• Title/Summary/Keyword: pore structure

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The Effect of Mask Patterns on Microwire Formation in p-type Silicon (P-형 실리콘에서 마이크로 와이어 형성에 미치는 마스크 패턴의 영향)

  • Kim, Jae-Hyun;Kim, Kang-Pil;Lyu, Hong-Kun;Woo, Sung-Ho;Seo, Hong-Seok;Lee, Jung-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.418-418
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    • 2008
  • The electrochemical etching of silicon in HF-based solutions is known to form various types of porous structures. Porous structures are generally classified into three categories according to pore sizes: micropore (below 2 nm in size), mesopore (2 ~ 50 nm), and macropore (above 50 nm). Recently, the formation of macropores has attracted increasing interest because of their promising characteristics for an wide scope of applications such as microelectromechanical systems (MEMS), chemical sensors, biotechnology, photonic crystals, and photovoltaic application. One of the promising applications of macropores is in the field of MEMS. Anisotropic etching is essential step for fabrication of MEMS. Conventional wet etching has advantages such as low processing cost and high throughput, but it is unsuitable to fabricate high-aspect-ratio structures with vertical sidewalls due to its inherent etching characteristics along certain crystal orientations. Reactive ion dry etching is another technique of anisotropic etching. This has excellent ability to fabricate high-aspect-ratio structures with vertical sidewalls and high accuracy. However, its high processing cost is one of the bottlenecks for widely successful commercialization of MEMS. In contrast, by using electrochemical etching method together with pre-patterning by lithographic step, regular macropore arrays with very high-aspect-ratio up to 250 can be obtained. The formed macropores have very smooth surface and side, unlike deep reactive ion etching where surfaces are damaged and wavy. Especially, to make vertical microwire or nanowire arrays (aspect ratio = over 1:100) on silicon wafer with top-down photolithography, it is very difficult to fabricate them with conventional dry etching. The electrochemical etching is the most proper candidate to do it. The pillar structures are demonstrated for n-type silicon and the formation mechanism is well explained, while such a experimental results are few for p-type silicon. In this report, In order to understand the roles played by the kinds of etching solution and mask patterns in the formation of microwire arrays, we have undertaken a systematic study of the solvent effects in mixtures of HF, dimethyl sulfoxide (DMSO), iso-propanol, and mixtures of HF with water on the structure formation on monocrystalline p-type silicon with a resistivity with 10 ~ 20 $\Omega{\cdot}cm$. The different morphological results are presented according to mask patterns and etching solutions.

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Importance of Impregnation and Polishing for Backscattered Electron Image Analysis for Cementitious Self-Healing Specimen (시멘트계 자기치유 시편에 대한 반사전자현미경 이미지 분석을 위한 함침과 연마의 중요성)

  • Kim, Dong-Hyun;Kang, Kook-Hee;Bae, Seung-Muk;Lim, Young-Jin;Lee, Seung-Heun
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.5 no.4
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    • pp.435-441
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    • 2017
  • Studies on self-healing have currently been diversified and the methods to evaluate the studies have become more diversified as well. Among them, the back-scattered electron (BSE) image acquired through the scanning electron microscope (SEM) is attempted as the means to evaluate the self-healing effect on cracks. In order evaluate by the BSE image, sophisticated pre-processing of specimen is critical and this injected inside the particle, pore and artificial crack of the hardener to stabilize the structure of the newly generated self-healing product and it enables to endure the stress on polishing without deformation. The impregnated specimen smoothen the surface to obtain the BSE image of high resolution that polishing is made for diamond suspension for wet polishing after dry polishing. As a result of evaluating the self-healing product on the impregnated and polished self-healing specimen, the generated product is formed from the surface of the artificial crack and the self-healing substances are confirmed as $Ca(OH)_2$ and C-S-H.

Partial Oxidation of Methane to Syngas over M(10)-Ni(5)/SBA-15(M=Ce, Nd, Sm) Catalysts (M(10)-Ni(5)/SBA-15(M=Ce, Nd, Sm) 촉매상에서 합성가스 제조를 위한 메탄의 부분산화반응)

  • Seo, Ho Joon;Kim, Yong Sung
    • Applied Chemistry for Engineering
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    • v.28 no.6
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    • pp.720-725
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    • 2017
  • M(10)-Ni(5)/SBA-15(M=Ce, Nd, Sm) catalysts were prepared for the partial oxidation of methane (POM) to syngas. The catalysts were characterized by BET, TEM, and XPS. The BET-specific surface area and average pore size for M(10)-Ni(5)/SBA-15(M=Ce, Nd, Sm) were 538.8, 504.3, and $447.3m^2/g$ and 6.4, 6.8, and 7.1 nm, respectively. TEM results showed that the mesoporous hexagonol structure was formed for SBA-15, while the homogeneous dispersion of Ni and Ce particles on the surface was formed for Ce(10)-Ni(5)/SBA-15 caused by the confinment effect of SBA-15. XPS data confirmed that $Ce^{4+}$ and $Ce^{3+}$ on the surface catalyst have two oxidation states due to the lattice oxygen species ($O^{2-}$, $O^-$). The yields of POM to syngas over Ce(10)-Ni(5)/SBA-15 were 52.9% $H_2$ and 21.7% CO at 1 atm, 973 K, $CH_4/O_2=2$, $GHSV=1.08{\times}10^5mL/g_{cat.}{\cdot}h$, and these values were kept constant even after 75 h on streams. The same tendency of syngas yields was observed for M(10)-Ni(5)/SBA-15(M=Ce, Nd, Sm). These results confirm that the redox reaction of promoters including Ce, Nd, and Sm enhanced the stability and yield of catalysts.

Adsorption of water vapor on zeolites of different framework types and alkali ions (다양한 구조와 양이온을 갖는 제올라이트 분체의 수증기 흡착 거동 연구)

  • Song, Ju-Sub;Sharma, Pankaj;Kim, Beom-Ju;Kim, Min-Zi;Han, Moon-Hee;Cho, Churl-Hee
    • Journal of Energy Engineering
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    • v.23 no.4
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    • pp.160-168
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    • 2014
  • In the present study, water vapor adsorption was evaluated at 298.15K for 9 different zeolites having LTA, FAU, CHA, and RHO frameworks, and then effect of framework type, Si/Al molar ratio, and alkali ion type on water up-take was investigated. Zeolites showed water up-takes which were increased in an order of $RHO<CHA{\approx}LTA<FAU$ frameworks. NaY zeolite having FAU framework showed a water up-take of 406 mg/g at p/po=0.5. The up-take was a little larger than that of 13X zeolite with the same framework. Among LTA zeolites, Ca-type 5A zeolite showed the highest water adsorption (282 mg/g at p/po=0.5) which could be explained by the large pore volume. Both CHA zeolite with a Si/Al molar ratio of 2.35 and RHO zeolite with a Si/Al molar ratio of 3.56 showed considerable water up-takes, even though the Si/Al molar ratio was much larger than that of LTA zeolite. In the present study, it is announced that in addition to FAU and LTA zeolites, CHA and RHO zeolites can be a promising dehumidification adsorbent.

Evaluation of Relationship between Strength and Resistance to Chloride in Concrete Containing Fly Ash with Ages (Fly Ash를 혼입한 콘크리트의 재령에 따른 강도와 염화물 저항능력간의 상관관계 평가)

  • Yoon, Yong-Sik;Park, Jae-Sung;Hwang, Chul-Sung;Kwon, Seung-Jun
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.21 no.4
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    • pp.53-60
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    • 2017
  • Fly ash(FA) which is a byproduct in the coal combustion in thermal power plant contributes to pore structure densification due to pozzolanic reaction, and this leads to long-term strength development and excellent resistance to chloride penetration. In the work, compressive strength and chloride resistance in OPC(Ordinary Portland Cement) and FA-based concrete are evaluated, and the relationships are investigated considering ages. For the work, 3 different W/B (Water to Binder) ratios of 37%, 42%, and 47% are prepared, and 3 substitution ratio of fly ash(0%, 30%, and 50%) are considered as well. At the age of 28 days and 180 days, test results of compressive strength, diffusion coefficients based on Tang's method, and passed charges referred to ASTM C 1202 and KS F 2711 are obtained. With increasing replacement ratio of FA and decreasing W/B, the resistances to chlorides(diffusion coefficient and passed charge) are improved, and the results at the age of 180 days decrease to only 15% level at the age of 28 days due to pozzolanic reaction in FA 50 mixture, which shows that resistance to chloride is much dependent on age effect than strength development. After 180 days, more clear linear relationships are observed between strength and resistance to chloride.

Fabrication and Characteristic Evaluation of Three-Dimensional Blended PCL (60 wt %)/β-TCP (40 wt %) Scaffold (3 차원 Blended PCL (60 wt %)/β-TCP (40 wt %) 인공지지체의 제작 및 특성 평가)

  • Sa, Min-Woo;Kim, Jong Young
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.38 no.4
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    • pp.371-377
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    • 2014
  • In tissue engineering, a scaffold is a three-dimensional(3D) structure that serves as a template for regeneration the functions of damaged tissues or organs. Among materials for scaffolds, polycaprolactone(PCL) and ${\beta}$-tricalcium phosphate(${\beta}$-TCP) are biodegradable and biocompatible. In this study, we fabricated 3D PCL, blended PCL (60 wt %)/${\beta}$-TCP (40 wt %), and pure ${\beta}$-TCP scaffolds by a multi-head scaffold fabrication system. Scaffolds with a pore size of $600{\pm}20{\mu}m$ was observed by scanning electron microscopy. The effects of 3D PCL, blended PCL (60 wt %)/${\beta}$-TCP (40 wt %) and pure ${\beta}$-TCP scaffolds were analyzed by evaluating their mechanical characteristics. In addition, in an in-vitro study using osteoblast-like saos-2 cells, we confirmed the effects of 3D scaffolds on cellular behaviors such as cell adhesion and proliferation. In summary, the 3D blended PCL (60 wt %)/${\beta}$-TCP (40 wt %) scaffold was found to be suitable for human cancellous bone in terms of its the compressive strength, biocompatibility, and osteoconductivity. Thus, blending PCL and ${\beta}$-TCP could be a promising approach for fabricating 3D scaffolds for effective bone regeneration.

Piping Analysis of Reservoir Embankment due to Leakage of Buried Box Culvert (저수지 제체 내 배수통관의 누수로 인한 파이핑 분석)

  • Kim, Han il;Yang, Hak Young;Kim, Young Muk
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.37 no.5
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    • pp.787-799
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    • 2017
  • Although the long-term leakage between the box culvert and the soil contact surface is one of the main causes of the failure in the embankment of the reservoir, there is a little studies on this matter. If a leakage occurs by the structure such as the buried box culvert of reservoir embankment is partially damaged, it is difficult to observe and there is a possibility of damage caused by piping. For these reasons, more research is necessary. In this study, the embankment type of the reservoir is divided into the core type and the homogeneous type when the damaged box culvert passing through the embankment of the reservoir is leaked due to the differential behavior of materials like differential settlement. In view of the condition, the seepage analysis of 2D was performed according to the water level change. The result of the study shows that the possibility of piping increases at the upper part rather than the bottom part of the box culvert when the leakage occurs to the box culvert passing through the embankment of the reservoir. Particularly, it is considered that the presence of the core helps to maintain the seepage stability of the embankment in case where the leakage occurs at the downstream side of the embankment. Also, if there is a drastic decrease on the internal pore water pressure in the embankment of reservoir, it is necessary to consider the possibility of piping.

Electrosorption of U(VI) by Surface-Modified Activated Carbon Fiber (표면처리 활성탄소섬유에 의한 U(VI)의 전기흡착)

  • Lee, Yu Ri;Jung, Chong Hun;Ryu, Seung Kon;Oh, Won Zin
    • Korean Chemical Engineering Research
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    • v.43 no.1
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    • pp.60-65
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    • 2005
  • The electrosorption of U(VI) from waste water was carried out by using activated carbon fiber(ACF) felt electrode in a continuous electrosorption cell. In order to enhance the electrosorption capacity at lower potential, ACF felt was chemically modified in acidic, basic and neutral solution. Pore structure and functional groups of chemically modified ACF were examined, and the effect of treatment conditions was studied for the adsorption of U(VI). Specific surface area of all ACFs decreases by this treatment. The amount of acidic functional groups decreases with basic and neutral salt treatment, while the amount increases a lot with acidic treatment. The electrosorption capacity of U(VI) decreases on using the acid treated electrode due to the shielding effect of acidic functional groups. Base treated electrode enhances the capacity due to the reduction of acidic functional groups. The electrosorption amount of U(VI) on the base treated electrode at -0.3 V corresponds to that of ACF electrode at -0.9 V. Such a good adsorption capacity was not only due to the reduction of shielding effect but also the increase of $OH^-$ in the electric double layer on ACF surface by the application of negative potential.

Effective Wavefield Separation of Reflected P- and PS-Waves in Multicomponent Seismic Data by Using Rotation Transform with Stacking (다성분 탄성파탐사자료에서 회전 변환과 중합을 이용한 효과적인 P파 반사파와 PS파 반사파의 분리)

  • Jeong, Soocheol;Byun, Joongmoo;Seol, Soon Jee
    • Geophysics and Geophysical Exploration
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    • v.16 no.1
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    • pp.6-17
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    • 2013
  • Multicomponent seismic data including both P- and PS-waves have advantages in discriminating the type of pore fluid, characterizing the lithologic attributes and producing the high resolution image. However, multicomponent seismic data recorded at the vertical and horizontal component receivers contain both P- and PS-waves which have different features, simultaneously. Therefore, the wavefield separation of P- and PS-waves as a preprocessing is inevitable in order to use the multicomponent seismic data successfully. In this study, we analyzed the previous study of the wavefield separation method suggested by Jeong and Byun in 2011, where the approximated reflection angle calculated only from one refernce depth is used in rotation transform, and showed its limitation for seismic data containing various reflected events from the multi-layered structure. In order to overcome its limitation, we suggested a new effective wavefield separation method of P- and PS-waves. In new method, we calculate the reflection angles with various reference depths and apply rotation transforms to the data with those reflection angles. Then we stack all results to obtain the final separated data. To verify our new method, we applied it to the synthetic data sets from a multi-layered model, a fault model, and the Marmousi-2 model. The results showed that the proposed method separated successfully P- and PS-reflection events from the multicomponent data from mild dipping layered model as long as the dip is not too steep.

Study on the limitation of AVO responses shown in the seismic data from East-sea gas reservoir (동해 가스전 탄성파 자료에서 나타나는 AVO 반응의 한계점에 대한 고찰)

  • Shin, Seung-Il;Byun, Joong-Moo;Choi, Hyung-Wook;Kim, Geon-Deuk;Ko, Seung-Won;Seo, Young-Tak;Cha, Young-Ho
    • 한국지구물리탐사학회:학술대회논문집
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    • 2008.10a
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    • pp.107-112
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    • 2008
  • In the case of the deep reservoirs like the gas reservoirs in the East-sea, it is often difficult to observe AVO responses in CMP gathers. Because the reservoir becomes more consolidated as its depth deepens, P-wave velocity does not decrease significantly when the pore fluid is replaced by the gas. In this study, we analyzed the effects of Poisson's ratio difference on AVO response with a variety of Poisson's ratios for the upper and lower layers. The results show that, as the difference in Poisson's ratio between the upper and lower layers decreases, the change in the reflection amplitude with incidence angle decreases. To consider the limitation of AVO responses shown in the gas reservoir in East-sea, the velocity model was made by simulation Gorae V structure with seismic data and well logs. The results of comparing AVO responses observed from the synthetic data with theoretical AVO responses calculated by using material properties show that the amount of the change in reflection amplitude with increasing incident angle is very small when the difference in Poisson's ratio between the upper and lower layers is small. In addition, the characteristics of AVO responses were concealed by noise or amplitude distortion arisen during preprocessing. To overcome such limitations of AVO analysis of the data from deep reservoirs, we need to acquire precisely reflection amplitudes in data acquisition stage and use processing tools which preserve reflection amplitude in data processing stage.

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