• Journal of Institute of Control, Robotics and Systems
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• v.6 no.9
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• pp.786-795
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• 2000

In this paper, a new impedance force control method for deburring and polishing process is proposed. The proposed method is robust to deal with unknown environment stiffness as unknown well as environment location. An adaptive technique is used to minimize the force error occurred due to unknown environment surface profile. A robust position control algorithm based on time-delayed information is used to cancel out uncertainties in robot dynamics. A three link robot manipulator is used to demonstrate performances of the proposed control on deburring and polishing tasks. Stability analysis for the adaptive control is presented and its results are confirmed by simulations.

• KIEE International Transactions on Electrophysics and Applications
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• v.3C no.1
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• pp.28-32
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• 2003

In this paper, we have studied the in-situ end point detection (EPD) for direct chemical mechanical polishing (CMP) of shallow trench isolation (STI) structures without the reverse moat etch process. In this case, we applied a high selectivity $1n (HSS) that improves the silicon oxide removal rate and maximizes oxide to nitride selectivity Quite reproducible EPD results were obtained, and the wafer-to-wafer thickness variation was significantly reduced compared with the conventional predetermined polishing time method without EPD. Therefore, it is possible to achieve a global planarization without the complicated reverse moat etch process. As a result, the STI-CMP process can be simplified and improved using the new EPD method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.464-467
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• 2005

Among several polishing techniques for micro structures, polishing process using magnetorheological(MR) fluid has advantages in the finishing process of 3-D micro structures because abrasives in the fluid can reach surfaces with complex feature and play their role. Although many researchers have been trying to reveal its polishing mechanism of the MR polishing, it has not been successful because in-situ measurement of state variables is difficult and process parameters are complex. In fact, one of the key factors for applying process control methodologies, such as Run-to-Run control, is the measuring and monitoring of slurry quality because the process strongly depends on the fluid property. Therefore, it is necessary to maintain consistent slurry quality to guarantee the process repeatability. The proposed equipment achieves the longer life cycle of MR fluid and reduces the variability of products. A new method to measure the material removal rate in MRF polishing process is also proposed and discussed.

• Transactions on Control, Automation and Systems Engineering
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• v.3 no.1
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• pp.58-65
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• 2001

This paper proposes a self tuning fuzzy inference method by the genetic algorithm in the fuzzy-sliding mode control for a robot. Using this method, the number of inference rules and the shape of membership functions are optimized without an expert in robotics. The fuzzy outputs of the consequent part are updated by the gradient descent method. And, it is guaranteed that he selected solution become the global optimal solution by optimizing the Akaikes information criterion expressing the quality of the inference rules. The trajectory tracking simulation and experiment of the polishing robot show that the optimal fuzzy inference rules are automatically selected by the genetic algorithm and the proposed fuzzy-sliding mode controller provides reliable tracking performance during the polishing process.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.4
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• pp.401-407
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• 2011

The conventional method of magnetic abrasive polishing is not suitable for non-magnetic materials because such polishing is basically possible when magnetic force exists and the magnetic force in non-magnetic materials is very low. The installation of an electromagnet under the working area of a non-magnetic material, which is called second-generation magnetic abrasive polishing in this study, can enhance the magnetic force. Experimental evaluation and optimization of process parameters for polishing magnesium alloy steel was performed by adopting the design of experiments and the response surface method. The results indicated that the intensity of the magnetic force and spindle speed are significant parameters that affect the improvement of surface roughness. A prediction model for the surface roughness of the magnesium alloy steel is developed using the second-order response surface method.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.5
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• pp.795-799
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• 2013

This paper describes a novel hybrid surface polishing process combining non-traditional electrochemical polishing (ECP) with external artificial ultrasonic vibration. The purpose of this study is to develop an easier method for improving stainless steel surfaces. To this end, vibration electrochemical polishing (VECP), a novel ultrasonic manufacturing process, for enhancing electrochemical reaction and surface quality compared with that achieved using conventional ECP is suggested. In addition, for finding the optimized experimental conditions, the two methods are compared under various current densities. Localized roughness of the work material is measured with atomic force microscopy (AFM) and scanning electron microscopy (SEM) for obtaining detailed surface information.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.7
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• pp.65-71
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• 2001

The development process of the polishing system for the aspherical lens mold for opto-electronics industry is described. The system uses the method that polishing tool is scanned on the surface under PC-NC control for the aspherical lens mold. The two axes interpolation of the minimum translation mechanism is applied to give uniform working condition by motion analysis. An aspherical surface is divided into multiple sections and each dwell time is calculated from the polishing rate model based on the Preston equation. As result of form error compensation experiment, initial form error is decreased about 25% while an average value of surface roughness is also reduced successfully from 180nm to 19nm.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.5
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• pp.616-621
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• 2010

New type of the base material of the light-emitting diode requires copper wafer in view of heat and electrical conductance. Therefore, polishing process of the substrate level is needed to get a nanometer level of surface roughness as compared with pattern structure of nano-size in the semiconductor industry. In this paper, a series of lapping and polishing technique is shown for the rough and deflected copper substrate of thickness 3mm. Lapping by sand papers tried air cooling method. And two steps of polishing used the diamond abrasives and the $Al_2O_3$ slurry of size 100mm considering the residual scratch. White-light interferometer proved successfully a mirror-like surface roughness of Ra 6nm on the area of $0.56mm{\times}0.42mm$.

• Journal of Powder Materials
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• v.8 no.1
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• pp.20-25
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• 2001

Most of mold manufacturing procedures have been automated by the introduction of NC machine tool and CAD/CAM system. But the three-dimensional surface curvature of the mold must be done by hand work of well-skilled workers. Magnetic abrasive polishing powders were investigated for surface polishing for 3D curvature. This study aims to investigate homogeneously distributed hard phase in Fe matrix and strong bonding between Fe-matrix and hard phase. The NbC powder, $B_4C$ powder and $Al_2O_3$ powder were mixed in Fe-matrix respectively. Mixed Fe-hard phase powders were compacted by press and then these were melted by plasma melting. According to SEM, XRD and OM observation, Fe-NbC magnetic abrsive powder had the most homogeneous distribution and strong bonding. As a result of magnetic polishing, the surface roughness before magnetic polishing, 1 ${\mu}m$ $R_{max}$, was reduced to 0.2 ${\mu}m$ $R_{max}$ over the entire inner surface of the tube.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.1
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• pp.92-99
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• 2014

An aspherical lens, which resolves several problems with a spherical lens,typically serves asa key part of an optical system. Generally, an aspherical lens is fabricated using a diamond turning machine or by mean of injection molding. However, residual stress and/or tool marks can arise when using a commercial fabricating method such as DTM or injection molding. A polishing process, thus, is commonly used to obtain a high-precision aspherical lens. In this study, a polishing method using MR fluid was applied to minimize several problems, in this case residual stress and the creation of tool marks, during the cutting process. The MR polishing system was developed to polish aspherical lenses. A series of experiments were performed to obtain a very fine surface roughness. PMMA (the lens material for molding) was used as a workpiece, and the gap size, magnetic field intensity, wheel speed and feed rate were selected as the parameters in this study. Finally, a very fine surface roughness of Ra=2.12nm was obtained after MR polishing.