• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.387-388
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• 2008

• 한국공작기계학회논문집
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• 제16권5호
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• pp.90-95
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• 2007

Single side final polishing is a very important role to stabilize a wafer finally before the device process on the wafer is executed. In this study, the machining variables, such as pressure, machining time, and the velocity of pad table were adopted. These parameters have the major influence on the characteristics of wafer polishing. We investigated the surface roughness changing these variables to find the optimal polishing condition. Pad, slurry, slurry quantity, and oscillation distance were set to the fixed variables. In order to reduce defects and find a stable machining condition, a hall sensor was used on the polishing process. AE sensor was attached to the polishing machine to verify optimal condition. Applying data analysis of the sensor signal, experiments were performed. We can get better surface roughness from loading the quasi static force and improving wafer-holding method.

• 한국기계가공학회지
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• 제15권2호
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• pp.72-77
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• 2016

Airplane reservoirs made of Al7075 are coated with an anodizing layer to maintain precision, air tightness and corrosion resistance. It is commonly required that the inner surface roughness of the reservoir be less than an average $0.2{\mu}m$ to maintain stable oil pressure. Even though precision polishing is necessary to achieve this quality it is not easy. Inner surface roughness is not uniform and the quality of the product is irregular because most of the work is done by hand. The purpose of this study is to design an exclusive polishing machine and to determine the standard cutting condition and polishing condition necessary for good inner surface roughness and to improve workefficiency.

• 한국공작기계학회논문집
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• 제14권2호
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• pp.14-20
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• 2005

This paper describes a dwell time calculation algorithm for polishing tool path generation in the small toot polishing process of the axis-symmetrical lens. Generally dwell time control in the polishing machines means that small polishing tool stays for a dwell time at the specific surface position to get the expected polishing depth. Polishing depth distribution on an aspherical lens surface consists of the superposition of the local polishing depth at the each dwell position. Therefore, tool path generation needs each dwell time together with tool positioning data during the polishing tool movements on the aspherical lens surface. The linear algebraic equation of removal depth removal matrix and dwell time is formulated. Parametric effects such as the dwell d interval are simulated to validate the dwell time calculation algorithm.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.8-13
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• 2000

Die polishing technology is very critical to determine quality and performance of the final products. Die polishing processes have not been automated because the automation requires a great deal of experience and skill of experts. Thus, to implement a fully automated polishing process, the development of polishing status monitoring system replacing the skill of experts is critical. AE is known to be closely related to material removal rate(MRR). As the surface is rougher, MRR gets larger and AE increased. The surface roughness can be indirectly estimated using the AE signal measured during automatic die polishing process. In this study, The polishing state monitoring system using AEms signal was developed. This system can be not only to monitor the abnormal state but also to estimate a state of surface roughness of polishing surface qualitatively.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.411-416
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• 2000

Cutting process has been automated by progress of CNC and CAD/CAM, but polishing process has been depended on only experiential knowledge of expert. To automate the polishing process, a polishing robot with w degrees of freedom which is attached to a machining center with 3 degrees of freedom has been developed. This automatic polishing robot is able to keep the polishing tool normal on the curved surface of die to improve a performance of polishing. Polishing task for a curved surface die demands repetitive operation and high precision, but conventional control algorithm can not cope with the problem of disturbance such as a change of load. In this research, a new sliding mode control algorithm is applied to the robot. The signal compression method is used to identify polishing robot system. to obtain an effect of 5 degrees of freedom motion, a synchronization between the machining center and polishing robot is accomplished by using M code of machining center. And also a trajectory for polishing the curved surface die by 5 degrees of freedom motion, a synchronization between the machining center and polishing robot is accomplished by using M code of machining center. And also a trajectory for polishing the curved surface die by 5 axes machining center is divided into data of two types for 3 axes machining center and 2 axes polishing robot. To evaluate polishing performance of the robot. various experiments are carried out.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.43-47
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• 1995

The ball screw is one of the important mechanical parts for the linear motion feeding systems. The usage of the ball screw has been growing in various industrial fields such as CNC machine tool, industrial robot and automated systems. Because of ever increasing demand for ball screws, increased accuracy and quality of the ball screw is needed,especially the surface roughness of the ball contact area in order to diminish noise and vibration. Therefore to improve the surface roughness of the area,we introduced magnetic assisted polishing which is one of the new potential polishing methods. In this study, diamond slurry and iron powder was used for magnetic assisted polishing of the ball bearing surface. This polishing process was experimentally confirmed to improve the surface roughness of the ball bearing.

• 한국공작기계학회논문집
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• 제11권1호
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• pp.45-51
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• 2002

To reduce the cost and increase reliability of die and mold products, automation of the finishing (polishing) process is essential. A major element of automation is a reliable database and a knowledge base for polishing status. This paper presents a polishing expert system which can determine optimal polishing sequences and conditions by using an empirical formula and an experimental database. The simplex method was used for the curve fittings of the experimental results. Also a graphical user interface, which visualizes the optimized results, was developed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1996년도 춘계학술대회 논문집
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• pp.124-131
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• 1996

The use of small hemispherical high-speed precision bearing has increased drastically these days in the field of computer disk driver, highteech devices as well as communication and electronic device drivers. It was suggested that the new polishing process adopting the diamond grinding wheel and polishing tool instead of multi stage lapping processes, which enables the mass production of the bearing by reduction of polishing time. Polishing mechanism was analysed and the results were applied to the design and manufacturing of the polishing system. Experiments for selection of optimal polishing conditions were carried out using the polishing system.

• 대한안전경영과학회:학술대회논문집
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• 대한안전경영과학회 2004년도 추계학술대회
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• pp.165-170
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• 2004

It used the flow system of the stone polishing machine head and it developed a multi axis whetstone polishing system. With the result, the defect by line contact polishing does not occur in both ends of the stone, and it came to trim smoothly. As the index of the surface roughness decreased to 3.6 times, the polishing effect improved greatly. It decreased greatly the dust and a noise with the wet polishing, and the factors of the duty evasion at production site were solved with the work environment improvement against the polishing process of the stone industry and work intensive reduction.