• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• Smart Structures and Systems
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• v.16 no.1
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• pp.67-79
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• 2015

Acoustic emission analysis is an effective technique for monitoring the evolution of damage in a structure. An experimental analysis on a set of reinforced concrete beams under flexural loading was carried out. A mixed AE analysis method which used both parameter-based and signal-based techniques was presented to characterize and identify different failure mechanisms of damage, where the signal-based analysis was performed by using the Hilbert-Huang transform. The maximum instantaneous energy of typical damage events and the corresponding frequency characteristics were established, which provided a quantitative assessment of reinforced concrete beam using AE technique. In the bending tests, a "pitch-catch" system was mounted on a steel bar to assess bonding state of the steel bar in concrete. To better understand the AE behavior of bond-slip damage between steel bar and concrete, a special bond-slip test called pullout test was also performed. The results provided the basis of quantitative AE to identify both failure mechanisms and level of damages of civil engineering structures.

• Bulletin of the Korean Mathematical Society
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• v.50 no.1
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• pp.83-96
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• 2013

Let K be a number field and fix a prime number $p$. For any set S of primes of K, we here say that an elliptic curve E over K has S-reduction if E has bad reduction only at the primes of S. There exists the set $B_{K,p}$ of primes of K satisfying that any elliptic curve over K with $B_{K,p}$-reduction has no $p$-torsion points under certain conditions. The first aim of this paper is to construct elliptic curves over K with $B_{K,p}$-reduction and a $p$-torsion point. The action of the absolute Galois group on the $p$-torsion subgroup of E gives its associated Galois representation $\bar{\rho}_{E,p}$ modulo $p$. We also study the irreducibility and surjectivity of $\bar{\rho}_{E,p}$ for semistable elliptic curves with $B_{K,p}$-reduction.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.11
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• pp.158-165
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• 2003

A specific experimental method, the Split Hopkinson pressure bar (SHPB) technique has been widely used to determine the dynamic material properties under the impact compressive loading conditions with strain rate of the order of 10$^3$/s∼l0$^4$/s. In this paper, dynamic deformation behaviors of rubber materials widely used for the isolation of vibration from structure under varying dynamic loading are determined by using plastic SHPB technique. A transition point to scope with the dynamic deformation behavior of rubber-like material is defined in this paper and used to characterize the specifics of the dynamic deformation of rubber materials.

• Journal of ILASS-Korea
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• v.6 no.3
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• pp.17-22
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• 2001

Recently LPG engine is developed to fulfill such new requirements as improved fuel efficiency in additional to further reduced exhaust emission. This experimental study is conducted to analyze spray characteristics for pintle type injector used in a LPLi (Liquid Phase LPG injection) engine. Since spray parameters including penetration length and spray angle make a role to design injector and engine intake system, spray visualization experiment is performed under atmosphere ambient and charging condition using Mie scattering method. From the experimental result under various LPG formation, the increased propane component decreases penetration length because boiling point of propane is lower than butane. To simulate intake charging condition in MPI engine, spray visualization is performed under high pressure condition. As a result, as ambient pressure is increased from atmosphere to 3.0 bar, penetration length is decreased. However, as ambient pressure is increased from atmosphere to 3.0 bar, spray angle is increased.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.378-381
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• 2003

Efficient development of method on a performance evaluation for machine tools has been regarded as the most important work for accuracy and quality enhancement to every user and manufacturer. A evaluation method of accuracy for machine tools has been studied recently according to the rapid increase of interest in precision machine tools. To this point of view, the circular interpolation test of machine tools is recognized as the most useful method to distinguish a dynamic accuracy of NC machine tools by ISO and ANSI/ASME, etc. In this paper, we have studied and developed the form measurement system with grid encoder to analyse the final accuracy of NC machine tools. we have analyzed the servo system error and geometric error of NC machine tools through measuring a dynamic error signal by this system. and then we verified the experimental result and enhanced the reliability by means of comparing the characteristics of the developed system with the kinematic ball-bar system.

• Journal of Mechanical Science and Technology
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• v.19 no.spc1
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• pp.320-327
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• 2005

A new mechanism for hyper redundant manipulator (HRM) is presented, which comprises of serially assembled compound three-bar linkages (CTL). The CTL mechanism has some unique properties. This paper presents the forward and inverse kinematics of this mechanism and shows the simulation of the HRM havig 9 CTL units. The recursive algorithm of the inverse kinematics that the author originally developed is employed. It is fast and stable ; moreover, it enables us to obtain a solution in which the end-point of the HRM is controlled by a portion of joints. It also presents the method of the dynamical analysis. There exist kinematical constraints in the proposed closed linkage mechanism. In the dynamic analysis constraints are sufficiently sustained by the constraint stabilization method that the author developed. The mechanical structure of the HRM having some CTL units that is under construction is shown.

• Asian review of World Histories
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• v.2 no.1
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• pp.17-45
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• 2014

Okakura Kakuz$\bar{o}$ (1863-1913), the founder of the Japan Art Institute, is best known for his proclamation, "Asia is One." This phrase in his book, The Ideals of the East, and his connections to Bengali revolutionaries resulted in Okakura being remembered as one of Japan's foremost Pan-Asianists. He did not, however, write The Ideals of the East as political propaganda to justify Japanese aggression; he wrote it for Westerners as an exposition of Japan's aesthetic heritage. In fact, he devoted much of his life to the preservation and promotion of Japan's artistic heritage, giving lectures to both Japanese and Western audiences. This did not necessarily mean that he rejected Western philosophy and theories. A close examination of his views of both Eastern and Western art and history reveals that he was greatly influenced by Hegel's notion of dialectics and the evolutionary theories proposed by Darwin and Spencer. Okakura viewed cross-cultural encounters to be a catalyst for change and saw his own time as a critical point where Eastern and Western history was colliding, causing the evolution of both artistic cultures.

• Journal of the Korea institute for structural maintenance and inspection
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• v.7 no.2
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• pp.193-199
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• 2003

This paper presents the results of an experimental research project on 7 Super Deck Plates with continuous or simple beam types. The test parameters included the distance of truss, depth of deck plate and the type of beam. The test results are as follows ; When thickness of deck plate was increased, maximum strength was improved When the distance of truss bar was reduced from 20cm to 15cm, the mean value of maximum load was increased to 1.21 times. Continuous beam shown superior to simple beam, such as 5.03 times high strength, low deflection at yield point.

• International Journal of Quality Innovation
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• v.6 no.2
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• pp.31-45
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• 2005

The target costing technique, mathematically discussed by Sauers, only uses the $C_p$ index along with Taguchi loss function and ${\bar{X}}-R$ control charts to set up goal control limits. The new specification limits derived from Taguchi loss function is linked through the $C_p$ value to ${\bar{X}}-R$ control charts to obtain goal control limits. This study further considers the reflected normal loss function as well as the $C_{pk}$ index along with its lower confidence interval in forming goal control limits. With the use of lower confidence interval to replace the point estimator of the $C_{pk}$ index and reflected normal loss function proposed by Spiring to measure the loss to society, this modified and improved target costing technique would become more robust and applicable in practice. Finally, an example is provided to illustrate how this modified and improved target costing technique works.