Diamond-like Carbon Films Synthesized from $CH_4$ , $CH_4-H_2$ , and $CH_4-Ar$ Plasmas
(메탄, 메탄-수소 및 메탄-아르곤 플라즈마로부터 합성된 다이아몬드성 탄소막)
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- Journal of the Korean Vacuum Society
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- v.4 no.1
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- pp.12-17
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- 1995