• Journal of Korean Society for Atmospheric Environment
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• v.29 no.1
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• pp.27-37
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• 2013

CFCs (Chlorofluorocarbons) and HCFCs (Hydrochlorofluorocarbons) that are chemically stable were proven to be a greenhouse gases that can destroy ozone layer. On the other hand, HFCs (Hydrofluorocarbons) was developed as an alternative refrigerant for them, but HFCs still have a relatively higher radiative forcing, resulting in a large Global Warming Potential (GWP) of 1,300. Current regulations prohibit production and use of these chemicals. In addition, obligatory removal of existing material is in progress. Methods for the decomposition of these material can be listed as thermal cracking, catalytic decomposition and plasma process. This study reports the development of low cost and high efficiency plasma scrubber. Stability of steam plasma generation and effect of plasma parameters such as frequency of power supply and reactor geometry have been investigated in the course of the development. Method for effective removal of by-product also has been investigated. In this study, elongated rotating arc was proven to be efficient in decomposition of HFCs above 99% and to be able to generate stable steam plasma with steam contents of about 20%.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.176-177
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• 2016

In the last few decades, attention toward atmospheric pressure plasma (APP) has been greatly increased due to the numerous advantages of those applications, such as non-necessity of high vacuum facility, easy setup and operation, and low temperature operation. The practical applications of APP can be found in a wide spectrum of fields from the functionalization of material surfaces to sterilization of medical devices. In the secondary battery industry, separator film has been typically treated by APP to enhance adhesion strength between adjacent films. In this process, the plasma is required to have high stability and uniformity for better performance of the battery. Dielectric barrier discharge (DBD) was usually adopted to limit overcurrent in the plasma, and we developed the pre-discharge technology to overcome the drawbacks of streamer discharge in the conventional DBD source which makes it possible to produce a super-stable plasma at atmospheric pressure. Simulations for the fluid flow and electric field were parametrically performed to find the optimized design for the linear jet plasma source. The developed plasma source (Plasmapp LJPS-200) exhibits spatial non-uniformity of less than 3%, and the adhesion strength between the separator and electrode films was observed to increase 17% by the plasma treatment.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.776-779
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• 2006

The alignment of liquid crystal (LC) is one of the key issues of liquid crystal display (LCD) technologies. In this study, we aligned polyimide (as the LC alignment layer) by ALT plasma beam and to realize the stability and characteristics of this technology. The characteristics such as anchoring energy, pre-tilt angle, voltage holding ratio(VHR) and residual direct current(Rdc) were discussed. Besides, we applied it to the in plane switch (IPS) mode 23" WXGA real panel, the performance parameters and electrical properties were measured and compared with those of rubbing alignment. From the result, we demonstrated a successful LC alignment treatment process in real panel by ALT plasma beam.

• Bulletin of the Korean Chemical Society
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• v.28 no.4
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• pp.553-556
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• 2007

We previously reported a 27.12 MHz inductively coupled plasma source at atmospheric pressure for atomic emission spectrometry based on polymer microchip plasma technology. For the PDMS polymer microchip plasma, molecular emission was observed, but no metallic detection was done. In this experiment, a lab-made electrothermal vaporizer (ETV) with tantalum coil was connected to the microchip plasma for aqueous sample introduction to detect metal ions. The electrode geometry of this microchip plasma was redesigned for better stability and easy monitoring of emission. The plasma was operated at an rf power of 30-70 W using argon gas at 300 mL/min. Gas kinetic temperatures between 800-3200 K were obtained by measuring OH emission band. Limits of detection of about 20 ng/mL, 96.1 ng/mL, and 1.01 μ g/mL were obtained for alkali metals, Zn, and Pb, respectively, when 10 μ L samples in 0.1% nitric acid were injected into the ETV.

• Journal of Surface Science and Engineering
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• v.39 no.3
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• pp.142-146
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• 2006

A novel internal-type linear inductive antenna, which we refer to as a double comb-type antenna, was developed for a large-area plasma source with substrate size of $880\;mm{\times}660\;mm$ ($4^{th}$ generation glass size). In this study, effect of plasma confinement by applying multi-polar magnetic field was investigated. High density plasmas of the order of $3.18{\times}10^{11}\;cm^{-3}$ could be obtained with a pressure of 15 mTorr Ar at an inductive power of 5000 W with good plasma stability. This plasma density is higher than that obtained for the conventional double comb-type antenna, possibly due to the plasma confinement, low rf voltage, resulting in high power transfer efficiency. Also, due to the remarkable reduction in the antenna rf voltage and length, a plasma uniformity of less than 3% could be obtained within a substrate area of $880\;mm{\times}660\;mm$ as rf power increased.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1702-1703
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• 1999

We have prepared the plasma-polymerized membrane for pervaporation of organic-liquid mixtures by the plasma polymerization technique. Plasma polymerization techniques were utilized in the development of hydrophilic composite membranes having high hydrogen ion permeability and excellent dimensional stability. To develop an organic liquid permselective membrane. suppressing membrane swelling as well as enhancing the solubility difference is important, the objectives of the present study are to design a suitable membrane for an organic-mixture system by the control of the plasma-polymer solubility.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.1
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• pp.98-105
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• 2008

In this paper, the system for monitoring process of aluminum laser welding was developed using the light signal emitted from the plasma which comes from interaction between material and laser. Photodiode for monitoring system was selected based on the spectrum analysis of light from plasma and keyhole. Behavior of plasma and keyhole was analyzed through the sensor signals. Value of sensor signal represented the light intensity and fluctuation of signal indicated the stability of plasma and keyhole. For the relation between welding condition and sensor signals, the input power and weld geometry greatly effected on the average of each sensor signals. Using the feature values of signals, estimation model for tensile strength of weld was formulated with neural network algorithm. Performance of this model was verified through coefficient of determination and average error rate.

• Journal of the Semiconductor & Display Technology
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• v.8 no.4
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• pp.89-94
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• 2009

The influence on a stability of thermal plasma has been investigated in an electrode structure of non-transferred plasma torch. The variations of dynamic characteristic of the arc voltage was analyzed and compared in terms of voltage character and nozzle types for both the step-shaped nozzles and magnetic-approved cylindrical nozzle. From the experimental results, an electrode gap, flow rate of arc gas, and currents are considered as major operational parameters. As conclusion, it was assured that a torch with step-shaped nozzles of magnetic-approved type produce the stable plasma jet.

• Proceedings of the KIPE Conference
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• 2010.07a
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• pp.242-243
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• 2010

This paper investigates a power supply of medium voltage with enhanced ignition characteristics for plasma torch. Series resonant half-bridge topology is presented to be a suitable ignition circuitry. The ignition circuitry is integrated into the main power conversion system of a multi-phase staggered three-level dc-dc converter with a diode front-end rectifier. The plasma torch rated for 3MW, 2kA and having the physical size of 1m long is selected to be a high enthalpy source in waste disposal system. The steady-state and transient operations of plasma torch are simulated. The parameters of Cassie-Mary arc model are calculated based on 3D magneto-hydrodynamic simulations. Circuit simulation waveform shows that the ripple of arc current can be maintained within ${\pm}10%$ of its rated value under the existence of load disturbance. This power conversion configuration provides high enough ignition voltage around 5KA during ignition phase and high arc stability under the existence of arc disturbance noise resulting in a high-performance plasma torch system.

• Journal of Surface Science and Engineering
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• v.29 no.6
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• pp.880-883
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• 1996

Plasma Source Ion Implantation (PSII) technique was used for the hydrophilization or hydrophobization of polymer surfaces. Polymers were modified with different plasma gases such as oxygen, nitrogen, argon, and tetrafluoromethane, and for varying lengths of treatment time. Plasma ion treatment of oxygen, nitrogen, argon and their mixtures increased significantly the hydrophilic properties of polymer surfaces. More hydrophobic surfaces of polymers were formed after the treatment with tetrafluoromethane. A study of plasma source ion implanted polymers was performed using contact angle measurements and Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS). The TOF-SIMS spectra and depth profile were used to obtain the information about the treated surfaces of polymers. The permanence of this technique could be evaluated with respect to ageing time. The surfaces treated with PSII gave better stability than other surface modification methods.