• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.2
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• pp.188-194
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• 2024

This paper introduces an optimized oxygen (O₂) plasma surface treatment technique to enhance sphere lithography on hydrophobic photoresist surfaces. The focus is on semiconductor manufacturing, particularly the creation of finer structures beyond the capabilities of traditional photolithography. The key breakthrough is a method that makes substrate surfaces hydrophilic without altering photoresist patterns. This is achieved by meticulously controlling the O₂ plasma treatment duration. The result is the consistent formation of nano and microscale patterns across large areas. From an academic perspective, the study deepens our understanding of surface treatments in pattern formation. Industrially, it heralds significant progress in semiconductor and precision manufacturing sectors, promising enhanced capabilities and efficiency.

• Analytical Science and Technology
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• v.22 no.2
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• pp.141-147
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• 2009

A laser induced breakdown spectroscopy (LIBS) measurement was carried out to derive an optimized measurement condition with a high reproducibility and to grow a plasma sphere to 20 mm high under a 600 mtorr vacuum in order to improve an accuracy of measurement. The measurement of the plasma was taken at a 6.0 mm distance, in the direction of a plasma sphere, from a sample. This location belongs to the outer sphere region in the plasma. The calibration curve of 'Ni' and 'Cu' was acquired by the signal intensity ratio and the atomic ratio for the samples, and linear regression of 'Cu' was $R^2$=0.9886, and the linear regression of 'Ni' was $R^2$=0.9988. The accuracy of LIBS was improved pre-existence as the measurement error of 'Ni' was 0.78%.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.1237-1239
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• 2008

Imaging Systems Technology is conducting research and development in large area flexible plasma displays. These displays will be used for low cost dynamic signage and billboards. In this paper, IST will report its current progress in achieving very bright full color displays.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.454-454
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• 2010

In order to achieve a high efficient a-Si solar cell, the TCO (transparent conductive oxide) substrates are required to be a low sheet resistivity, a high transparency, and a textured surface with light trapping effect. Recently, a zinc oxide (ZnO) thin film attracts our attention as new coating material having a good transparent and conductive for TCO of solar cells. In this paper the optical properties of $H_2$ post-treated BZO (boron doped ZnO, ZnO:B) thin film are investigated with $O_2$-plasma treatment. The BZO thin films by MOCVD (Metal Organic Chemical Vapor Deposition) are investigated and the samples of $H_2$ post-treated BZO thin film are tested with $O_2$-plasma treatment by plasma treatment system with 13.56 MHz as RIE (Reactive Ion Etching) type. We measured the optical properties and surface morphology of BZO thin film with and without $O_2$-plasma treatment. The optical properties such as transmittance, reflectance and haze are measured with integrating sphere and ellipsometer. This result of the BZO thin film with and without $O_2$-plasma treatment is application to the TCO for solar cells.

• Journal of the Korean institute of surface engineering
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• v.49 no.1
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• pp.92-97
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• 2016

The plasma has been used in various industrial fields of semiconductors, displays, transparent electrode and so on. Plasma diagnostics is critical to the uniform process and the product. We use the electron temperature of the various plasma parameters for the diagnosis of plasma. Generally, the range of the electron temperature which is used in a semiconductor process used the range of 1 eV to 10 eV. The difference of electron temperature of 0.5 eV has a influence in plasma process. The electron temperature can be measured by the electrical method and the optical method. Measurement of electron temperature for various gas flow rates was performed in DC-magnetron sputter and Inductively Coupled Plasma. The physical properties of the thin film were also determined by changing electron temperatures. The transmittance was measured using the integrating sphere, and wavelength range was measured at 300 ~ 1100 nm. We obtain the thin film of the mobility, resistivity and carrier concentration using the hall measurement system. As to the electron temperature increase, optical and electrical properties decrease. We determine it was influenced by the oxygen flow ratio and plasma.

• Applied Chemistry for Engineering
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• v.18 no.1
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• pp.84-89
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• 2007

Direct decomposition of hydrocarbon (methane, propane) was studied using a thermal plasma to produce high purity hydrogen and carbon black. Thermodynamic equilibrium compositions were calculated based on the minimization of Gibb's free energy, and decomposition experiments were performed on the basis of calculation results. The purity of hydrogen was found to be depended strongly on the flow rate of hydrocarbon. The decomposition conditions for high purity hydrogen were investigated. The purity of hydrogen produced from methane decomposition was higher than that from propane. In the case of propane, it was investigated that by products such as methane, acetylene, and ethane etc., by radical recombination under thermal plasma were produced more than that of methane. Produced carbon blacks were characterized by material analyses, such as XRD, Raman spectroscopy, SEM, and particle size analysis. In both methane and propane decompositions, well-crystallized carbon blacks were produced and showed uniform and sphere-like morphologies. The size of carbon black synthesized from methane was observed to be smaller than that from propane.

• Journal of Space Technology and Applications
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• v.3 no.1
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• pp.1-25
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• 2023

In this paper, I briefly introduce recently terminated, current, and future scientific spacecraft missions for in situ and remote-sensing observations of Earth's and other planetary magnetospheres as of February 2023. The spacecraft introduced here are Geotail, Cluster, Time History of Events and Macroscale Interactions during Substorms / Acceleration, Reconnection, Turbulence, and Electrodynamics of the Moon's Interaction with the Sun (THEMIS / ARTEMIS), Magnetospheric Multiscale (MMS), Exploration of energization and Radiation in Geospace (ERG), Cusp Plasma Imaging Detector (CuPID), and EQUilibriUm Lunar-Earth point 6U Spacecraft (EQUULEUS) for recently terminated or currently operated missions for Earth's magnetosphere; Lunar Environment Heliospheric X-ray Imager (LEXI), Gateway, Solar wind Magneto-sphere Ionosphere Link Explorer (SMILE), HelioSwarm, Solar-Terrestrial Observer for the Response of the Magnetosphere (STORM), Geostationary Transfer Orbit Satellite (GTOSat), GEOspace X-ray imager (GEO-X), Plasma Observatory, Magnetospheric Constellation (MagCon), self-Adaptive Magnetic reconnection Explorer (AME), and COnstellation of Radiation BElt Survey (CORBES) approved for launch or proposed for future missions for Earth's magnetosphere; BepiColombo for Mercury and Juno for Jupiter for current missions for planetary magnetospheres; Jupiter Icy Moons Explorer (JUICE) and Europa Clipper for Jupiter, Uranus Orbiter and Probe (UOP) for Uranus, and Neptune Odyssey for Neptune approved for launch or proposed for future missions for planetary magnetospheres. I discuss the recent trend and future direction of spacecraft missions as well as remaining challenges in magnetospheric research. I hope this paper will be a handy guide to the current status and trend of magnetospheric missions.

• Applied Chemistry for Engineering
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• v.27 no.1
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• pp.92-100
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• 2016

Low-temperature conversion of nitrogen oxides using plasma-assisted hydrocarbon selective catalytic reduction of (HC-SCR) was investigated. Plasma was created in the catalyst-packed bed so that it could directly interact with the catalyst. The effect of the reaction temperature, the shape of catalyst, the concentration of n-heptane as a reducing agent, the oxygen content, the water vapor content and the energy density on $NO_x$ removal was examined. $NO_x$ conversion efficiencies achieved with the plasma-catalytic hybrid process at a temperature of $250^{\circ}C$ and an specific energy input (SIE) of $42J\;L^{-1}$ were 83% and 69% for one-dimensional Ag catalyst ($Ag\;(nanowire)/{\gamma}-Al_2O_3$) and spherical Ag catalyst ($Ag\;(sphere)/{\gamma}-Al_2O_3$), respectively, whereas that obtained with the catalyst-alone was considerably lower (about 30%) even with $Ag\;(nanowire)/{\gamma}-Al_2O_3$ under the same condition. The enhanced catalytic activity towards $NO_x$ conversion in the presence of plasma can be explained by the formation of more reactive $NO_2$ species and partially oxidized hydrocarbon intermediates from the oxidation of NO and n-heptane under plasma discharge. Increasing the SIE tended to improve $NO_x$ conversion efficiency, and so did the increase in the n-heptane concentration; however, a further increase in the n-heptane concentration beyond $C_1/NO_x$ ratio of 5 did not improve the $NO_x$ conversion efficiency any more. The increase in the humidity affected negatively the $NO_x$ conversion efficiency, resulting in lowering the $NO_x$ conversion efficiency at the higher water vapor content, because water molecules competed with $NO_x$ species for the same active site. The $NO_x$ conversion efficiency increased with increasing the oxygen content from 3 to 15%, in particular at low SIE values, because the formation of $NO_2$ and partially oxidized hydrocarbon intermediates was facilitated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.334-334
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• 2009

본 논문에서는 질화갈륨 (GaN) 표면에 나노-스피어 리소그라피를 가능하게 하기 위하여 친수성으로 개질을 시도하였다. 플라즈마 처리 공정 변수인 공정 파워, 처리시간을 변화시키면서 표면을 개질하였으며, 친수성 개질을 확인하기 위하여 접촉각 및 표면 자유 에너지 변화를 측정 계산하였다. 또한 FT-IR 분석을 통하여 표면 작용기를 확인하였다. 최종적으로 본 실험의 결과로 얻어진 친수성이 질화갈륨 표면의 나노-스피어 리소그라피에 얼마나 큰 영향을 주는지 표면 모폴리지를 SEM을 이용하여 관찰하였다.

• Bulletin of the Korean Chemical Society
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• v.35 no.12
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• pp.3583-3589
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• 2014

This study evaluated a simple and useful route to the synthesis of mesoporous $TiO_2$ microcapsules with a hollow macro-core structure. A hydrophilic precursor sol containing the surfactants in the hydrophobic solvents was deposited on PMMA polymer surfaces modified by non-thermal plasma to produce mesoporous shells after calcination. The surface of the PMMA polymer spheres was coated with $NH_4F$ and CTAB to control the interfacial properties and promote the subsequent deposition of inorganic sols. These hollow type mesoporous $TiO_2$ microcapsules could be applied as an efficient substrate for the immobilization of DNA oligonucleotides.