• 반도체디스플레이기술학회지
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• 제2권1호
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• pp.1-5
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• 2003

Plasma generator based on non-self-sustained low-pressure arc discharge has been examined as a tool for deposition of highly-adhesive hydrogenated amorphous diamond-like carbon(DLC) films. Since the discharge is stable in wide range of gas pressures and currents, this plasma source makes possible to realize both plasma-immersion ion implantation(PIII) and plasma-immersion ion deposition(PIID) in a unified vacuum cycle. The plasma parameters were measured as functions of discharge current. Discharge and substrate bias voltage parameters have been determined for the PIII and PIID modes. For PIID it has been demonstrated that hard and well-adherent DLC coating are produced at 200-500 eV energies per deposited carbon atom. The growth rates of DLC films in this case are about 200-300 nm/h. It was also shown that short(∼60$\mu\textrm{s}$) high-voltage(> 1kV) substrate bias pulses are the most favorable for achieving high hardness and good adhesion of DLC, as well as for reducing of residual intrinsic stress are.

• 한국전자파학회논문지
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• 제28권8호
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• pp.646-652
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• 2017

큰 부피의 플라즈마를 발생시키기 위하여 플라즈마 층을 포함하는 유전체 장벽 방전 구조(dielectric barrier discharge)를 제안하고, 발생기 동작 유무에 따른 모노스태틱 레이다 단면적(mono-static radar cross section)을 측정함으로써 대기압 플라즈마가 전자기파에 미치는 영향을 분석하였다. 다수의 전극을 평면으로 평행 배열함으로써 플라즈마 층의 부피를 증가시켰으며, 전극 배열과 수직인 방향의 전기장을 포함하는 전자기파를 입사시킴으로써 발생기와의 원치 않는 커플링을 최소화 시켰다. 실험 결과, 모노스태틱 레이다 단면적을 2 GHz부터 25 GHz까지 측정하였을 때, K band에서 최대 8 dB까지 감소하는 것을 확인하였다. 또한, 고전압 발생기의 인가 전압을 최대 20 kV까지 변화시킴으로써 원하는 주파수에서 플라즈마로 인한 감소치를 유연하게 조절 가능함을 보였다.

• 한국환경과학회지
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• 제21권10호
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• pp.1181-1186
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• 2012

We studied the ozone concentrations generated by low-temperature dielectric barrier discharge plasma reactor after adding air and phytoplankton to control the ozone concentrations in seawater. We also examined the numbers of bacteria and Vibrio spp. after treatment using the plasma reactor. As the airflow rate was increased, more ozone was removed. Although marked variation in the ozone decrease was observed with and without airflow, the rate of ozone removal did not increase proportionately with the airflow rates. The ozone concentration decreased with increasing organic matter and time. The amount of organic matter seems to be an important factor decreasing the dissolved ozone concentration in liquid. The ozone concentration was 0.07, 0.32, 1.28, and 2.3 mg/L when operating the plasma reactor for 30, 60, 180, and 300 s, respectively; i.e., the ozone concentration increased with the reactor operating time. The initial numbers of bacteria and Vibrio spp. were 800 and 480 CFU/mL, respectively. After operating the plasma reactor at a flow rate of 6 L/min for 30 s, no bacteria or Vibrio spp. were detected. The disinfection effect of this plasma reactor seems to be superior to that of a conventional ozone generator.

• Nuclear Engineering and Technology
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• 제54권1호
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• pp.262-268
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• 2022

This paper introduces a novel concept of the pulsed neutron facility (PNF) for maximizing the production of the thermal neutrons and its application to medical use based on prompt gamma neutron activation analysis (PGNAA) using Monte Carlo simulations. The PNF consists of a compact D-T neutron generator, a graphite pile, and a detection system using Cadmium telluride (CdTe) detector arrays. The configuration of fuel pins in the graphite monolith and the design and materials for the moderating layer were studied to optimize the thermal neutron yields. Biological samples - normal and cancerous breast tissues - including chlorine, a trace element, were used to investigate the sensitivity of the characteristic γ-rays by neutron-trace material interactions and the detector responses of multiple particles. Around 90 % of neutrons emitted from a deuterium-tritium (D-T) neutron generator thermalized as they passed through the graphite stockpile. The thermal neutrons captured the chlorines in the samples, then the characteristic γ-rays with specific energy levels of 6.12, 7.80 and 8.58 MeV were emitted. Since the concentration of chlorine in the cancerous tissue is twice that in the normal tissue, the count ratio of the characteristic g-rays of the cancerous tissue over the normal tissue is approximately 2.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2018년도 춘계학술대회
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• pp.175-176
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• 2018

본 논문에서는 반도체 소자에 적용되는 극미세 박막을 낮은 온도에서 증착하기 위한 액상 전구체 공급 장치 개발 및 이의 특성 평가를 소개한다. 액상전구체 공급장치는 aerosol generator, vaporizer, vapor storage로 구성되어 있으며, 액체 상태의 전구 물질을 기화하여 박막 증착에 사용하는 장치이다. 이를 이용하여 알루미나 극미세 박막을 증착하여 그 특성을 평가하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.233-236
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• 1997

An investigation has been made of the various plasma chemistry reactions that occur in the corona discharge of an electrostatic precipitator operating in a typical flue gas. As the results of investigation, sulphur dioxide is removed principally by reactions with OH radicals to produce sulphuric acid, while nitrogen oxides are removed principally by reduction via the N radical to molecular nitrogen. If electrostatic precipitator\ulcorner used for flue gases are operated with positive voltages instead of negative dc voltages, there are significant reductions in the emission of the undesirable gases SO$_2$, NO, and NO$_2$. Thus, in this paper we design the bidirectional pulse generator for removal of flue gas, where the pulse width is more than 50[nsec] and the maximum output voltage is more than 100[kVl.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 D
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• pp.2582-2584
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• 2003

역전파 신경망 (BPNN)은 반도체 공정 모델링에 효과적으로 응용되고 있다. 뉴런의 활성화 함수는 동일한 값을 가지며, 이로 인해 예측정확도를 증진하는 데에는 한계가 있었다. 본 연구에서는 난수발생기(Random generator-RG)를 이용하여 뉴런 경사들이 다중값을 가지도록 최적화하였다. 본 기법은 은닉충의 뉴런수의 함수로 고찰하였으며, 종래의 고정된 경사를 갖는 모델과 그 성능을 비교 평가하였다. 평가에 이용된 데이터는 플라즈마 식각 공정데이터이며, 모델에 이용된 응답은 식각률과 프로파일 각이다. 비교결과 종래의 모델에 비해 예측정확도가, 식각률의 경우 19%-43%, 프로파일의 경우 10%-56% 정도 향상하였으며, 이는 제안된 기법이 모델개발에 매우 효과적으로 적용될 수 있음을 보여준다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.184.1-184.1
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• 2013

It is generally known that electron beam has sterilization effects and can activate plant germination and growth. Compared to electron beam, electrical pulse has not been frequently studied with respect to the biological application. In this study, we have analyzed the effects of high voltage pulse on seed germination and growth using various plant species. We have used the high voltage generator for examining seed's responses to the high voltage pulse. The operating voltage and currents of the generator are about 300 kV and 30 kA, respectively. Pulse width is 60 ns. High voltage pulse has slightly activated germination and growth of radish during early stage. Various levels of germination and growth are observed in different plant species after treated with high voltage pulse.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.550-551
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• 2013

Large-area RF-driven ion source is being developed at Germany for the heating and current drive of ITER plasmas. Negative hydrogen (deuterium) ion sources are major components of neutral beam injection systems in future large-scale fusion experiments such as ITER and DEMO. RF ion sources for the production of positive hydrogen ions have been successfully developed at IPP (Max-Planck- Institute for Plasma Physics, Garching) for ASDEX-U and W7-AS neutral beam injection (NBI) systems. In recent, the first NBI system (NBI-1) has been developed successfully for the KSTAR. The first and second long-pulse ion sources (LPIS-1 and LPIS-2) of NBI-1 system consist of a magnetic bucket plasma generator with multi-pole cusp fields, filament heating structure, and a set of tetrode accelerators with circular apertures. There is a development plan of large-area RF ion source at KAERI to extract the positive ions, which can be used for the second NBI (NBI-2) system of KSTAR, and to extract the negative ions for future fusion devices such as ITER and K-DEMO. The large-area RF ion source consists of a driver region, including a helical antenna (6-turn copper tube with an outer diameter of 6 mm) and a discharge chamber (ceramic and/or quartz tubes with an inner diameter of 200 mm, a height of 150 mm, and a thickness of 8 mm), and an expansion region (magnetic bucket of prototype LPIS in the KAERI). RF power can be transferred up to 10 kW with a fixed frequency of 2 MHz through a matching circuit (auto- and manual-matching apparatus). Argon gas is commonly injected to the initial ignition of RF plasma discharge, and then hydrogen gas instead of argon gas is finally injected for the RF plasma sustainment. The uniformities of plasma density and electron temperature at the lowest area of expansion region (a distance of 300 mm from the driver region) are measured by using two electrostatic probes in the directions of short- and long-dimension of expansion region.

• Journal of Advanced Marine Engineering and Technology
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• 제40권10호
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• pp.894-898
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• 2016

Solution plasma is a unique method which provides a direct discharge in solutions. It is one of the promising techniques for various applications including the synthesis of metallic/non-metallic nanomaterials, decomposition of organic compounds, and the removal of microorganism. In the context of nanomaterial syntheses, solution plasma has been utilized to produce carbon nanoparticles and metallic-carbon nanoparticle systems. The main purpose of this study was to synthesize nickel nanoparticles embedded in a matrix of carbon particles by solution plasma in one-step using waste vegetable oil as the carbon source. The experimental setup was done by simply connecting a bipolar pulsed power generator to nickel electrodes, which were submerged in the waste vegetable oil. Black powders of the nickel nanoparticles-embedded carbon (NiNPs/Carbon) particles were successfully obtained after discharging for 90 min. The morphology of the synthesized NiNPs/Carbon was investigated by a scanning electron microscope, which revealed a good dispersion of NiNPs in the carbon-particle matrix. The X-ray diffraction of NiNPs/Carbon clearly showed the co-existence of crystalline Ni nanostructures and amorphous carbon. The crystallite size of NiNPs (through the Ni (111) diffraction plane), as calculated by the Scherrer equation was found to be 64 nm. In addition, the catalytic activity of NiNPs/Carbon was evaluated by cyclic voltammetry in an acid solution. It was found that NiNPs/Carbon did not show a significant catalytic activity in the acid solution. Although this work might not be helpful in enhancing the activity of the fuel cell catalysts, it is expected to find application in other processes such as the CO conversion (by oxidation) and cyclization of organic compounds.