• Journal of Electrical Engineering and Technology
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• 제7권1호
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• pp.86-90
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• 2012

A two-dimensional nonlocal heating theory of planar-type inductively coupled plasma source has been previously reported with a filamentary antenna current model. However, such model yields an infinite value of electric field at the antenna position, resulting in the infinite self-inductance of the antenna. To overcome this problem, a surface current model of antenna should be adopted in the calculation of the electromagnetic fields. In the present study, the reactor impedance is calculated based on the surface current model and the dependence on various discharge parameters is studied. In addition, a simpler method is suggested and compared with the surface current calculation.

• 대한화학회지
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• 제23권1호
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• pp.1-6
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• 1979

사각형 및 사면체 $[M(II)N_2S_2]$형태 착물의 쌍극자모멘트를 spherical harmonics의 전개방법에 의하여 계산하였다. [M(II) = Co(II), Ni(II), Cu(II) 또는 Zn(II)]. 이들 착물에 대한 쌍극자모멘트의 계산치가 실험치 범위안에 들었다. 계산한 쌍극자모멘트와 자기적 성질을 기초로하여 벤젠용액에서 이들 착물에 대한 가능한 구조를 고찰하였다.

• 정보통신설비학회논문지
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• 제4권1호
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• pp.31-36
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• 2005

In this paper, a planar type bandpass filter in multilayered PCB is presented. The multilayered PCB structure has some advantages on fabricating microwave devices such as the size reduction and ability of tight coupling by folding or embedding. The proposed BPF has two transmission zeros at the both sides of the center frequency by using independent electric and magnetic coupling structure. The designed BPF with four layer teflon PCBs of dielectric constant 2.94 has dimensions of 24x20x1.524 in mm, center frequency of 2.47GHz and bandwidth of about l00MHz. A good agrement is achieved between the measured result and the simulated one. The influences of air gaps between the layers are also analyzed and presented.

• 한국전기전자재료학회논문지
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• 제11권4호
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• pp.261-266
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• 1998

In developing the high density memory device, the etching of fine pattern is becoming increasingly important. Therefore, definition of ultra fine line and space pattern and minimization of damage and contamination are essential process. Also, the high density plasma in low operating pressure is necessary. The candidates of high density plasma sources are electron cyclotron resonance plasma, helicon wave plasma, helical resonator, and inductively coupled plasma. In this study, planar type magnetized inductively coupled plasma etcher has been built. The density and temperature of Ar plasma are measured as a function of rf power, flow rate, external magnetic field, and pressure. The oxide etch rate and selectivity to polysilicon are measured as the above mentioned conditions and self-bias voltage.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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• pp.287-289
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• 1994

This paper deals with the planar-type electric field sensor which can measure the time-varying electric fields. The theoretical principle and design rule of the sensor are introduced, and also the calibration and application investigations are carried out. From the calibration experiments, the frequency bandwidth of the measurement system ranges from 160 [Hz] to 25 [MHz]. At a high voltage laboratory, the electric fields caused by the impulse voltage and oscillating transient voltage are measured by the proposed sensor. Obtained results are well agreement with the applied voltage waveforms.

• 한국전기전자재료학회논문지
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• 제19권7호
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• pp.644-649
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• 2006

This paper presents a new disk-type piezoelectric transformer. The input side of the transformer has a crescent-shaped electrode and the output side has a focused poling direction. The piezoelectric transformers operated in each transformer's resonance vibration mode. The electrodes and poling directions on commercially available piezoelectric ceramic disks were designed so that the planar or shear mode coupling factor $(k_p\;k_{15})$ becomes effective rather than the transverse mode coupling factor $(k_{31})$. ANSYS finite element code was used to analyze transformer behavior and to optimize electrode and poling configurations. The voltage step-up ratio of the proposed transformer has been markedly improved in comparison with that of the equivalent rectangular(Rosen) type. A single layer prototype transformer, $20\sim30mm$ in diameter and $1.0\sim3.5mm$ thick, was fabricated, such as step-up ratio, power transformation efficiency, and temperature were measured. While the transformer was driving a Cold Cathode Fluorescent Lamp(CCFL), the temperature field of the transformer was also observed.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 1998년도 춘계연구발표회 논문개요집
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• pp.60-61
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• 1998

• 한국재료학회:학술대회논문집
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• 한국재료학회 2001년도 춘계학술발표강연 및 논문개요집
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• pp.51-51
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• 2001

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2000년도 춘계연구발표회 논문개요집
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• pp.88-89
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• 2000

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제35회 하계학술대회 초록집
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• pp.53-53
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• 2008