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http://dx.doi.org/10.5370/JEET.2012.7.1.86

Calculation of the Reactor Impedance of a Planar-type Inductively Coupled Plasma Source  

Kwon, Deuk-Chul (Convergence Plasma Research Center, National Fusion Research Institute)
Jung, Bong-Sam (OLEV & E)
Yoon, Nam-Sik (School of Electrical Engineering, Chungbuk National University)
Publication Information
Journal of Electrical Engineering and Technology / v.7, no.1, 2012 , pp. 86-90 More about this Journal
Abstract
A two-dimensional nonlocal heating theory of planar-type inductively coupled plasma source has been previously reported with a filamentary antenna current model. However, such model yields an infinite value of electric field at the antenna position, resulting in the infinite self-inductance of the antenna. To overcome this problem, a surface current model of antenna should be adopted in the calculation of the electromagnetic fields. In the present study, the reactor impedance is calculated based on the surface current model and the dependence on various discharge parameters is studied. In addition, a simpler method is suggested and compared with the surface current calculation.
Keywords
ICP; Impedance; Plasma;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
Times Cited By Web Of Science : 0  (Related Records In Web of Science)
연도 인용수 순위
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