• Title/Summary/Keyword: pit morphology

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Evolution of Surface Morphology During Wet-Etching of N-type GaN Using Phosphoric Acidic Solutions (인산을 이용한 n-type GaN의 습식식각을 통한 표면 Morphology 변화)

  • Kim, Jae-Kwan;Kim, Taek-Seung;Jo, Young-Je;Lee, Ji-Myon
    • Korean Journal of Metals and Materials
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    • v.46 no.3
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    • pp.169-173
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    • 2008
  • Characteristics of etching and induced surface morphology variation by wet-etching of n-type GaN were investigated using phosphoric acidic solutions. Generally, the etch-rate was increased as the temperature of the etch solutions was increased, and the highest etch rate of about $300{\AA}/min$ was achieved at the temperature of $180^{\circ}C$. The morphology variation of the etched surface was observed by optical microscopy and atomic force microscopy. Initially, high density of hexagonal holes or pits were formed on the etched surface at the time of 40 min with the bimodal size of $20{\mu}m$ or $5{\mu}m$, respectively. However, as the etching time was increased further, the lateral size of the hexagonal holes or pits was increased, and finally, joined and merged together at the time of 100 min. This means that the etching of n-type GaN by phosphoric acidic solutions proceeded through the lateral widening and the merging of initial holes and pits.

A Study on the Time-Dependent Deformation Behaviors of PMMA in Nanoindentation Process for Hyperfine Pit Structure Fabrication (극미세 점 구조체 제작을 위한 나노압입 공정에서 PMMA의 시간의존적 변형거동에 관한 연구)

  • Kim Hyun-Il;Kang Chung-Gil;Youn Sung-Won
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.7 s.172
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    • pp.62-70
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    • 2005
  • The nanoindenter and AFM have been used for nanofabrication, such as nanolithography, nanowriting, and nanopatterning, as well as measurement of mechanical properties and surface topology. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is very important to make indents of desired morphology (shape, size and depth). Indents of different shapes can be obtained by using indenters of different geometries such as a cube comer and conical and spherical tips. The depth and size of indents can be controlled by making indentations at different indentation loads. However, in case of viscoplastic viscoelastic materials such as polymethylmethacrylate (PMMA) the time dependent deformation (TDD) should also be considered. In this study, the effect of process parameters such as loading rate and hold-time at peak load on the indent morphology (maximum penetration depth, elastic recovery, transient creep recovery, residual depth pile-up height) of PMMA were studied for hyperfine pattern fabrication.

The first discovery of larval Gnathostoma hispidum (Nematoda: Gnathostomidae) from a snake host, Agkistrodon breuicaudn (한국산 살모사에서 최초로 발견한 돼지악구충의 제3기 유충)

  • 손운목;이순형
    • Parasites, Hosts and Diseases
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    • v.36 no.2
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    • pp.81-90
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    • 1998
  • The present study was performed to observe the infection status of several kind of animals with indigenous Gnnthostomn in Korea, and morphological characteristics of gnathostome larvae detected from pit-viper, Askistronon breuiccudus, for the species bullfrogs. several kinds of snakes, j.e., 55 Elnphe rufodorsata, 2 Dinodon rufozonatum rufzonatum. 62 Rhnbdophis tisrinus tigrinus and 87 Askistronon app., and 438 cats were examined. A total of 21 larval gnathostomes was detected from 12 pit-vipers, A. breuicnudus. They were 2.233 x 0.343 mm in average size and covered with about 210 transverse rows of minute cuticular spines. Their characteristic head bulbs were provided with 4 rows of hooklets of which average numbers in each row were 36.8, 39.0, 41.7 and 44.3. posteriorly. In the cross sections of midgut level, the intestinal wall consisted of a single layer of 19-25 elongate epithelial cells with a single nucleus. SEM observation of the larvae revealed unique features of head bulb , cuticular spines on transverse striations and a cervical papilla. On the basis of above morphological characteristics, they were identified as the advanced third-stage larvae of Gnothostomo hispinum. It was first confirmed that the pit-viper. ABkistronon breuicaunus is the snake intermediate host of G. hispidun.

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The Effect of Children's Beverages on Degradation of Dental Resin-Based Pit and Fissure Sealant (어린이 음료가 레진계 치면열구전색제의 화학적 분해에 미치는 영향)

  • Min, Hee-Hong;Kim, Hyun-Jin;Lee, Hye-Jin
    • Journal of dental hygiene science
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    • v.18 no.6
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    • pp.367-373
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    • 2018
  • The consumption of beverages among children is rising. The purpose of this study was to examine the effect of kid's drink on dental resin-based pit and fissure sealant. Pororo, I-kicker, Sunkist kids were included in the experimental groups, and Samdasu was included in the control group. A conventional dental sealant material ($Clinpro^{TM}Sealant^{(R)}$) was selected for this study. Resin specimens (8 mm in diameter and 1 mm in thickness) were prepared according to manufacturers' instructions and the initial roughness (Ra) was then measured. The pH of all the four groups was measured using a pH meter. The specimens were individually immersed in 5 ml of the experimental solutions and stored at $37^{\circ}C$ for 72 hours. Following this, the surface roughness of the resin specimens was measured by Surftest. The concentration of residual monomer released was determined by high performance liquid chromatography (HPLC). The surface morphology of the resin specimen was evaluated before and after storage by scanning electron microscopy (SEM). Data were statistically analyzed using Kruskal-Wallis and Duncan's test. The results showed that all the children's beverages examined in this study contained citric acid. The pH of I-kicker was the lowest ($3.03{\pm}0.01$), followed by that of Sunkist kids ($3.26{\pm}0.02$) and Pororo ($3.47{\pm}0.02$). We observed an increase in the surface roughness of resin specimens after 72 h of immersion in all the beverages tested (p<0.05). There was matrix degradation after immersion, visualized on SEM image, in all the beverage groups. Bisphenol-A-glycidyl methacrylate was not detected after 72 hours, but triethylene glycol dimethacrylate levels were increased in all the beverages tested during the 72 hours by HPLC. These results suggest that intake of beverages containing acid can cause degradation of the resin-based pit and fissure sealants in children.

Effects of AlN buffer layer on optical properties of epitaxial layer structure deposited on patterned sapphire substrate (패턴화된 사파이어 기판 위에 증착된 AlN 버퍼층 박막의 에피층 구조의 광학적 특성에 대한 영향)

  • Park, Kyoung-Wook;Yun, Young-Hoon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.30 no.1
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    • pp.1-6
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    • 2020
  • In this research, 50 nm thick AlN thin films were deposited on the patterned sapphire (0001) substrate by using HVPE (Hydride Vapor Phase Epitaxy) system and then epitaxial layer structure was grown by MOCVD (metal organic chemical vapor deposition). The surface morphology of the AlN buffer layer film was observed by SEM (scanning electron microscopy) and AFM (atomic force microscope), and then the crystal structure of GaN films of the epitaxial layer structure was investigated by HR-XRC (high resolution X-ray rocking curve). The XRD peak intensity of GaN thin film of epitaxial layer structure deposited on AlN buffer layer film and sapphire substrate was rather higher in case of that on PSS than normal sapphire substrate. In AFM surface image, the epitaxial layer structure formed on AlN buffer layer showed rather low pit density and less defect density. In the optical output power, the epitaxial layer structure formed on AlN buffer layer showed very high intensity compared to that of the epitaxial layer structure without AlN thin film.

Improvement of HgCdTe Qualities grown by MOVPE using MBE grown CdTe/Si as Substrate (MBE법으로 성장된 CdTe(211)/Si 기판을 이용한 MOVPE HgCdTe 박막의 특성 향상)

  • Kim, Jin-Sang;Suh, Sang-Hee;Sivananthan, S.
    • Journal of Sensor Science and Technology
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    • v.12 no.6
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    • pp.282-288
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    • 2003
  • We report the growth of HgCdTe by metal organic vapor phase epitaxy (MOVPE), using (211)B CdTe/Si substrates grown by molecular beam epitaxy (MBE). The surface morphology of these films is very smooth with hillock free. The etch pit densities (EPD) and full widths at half maximum (FWHM) of x-ray rocking curves exhibited that the crystalline quality of HgCdTe epilayer on MBE grown CdTe/Si was improved compare to HgCdTe on GaAs substrate. The Hall parameters of undoped HgCdTe layers on CdTe/Si showed n-type behavior with carrier concentration of $8{\times}10^{14}/cm^3$ at 77K. But HgCdTe on GaAs showed p-type conductivity due to in corporation of p-type impurities during GaAs substrate preparation. It is thought that these results are applicable for large area HgCdTe forcal plane arrays of $1024{\times}1024$ format and beyound.

Surface Compatibility and Electrochemical Behaviors of Zirconia Abutment for Prosthodontics (보철용 지르코니아 어버트먼트의 표면적합도와 전기화학적 거동)

  • Park, K.H.;Jeong, Y.H.;Kim, W.G.;Choe, H.C.;Kim, M.S.
    • Journal of the Korean institute of surface engineering
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    • v.42 no.1
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    • pp.41-46
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    • 2009
  • The fit between dental implant fixture and zirconia abutment is affected by many variables during the fabrication process by CAD/CAM program and milling working. The purpose of this study was to evaluate the surface compatibility and electrochemical behaviors of zirconia abutment for prosthodontics. Zirconia abutments were prepared and fabricated using zirconia block and milling machine. For stabilization of zirconia abutments, sintering was carried out at $1500^{\circ}F$ for 7 hrs. The specimens were cut and polished for gap observation. The gap between dental implant fixture and zirconia abutment was observed using field-emission scanning electron microscopy (FE-SEM). The hardness and corrosion resistance of zirconia abutments were observed with vickers hardness tester and potentiostat. The gap between dental implant fixture and zirconia abutment was $5{\sim}12{\mu}m$ for small gap, and $40{\sim}60{\mu}m$ for large gap. The hardness of zirconia surface was 1275.5 Hv and showed micro-machined scratch on the surface. The corrosion potentials of zirconia abutment/fixture was .290 mV and metal abutment/fixture was .280 mV, whereas $|E_{pit}-E_{corr}|$ of zirconia abutment/fixture (172 mV) was higher than that of metal abutment/fixture (150 mV). The corrosion morphology of metal abutment/fixture showed the many pit on the surface in compared with zirconia abutment/fixture.

Correlation between Physical Defects and Performance in AlGaN/GaN High Electron Mobility Transistor Devices

  • Park, Seong-Yong;Lee, Tae-Hun;Kim, Moon-J.
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.2
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    • pp.49-53
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    • 2010
  • Microstructural origins of leakage current and physical degradation during operation in product-quality AlGaN/GaN high electron mobility transistor (HEMT) devices were investigated using photon emission microscopy (PEM) and transmission electron microscopy (TEM). AlGaN/GaN HEMTs were fabricated with metal organic chemical vapor deposition on semi-insulating SiC substrates. Photon emission irregularity, which is indicative of gate leakage current, was measured by PEM. Site specific TEM analysis assisted by a focused ion beam revealed the presence of threading dislocations in the channel below the gate at the position showing strong photon emissions. Observation of electrically degraded devices after life tests revealed crack/pit shaped defects next to the drain in the top AlGaN layer. The morphology of the defects was three-dimensionally investigated via electron tomography.

PAALD 방법을 이용한 TaN 박막의 구리확산방지막 특성

  • 부성은;정우철;배남진;권용범;박세종;이정희
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2002.11a
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    • pp.14-19
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    • 2002
  • In this study, as Cu diffusion barrier, tantalum nitrides were successfully deposited on Si(100) substrate and SiO2 by plasma assisted atomic layer deposition(PAALD) and thermal ALD, using pentakis (ethylmethlyamino) tantalum (PEMAT) and $NH_3$ as precursors. The TaN films were deposited on $250^{\circ}$C by both method. The growth rates of TaN films were $0.8{\AA}$/cycle for PAALD and $0.75{\AA}$/cycle for thermal ALD. TaN films by PAALD showed good surface morphology and excellent step coverage for the trench with an aspect ratio of h/w - $1.8 : 0.12 \mu\textrm{m}$ but TaN films by thermal ALD showed bad step coverage for the same trench. The density for PAALD TaN was $11g/\textrm{cm}^3$ and one for thermal ALD TaN was $8.3g/\textrm{cm}^3$. TaN films had 3 atomic % carbon impurity and 4 atomic % oxygen impurity for PAALD and 12 atomic % carbon impurity and 9 atomic % oxygen impurity for thermal ALD. The barrier failure for Cu(200nm)/TaN(l0nm)/$SiO_2(85nm)$/Si structure was shown at temperature above $700^{\circ}$C by XRD, Cu etch pit analysis.

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A STUDY ON MORPHOLOGY AND SIZE OF CLINICAL CROWN OF PERMANENT MANDIBULAR MOLAR IN KOREAN ADULT (한국 성인의 하악대구치 임상치관의 형태와 크기에 관한 연구)

  • Oh, Sang-Chun
    • The Journal of Korean Academy of Prosthodontics
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    • v.37 no.2
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    • pp.242-255
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    • 1999
  • The purpose of this study was to estimate the morphology and the size of permanent mandibular molar in Korean Adult. The 100 dental college students with a normal dentition and without any dental prosthesis and severe caries were selected for this study The subjects were taken impression to make study model. On the study model, the 5 dentists measured those sizes and estimated morphological structures with a calipers, a Boley gauge and a protractor. The results were as follows; 1. The clinical crown height, width, thickness and the other anatomical structures had symmetrical relationship between the left and right mandibular molar. 2. In the clinical crown height aspect, the buccal crown heights always were higher than the lingual crown height. The heights of the each surface, the buccal or lingual surface, were gradually decreased from the 1st molar to the 2nd molar and the difference on the buccal surface was higher than that on the lingual surface. 3. In the clinical crown width aspect, the mesiodistal measurement of the mandibular 1st molar was higher than that of the mandibular 2st molar. 4. In the clinical crown thickness aspect, the mesial buccolingual measurement was highest on the mandibular 1st molar and the distal buccolingual distance was lowest on the mandibular 2nd molar. This distal thickness of the mandibular molar always was higher than that of the mesial half. 5. The well-developed mesiobuccal groove of the 1st molar was observed more often than that of the 2nd molar. The buccal pit was also observed more frequently at the 1st molar, but the frequency(35%) was not high. 6. The occlusal type according to the number of cusp was almost 5-cusp(98%) in the 1st molar and was also 5-cusp(63%) in the 2nd molar. The frequency of the 6th cusp was 31% in the 1st molar and was 22% in the 2nd molar. The frequency of the 7th cusp was below 2of in the both teeth. 7. In the buccolingual intercuspal distance aspect of the mesial and distal half, the intercuspal distance of distal half was higher than that of the mesial half on the 1st and 2nd molar, but the difference on the 1st molar was higher than that on the 2nd molar. 8. The difference between the widths of the buccal and lingual half was 1.5mm in the 1st molar and 0.8mm in the 2nd molar. Therefore the lingual convergency of the occlusal surface was more higher in the 1st molar. 9. On the mandibular 1st and 2nd molar, the distobuccal external angle was more acute than the mesiobuccal external angle. But the mesiobuccal internal angle was more acute than the distobuccal internal angle. 10. When the mandibular molar was a 5-cusp type, the development of the distal cusp on the 1st molar was better than that on the 2nd molar. The difference between the cusps was around 0.4mm.

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