Design and fabrication of a comb-type differential pressure sensor with silicon beams embedded in a silicone rubber membrane (실리콘 빔이 실리콘 고무 멤브레인에 삽입된 빗살형 차압센서의 설계 및 제조)
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- Journal of Sensor Science and Technology
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- v.9 no.6
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- pp.424-429
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- 2000