• 제목/요약/키워드: piezoelectric voltage coefficient

검색결과 56건 처리시간 0.03초

Polarization behavior of polyvinylidene fluoride films with the addition of reduced graphene oxide

  • Lee, Junwoo;Lim, Sangwoo
    • Journal of Industrial and Engineering Chemistry
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    • 제67권
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    • pp.478-485
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    • 2018
  • The effect of reduced graphene oxide (RGO) addition on the dielectric and piezoelectric behavior of the polyvinylidene fluoride (PVDF) films was studied. Dielectric constant increased by four times and piezoelectric coefficient also increased twice by the addition of RGO in the PVDF films. Based on capacitance-voltage and ellipsometry measurements and the Kramers-Kronig transformation, it is concluded that the enhanced dielectric and piezoelectric properties of the PVDF/RGO films resulted from the increased orientational polarization due to a phase transition from nonpolar crystalline ${\alpha}$ phase to polar crystalline ${\beta}$ phase in the PVDF structure.

Microelectromechnical system 소자 제작을 위한 유기금속분해법에 의한 압전성 PZT(53/47)박막의 증착 (Deposition of Piezoelectric PZT(53/47) Film by Metalorganic Decomposition for Micro electro mechanical Device)

  • 윤영수;정형진;신영화
    • 한국전기전자재료학회논문지
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    • 제11권6호
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    • pp.458-464
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    • 1998
  • This paper gives characterization of substrate and PZT(53/47) thin film deposited by metalorganic decomposition, which is concerned in deposition process and device fabrication process, to fabricate micro electro mechanical system (MEMS) device with piezoelectric material. The PZT thin films deposited by MOD at 700^{\circ}C$ for 30 minutes had a polycrystallinity, that is, no substrate dependence, while different interface were developed depending on the bottom electrodes. Such a structural variation could influence on not only the properties of the PZT film but also etching process for fabricating MEMS devices. Therefore the electrode structure is a very important factor in the deposition of the PZT film during etching process by HF acid for MEMS device with piezoelectric material. Piezoelectric coefficients of the PZT films on the different substrates were 40 and 80 pm/V at an applied voltage of 4V. Based in these results, it was possible for deposition of the PZT film by MOD to apply MEMS device fabrication process based on piezoelectricity after selection of proper bottom electrode.

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Effect of Bias Magnetic Field on Magnetoelectric Characteristics in Magnetostrictive/Piezoelectric Laminate Composites

  • Chen, Lei;Luo, Yulin
    • Journal of Magnetics
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    • 제20권4호
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    • pp.347-352
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    • 2015
  • The magnetoelectric (ME) characteristics for Terfenol-D/PZT laminate composite dependence on bias magnetic field is investigated. At low frequency, ME response is determined by the piezomagnetic coefficient $d_{33,m}$ and the elastic compliance $s_{33}^H$ of magnetostrictive material, $d_{33,m}$ and $s_{33}^H$ for Terfenol-D are inherently nonlinear and dependent on $H_{dc}$, leading to the influence of $H_{dc}$ on low-frequency ME voltage coefficient. At resonance, the mechanical quality factor $Q_m$ dependences on $H_{dc}$ results in the differences between the low-frequency and resonant ME voltage coefficient with $H_{dc}$. In terms of ${\Delta}E$ effect, the resonant frequency shift is derived with respect to the bias magnetic field. Considering the nonlinear effect of magnetostrictive material and $Q_m$ dependence on $H_{dc}$c, it predicts the low-frequency and resonant ME voltage coefficients as a function of the dc bias magnetic field. A good agreement between the theoretical results and experimental data is obtained and it is found that ME characteristics dependence on $H_{dc}$ are mainly influenced by the nonlinear effect of magnetostrictive material.

A High-sensitivity Passive Magnetic Transducer Based on PZT Plates and a Fe-Ni Fork Substrate

  • Li, Ping;Wen, Yumei;Jia, Chaobo;Li, Xinshen
    • Journal of Magnetics
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    • 제16권3호
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    • pp.271-275
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    • 2011
  • This paper proposes a magnetoelectric (ME) composite transducer structure consisting of a magnetostrictive H-type Fe-Ni fork substrate and piezoelectric PZT plates. The fork composite structure has a higher ME voltage coefficient compared to other ME composite structures due to the higher quality (Q) factor. The ME sensitivity of the fork structure reaches 12 V/Oe (i.e., 150 V/cm Oe). The fork composite with two PZT plates electrically connected in series exhibits over 5 times higher ME voltage coefficient than the output of the rectangle structure in the same size. The experiment shows the composite of a Fe-Ni fork substrate and PZT plates has a significantly enhanced ME voltage coefficient and a higher ME sensitivity relative to the prior sandwiched composite laminates. By the use of a lock-in amplifier with 10 nV resolution, this transducer can detect a weak magnetic field of less than $10^{-12}$ T. This transducer can also be designed for a magnetoelectric energy harvester due to its passive high-efficiency ME energy conversion.

정적 하중하의 굽힘 압전 복합재료 작동기의 작동 성능 (Actuating Performance of a Bending Piezoelectric Composite Actuator with a Thin Sandwiched PZT Plate under Static Loads)

  • 우성충;박기훈;구남서
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회A
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    • pp.1231-1236
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    • 2007
  • This study presents the static and dynamic actuating performances of a bending piezoelectric actuator with a thin sandwiched PZT plate under a static load. The stored elastic energy within the actuators which occurs during a curing process is obtained through a flexural bending test. An actuating performance is evaluated in terms of an actuating displacement at the simply supported condition. The results reveal that an actuator that consists of a top layer having a high elastic modulus and a low coefficient of thermal expansion exhibits a better performance than the rest of actuators due to the formation of the large stored elastic energy within the actuator system. When actuators are excited at the alternating current voltage, the effect of PZT ceramic softening results in a slight reduction in the resonance frequency of each actuator as the applied electric field increases. It is thus suggested that the static and dynamic actuating characteristics of bending piezoelectric actuators with a thin sandwiched PZT plate should be simultaneously considered in controlling their performances.

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굽힘 압전 복합재료 작동기의 하중 특성 (Load Capability in a Bending Piezoelectric Composite Actuator with a Thin Sandwiched PZT Plate)

  • 우성충;구남서
    • 대한기계학회논문집A
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    • 제31권8호
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    • pp.880-888
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    • 2007
  • This article describes the load capability of bending piezoelectric actuators with a thin sandwiched PZT plate in association with the stored elastic energy induced by an increased dome height after a curing process. The stored elastic energy within the actuators is obtained via a flexural mechanical bending test. The load capability is evaluated indirectly in terms of an actuating displacement with a load of mass at simply supported and fixed-free boundary conditions. Additionally, a free displacement under no load of mass is measured for a comparison with an actuating displacement. The results reveal that an actuator with a top layer having a high elastic modulus and a low coefficient of thermal expansion exhibits a better performance than the rest of actuators in terms of free displacement as well as actuating displacement due to the formation of the large stored elastic energy within the actuator system. When actuators are excited at AC voltage, the actuating displacement is rather higher than the free displacement for the same actuating conditions. In addition, the effect of PZT ceramic softening results in a slight reduction in the resonance frequency of each actuator as the applied electric field increases. It is thus suggested that the static and dynamic actuating characteristics of bending piezoelectric composite actuators with a thin sandwiched PZT plate should be simultaneously considered in controlling the performance.

음향 방출 센서용 Pb(Zn,Ni,Nb)O3-Pb(Zr,Ti)O3 세라믹스의 유전 및 압전 특성 (Dielectric and Piezoelectric Properties of Pb(Zn,Ni,Nb)O3-Pb(Zr,Ti)O3 Ceramics for AE Sensor)

  • 한종대;류주현;정회승;서동희
    • 한국전기전자재료학회논문지
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    • 제29권8호
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    • pp.466-469
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    • 2016
  • In this study, in order to develop composition ceramics for Acoustic Emission (abbreviated as AE) sensor application, the PZT system ceramics was fabricated by conventional solid state reaction method. When x=0.48, the density, electromechanical coupling factor($k_p$), piezoelectric coefficient $d_{33}$ and piezoelectric voltage constant $g_{33}$ of the maximum values of $7.857g/cm^3$, 0.51, 190[pC/N], 52[$10^{-3}mV/N$] were obtained, respectively, suitable for AE sensor.

PZT 박막의 압전 특성 및 MEMS 기술로 제작된 PZT cantilever의 전기기계적 물성 평가 (Piezoelectric and electromechanical properties of PZT films and PZT microcantilever)

  • 이정훈;황교선;윤기현;김태송
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.177-180
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    • 2002
  • Thickness dependence of crystallographic orientation of diol based sol-gel derived PZT(52/48) films on dielectric and piezoelectric properties was investigated The thickness of each layer by one time spinning was about 0.2 $\mu\textrm{m}$, and crack-free films was successfully deposited on 4 inches Pt/Ti/SiO$_2$/Si substrates by 0.5 mol solutions in the range from 0.2 $\mu\textrm{m}$ to 3.8 $\mu\textrm{m}$. Excellent P-E hysteresis curves were achieved without pores or any defects between interlayers. As the thickness increased , the (111) preferred orientation disappeared from 1$\mu\textrm{m}$ to 3 $\mu\textrm{m}$ region, and the orientation of films became random above 3 $\mu\textrm{m}$. Dielectric constants and longitudinal piezoelectric coefficient d$\_$33/, measured by pneumatic method were saturated around the value of about 1400 and 300 pC/N respectively above the thickness of 0.8 7m. A micromachined piezoelectric cantilever have been fabricated using 0.8 $\mu\textrm{m}$ thickness PZT (52/48) films. PZT films were prepared on Si/SiN$\_$x/SiO$_2$/Ta/Pt substrate and fabricated unimorph cantilever consist of a 0.8 fm thick PZT layer on a SiNx elastic supporting layer, which becomes vibration when ac voltage is applied to the piezoelectric layer. The dielectric constant (at 100 kHz) and remanent polarization of PZT films were 1050 and 25 ${\mu}$C/$\textrm{cm}^2$, respectively. Electromechanical characteristics of the micromachined PZT cantilever in air with 200-600 $\mu\textrm{m}$ lengths are discussed in this presentation.

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Nonlocal strain gradient-based vibration analysis of embedded curved porous piezoelectric nano-beams in thermal environment

  • Ebrahimi, Farzad;Daman, Mohsen;Jafari, Ali
    • Smart Structures and Systems
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    • 제20권6호
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    • pp.709-728
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    • 2017
  • This disquisition proposes a nonlocal strain gradient beam theory for thermo-mechanical dynamic characteristics of embedded smart shear deformable curved piezoelectric nanobeams made of porous electro-elastic functionally graded materials by using an analytical method. Electro-elastic properties of embedded curved porous FG nanobeam are assumed to be temperature-dependent and vary through the thickness direction of beam according to the power-law which is modified to approximate material properties for even distributions of porosities. It is perceived that during manufacturing of functionally graded materials (FGMs) porosities and micro-voids can be occurred inside the material. Since variation of pores along the thickness direction influences the mechanical and physical properties, so in this study thermo-mechanical vibration analysis of curve FG piezoelectric nanobeam by considering the effect of these imperfections is performed. Nonlocal strain gradient elasticity theory is utilized to consider the size effects in which the stress for not only the nonlocal stress field but also the strain gradients stress field. The governing equations and related boundary condition of embedded smart curved porous FG nanobeam subjected to thermal and electric field are derived via the energy method based on Timoshenko beam theory. An analytical Navier solution procedure is utilized to achieve the natural frequencies of porous FG curved piezoelectric nanobeam resting on Winkler and Pasternak foundation. The results for simpler states are confirmed with known data in the literature. The effects of various parameters such as nonlocality parameter, electric voltage, coefficient of porosity, elastic foundation parameters, thermal effect, gradient index, strain gradient, elastic opening angle and slenderness ratio on the natural frequency of embedded curved FG porous piezoelectric nanobeam are successfully discussed. It is concluded that these parameters play important roles on the dynamic behavior of porous FG curved nanobeam. Presented numerical results can serve as benchmarks for future analyses of curve FG nanobeam with porosity phases.

압전단결정을 이용한 소형 free-flooded ring 트랜스듀서의 성능 특성 예측 및 검증 (Analysis and verification of the characteristic of a compact free-flooded ring transducer made of single crystals)

  • 임종범;윤홍우;권병진;김경섭;이정민
    • 한국음향학회지
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    • 제41권3호
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    • pp.278-286
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    • 2022
  • 본 연구에서는 압전세라믹 기반의 상용 Free-Flooded Ring(FFR) 트랜스듀서 대비 소형이면서 저주파 고감도 특성을 확보하기 위해, 높은 압전상수와 전기-기계 결합계수를 가지는 압전단결정 PIN-PMN-PT를 적용한 33-모드 FFR 트랜스듀서를 설계하였다. FFR 트랜스듀서의 광대역 특성을 확보하기 위해 비능동소자를 삽입한 링 구조를 적용하였으며, 3종의 비능동소자 소재 별 특성 해석 결과를 비교하여 최적의 소재를 선정하였다. 링 트랜스듀서의 특성 변화를 최소화하기 위해 오일 충진형 FFR 트랜스듀서로 제작하였으며, 음향시험을 통해 송신감도, 수중 임피던스 및 수평/수직 빔패턴이 해석결과와 잘 일치하는지 확인하였다. 해석 및 시험 결과를 비교한 결과, 송신감도는 공동공진 주파수에서 약 1.3 dB, 구조공진 주파수에서는 약 0.3 dB 차이를 보였다. 또한 상용 트랜스듀서 대비 높은 송신감도를 보유하면서도 직경을 약 17 % 축소하여 제작할 수 있었다. 이를 통해 소형이면서 고출력 특성을 가지는 압전단결정적용 FFR 트랜스듀서의 구현 가능성과 해석을 통한 특성 예측 방법의 유효성을 확인하였다.