• 한국전기전자재료학회논문지
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• 제15권12호
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• pp.1039-1044
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• 2002

Film Bulk Acoustic Resonator (FBAR) using thin piezoelectric films can be made as monolithic integrated devices with compatibility to semiconductor process, leading to small size, low cost and high Q RF circuit elements with wide applications in communications area. This paper presents an MMIC compatible suspended FBAR using SOI micromachining. It is possible to make a single crystal silicon membrane using a SOI wafer In fabricating active devices, SOI wafer offers advantage which removes the substrate loss. FBAR was made on the 12㎛ silicon membrane. Electrode and Piezoelectric materials were deposited by RF magnetron sputter. The maximum resonance frequency of FBAR was shown at 2.5GHz range. The reflection loss, K$^2$$\_$eff/, Q$\_$serise/ and Q$\_$parallel/ in that frequency were 1.5dB, 2.29%, 220 and 160, respectively.

• E2M - 전기 전자와 첨단 소재
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• 제10권1호
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• pp.1-7
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• 1997

SAW filter has been used in mobile communication device, bandpass filter and resonator for merits )f miniaturization and high reliability. Materials for substrate mainly used single crystal such as LiNbO$_{3}$, LiTaO$_{3}$, ZnO. In this study, it was attempted that LiNbO$_{3}$ was substituted for piezoelectric ceramics(PZT4, PZT5A and PZT8) which had simple fabrication process because fabrication of crystal is difficult and it's cost is high. SAW filters were fabricated by the photolithography on piezoelectric ceramics substrates in order to compare their characteristics with LiNbO$_{3}$'s. The experimental value of center frequency was compared with theoretical one. The average difference of center frequency was 3.7%. PZT8 showed the best bandwidth properties among them. It is considered that PZT8 has higher mechanical quality factor and propagation velocity than others.

• Smart Structures and Systems
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• 제23권3호
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• pp.215-225
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• 2019

In the present paper, the nonlocal strain gradient refined model is used to study the thermal stability of sandwich nanoplates integrated with piezoelectric layers for the first time. The influence of Kerr elastic foundation is also studied. The present model incorporates two small-scale coefficients to examine the size-dependent thermal stability response. Elastic properties of nanoplate made of functionally graded materials (FGMs) are supposed to vary through the thickness direction and are estimated employing a modified power-law rule in which the porosity with even type of distribution is approximated. The governing differential equations of embedded sandwich piezoelectric porous nanoplates under hygrothermal loading are derived through Hamilton's principle where the Galerkin method is applied to solve the stability problem of the nanoplates with simply-supported edges. It is indicated that the thermal stability characteristics of the porous nanoplates are obviously influenced by the porosity volume fraction and material variation, nonlocal parameter, strain gradient parameter, geometry of the nanoplate, external voltage, temperature and humidity variations, and elastic foundation parameters.

• 한국분말재료학회지
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• 제28권2호
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• pp.127-133
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• 2021

One-dimensional (1D) piezoelectric nanostructures are attractive candidates for energy generation because of their excellent piezoelectric properties attributed to their high aspect ratios and large surface areas. Vertically grown BaTiO₃ nanotube (NT) arrays on conducting substrates are intensively studied because they can be easily synthesized with excellent uniformity and anisotropic orientation. In this study, we demonstrate the synthesis of 1D BaTiO₃ NT arrays on a conductive Ti substrate by electrochemical anodization and sequential hydrothermal reactions. Subsequently, we explore the effect of hydrothermal reaction conditions on the piezoelectric energy conversion efficiency of the BaTiO₃ NT arrays. Vertically aligned TiO₂ NT arrays, which act as the initial template, are converted into BaTiO₃ NT arrays using hydrothermal reaction with various concentrations of the Ba source and reaction times. To validate the electrical output performance of the BaTiO₃ NT arrays, we measure the electricity generated from each NT array packaged with a conductive metal foil and epoxy under mechanical pushings. The generated output voltage signals from the BaTiO₃ NT arrays increase with increasing concentration of the Ba source and reaction time. These results provide a new strategy for fabricating advanced 1D piezoelectric nanostructures by demonstrating the correlation between hydrothermal reaction conditions and piezoelectric output performance.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2002년도 추계학술발표강연 및 논문개요집
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• pp.106-106
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• 2002

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.177-180
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• 2002

Thickness dependence of crystallographic orientation of diol based sol-gel derived PZT(52/48) films on dielectric and piezoelectric properties was investigated The thickness of each layer by one time spinning was about 0.2 $\mu\textrm{m}$, and crack-free films was successfully deposited on 4 inches Pt/Ti/SiO$_2$/Si substrates by 0.5 mol solutions in the range from 0.2 $\mu\textrm{m}$ to 3.8 $\mu\textrm{m}$. Excellent P-E hysteresis curves were achieved without pores or any defects between interlayers. As the thickness increased , the (111) preferred orientation disappeared from 1$\mu\textrm{m}$ to 3 $\mu\textrm{m}$ region, and the orientation of films became random above 3 $\mu\textrm{m}$. Dielectric constants and longitudinal piezoelectric coefficient d$\_$33/, measured by pneumatic method were saturated around the value of about 1400 and 300 pC/N respectively above the thickness of 0.8 7m. A micromachined piezoelectric cantilever have been fabricated using 0.8 $\mu\textrm{m}$ thickness PZT (52/48) films. PZT films were prepared on Si/SiN$\_$x/SiO$_2$/Ta/Pt substrate and fabricated unimorph cantilever consist of a 0.8 fm thick PZT layer on a SiNx elastic supporting layer, which becomes vibration when ac voltage is applied to the piezoelectric layer. The dielectric constant (at 100 kHz) and remanent polarization of PZT films were 1050 and 25 ${\mu}$C/$\textrm{cm}^2$, respectively. Electromechanical characteristics of the micromachined PZT cantilever in air with 200-600 $\mu\textrm{m}$ lengths are discussed in this presentation.

• Advances in nano research
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• 제9권1호
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• pp.47-58
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• 2020

The present paper deals with analyzing nonlinear forced vibrational behaviors of nonlocal multi-phase piezo-magnetic beam rested on elastic substrate and subjected to an excitation of elliptic type. The applied elliptic force may be presented as a Fourier series expansion of Jacobi elliptic functions. The considered multi-phase smart material is based on a composition of piezoelectric and magnetic constituents with desirable percentages. Additionally, the equilibrium equations of nanobeam with piezo-magnetic properties are derived utilizing Hamilton's principle and von-Kármán geometric nonlinearity. Then, an exact solution based on Jacobi elliptic functions has been provided to obtain nonlinear vibrational frequencies. It is found that nonlinear vibrational behaviors of the nanobeam are dependent on the magnitudes of induced electrical voltages, magnetic field intensity, elliptic modulus, force magnitude and elastic substrate parameters.

• 한국세라믹학회지
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• 제23권6호
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• pp.33-36
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• 1986

The $PbTiO_3$is well known materials having remarkable ferroelectric piezoelectric and pyro-electric properties. Thin films of the lead titanite has been successfully fabricated by Chemical Vapor Deposition on the borosilicate glass and titanium substrate. The $PbTiO_3$ thin film deposited on the borosilicate glass using the $PbCl_2$, $TiCl_4$ dry oxygen and wet oxygen at different temperatures (50$0^{\circ}C$-$700^{\circ}C$) grows along the (001) preferred orientation. On the other hand the $PbTiO_3$ thin film deposited on the titanium substrate using the PbO grows along the (101) preferred orientation. Growth orientation of deposited $PbTiO_3$ depends on the reaction species irrespective of substrate materials. Maximum dielectic constant and loss tangent of the $PbTiO_3$ thin film deposited on the titanium substrate are about 90 and 0.02 respectively, . Deposition rates of $PbTiO_3$ deposited on the borosilicate glass and titanium substrate are 10-15 ${\mu}{\textrm}{m}$/hr. Titanium dioxide interlayer formed be-tween $PbTiO_3$ film and titanium substrate material, It improved the adhesion of the film.

• 한국콘텐츠학회:학술대회논문집
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• 한국콘텐츠학회 2007년도 추계 종합학술대회 논문집
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• pp.804-806
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• 2007

ZnO박막을 c-축 방향으로 실리콘(Si 100)기판 위에 rf 마그네트론 스퍼터링 법으로 증착 하였고, 증착변수가 박막의 결정학적, 전기적 특성에 미치는 영향을 연구하였다. 기판온도 $200^{\circ}C$, rf전력이 150W, 산소:아르곤 가스의 비율이 50%:50%, 그리고 증착압력이 10mTorr의 조건에서 증착된 박막이 강한 c-축 성장과 우수한 결정성을 나타내었다. 증착변수의 변화에 의한 ZnO 박막의 전기비저항은 크게 영향을 받고 있었는데, 산소비율이 증가할수록, 기판온도가 감소할수록, 비저항이 증가하였다.

• 한국콘텐츠학회:학술대회논문집
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• 한국콘텐츠학회 2008년도 춘계 종합학술대회 논문집
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• pp.595-597
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• 2008

RF 마그네트론 스퍼터링 법으로 ZnO박막을 실리콘기판 위에 증착 하였고, 인가전력에 따른 박막의 결정학적, 전기적 특성을 연구하였다. 기판온도 $200^{\circ}C$, 산소:아르곤 가스의 비율이 50%:50%, 증착압력이 10mTorr의 조건에서 RF 전압에 따라 증착된 박막은 강한 c-축 성장과 우수한 결정성을 나타내었다.