Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.11a
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- Pages.106-106
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- 2002
The structural and piezoelectric properties of epitaxial $Pb(Zr_{0.52}Ti_{0.48})O_3$ thin film on Si substrate by PLD method
PLD 법으로 Si 기판위에 epi성장시킨 $Pb(Zr_{0.52}Ti_{0.48})O_3$ 박막의 구조 및 압전특성
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