• Journal of Mechanical Science and Technology
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• v.20 no.1
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• pp.76-84
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• 2006

Arrayed ultrasonic sensors based on the piezoelectric thin film (lead-zirconate-titanate: Pb($Zr_{0.52}Ti_{0.48})O_{3}$) having composite membrane structure are fabricated. Different thermal and elastic characteristics of each layer generate the residual stress during the high temperature deposition processes, accomplished diaphragm is consequently bowing. We present the membrane deflection effects originated from the residual stress on the resonant frequencies of the sensor chips. The resonant frequencies ($f_r$) measured of each sensor structures are located in the range of $87.6{\sim}111\;kHz$, these are larger $30{\sim}40\;kHz$ than the resultant frequencies of FEM. The primary factors of $f_r$ deviations from the ideal FEM results are the membrane deflections, and the influence of stiffness variations are not so large on that. Membrane deflections have the effect of total thickness increase which sensitively change the $f_r$ to the positive direction. Stress generations of the membrane are also numerically predicted for considering the effect of stiffness variations on the $f_r$.

• Smart Structures and Systems
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• v.8 no.4
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• pp.385-398
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• 2011

This paper discusses the applicability of Acoustic Emission (AE) to assess the damage in reinforced concrete (RC) structures subjected to complex dynamic loadings such as those induced by earthquakes. The AE signals recorded during this type of event can be complicated due to the arbitrary and random nature of seismicity and the fact that the signals are highly contaminated by many spurious sources of noise. This paper demonstrates that by properly filtering the AE signals, a very good correlation can be found between AE and damage on the RC structure. The basic experimental data used for this research are the results of fourteen seismic simulations conducted with a shake table on an RC slab supported on four steel columns. The AE signals were recorded by several low-frequency piezoelectric sensors located on the bottom surface of the slab. The evolution of damage under increasing values of peak acceleration applied to the shake table was monitored in terms of AE and dissipated plastic strain energy. A strong correlation was found between the energy dissipated by the concrete through plastic deformations and the AE energy calculated after properly filtering the signals. For this reason, a procedure is proposed to analyze the AE measured in a RC structure during a seismic event so that it can be used for damage assessment.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.38C no.12
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• pp.1150-1158
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• 2013

Artificial cochlear implant system is known as the most efficient and widespread device to patients who have cochlear disorder. However, current commercialized artificial cochleas have inconveniences because of large volume size and high power consumption, requiring further research on improvements in terms of the size, power, and performance. In this paper, we will introduce our fully implantable artificial cochlear implant system, where small-size sensors and actuators are wirelessly connected, focusing on communication system design and its performance simulation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.130-130
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• 2009

This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The 1.2 ${\mu}m$ and 0.4 ${\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 ${\mu}m$ long cantilever resonators were -9.79, -7.72 and -8.0 $ppm/^{\circ}C$. On the other hand, TCF of 60, 80 and 100 ${\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 $ppm/^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

• Advances in nano research
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• v.9 no.3
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• pp.133-145
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• 2020

In this study, nonlinear vibrations and dynamic instabilities of a smart embedded micro shell conveying varied fluid flow and subjected to the combined electro-thermo-mechanical loadings are investigated. With the aim of designing new hydraulic sensors and actuators, the piezoelectric materials are employed for the body and the effects of applying electric field on the stability of the system as well as the induced voltage due to the dynamic behavior of the system are studied. The nonlocal piezoelasticity theory and the nonlinear cylindrical shell model in conjunction with the energy approach are utilized to mathematically modeling of the structure. The fluid flow is assumed to be isentropic, incompressible and fully develop, and for more generality of the problem both steady and time dependent flow regimes are considered. The mathematical modeling of fluid flow is also carried out based on a scalar potential function, time mean Navier-Stokes equations and the theory of slip boundary condition. Employing the modified Lagrange equations for open systems, the nonlinear coupled governing equations of motion are achieved and solved via the state space problem; forth order numerical integration and Bolotin's method. In the numerical results, a comprehensive discussion is made on the dynamical instabilities of the system (such as divergence, flutter and parametric resonance). We found that applying positive electric potential field will improve the stability of the system as an actuator or vibration amplitude controller in the micro electro mechanical systems.

• The Journal of the Acoustical Society of Korea
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• v.23 no.1
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• pp.1-7
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• 2004

We developed SH-SAW sensors to detect protein molecules in liquid solutions applying a particular antibody thin film on the delay line of transverse SAW devices. The antibody investigated was human-immune-globulin G (HigG) to hold the antigens (anti-HigG) in the protein solution. We fabricated the sensor generating 100 MHz with the piezoelectric single crystal LiTaO₃. We measured the frequency change of the sensor by adding the anti-body concentration on SAM (self assembled monolayer) deposited on the Au layer. The sensor showed stable response to the mass loading effects of the anti-HigG molecules with the sensitivity up to 10.8 ng/ml/Hz at noise level 400 Hz below.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.146-146
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• 2016

Zinc Oxide (ZnO) was known as a promising material for surface acoustic wave devices, gas sensors, optical devices and solar cells due to piezoelectric material, large band gap of 3.37 eV and large exciton binding energy of 60 meV at room temperature. In particular, the alignment of ZnO nanostructures into ordered nanoarrays can bring about improved sensitivity of devices due to widen the surface area to catch a lot of gas particle. Oxygen plasma treatment is used to specify the nucleation site of round patterned ZnO nanorods growth. Therefore ZnO nanorods were grown on a quartz substrate with patterned polystyrene monolayer by hydrothermal method after oxygen plasma treatment. And then, we carried out nanostructures by adjusting the diameter of the arranged ZnO nanorods according to polystyrene spheres of various sizes. The obtained ZnO nanostructures was characterized by X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM).

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.423.1-423.1
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• 2016

Polyvinylidene fluoride (PVDF) has drawn much attention due to its many advantages. PVDF shows high mechanical strength and flexibility, thermal stability, and good piezoelectricity enabling its application to various fields such as sensors, actuators, and energy transducers. Further studies have been conducted on PVDF in the form of thin films. The thin films exhibit different ionic conductivity according to the number of pores within the film, letting these films to be applied as electrolytes or separators of batteries. Porous PVDF membranes are also easily processed, usually made by using electrospinning. However, a large portion of researches were conducted using PVDF membranes produced by far field electrospinning, which is not a well-controlled experimental method. In this paper, we use near field electrospinning (NFES) process for more controlled, small-scaled, mesh type PVDF structures of nano to micro fibers fabricated by controlling process parameters and investigate the properties of such membranous structures. These membranes vary according to geometrical shape, pore density, and fiber thickness. We then measured the mechanical strength and piezoelectric characteristic of the structures. With various geometries in the fiber structures and various scales in the fibers, these types of structures can potentially lead to broader applications for stretchable electronics and dielectric electro active polymers.

• Smart Structures and Systems
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• v.15 no.2
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• pp.283-297
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• 2015

Jacket-type offshore structures are always exposed to severe environmental conditions such as salt, high speed of current, wave, and wind compared with other onshore structures. In spite of the importance of maintaining the structural integrity for an offshore structure, there are few cases to apply a structural health monitoring (SHM) system in practice. The impedance-based SHM is a kind of local SHM techniques and to date, numerous techniques and algorithms have been proposed for local SHM of real-scale structures. However, it still requires a significant challenge for practical applications to compensate unknown environmental effects and to extract only damage features from impedance signals. In this study, the impedance-based SHM was carried out on a 1/20-scaled model of an Uldolmok current power plant structure in Korea under changes in temperature and transverse loadings. Principal component analysis (PCA)-based approach was applied with a conventional damage index to eliminate environmental changes by removing principal components sensitive to them. Experimental results showed that the proposed approach is an effective tool for long-term SHM under significant environmental changes.

• Journal of Advanced Marine Engineering and Technology
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• v.35 no.3
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• pp.309-316
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• 2011

This paper deals with the experimental study of the vibration suppression of the smart structures. First, a new high-speed active control system is presented using the DSP320C6713 microprocessor. A peripheral system developed is composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA 95 for fast data processing. Next, the processing time of the peripheral device is tested and the corresponding test results are provided. Since fast data processing is very important in the active vibration control of the structures, achieving the fast loop times of the control system is focused. The control algorithm using PPF in addition to FIR filter is implemented. Finally, numerous experiments were carried out on the aluminum plate to validate the superior performance of the vibration control system at different control loop times.