• Journal of Sensor Science and Technology
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• v.23 no.2
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• pp.94-98
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• 2014

Aluminum nitride (AlN) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 25~75% $N_2$ /Ar. The characterization of film properties were performed using surface profiler, X-ray diffraction, X-ray photoelectron spectroscopy(XPS), and pressure-voltage measurement system. The deposition rates of AlN films were decreased with increasing the $N_2$ concentration owing to lower mass of nitrogen ions than Ar. The as-deposited AlN films showed crystalline phase, and with increasing the $N_2$ concentration, the peak of AlN(100) plane and the crystallinity became weak. Any change in the preferential orientation of the as-deposited AlN films was not observed within our $N_2$ concentration range. But in the case of 50% $N_2$ /Ar condition, the peak of (002) plane, which is determinant in pressure sensing properties, appeared. XPS depth profiling of AlN/TiN/SUS430 revealed Al/N ratio was close to stoichiometric value (45:47) when deposited under 50% $N_2/Ar$ atmosphere at room temperature. The output signal voltage of AlN sensor showed a linear behavior between 26~85 mV, and the pressure-sensing sensitivity was calculated as 7 mV/MPa.

• The Journal of the Acoustical Society of Korea
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• v.24 no.3
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• pp.160-165
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• 2005

We have developed SH (shear horizontal) surface acoustic wave (SAW) sensors for detection of the immobilization and hybridization of DNA (deoxyribonucleic acid) on the gold coated delay line of transverse SAW devices. The experiments of DNA immobilization and hybridization were performed with 15-mer oligonucleotides (probe and complementary target DNA). The sensor consists of twin SAW delay line oscillators operating at 100 MHz fabricated on $36^{\circ}$ rotated Y-cut $LiTaO_3$ piezoelectric single crystals. The relative change in the frequency of the two oscillators was monitored to detect the hybridization between target DNA and immobilized probe DNA in pH 7.4 PBS (phosphate buffered saline) solution. The measurement results showed a good response of the sensor to the mass loading effects of the DNA immobilization and hybridization with the sensitivity up to $1.55{\cal}ng/{\cal}ml/Hz$.

• Smart Structures and Systems
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• v.6 no.7
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• pp.835-849
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• 2010

This study investigated propagation characteristics of piezo-activated guided waves in an aluminium rectangular-section tube for the purpose of damage identification. Changes in propagating velocity and amplitude of the first wave packet in acquired signals were observed in the frequency range from 50 to 250 kHz. The difference in guided wave propagation between rectangular- and circular-section tubes was examined using finite element simulation, demonstrating a great challenge in interpretation of guided wave signals in rectangular-section tubes. An active sensor network, consisting of nine PZT elements bonded on different surfaces of the tube, was configured to collect the wave signals scattered from through-thickness holes of different diameters. It was found that guided waves were capable of propagating across the sharp tube curvatures while retaining sensitivity to damage, even that not located on the surfaces where actuators/sensors were attached. Signal correlation between the intact and damaged structures was evaluated with the assistance of a concept of digital damage fingerprints (DDFs). The probability of the presence of damage on the unfolded tube surface was thus obtained, by which means the position of damage was identified with good accuracy.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.35 no.3
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• pp.303-307
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• 2022

Magnetoelectric (ME) properties of 3-0 type particulate composites have been investigated with respect to application features for reliable magnetic sensitivity and magnetically-induced output voltage. In order to figure out the magnetoelectric characteristics in the ME composites, frequency dependent ME responses were studied from [0.948 Na_0.5K_0.5NbO₃-0.052 LiSbO₃]-[Co_1-xZn_xFe₂O₄] (NKNLS)/Co_1-xZn_xFe₂O₄ (CZFO, x=0, 0.1, and 0.2). As a result, the maximal α_ME of 23.15 mV/cm·Oe was achieved from the NKNLS-CZFO (x_Zn = 0.1) composites at resonance frequency of 315 kHz and H_dc = 0 Oe. From the frequency dependent ME responses, it is clearly described that the self-biased ME composites can be used for applications as both magnetic sensors and energy harvesters, respectively.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.7 no.3
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• pp.366-376
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• 1997

$CdGa_2Se_4$, epilayer of tetragonal type are grown on Si(100) substrate by hot wall epitaxy method. The source and substrate temperature is $580^{\circ}C$ and $420^{\circ}C$ respectively, and the thickness of the film is 3 $\mu \textrm{m}$. The crystallihe structure of epilayers were investigated by double crystal X-ray diffraction(DCXD). Hall effect on this sample was measured by the method of van der Pauw and studied on carrier density and mobility depending on temperature. From Hall data, the mobility was likely to be decreased by pizoelectric scattering in the temperature range 30 K to 200 K and by polar optical scattering in the temperature range 200 K to 293 K. In order to explore of photocurrent to darkcurrent (pc/dc), maximum allowable power dissipation (MAPD), spectral response and response time. The results indicated that for the samples annealed in Se vapor the photoconductive characteristics are best. Then we obtained the sensitivity of 0.98, the value of pc/dc of $9.62{\times}10^6$, the MAPD of 321 ㎽ and the rise and decay time of 9 ㎳ and 9.5 ㎳, respectively.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.37 no.3
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• pp.196-213
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• 2001

A split beam ultrasonic transducer operating at a frequency of 70 kHz to use in the fish sizing echo sounder was developed and the acoustic radiation characteristics were experimentally analyzed. The amplitude shading method utilizing the properties of the Chebyshev polynomials was used to obtain side lobe levels below -20 dB and to optimize the relationship between main beam width and side lobe level of the transducer, and the amplitude shading coefficient to each of the elements was achieved by changing the amplitude contribution of elements with 4 weighting transformers embodied in the planar array transducer assembly. The planar array split beam transducer assembly was composed of 36 piezoelectric ceramics (NEPEC N-21, Tokin) of rod type of 10 mm in diameter and 18.7 mm in length of 70 kHz arranged in the rectangular configuration, and the 4 electrical inputs were supplied to the beamformer. A series of impedance measurements were conducted to check the uniformity of the individual quadrants, and also in the configurations of reception and transmission, resonant frequency, and the transmitting and receiving characteristics were measured in the water tank and analyzed, respectively. The results obtained are summarized as follows : 1. Average resonant and antiresonant frequencies of electrical impedance for four quadrants of the split beam transducer in water were 69.8 kHz and 83.0 kHz, respectively. Average electrical impedance for each individual transducer quadrant was 49.2$\Omega$ at resonant frequency and 704.7$\Omega$ at antiresonant frequency. 2. The resonance peak in the transmitting voltage response (TVR) for four quadrants of the split beam transducer was observed all at 70.0 kHz and the value of TVR was all about 165.5 dB re 1 $\mu$Pa/V at 1 m at 70.0 kHz with bandwidth of 10.0 kHz between -3 dB down points. The resonance peak in the receiving sensitivity (SRT) for four combined quadrants (quad LU+LL, quad RU+RL, quad LU+RU, quad LL+RL) of the split beam transducer was observed all at 75.0 kHz and the value of SRT was all about -177.7 dB re 1 V/$\mu$Pa at 75.0 kHz with bandwidth of 10.0 kHz between -3 dB down points. The sum beam transmitting voltage response and receiving senstivity was 175.0 dB re 1$\mu$Pa/V at 1 m at 75.0 kHz with bandwidth of 10.0 kHz, respectively. 3. The sum beam of split beam transducer was approximately circular with a half beam angle of $9.0^\circ$ at -3 dB points all in both axis of the horizontal plane and the vertical plane. The first measured side lobe levels for the sum beam of split beam transducer were -19.7 dB at $22^\circ$ and -19.4 dB at $-26^\circ$ in the horizontal plane, respectively and -20.1 dB at $22^\circ$ and -22.0 dB at $-26^\circ$ in the vertical plane, respectively. 4. The developed split beam transducer was tested to estimate the angular position of the target in the beam through split beam phase measurements, and the beam pattern loss for target strength corrections was measured and analyzed.