• 한국전기전자재료학회논문지
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• 제17권10호
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• pp.1041-1048
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• 2004

Chemical mechanical polishing (CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various friction signals were attained and analyzed with the kind of pad, abrasive and abrasive concentration. As a result of experiment, the lubrication regime is classified with ηv/p(η, v and p; the viscosity, relative velocity and pressure). The characteristics of friction and material removal mechanism is also different as a function of the kind of abrasive and the abrasive concentration in slurry. Especially, the material removal per unit distance is directly proportional to the friction force and the non~uniformity has relation to the coefficient of friction.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.231-234
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• 2004

Chemical mechanical polishing(CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with the slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various coefficient of friction was attained and analyzed with the kind of pad, abrasive and the abrasive concentration. The lubrication regime is also classified with ${\eta}v/p(\eta,\;v\;and\;p;$ the viscosity, relative velocity and pressure). Especially, the co-relation not only between the friction force and the removal per unit distance but also between the coefficient of friction and within-wafer-nonuniformity was estimated.

• 한국음향학회지
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• 제16권6호
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• pp.61-67
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• 1997

압전 회전센서(Piezoelectric Gyroscope)는 물체의 회전속도를 감지하기 위한 센서로서 압전효과를 이용해 코리올리스힘(Coriolis Force)을 측정하는 센서이다. 기존에 사용되고 있는 압전 회전센서는 1축형이 주종을 이루고 있는데 비하여 본 연구에서는 한 차원 발전된 2축형의 회전센서를 고안, 제작하였다. 이러한 새로운 구조에 대한 검토 및 고찰을 위해 유한요소법 (Finite Element Method) 을 통한 동적 해석을 실시하여 구조의 타당성을 검증하고 각 설계인자 변화에 따른 센서의 특성변화를 조사하였다. 또한 그 결과를 토대로 직접 회전센서를 제작하여 그 성능을 평가, 비교하였다. 나아가 센서의 특성평가를 위한 회전 시뮬레이터를 구성한 후 정량적인 실험을 통해 제작된 센서의 반응을 조사하였으며, 그 결과 본 논문에서 개발된 2축형 센서는 두 방향의 회전력에 대한 우수한변별도 및 감도를 나타내어 새로운 형태의 회전 센서로서의 사용가능성을 확인할 수 있었다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2007년도 제28회 춘계학술대회논문집
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• pp.45-48
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• 2007

기존에 사용되는 피에조 타입의 센서는 추력의 측정 범위가 제한되어 있으므로 이를 개선하고자 레이져 변위측정기와 cantilever를 이용하여 변위 측정 장치를 개선하였고, 스테인레스 캐필러리를 이용하여 추력 모델을 만든 후 추력을 측정하였다. 이와 더불어 extrude shape의 노즐을 갖는 마이크로 추력 장치를 PMMA(Polymethyl methacrylate)를 이용하여 공정하였으며, 매니스커스의 형상 변화를 관찰하였다.

• Design & Manufacturing
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• 제16권4호
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• pp.46-51
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• 2022

The piercing process of creating holes in sheet metals for mechanical fastening generates high shear force. Real-time monitoring technology could predict tool damage and product defects due to this severe condition, but there are few applications for piercing high-strength aluminum. In this study, we analyzed the load signal to predict the punch's wear level during the process with a piezoelectric sensor installed piercing tool. Experiments were conducted on Al6061 T6 with a thickness of 3.0 mm using piercing punches whose edge angle was controlled by reflecting the wear level. The piercing load increases proportionally with the level of tool wear. For example, the maximum piercing load of the wear-shaped punch with the tip angle controlled at 6 degrees increased by 14% compared to the normal-shaped punch under the typical clearance of 6.7% of the aluminum piercing tool. In addition, the tool wear level increased compression during the down-stroke, which is caused by lateral force due to the decrease in the diameter of pierced holes. Our study showed the predictability of the wear level of punches through the recognition of changes in characteristic elements of the load signal during the piercing process.

• 한국정밀공학회지
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• 제14권3호
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• pp.107-113
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• 1997

This paper presents the active control of a flexible cantilever beam vibration. The cantilever beam was excitied by a steady-state harmonic and white noise point force and the control was performed by one piezo ceramic actuator bonded to the surface of the beam. An adaptive controller based on filtered-x LMS algorithm was used and the controller was defined by minimizing the square of the response of error sensor. In the experiment, gap sensor was used as an error sensor while the sinusoidal or white noise was applied as a disturbance. In the case of sinusoidal input, more than 20 dB of vibration reduction was achieved over all range of the natural frequencies and it takes 5 seconds to control the vibration at first natural frequency and 1 second at other natural frequencies. In the case of white noise input, 7 dB of vibration reduction was achieved at the first natural frequency and good control performance was achieved in the considered whole frequency range. Results indicate that the vibration of a flexible cantilever beam could be controlled effectively when the piezo ceramic actuator was used with filtered-x LMS algorithm.

• Smart Structures and Systems
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• 제18권1호
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• pp.31-52
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• 2016

The paper first reviews the theory of active tendon control with decentralized Integral Force Feedback (IFF) and collocated displacement actuator and force sensor; a formal proof of the formula giving the maximum achievable damping is provided for the first time. Next, the potential of the control strategy for the control of suspension bridges with active stay cables is evaluated on a numerical model of an existing footbridge; several configurations are investigated where the active cables connect the pylon to the deck or the deck to the catenary. The analysis confirms that it is possible to provide a set of targeted modes with a considerable amount of damping, reaching ${\xi}=15%$. Finally, the control strategy is demonstrated experimentally on a laboratory mock-up equipped with four control stay cables equipped with piezoelectric actuators. The experimental results confirm the excellent performance and robustness of the control system and the very good agreement with the predictions.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2001년도 춘계학술발표대회 논문집
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• pp.126-129
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• 2001

LIPCA (LIghtweight Piezo-composite Curved Actuator) is an actuator device which is lighter than other conventional piezoelectric ceramic type actuator. LIPCA is composed of a piezoelectric ceramic layer and fiber reinforced light composite layers, typically a PZT ceramic layer is sandwiched by a top fiber layer with low CTE (coefficient of thermal expansion) and base layers with high CTE. LIPCA has curved shape like a typical THUNDER (thin-layer composite unimorph feroelectric driver and sensor), but it is lighter an than THUNDER. Since the curved shape of LIPCA is from the thermal deformation during the manufacturing process of unsymmetrically laminated lay-up structure, an analysis for the thermal deformation and residual stresses induced during the manufacturing process is very important for an optimal design to increase the performance of LIPCA. To investigate the thermal deformation behavior and the induced residual stresses of LIPCA at room temperature, the curvatures of LIPCA were measured and compared with those predicted from the analysis using the classical lamination theory. A methodology is being studied to find an optimal stacking sequence and geometry of LIPCA to have larger specific actuating displacement and higher force. The residual stresses induced during the cooling process of the piezo-composite actuators have been calculated. A lay-up geometry for the PZT ceramic layer to have compression stress in the geometrical principal direction has been designed.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 추계학술대회논문집
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• pp.743-748
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• 2008

This paper presents an inertia type of piezostack based active mount for unmanned aero vehicle (UAV) camera system. After identifying the stiffness and damping properties of the rubber element and piezostack a mechanical model of the active mount system is established. The governing equation of mount is them derived and expressed in a state space farm. Subsequently, a sliding mode controller which is robust to uncertain parameters is designed in order to reduce the vibration imposed according to the military specification associated with UAV camera mount system operation. Control performances such as acceleration and transmitted force are evaluated through both computer simulation and experimental implementation.

• Structural Engineering and Mechanics
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• 제17권3_4호
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• pp.303-329
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• 2004

Magnetostrictive materials are routinely employed as actuator and sensor elements in a wide variety of noise and vibration control problems. In infrastructural applications, other technologies such as hydraulic actuation, piezoelectric materials and more recently, magnetorheological fluids, are being favored for actuation and sensing purposes. These technologies have reached a degree of technical maturity and in some cases, cost effectiveness, which justify their broad use in infrastructural applications. Advanced civil structures present new challenges in the areas of condition monitoring and repair, reliability, and high-authority actuation which motivate the need to explore new methods and materials recently developed in the areas of materials science and transducer design. This paper provides an overview of a class of materials that because of the large force, displacement, and energy conversion effciency that it can provide is being considered in a growing number of quasistatic and dynamic applications. Since magnetostriction involves a bidirectional energy exchange between magnetic and elastic states, magnetostrictive materials provide mechanisms both for actuation and sensing. This paper provides an overview of materials, methods and applications with the goal to inspire novel solutions based on magnetostrictive materials for the design and control of advanced infrastructural systems.