• 한국전기전자재료학회논문지
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• 제32권2호
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• pp.157-160
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• 2019

P(VDF-TrFE-CFE) (Poly (vinylidene fluoride-trifluoroethylene-chlorofluoroethylene)), which exhibits a high electrostriction of about 7%, can transmit tactile output as vibration or displacement. In this study, we investigated the applicability of P(VDF-TrFE-CFE) to wearable piezoelectric actuators. The P(VDF-TrFE-CFE) layers were deposited through spin-coating, and interspaced with patterned Ag electrodes to fabricate a two-layer $3.5mm{\times}3.5mm$ device. This layered structure was designed and fabricated to increase the output and displacement of the actuator at low driving voltages. In addition, a laser vibrometer and piezoelectric force microscope were used to analyze the device's vibration characteristics over the range of ~200~4,200 Hz. The on-off characteristics were confirmed at a frequency of 40 Hz.

• 한국기계가공학회지
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• 제18권4호
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• pp.100-108
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• 2019

In this paper, a new stacked element pressure sensor has proposed for heartbeat and respiration measurement. This device can be directly attached to an individual's chest; heartbeat and respiration are detected by the pulsatile vibration and deformation of the chest. A key feature of the device is the simultaneous measurement of heart rate and respiration. The structure of the sensor consists of two stacked elements, in which one element includes one polyvinylidene fluoride (PVDF) thin film bonded on polydimethylsiloxane (PDMS) substrate. In addition, for the measurement and signal processing, the electric circuit and the filter are simply constructed with an OP-amp, resistance, and a capacitor. One element (element1, PDMS) maximizes the respiration signal; the other (element2, PVDF) is used to measure heartbeat. Element1 and element2 had sensitivity of 0.163V/N and 0.209V/N, respectively, and element2 showed improved characteristics compared with element1 in response to force. Thus, element1 and element2 were optimized for measuring respiration heart rate, respectively. Through mechanical and vivo human tests, this sensor shows the great potential to optimize the signals of heartbeat and respiration compared with commercial devices. Moreover, the proposed sensor is flexible, light weight, and low cost. All of these characteristics illustrate an effective piezoelectric pressure sensor for heartbeat and respiration measurements.

• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.51-55
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• 2021

With the recent development of various smartphone designs in the smartphone market, the use of curved cover glass has been required, and interest in curved glass production has increased. In this paper, we designed a pressurization system that simplified the size of the system using a wedge amplification mechanism for smartphone curved glass molding systems. The pressurization system consisted of a linear motor, a wedge, and a force sensor. The wedge was used to amplify the force, and the piezoelectric sensor was used to measure the force. In addition, the proposed amplification mechanism was confirmed to have an error of 1.27% through an experiment compared to the simulation, and the pressurization error of 0.76% for the pressurization profile 3,500N was verified through an experiment.

• 한국소음진동공학회논문집
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• 제14권10호
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• pp.1007-1014
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• 2004

This paper presents a study of low frequencies volume velocity vibration control of a smart panel in order to reduce sound transmission. A distributed piezoelectric quadratically shaped polyvinylidene fluoride (PVDF) polymer film is used as a uniform force actuator and an array of $4\;{\times}\;4$ accelerometer is used as a volume velocity sensor for the implementation of a single-input single-output control system. The theoretical and experimental study of sensor-.actuator frequency response function shows that this sensor-actuator arrangement provides a required strictly positive real frequency response function below about 900 Hz. Direct velocity feedback could therefore be implemented with a limited gain which gives reductions of about 15 dB in vibration level and about 8 dB in acoustic power level at the (1,1) mode of the smart panel. It has been also shown that the shaping error of PVDF actuator could limit the stability and performance of the control system.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.61.4-61
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• 2001

This research is the development of a distributed flexible tactile sensor for service robots using PVDF (polyvinylidene fluoride) film for the detection of the contact state in real time. The tactile sensor which has 8$\times$8 taxels is fabricated using PVDF film and flexible circuitry. The proposed fabrication method is simple and easy to make the sensor in the laboratory without using any special equipment. Experimental results on static and dynamic properties are obtained. In order to investigate the properties of the sensor, the sensor output to the arbitrary forces and frequencies are measured using the shaker with the force sensor.

• 전기학회논문지
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• 제60권3호
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• pp.594-599
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• 2011

A SAW strain sensor based on Shear Horizontal wave with an 92 MHz central frequency was developed. It consists of SAW sensor, PCB substrate and bonding material (Loctite 401). External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. The change in the velocity of the SAW result in a frequency shift of the sensor and by measuring a frequency shift, we can extract the strain induced by the external force. The $41^{\circ}$ YX $LiNbO_3$ was used because it has a Leaky shear horizontal(SH) wave propagation mode and a high electromechanical coupling coefficient ($K^2$=17.2%). And to compare with Rayleigh wave mode, $128^{\circ}$ YX $LiNbO_3$ was used. And to make a stable and low insert loss, Split IDT structure was used. The obtained sensitivity and linearity of the SAW strain sensor in the case of Split IDT were measured to be 17.2 kHz / % and 0.99, respectively.

• 센서학회지
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• 제18권6호
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• pp.461-466
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• 2009

This paper represents a piezoelectric ultrasonic linear actuator with flexural vibration mode. The actuator is composed of two piezo ceramics, the elastic body, and the connecting tip. It is driven by the frictional force between the connecting tip and the linear motion guide. Unimorph actuators have flexural vibration. Its middle point is fixed so that suitable to the flexural vibration of $3/2\lambda$. These vibrations contribute to elliptical motion by mixed mode between longitudinal and transverse mode. It was generated when the ultrasonic electrical signals with 90 degree phase difference are applied to two ceramics. A linear movement can be easily obtained using the elliptical motion. The ATILA, FEM simulator has been used to design actuator and verify the kinetic and dynamic analysis. We used the ceramics of $20\times10\times1$ mm size and confirmed the flexural vibration of the $3/2\lambda$ at the 79 kHz through the scanning of 3D-vibrometer. The maximum velocity of actuator was 221 mm/sec and the thrust force of actuator was 2.7 N in 200Vp-p of additional voltage.

• Journal of Biosystems Engineering
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• 제33권1호
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• pp.30-37
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• 2008

Dynamic excitation and response analysis is an acceptable method to determine some of physical properties of agricultural product for quality evaluation. There is a difference in the internal viscoelasticity between sound and defective fruits due to the difference of geometric structures, thereby showing different vibration characteristics. This study was carried out to develop a portable piezoelectric film-based glove sensor system that can separate internally damaged watermelons from sound ones using an acoustic impulse response technique. Two piezoelectric sensors based on polyvinylidene fluoride (PVDF) films to measure an impact force and vibration response were separately mounted on each glove. Various signal parameters including number of peaks, energy ratio, standard deviation of peak to peak distance, zero-crossing rate, and integral value of peaks were examined to develop a regression-estimated model. When using SMLR (Stepwise Multiple Linear Regression) analysis in SAS, three parameters, i.e., zeros value, number of peaks, and standard deviation of peaks were selected as usable factors with a coefficient of determination ($r^2$) of 0.92 and a standard error of calibration (SEC) of 0.15. In the validation tests using twenty watermelon samples (sound 9, defective 11), the developed model provided good capability showing a classification accuracy of 95%.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1109-1112
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• 2004

This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80$\mu$N to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by a X-Y scanning motion stage with 5 nm resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.

• 한국진공학회지
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• 제17권5호
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• pp.448-454
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• 2008

본 논문의 목적은 진공증착법을 이용한 $\beta$-PVDF($\beta$-Polyvinylidene fluoride) 유기 박막의 제조와 제조된 유기 박막의 압전 특성을 연구하는데 있다. 진공 증착은 증발원 온도 $270^{\circ}C$, 인가 전계 142.4kV/cm, 진공도 $2.0{\times}10^{-5}Torr$에서 실시하였다. 기판 온도의 증가에 따라서 $\beta$형태의 PVDF 함유량은 72%에서 95.5%로 증가함을 알 수 있었다. 힘 모우멘트를 $1.372{\times}10^{-5}N{\cdot}m$에서 $39.2{\times}10^{-5}N{\cdot}m$로 변화시킨 응답특성의 경우, 출력전압은 1.39V에서 7.04V로 증가하였다.