• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.156-159
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• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be fabricated as monolithic integrated devices with compatibility to semiconductor process, leading to small size, low cost and high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible Suspended FBAR using surface micromachining. It is possible to make Si$_3$N$_4$/SiO$_2$/Si$_3$N$_4$membrane by using surface micromachining and its good effect is to remove the substrate silicon loss. FBAR was made on 2$\mu\textrm{m}$ multi-layered membrane using CVD process. According to our result, Fabricated film bulk acoustic wave resonator has two adventages. First, in the respect of device Process, our Process of the resonator using surface micromachining is very simple better than that of resonator using bull micromachining. Second, because of using the multiple layer, thermal expansion coefficient is compensated, so, the stress of thin film is reduced.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1521-1523
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• 2001

In this paper, High quality factor and fine dielectric loss was resulted on specimen added 0.5wt% $MnO_2$ after compared and analyzed dielectric and piezoelectric properties following that added each 0 $\sim$ 0.9wt% of $Fe_2O_3$, $Nb_2O_5$, and $MnO_2$ on dopant at PSN-PT in two material disposition ceramics with research still is not completed to material investigation to increase high power piezoelectric actuator device efficiency. And, a measuring method and the experimental results of the temperature rise under the high vibrational velocity are also described.

• Speech Sciences
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• v.7 no.1
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• pp.39-52
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• 2000

The present study investigates the clinical applicability of a new device which objectively measures nasal resonating vibration via piezoelectric vibratory sensor from 10 normal volunteers, 10 patients with definite hypernasality and 10 nasal polyposis patients. For the assessment of the hypernasality, the ratio of 'ng' to 'a' as well as that of 'mama' to 'papa' passages were used. For the evaluation of hyponasality, the ratio of nasal vibration post- to pre-induced cul-de-sac resonation was calculated. In the control group, the ratio of ng/a and mama/papa passages was larger than 8, while in the hypernasality group, the ratio was markedly lower. The vibratory signals of 'a' and 'ng' increased markedly in the control group and the hypernasality group after inducing cul-de-sac resonation, while in the hyponasality group, the change was minimal.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.863-867
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• 2003

This paper aims at the development of shoes measuring the performance of walking or running, which is equipped with electronic devices. In the in-sole of the shoes, a piezoelectric sensor is inserted for measuring the number of steps and the speed of walking. The measured signals are processed by the one-chip microprocessor and related electronic devices. Using the data, the momentum and calories of walking and running are calculated, and the results are transmitted to the displaying system composed of LCD by the RF telecommunication system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1341-1347
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• 2013

Energy harvesting is a clean technology to obtain energy from the surrounding environment such as wind, sun, vibration and so on. In particular, the current TPMS (Tire Pressure Monitoring Device) is very small and attached to the outside of a vehicle and power supply of the TPMS is limited. Therefore, energy harvesting using vibration energy of piezoelectric materials is important to the TPMS. In this paper, we analyzed several models using ANSYS which is one of the FEA (Finite Element Analysis) package and compared corresponding strain frequency response functions of the TPMS. In addition, we confirmed that dynamic characteristics variations according to geometry changes have effects on the performance of the TPMS.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.283-286
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• 2002

This paper presents the straightness compensation system which is a device for improving the machining accuracy of ultra-precision machines by synchronizing the position of diamond tool tip with machine error motion. Sine it is actuated by piezoelectric actuator with highly nonlinear hysteresis characteristics, the feedback control schemes such as Proportional Integral(PI), are required and realized by measuring the displacements of diamond tool tip. for the better tracking performance, the controller was implemented using TMS320C32 32bit floating-point DSP which is fast so that the real-time control is possible. In addition, stand alone type DSP board was chosen fur the easy assembly into the ultra-precision machines. The experimental results show good command tracking performance and the motion error of the machine is satisfactorily compensated during the machining process.

• Electrical & Electronic Materials
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• v.9 no.9
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• pp.954-963
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• 1996

Particle displacement distributions of the fundamental thickness shear vibration mode and overtone modes in an energy-trapped single resonator and an energy-trapped double acoustically coupled filter were calculated. The effects of the width of a pair of partial eletrodes and the magnitude of the plate back of the resonator on the particle displacement distributions of its symmetric vibration mode and anti-symmetric vibration mode were investigated. And the effects of the width of a pair of partial eletrodes, the width of the gap between two pairs of partial electrodes and the magnitude of the plate back of the filter on the particle displacement distributions of its symmetric vibration mode and anti-symmetric vibration mode were investigated.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.3
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• pp.29-35
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• 2006

Various types of elliptical motions are generated by PZT mechanism which is composed of two parallel piezoelectric actuators. Elliptical vibration cutting(EVC) is obtained by attaching single crystal diamond cutting tool to the mechanism, and V-grooving for Brass and Aluminum is carried out by applying the EVC. It is experimentally observed that the cutting force in the process of the EVC reduces compared to the ordinary non-vibration cutting, which is due to the decrease of undeformed chip thickness and frictional force between the tool and chip. Ultrasonic elliptical vibration cutting(UEVC) suppresses burr formation and decreases cutting force still more, so UEVC makes it possible to enhance the shape accuracy of machined surface.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.828-833
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• 2004

The performance of a mixed $H_{\infty}/H_2$ design with pole placement constraints based on robust vibration control for a piezo/beam system is investigated. The governing equation of motion for the piezo/beam system is derived by Hamilton's principle. The assumed mode method is used to discretize the governing equation into a set of ordinary differential equation. A robust controller is designed by $H_{\infty}/H_2$ feedback control law that satisfies additional constraints on the closed-loop pole location in the face of model uncertainties, which are derived for a general class of convex regions of the complex plane. These constraints are expressed in terms of linear matrix inequalities (LMIs) approach for the multiobjective synthesis. The validity and applicability of this approach for vibration suppressions of SMART structural systems are discussed by damping out the multiple vibrational modes of the piezo/beam system.