• 제목/요약/키워드: piezoelectric constant

검색결과 477건 처리시간 0.027초

마이크로 압전 소자용 후막 PZT의 제조 및 물성 평가 (Fabrication and Characterizations of Thick PZT Films for Micro Piezoelectric Devices)

  • 박준식;박광범;윤대원;박효덕;강성군;최태훈;이낙규;나경환
    • 소성∙가공
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    • 제11권7호
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    • pp.569-574
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    • 2002
  • Recently, thick PZT films are required for the cases of micro piezoelectric devices with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Microstructures, and electrical properties of films were investigated by XRD, FESEM, impedance analyzer, and P-E hysteresis. PZT films with 2.7$mu extrm{m}$ to 4.4${\mu}{\textrm}{m}$ thickness were fabricated. Dielectric constant, loss, remnant polarization and coercive field of them were 880~1650 at 1kHz, 2~3% at 1kHz, 26~32 $\mu$C/$ extrm{cm}^2$, and 33~60kV/cm, respectively. Also a transverse piezoelectric coefficient $(e_{31,f})$ measurement system was fabricated and tested for thick film samples.

$Pb({Zr_0.53}, {Ti_0.47})O_3$ 압전세라믹소자의 고주파필터에 관한 연구 (A study on HF filter of $Pb({Zr_0.53}, {Ti_0.47})O_3$ piezoelectric ceramics)

  • 박창엽;송준태
    • 전기의세계
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    • 제27권3호
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    • pp.43-46
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    • 1978
  • The prezoelectric ceramic specimen compoxed of PbO, ZrO$_{2}$, TiO$_{2}$ were prepared in this Lab, and showed properties of dielectric constant .epsilon.$^{33}$ /.epsilon.$_{0}$ 487 at 1kHz, electromechanical coefficient Kr 0.524. As the characteristics of piezoelectric HF filter used these piezoelectric specimen were the resonant point 6.7 MHz, effective bandwidth 690KHz, it was exellant. Since a LC resonant filter can be replaced bt this piezoelectric HG filter, it will greatly contribute to compose a compact circuit. If the resont point can be controlled, this piezoelectric HF filter practically.

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저온소결 PMN-PNN-PZT세라믹스의 $WO_3$첨가에 따른 압전 및 유전특성 (Piezoelectric and Dielectric Characteristics of Low Temperature Sintering PMN-PNN-PZT ceramics with the amount of $WO_3$ addition)

  • 김국진;류주현;정영호
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.61-62
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    • 2006
  • In this study, in order to develop the low temperature sintering ceramics for multilayer piezoelectric actuator, PMN-PNN-PZT ceramics using ${Fe_2}{O_3}$ and $WO_3$ as sintering aids were manufactured with the amount of $WO_3$ addition, and the specimens were sintered at 900, 930, $960^{\circ}C$, respectively. Thereafter, their dielectric and piezoelectric properties were investigated. The sintering aids were proved to lower the sintering temperature of piezoelectric ceramics due to the effects of ${Fe_2}{O_3}$ and $WO_3$ liquid phase. At 0.3wt% $WO_3$ added specimen sintered at $930^{\circ}C$, kp, Qm, dielectric constant and $d_{33}$ showed the optimum values of 0.60, 1402, 1440 and 360[pC/N], respectively, for multilayer piezoelectric actuator application.

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Ba치환된 $Pb(Mg_{1/3}Nb_{2/3})O_3$-$PbTiO_3$-$PbZrO_3$계 세라믹스의 압전 및 변위특성에 관한 연구 (Piezoelectric and strain characteristics of PMN-PT-PZ ceramics with Ba addition)

  • 지승한;이덕출;이능헌
    • E2M - 전기 전자와 첨단 소재
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    • 제10권1호
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    • pp.20-25
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    • 1997
  • In this study, piezoelectric actuator samples were fabricated using 0.375PMN-0.37OPT-0.255PZ system ceramics with Barium substitution and the strain properties of them were investigated. Dielectric constant of the specimens increased with the increase of Ba content up to 5mol% and decreased with futher addition of Ba. The largest piezoelectric coefficient and electromechanical coupling coefficient were observed at the sintering temperature of 1250'C and Barium content of 5mol%. The characteristics of strain hysteresis was found largely with varing the sintering temperature on the single round type, and the strain is proportional to piezoelectric coefficient.

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Computational electromechanical approach for stability/instability of smart system actuated with piezoelectric NEMS

  • Luo, Zhonghua;Cheng, Xiaoling;Yang, Yuhan
    • Advances in Computational Design
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    • 제7권3호
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    • pp.211-227
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    • 2022
  • In this research, the size-dependent impact of an embedded piezoelectric nanoplate subjected to in-plane loading on free vibration characteristic is studied. The foundation is two-parameter viscoelastic. The nonlocal elasticity is employed in order to capture the influence of size of the plate. By utilizing Hamilton's principle as well as the first- order shear deformation theory, the governing equation and boundary conditions are achieved. Then, using Navier method the equations associated with the free vibration of a plate constructed piezoelectric material under in-plane loads are solved analytically. The presented formulation and solution procedure are validated using other papers. Also, the impacts of nonlocal parameter, mode number, constant of spring, electric potential, and geometry of the nanoplate on the vibrational frequency are examined. As this paper is the first research in which the vibration associated with piezoelectric nanoplate on the basis of FSDT and nonlocal elasticity is investigated analytically, this results can be used in future investigation in this area.

Ag2O 첨가량에 따른 0.95(K0.5Na0.5)NbO3-0.05Li(Sb0.8Nb0.2)O3 무연 세라믹스의 유전 및 압전특성 (Dielectric and Piezoelectric Characteristics of 0.95(K0.5Na0.5)NbO3-0.05Li(Sb0.8Nb0.2)O3 Pb-free Ceramics with amount of Ag2O Addition)

  • 김도형;류주현;정영호
    • 한국전기전자재료학회논문지
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    • 제22권11호
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    • pp.925-929
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    • 2009
  • In this study, $0.95(K_{0.5}Na_{0.5})NbO_3-0.05Li(Sb_{0.8}Nb_{0.2})O_3$ ceramics were investigated as a function of the amount of $Ag_2O$ addition in order to improve dielectric and piezoelectric properties of lead-free piezoelectric ceramics. With increasing the amount of $Ag_2O$ addition, density and electromechanical coupling factor ($k_p$) increased up to 0.2 wt.% $Ag_2O$ and decreased above 0.2 wt.% $Ag_2O$. At the sintering temperature of $1020^{\circ}C$, electromechanical coupling factor ($k_p$), density, dielectric constant (${\varepsilon}r$) and curie temperature (Tc) of ceramics with 0.2 wt% $Ag_2O$ showed the optimal values of 0.42, $4.33\;g/cm^3$, 738 and $393^{\circ}C$, respectively.

PMS-PZT 세라믹스의 압전특성에 미치는 ZnO의 영향 (Effects of ZnO on the Piezoelectric Properties of PMS-PZT Ceramics)

  • 손영진;황동연;김재창;조경원;김영민;어순철;김일호
    • 한국재료학회지
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    • 제14권11호
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    • pp.764-768
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    • 2004
  • Perovskite Pb(Mn_{1/3}Sbu_{2/3})O_2-Pb(Zr,Ti)O_3\;(PMS-PZT) was prepared and ZnO doping effects on its piezoelectric properties were investigated. Pyrochlore phase was not identified in the PMS-PZT ceramics with $0\sim5\;mol\%$ ZnO sintered at $1100^{\circ}C$ for 2 hrs, and maximum sintered density of $7.92 g/cm^3$ was obtained. Piezoelectric charge constant and voltage constant increased to $359{\times}10^{-12}\;C/N\;and\;22.5{\times}10^{-13}\;Vm/N$, respectively, with increasing ZnO content. Mechanical quality factor reduced considerably with increasing ZnO content. When the ZnO content was 3 $mol\%$, electromechanical coupling factor and relative dielectric constant showed maximum values of $56\%$ and 1727, respectively. This should be evaluated by complicated variations of sintered density, tetragonality of lattice, grain size, and A-site vacancy generated by ZnO addition and $Zn^{2+}$ substitution.

ZnO 첨가량에 따른 비납계 (Na0.44K0.52)Nb0.84O3-Li0.04(Sb0.06Ta0.1)O3 세라믹스의 압전 특성 (Piezoelectric Properties of lead free (Na0.44K0.52)Nb0.84O3-Li0.04(Sb0.06Ta0.1)O3 Ceramics with ZnO Addition)

  • 이동현;이승환;남성필;이영희
    • 전기학회논문지
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    • 제59권11호
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    • pp.2021-2025
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    • 2010
  • Electrical and structural properties were investigated on the effects of ZnO and the lead-free NKN-LST ceramics with the addition of ZnO were fabricated by a conventional mixed oxide method. A gradual change in the crystal and microstructure was observed with the increase of ZnO addition. For the NKN-LST-ZnO ceramics sintered at $1050^{\circ}C$, bulk density increased with the addition of ZnO and showed maximum value at addition 2.0mol% of ZnO. Curie temperature of the NKN-LST-ZnO ceramics slightly decreased with adding ZnO. The dielectric constant, piezoelectric constant ($d_{33}$) and electromechanical coupling factor ($k_p$) increased at the small amount of ZnO addition, which might be due to the increase in density. The high piezoelectric properties = 153 pC/N, electromechanical coupling factor = 0.484 and dielectric constant = 2883 were obtained for the NKN-LST+0.5ZnO ceramics sintered at $1050^{\circ}C$ for 2h.

비납계 (Bi1/2Na1/2)TiO3-Ba(Cu1/3Nb2/3)O3 세라믹의 압전 및 변위 특성 (Piezoelectric and Strain Properties of Lead-free (Bi1/2Na1/2)TiO3-Ba(Cu1/3Nb2/3)O3 Ceramics)

  • 류정호;정대용
    • 한국재료학회지
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    • 제21권11호
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    • pp.628-633
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    • 2011
  • Studies on lead-free piezoelectrics have been attractive as means of meeting environmental requirements. We synthesized lead-free piezoelectric $(Bi_{1/2}Na_{1/2})TiO_3-Ba(Cu_{1/3}Nb_{2/3})O_3$ (BNT-BCN) ceramics, and their dielectric, piezoelectric, and strain behavior were characterized. As BCN with a tetragonal phase was incorporated into the rhombohedral BNT lattice, the lattice constant increased. A small amount of BCN increased the density and dielectric constant forming the complete solid solution with BNT. However, BCN above 10 mol% was precipitated into a separate phase, and which was detected with XRD. In addition, EDX measurement revealed that Cu in BCN was not distributed homogeneously but was accumulated in a certain area. A lower density with a large amount of BCN was attributed to the nonsinterable property of BCN with large tetragonaliy. The dielectric constant vs the temperature change and the strain vs the electric field indicated that the ferroelectric property of BNT was diminished and paraelectric behavior was enhanced with the BCN addition. BNT-7.5BCN showed a 0.11% unimorph strain with a 9.0 kV/mm electric field with little hysteresis.

PZT-PMFW 압전 세라믹의 압전 및 유전 특성 (The Piezoelectric and Dielectric Properties of PZT-PMFW Piezoelectric Ceramics)

  • 이종섭;이문주;이용희;정수현;임기조
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.689-692
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    • 2001
  • In this paper, the pizoelectric and dielectric properties of 0.95Pb(ZrxTil-x)O$_3$- 0.05Pb(Mn$\_$0.2/Fe$\_$0.4/W$\_$0.4/)O$_3$piezoelectric ceramics is investigated as a function of Zr/Ti mole ratio. Also, MPB(Morphotropic Phase Boundary) and optimal sintering temperature is studied using XRD and SEM. As a results, when Zr/Ti mole ratio is 52/48, electromechanical coupling factor, k$\_$p/, is 58[%], permittivity, $\varepsilon$$\^$T/$\_$33//$\varepsilon$0, is 1360 and piezoelectric strain constant, d$\_$33/ is 265[pC/N] and the piezoelectric and dielectric properties become maximum. Phase transition temperature of its ternary piezoelectric system is about 350[$^{\circ}C$]. From the XRD analysis, when Zr/Ti mole ratio is 52/48, tetragonal phase transits to rhombohedral phase. Also, From measuring results of the sintering density, when sintering temperature is 1050[$^{\circ}C$], sintering density become maximum and is about 7930[kg/㎥], and average grain size is about 2-3[$\mu\textrm{m}$].

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