• 제목/요약/키워드: phosphoric acid

검색결과 802건 처리시간 0.024초

Roles of Phosphoric Acid in Slurry for Cu and TaN CMP

  • Kim, Sang-Yong;Lim, Jong-Heun;Yu, Chong-Hee;Kim, Nam-Hoon;Chang, Eui-Goo
    • Transactions on Electrical and Electronic Materials
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    • 제4권2호
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    • pp.1-4
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    • 2003
  • The purpose of this study was to investigate the characteristics of slurry including phosphoric acid for chemical-mechanical planarization of copper and tantalum nitride. In general, the slurry for copper CMP consists of alumina or colloidal silica as an abrasive, organic acid as a complexing agent, an oxidizing agent, a film forming agent, a pH control agent and additives. Hydrogen peroxide (H$_2$O$_2$) is the material that is used as an oxidizing agent in copper CMP. But, the hydrogen peroxide needs some stabilizers to prevent decomposition. We evaluated phosphoric acid (H$_3$PO$_4$) as a stabilizer of the hydrogen peroxide as well as an accelerator of the tantalum nitride CMP process. We also estimated dispersion stability and zeta potential of the abrasive with the contents of phosphoric acid. An acceleration of the tantalum nitride CMP was verified through the electrochemical test. This approach may be useful for the development of the 2$\^$nd/ step copper CMP slurry and hydrogen peroxide stability.

인산 겔 전해질을 사용한 밀폐형 납축전지에 관한 연구 (A Study on the Valve Regulated Lead-Acid Battery using Phosphoric Acid Gel Electrolyte)

  • 주찬홍;박근호
    • 한국응용과학기술학회지
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    • 제20권4호
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    • pp.296-308
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    • 2003
  • The capacity and long life of gel electrolyte batteries is connected with gas recombination producting $PbO_2$ and Pb electrode. We were prepared with phosphoric acid gel electrolyte to know gel characteristics per density to assemble VRLA batteries. We studied by measuring electrolyte dispersion using Brewster-angle microscope(BAM), charge-discharge cycle and electrode structure using scanning election microscope(SEM) per electrolyte density. As a results, phosphoric acid density 1.210 was excellent gel dispersion in sol condition, electrode condition after fifty cycles in this study.

카올린-인산염-물계의 고온특성에 관한 연구 (A Study on High Temperature properties of Kaolin-Phosphate-Water Systems)

  • 박금길;장영재
    • 한국세라믹학회지
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    • 제18권4호
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    • pp.229-236
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    • 1981
  • This study deals with the high temperature (600-135$0^{\circ}C$) properties of Kaolin-Phosphate-Water systems. Phosphoric acid, mono aluminum phosphate, mono ammonium phosphate, the mixture of phosphoric acid and mono aluminum phosphate, and the mixture of phosphoric acid and mono ammonium phosphate were used to characterize the M.O.R of the systems with to quantity of phosphates and firing temperature. Firing shrinkage, creeptest, DTA, TGA, and X-ray diffraction patterns were also measured in order to investigate the factors of strengthening. The resules of the experiments are as follows: 1. Linear shrinkage of kaolin-phosphate systems become larger as the firing temperature rise, and generally in the firing temperature of $600^{\circ}C$ and 100$0^{\circ}C$ the test pieces with phosphate binder show larger then Kaolin-Water system in linear shrinkage and reversed trends were found at 120$0^{\circ}C$ and 135$0^{\circ}C$. 2. Cold M.O.R. of kaolin-phosphate systems show higher trends in strength as the firing temperature rise. Comparing M.O.R. of test pieces after firing at 135$0^{\circ}C$, the mixture of phosphoric acid-mono aluminum phosphate, and phosphoric acid mono ammonium phosphate systems show higher strength than kaolin-mono aluminum phosphate system which widely used, and it shows highest strength when the mole ratio of phosphoric acid and mono ammonium phosphate is 1:1 among the test pieces of kaolin-phosphate systems. 3. The refractoriness of kaolin-phosphate systems are more deteriorated than Kaolin-Water system, and generally, the more addition of phosphate, the lower the refractoriness, however in the range of 4-8% phosphate addition, the difference of the fusion temperature is about 7$0^{\circ}C$. 4. The test pieces of T1 and T2 in creep test were same or even higher than kaolin-water system when 6% of phosphoric acid-mono ammonium phosphate was added to kaolin. 5. In case where the phosphoric acid-mono ammonium phosphate was added to kaolin in mole ratio 1:1 the cold M.O.R., after firing at 135$0^{\circ}C$, refractoriness and $T_2$ in creep test show better results than kaolin-mono-aluminum phosphate system which is widely used. 6. Phosphoric acid and mono ammonium phosphate react with kaolin in temperature over 100$0^{\circ}C$, and it forms aluminum phosphate.

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미강유로부터 Acetone Insolubles 회수 및 성질에 미치는 탈검제의 영향 (Effect of Degumming Reagents on the Recovery and Nature of Acetone Insolubles from Rice Bran Oil)

  • 이태규;노민환;양희천;김충기;송근섭;엄태붕;권용주
    • 한국식품영양과학회지
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    • 제20권3호
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    • pp.220-224
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    • 1991
  • 물 및 다섯가지 탈검제(citric acid, phosphoric acid, acetic anhydride 및 maleic anhydride)를 사용하여 미강유를 탈검하고 그 탈검효율을 비교하였다. 미강유 원유로부터 인 함유 물질을 제거하는데 있어서 모든 탈검제가 보다 효과적이었으며, 특히 acetic anhydride와 phosphoric acid는 각각 92.5% 및 93.3%까지 인 함유율을 저하시켰다. 또한 비수화성 인지질 특히 Lyso PC를 제거하는데 있어서 모든 탈검제가 효과적이었다. 미강유로부터 추출한 AI의 인지질은 주로 PC, PI, PE 및 Lyso PC로 구성되어 있었으며, 주요 지방산은 oleic acid, linoleic acid 및 palmitic acid의 순이었다. Acetic anhydride를 사용하여 얻은 AI가 가장 안정된 유화를 형성하였으며, 반면에 phosphoric acid 및 oxalic acid를 처리하여 얻은 AI는 매우 빈약한 유화성을 나타냈다.

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과산화수소 분해반응을 이용한 Pt계 촉매의 인산피독 특성 평가 방법 (The Analysis Method for Evaluation of Phosphoric Acid Poisioning of Pt Based Catalyst by Using Hydrogen Peroxide Decomposition Reaction)

  • 박정진;양승원;정용진;권용재
    • 한국수소및신에너지학회논문집
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    • 제28권6호
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    • pp.669-674
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    • 2017
  • In this study, the novel electrochemical and colorimetric analysis methods are suggested to estimate the degree of phosphoric acid ion poisoning on Pt based catalyst surface and to confirm the possibility of replacing the expensive and long time consumed conventional methods. As the ways, the electrochemical half cell tests such as cyclic voltammetry (CV) and linear sweep voltammetry (LSV) are used and the change in chemical behavior by absorption of the phosphoric acid ion on Pt based catalyst surface and hydrogen peroxide decomposition reaction are successfully recognized by colorimetric measurements. Conclusively, it is proved that the new methods show superior sensitivity for identifying the degree of phosphoric acid poisoned on Pt based catalyst.

인산을 전처리한 활성탄소섬유에 칼륨 처리효과 (Potassium loading effects for activated carbon fiber pre-treated with phosphoric acid)

  • 오원춘;배장순
    • 분석과학
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    • 제18권4호
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    • pp.355-361
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    • 2005
  • 본 연구는 인산의 전처리에 의한 두 종류의 활성탄소섬유의 특성 변화와 여기에 칼륨을 처리하여 표면 특성을 비교하고자 하였다. X-선 회절 패턴은 인산을 전처리함에 따라 칼륨종을 포함하는 활성탄소섬유에 대한 금속과 금속염의 존재에 대한 좋은 결과를 나타내었다. 인산을 처리한 후에 표면특성과 비표면적 변화에 차이의 원인을 나타내기 위하여, 동공구조와 표면 모폴로지를 흡착분석과 SEM에 의하여 연구하였다. 인산을 가지고 전처리한 활성탄소섬유의 칼륨 처리효과에 대한 화학적 구성에 대한 원소분석을 위하여 EDX를 사용하였다. 최종적으로, 산소를 포함하는 기능기의 형태와 정성분석은 Boehm에 의하여 제안된 방법으로 부터 결정하였다.

초산(醋酸), 질산(窒酸), 인산(燐酸)을 함유한 삼원계(三元系) 폐혼산(廢混酸)으로부터 인산(燐酸) 회수(回收)에 관한 기초 연구(硏究) (A Study on the Recovery of Phosphoric acid from Waste acid containing Acetic acid, Nitric acid and phosphoric acid)

  • 이향숙;이창훈;신준영;김주엽;안재우
    • 자원리싸이클링
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    • 제14권5호
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    • pp.18-23
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    • 2005
  • 초산, 질산, 인산이 함유된 폐혼산으로부터 인산을 분리하여 재활용하기 위한 방법으로 용매추출법을 이용하였다. 폐혼산에서 초산과 질산을 선택적으로 분리하고, 추출 잔류액에서 인산을 회수하고자 하였다. 주요 실험 변수로는 추출제 농도, 교반시간, 교반속도 등의 변화에 따른 초산, 질산, 인산의 추출거동을 조사하였다. 또한, McCabe-Thiele diagram으로부터 초산, 질산 성분의 추출 및 탈거에 필요한 이론적 단수를 조사하였다. 실험결과 인산염계 추출제를 사용할 경우 초산과 질산을 선택적으로 분리 추출이 가능하였으며, 추출제의 함량은 유기상의 50%가 적합하였다. 교반속도와 교반시간의 영향은 크게 없었으며, 상비(A/O)=1/3, 6단에서 초산과 질산을 완전히 추출 분리하여 인산을 추출잔류액에서 회수가 가능하였다.

상아질을 통한 HEMA의 확산에 인산농도가 미치는 영향 (EFFECT OF PHOSPHORIC ACID CONCENTRATION ON THE DIFFUSION OF HEMA THROUGH DENTIN)

  • 윤미란;이광원;박수정
    • Restorative Dentistry and Endodontics
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    • 제24권1호
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    • pp.147-155
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    • 1999
  • The purpose of this study was to investigate the effect of phosphoric acid concentration on the movement of 2-hydroxyethylmethacrylate(HEMA) from bonding resin - resin composite combination through dentin in vitro. Freshly extracted human third molar teeth were divided into four groups each of 10 teeth. A closed chamber with 1 ml distilled water was attached to the CEJ of each tooth. An occlusal cavity of 4mm diameter & remaining dentin thickness of 1.0-1.5mm was prepared in each tooth. Dentin was treated with 10% phosphoric acid gel for 15 seconds. 32% phosphoric acid gel for 15 seconds, or with 35% phosphoric acid gel for 15 seconds. A control group not treated with acid gel was also prepared. The cavities were rinsed, dried and then treated with the HEMA-containing All-Bond 2 primer & bonding resin which was light-cured for 10 seconds. The cavities were then restored with Z100 composite resin(shade:A3.5:3M Dent. Prod. USA) & light cured for 30 seconds. Water samples were retrieved from the chambers over a time course (4.32, 14.4, 43.2, 144 & 432 minutes ; 1, 3 & 10 days) and analyzed by high performance liquid chromatography. The results were as follows. 1. HEMA was detected in the pulp chambers of all teeth from 4.32 minutes after resin placement The highest rate of release was in the first sample period (0-4.32 min) & rate of release declined exponentially thereafter. 2. No significant differences were found for mean release rate for HEMA over a time course among the four groups (p>0.05). 3. The diffusion rate was significantly (p<0.05) less for 10% phosphoric acid gel than 32% phosphoric acid gel at the second sample period(4.32-14.4 min). 4. No significant differences were found for cumulative HEMA diffusion among the four groups at 10 days(p>0.05) and mean total(cumulative) release at 10 days for all groups was in the 9 - 16 nmol range. 5. The cumulative release was significantly (p<0.05) less for 10% phosphoric acid gel than 32% phophoric acid gel at the third(14.4-43.2 min) & fourth(43.2-144 min) sample period.

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Control of phosphoric acid induced volume change in clays using fly ash

  • Chavali, Rama Vara Prasad;Reddy, P. Hari Prasad
    • Geomechanics and Engineering
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    • 제15권6호
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    • pp.1135-1141
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    • 2018
  • Volume changes of soils induced by inorganic acids cause severe foundation and superstructure failures in industrial buildings. This study aimed to assess the potential of fly ash to control volume changes in soils under acidic environment. Two soils such as black cotton soil predominant with montmorillonite and kaolin clay predominant with kaolinite were used for the present investigation. Both soils exhibited an increase in swelling subjected to phosphoric acid contamination. Ion exchange reactions and mineralogical transformations lead to an increase in swelling and a decrease in compressibility in black cotton soil, whereas phosphate adsorption and mineral dissolution lead to an increase in swelling and compressibility in case of kaolin clay. Different percentages of Class F fly ash obtained from Ramagundam national thermal power station were used for soil treatment. Fly ash treatment leads to significant reduction in swelling and compressibility, which is attributed to the formation of aluminum phosphate cements in the presence of phosphoric acid.

Metal Ion Selectivity of Surface Templated Resins Carrying Phosphate Groups

  • Murata, Masaharu;Maeda, Mizuo;Takagi, Makoto
    • 분석과학
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    • 제8권4호
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    • pp.529-534
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    • 1995
  • The metal ion selective resins were prepared by surface template polymerization using monooleyl phosphoric acid (1), oleyl methyl phosphoric acid (2) or oleyl ethyl phosphoric acid (3) as an amphiphilic host surfactant. The $Cu^{2+}$-imprinted resins prepared in the presence of $Cu^{2+}$ adsorbed $Cu^{2+}$ much more effectively than did their reference resins. On the other hand, the $Cu^{2+}$-imprinted resins showed much less binding ability to $Zn^{2+}$. The template-dependent selectivity should be ascribed to a favorable placement of the surface-anchored metallophilic groups for multidentate coordination to specific metal ion.

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