• Title/Summary/Keyword: phosphoric acid

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Roles of Phosphoric Acid in Slurry for Cu and TaN CMP

  • Kim, Sang-Yong;Lim, Jong-Heun;Yu, Chong-Hee;Kim, Nam-Hoon;Chang, Eui-Goo
    • Transactions on Electrical and Electronic Materials
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    • v.4 no.2
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    • pp.1-4
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    • 2003
  • The purpose of this study was to investigate the characteristics of slurry including phosphoric acid for chemical-mechanical planarization of copper and tantalum nitride. In general, the slurry for copper CMP consists of alumina or colloidal silica as an abrasive, organic acid as a complexing agent, an oxidizing agent, a film forming agent, a pH control agent and additives. Hydrogen peroxide (H$_2$O$_2$) is the material that is used as an oxidizing agent in copper CMP. But, the hydrogen peroxide needs some stabilizers to prevent decomposition. We evaluated phosphoric acid (H$_3$PO$_4$) as a stabilizer of the hydrogen peroxide as well as an accelerator of the tantalum nitride CMP process. We also estimated dispersion stability and zeta potential of the abrasive with the contents of phosphoric acid. An acceleration of the tantalum nitride CMP was verified through the electrochemical test. This approach may be useful for the development of the 2$\^$nd/ step copper CMP slurry and hydrogen peroxide stability.

A Study on the Valve Regulated Lead-Acid Battery using Phosphoric Acid Gel Electrolyte (인산 겔 전해질을 사용한 밀폐형 납축전지에 관한 연구)

  • Ju, Chan-Hong;Park, Keun-Ho
    • Journal of the Korean Applied Science and Technology
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    • v.20 no.4
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    • pp.296-308
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    • 2003
  • The capacity and long life of gel electrolyte batteries is connected with gas recombination producting $PbO_2$ and Pb electrode. We were prepared with phosphoric acid gel electrolyte to know gel characteristics per density to assemble VRLA batteries. We studied by measuring electrolyte dispersion using Brewster-angle microscope(BAM), charge-discharge cycle and electrode structure using scanning election microscope(SEM) per electrolyte density. As a results, phosphoric acid density 1.210 was excellent gel dispersion in sol condition, electrode condition after fifty cycles in this study.

A Study on High Temperature properties of Kaolin-Phosphate-Water Systems (카올린-인산염-물계의 고온특성에 관한 연구)

  • 박금길;장영재
    • Journal of the Korean Ceramic Society
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    • v.18 no.4
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    • pp.229-236
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    • 1981
  • This study deals with the high temperature (600-135$0^{\circ}C$) properties of Kaolin-Phosphate-Water systems. Phosphoric acid, mono aluminum phosphate, mono ammonium phosphate, the mixture of phosphoric acid and mono aluminum phosphate, and the mixture of phosphoric acid and mono ammonium phosphate were used to characterize the M.O.R of the systems with to quantity of phosphates and firing temperature. Firing shrinkage, creeptest, DTA, TGA, and X-ray diffraction patterns were also measured in order to investigate the factors of strengthening. The resules of the experiments are as follows: 1. Linear shrinkage of kaolin-phosphate systems become larger as the firing temperature rise, and generally in the firing temperature of $600^{\circ}C$ and 100$0^{\circ}C$ the test pieces with phosphate binder show larger then Kaolin-Water system in linear shrinkage and reversed trends were found at 120$0^{\circ}C$ and 135$0^{\circ}C$. 2. Cold M.O.R. of kaolin-phosphate systems show higher trends in strength as the firing temperature rise. Comparing M.O.R. of test pieces after firing at 135$0^{\circ}C$, the mixture of phosphoric acid-mono aluminum phosphate, and phosphoric acid mono ammonium phosphate systems show higher strength than kaolin-mono aluminum phosphate system which widely used, and it shows highest strength when the mole ratio of phosphoric acid and mono ammonium phosphate is 1:1 among the test pieces of kaolin-phosphate systems. 3. The refractoriness of kaolin-phosphate systems are more deteriorated than Kaolin-Water system, and generally, the more addition of phosphate, the lower the refractoriness, however in the range of 4-8% phosphate addition, the difference of the fusion temperature is about 7$0^{\circ}C$. 4. The test pieces of T1 and T2 in creep test were same or even higher than kaolin-water system when 6% of phosphoric acid-mono ammonium phosphate was added to kaolin. 5. In case where the phosphoric acid-mono ammonium phosphate was added to kaolin in mole ratio 1:1 the cold M.O.R., after firing at 135$0^{\circ}C$, refractoriness and $T_2$ in creep test show better results than kaolin-mono-aluminum phosphate system which is widely used. 6. Phosphoric acid and mono ammonium phosphate react with kaolin in temperature over 100$0^{\circ}C$, and it forms aluminum phosphate.

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Effect of Degumming Reagents on the Recovery and Nature of Acetone Insolubles from Rice Bran Oil (미강유로부터 Acetone Insolubles 회수 및 성질에 미치는 탈검제의 영향)

  • 이태규;노민환;양희천;김충기;송근섭;엄태붕;권용주
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.20 no.3
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    • pp.220-224
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    • 1991
  • Six reagents (water, citric acid, phosphoric acid, oxalic acid, acetic anhydride and maleic anhydride) were evaluated for their effectiveness is degumming rice bran oil. All chemical reagents tested were found to be significantly more effective than water in removing phosphatides from crude rice bran oil. Especially acetic anhydride and phosphoric acid were effective in reducing phosphorous levels (92.5% and 93.3% removeal, respectively). Nonhydratable phospholipids, lysophosphatidyl choline, were removed more effectively by the chemical reagents than by the water degumming. The major phospholipid(PL) components were phophatidyl choline. Oleic, linolieic and palmitic acids were the major fatty acids of PL in rice bran acetone insolubles(AI). The AI recovered by acetic anhydride degumming produced the most stable emulsions. However, the AI obtained from phophoric acid or oxalic acid treatments had very poor emulsifying properties.

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The Analysis Method for Evaluation of Phosphoric Acid Poisioning of Pt Based Catalyst by Using Hydrogen Peroxide Decomposition Reaction (과산화수소 분해반응을 이용한 Pt계 촉매의 인산피독 특성 평가 방법)

  • PARK, JEONGJIN;YANG, SEUNGWON;CHUNG, ONGJIN;KWON, YONGCHAI
    • Transactions of the Korean hydrogen and new energy society
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    • v.28 no.6
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    • pp.669-674
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    • 2017
  • In this study, the novel electrochemical and colorimetric analysis methods are suggested to estimate the degree of phosphoric acid ion poisoning on Pt based catalyst surface and to confirm the possibility of replacing the expensive and long time consumed conventional methods. As the ways, the electrochemical half cell tests such as cyclic voltammetry (CV) and linear sweep voltammetry (LSV) are used and the change in chemical behavior by absorption of the phosphoric acid ion on Pt based catalyst surface and hydrogen peroxide decomposition reaction are successfully recognized by colorimetric measurements. Conclusively, it is proved that the new methods show superior sensitivity for identifying the degree of phosphoric acid poisoned on Pt based catalyst.

Potassium loading effects for activated carbon fiber pre-treated with phosphoric acid (인산을 전처리한 활성탄소섬유에 칼륨 처리효과)

  • Oh, Won-Chun;Bae, Jang-Soon
    • Analytical Science and Technology
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    • v.18 no.4
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    • pp.355-361
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    • 2005
  • The objective of this paper is to compare the surface features of two kinds of activated caron fiber (ACF) treated with potassium and the variation of their properties by phosphoric acid pre-treatment. X-ray diffraction (XRD) patterns indicate that activated carbon fiber containing potassium species show better performance for metal and metal salts by pre-treatment with phosphoric acid. In order to present the causes of the differences in surface properties and specific surface area after the samples were treated with phosphoric acid, pore structure and surface morphology were investigated by adsorption analysis and SEM. For the chemical composition microanalysis for potassium leading of the activated carbon fibers pre-treated with phosphoric acid, samples were analyzed by EDX. Finally, the type and quality of oxygen groups were determined from the method proposed by Boehm.

A Study on the Recovery of Phosphoric acid from Waste acid containing Acetic acid, Nitric acid and phosphoric acid (초산(醋酸), 질산(窒酸), 인산(燐酸)을 함유한 삼원계(三元系) 폐혼산(廢混酸)으로부터 인산(燐酸) 회수(回收)에 관한 기초 연구(硏究))

  • Lee, Hyang-Sook;Lee, Chang-Hoon;Shin, June-Young;Kim, Ju-Yup;Ahn, Jae-Woo
    • Resources Recycling
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    • v.14 no.5 s.67
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    • pp.18-23
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    • 2005
  • Recovery of phosphoric acid from waste acid mixture of acetic, nitric and phosphoric acid has been attempted by using solvent extraction method. In this work, organic phosphate was used as an extraction agent. The effect of phosphate concentration, agitation speed and time on the solvent extraction of acetic and nitric acids has been investigated. The optimum concentration of phosphate for preferential extraction of acetic and nitric acids from waste acid was found to be about 50% irrespective of agitation speed and time. Purified phophoric acid was recovered from extraction residue at 1/3 of A/O ratio and 6th stage of extraction stage, which is well consistent with the value calculated by using McCabe-Thiele diagram.

EFFECT OF PHOSPHORIC ACID CONCENTRATION ON THE DIFFUSION OF HEMA THROUGH DENTIN (상아질을 통한 HEMA의 확산에 인산농도가 미치는 영향)

  • Yoon, Mi-Ran;Lee, Kwang-Won;Park, Soo-Joung
    • Restorative Dentistry and Endodontics
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    • v.24 no.1
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    • pp.147-155
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    • 1999
  • The purpose of this study was to investigate the effect of phosphoric acid concentration on the movement of 2-hydroxyethylmethacrylate(HEMA) from bonding resin - resin composite combination through dentin in vitro. Freshly extracted human third molar teeth were divided into four groups each of 10 teeth. A closed chamber with 1 ml distilled water was attached to the CEJ of each tooth. An occlusal cavity of 4mm diameter & remaining dentin thickness of 1.0-1.5mm was prepared in each tooth. Dentin was treated with 10% phosphoric acid gel for 15 seconds. 32% phosphoric acid gel for 15 seconds, or with 35% phosphoric acid gel for 15 seconds. A control group not treated with acid gel was also prepared. The cavities were rinsed, dried and then treated with the HEMA-containing All-Bond 2 primer & bonding resin which was light-cured for 10 seconds. The cavities were then restored with Z100 composite resin(shade:A3.5:3M Dent. Prod. USA) & light cured for 30 seconds. Water samples were retrieved from the chambers over a time course (4.32, 14.4, 43.2, 144 & 432 minutes ; 1, 3 & 10 days) and analyzed by high performance liquid chromatography. The results were as follows. 1. HEMA was detected in the pulp chambers of all teeth from 4.32 minutes after resin placement The highest rate of release was in the first sample period (0-4.32 min) & rate of release declined exponentially thereafter. 2. No significant differences were found for mean release rate for HEMA over a time course among the four groups (p>0.05). 3. The diffusion rate was significantly (p<0.05) less for 10% phosphoric acid gel than 32% phosphoric acid gel at the second sample period(4.32-14.4 min). 4. No significant differences were found for cumulative HEMA diffusion among the four groups at 10 days(p>0.05) and mean total(cumulative) release at 10 days for all groups was in the 9 - 16 nmol range. 5. The cumulative release was significantly (p<0.05) less for 10% phosphoric acid gel than 32% phophoric acid gel at the third(14.4-43.2 min) & fourth(43.2-144 min) sample period.

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Control of phosphoric acid induced volume change in clays using fly ash

  • Chavali, Rama Vara Prasad;Reddy, P. Hari Prasad
    • Geomechanics and Engineering
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    • v.15 no.6
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    • pp.1135-1141
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    • 2018
  • Volume changes of soils induced by inorganic acids cause severe foundation and superstructure failures in industrial buildings. This study aimed to assess the potential of fly ash to control volume changes in soils under acidic environment. Two soils such as black cotton soil predominant with montmorillonite and kaolin clay predominant with kaolinite were used for the present investigation. Both soils exhibited an increase in swelling subjected to phosphoric acid contamination. Ion exchange reactions and mineralogical transformations lead to an increase in swelling and a decrease in compressibility in black cotton soil, whereas phosphate adsorption and mineral dissolution lead to an increase in swelling and compressibility in case of kaolin clay. Different percentages of Class F fly ash obtained from Ramagundam national thermal power station were used for soil treatment. Fly ash treatment leads to significant reduction in swelling and compressibility, which is attributed to the formation of aluminum phosphate cements in the presence of phosphoric acid.

Metal Ion Selectivity of Surface Templated Resins Carrying Phosphate Groups

  • Murata, Masaharu;Maeda, Mizuo;Takagi, Makoto
    • Analytical Science and Technology
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    • v.8 no.4
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    • pp.529-534
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    • 1995
  • The metal ion selective resins were prepared by surface template polymerization using monooleyl phosphoric acid (1), oleyl methyl phosphoric acid (2) or oleyl ethyl phosphoric acid (3) as an amphiphilic host surfactant. The $Cu^{2+}$-imprinted resins prepared in the presence of $Cu^{2+}$ adsorbed $Cu^{2+}$ much more effectively than did their reference resins. On the other hand, the $Cu^{2+}$-imprinted resins showed much less binding ability to $Zn^{2+}$. The template-dependent selectivity should be ascribed to a favorable placement of the surface-anchored metallophilic groups for multidentate coordination to specific metal ion.

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