• International Journal of Precision Engineering and Manufacturing
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• 제2권4호
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• pp.81-88
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• 2001

We present a new digital phase measuring method for heterodyne optical interferometry, which providers high measuring speed up to 6 m/s with a fine displacement resolution of 0.1 nanometer. The key idea is combining two distinctive digital phase measuring techniques with mutually complementary characteristics to earth other one is counting the Doppler shift frequency counting with 20 MHz beat frequency for high-velocity measurement and the other is the synchronous phase demodulation with 2.0 kHz beat frequency for extremely fine displacement resolution. The two techniques are operated in switching mode in accordance wish the object speed in a synchronized way. Experimental results prove that the proposed dual mode phase measuring scheme is realized with a set of relatively simple electronic circuits of beat frequency shifting, heterodyne phase detection. and low-pass filtering.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.513-516
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• 2003

Phase Measuring Profilometry(PMP) has been developed as one of three dimensional 3-D shape measuring methods. The 3-D profile of an object was calculated from the phase data obtained by the sinusoidal patterns projected on the object. However, in some cases the approximation includes considerable errors. In this paper, the effect on the errors caused by the optical geometry and the calibration procedure in PMP technique are discussed. The errors which occured in the process of calculating the 3-D profile from the phase distribution are investigated theoritically and experimentally.

• 한국정밀공학회지
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• 제17권6호
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• pp.210-217
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• 2000

Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and it's high sensitivity. Especially when projecting a grid pattern over the object, the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, the projection moire are compared with the PMP mathematically, and it is shown that PMP can generate moire image with simple mathematical computations. Experimental works are also carried out showing the same results. It is shown that using a single gird pattern, moire image can be obtained directly without any mathematical operation when some conditions are satisfied.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.421-424
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• 2002

The 3-D measurement using a sinusoidal grating pattern projection is very attractive because of its high measuring speed and high sensitivity. When a sinusoidal amplitude grating was projected on an object, the surface-height distribution of the object is translated into a phase distribution of the deformed grating image. The phase-acquisition algorithms are so sufficiently simple that high-resolution phase maps using a CCD camera can be generated in a short time. The PMP technique is discussed, and the analysis of the systematic errors, the calibration procedure designed to determined the optimal setting of the measurement parameters is illustrated. Results of measurements and calibrations on the measurement plane objects are described.

• 새물리
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• 제68권11호
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• pp.1275-1280
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• 2018

We demonstrated transmission direct phase-measuring deflectometry (DPMD) with a specular phase object having discontinuous surfaces by using two displays and a two-dimensional array detector for display and by recording the distorted fringe patterns. Three-dimensional (3D) information was obtained by calculating the height map directly from the phase information. We developed a mathematical model of the phase-height relationship in transmission DPMD. Unlike normal transmission deflectometry, this method supports height measurement directly from the phase. Compared with other 3D measurement techniques such as interferometry, this method has the advantages of being inexpensive and easy to implement.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.203-206
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• 2002

One of the ever-increasing demands on the performances of heterodyne interferometers is to improve the measurement resolution, of which current state-of-the-art reaches the region of sub-nanometers. We propose a new scheme of phase-measuring electronics that reduces the measurement resolution without further increase in clock speed. Our scheme adopts a super-heterodyne technique that lowers the original beat frequency to a level of 1 MHz by mixing it with electrically generated reference signal. The technique enables us to measure the phase of Doppler shift with a resolution of 1.58 nanometer at a sampling rate of 1 MHz. To avoid the undesirable decrease in the maximum measurable speed caused by the lowered beat frequency, a special from of frequency up-down counting technique is combined with the super-heterodyning. This alloys performing required phase unwrapping simply by using programmable digital gates without 2$\pi$ ambiguities up to the maximum velocity of 2.35 m/s.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.91-95
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• 1997

ESPI(Electronic Speckle Pattern Interferometry) is new optical measuring method to be able to measure the surface deformations of engineering components and materials in industrial areas. Conventional measuring method of surface deformation such as the strain gauge have many demerits because it is contact and point-to-point measuring one. But ESPI that is non-contact, whole field measuring method can overcome previous disadvantages. The speckle pattern to be formed with interference phenomena of scattering light from rough surfaces illuminated by laser light have phase information of surface In this study we used this interference phenomena and the phase shifting method to measure the in- plane deformation, together with the use of digital equipment to process the information contained in the speckle pattern and to display consequent inter ferograms. Finally we obtained good agreement between the experimenta results and those of FEM..

• 한국정밀공학회지
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• 제19권9호
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• pp.172-178
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• 2002

One of the ever-increasing demands on the performances of heterodyne interferometers is to improve the measurement resolution, of which current state -of-the-art reaches the region of sub-nanometers. So far, the demand has been met by increasing the clock speed that drives the electronics involved fur the phase measurement of the Doppler shift, but its further advance is being hampered by the technological limit of modem electronics. To cope with the problem, in this investigation, we propose a new scheme of phase -measuring electronics that reduces the measurement resolution without further increase in clock speed. Our scheme adopts a super-heterodyne technique that lowers the original beat frequency to a level of 1 MHz by mixing it with a stable reference signal generated from a special phase- locked-loop. The technique enables us to measure the phase of Doppler shift with a resolution of 1.58 nanometer at a sampling rate of 1 MHz. To avoid the undesirable decrease in the maximum measurable speed caused by the lowered beat frequency, a special form of frequency up-down counting technique is combined with the super-heterodyning. This allows performing required phase unwrapping simply by using programmable digital gates without 2n ambiguities up to the maximum velocity guaranteed by the original beat frequency.

• 설비공학논문집
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• 제13권12호
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• pp.1223-1229
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• 2001

Though conventional calorimetry methods such as differential scanning calorimetry (DSC) and differential thermal analysis (DTA) are used generally in measuring heat of fusion, T-history method has the advantages of a simple experimental apparatus and no requirements of sampling process, which is particularly useful for measuring thermal properties of inhomogeneous phase change materials (PCMs) in sealed tubes. However, random criteria (a degree of supercooling) used in selecting the range of latent heat release and neglecting sensible heat during the phase change process can cause significant errors in determining the heat of fusion. In the present study, it was shown that a 40% discrepancy exists between the original T-history and the present methods when analyzing the same experimental data. As a result, a reasonable modification to the original T-history method is proposed.

• 한국광학회지
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• 제25권6호
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• pp.326-333
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• 2014

액체 속에 담긴 시료를 투과형 편향법을 이용하여 3차원 형상을 측정하고 시료의 굴절률 분포를 측정하였다. 편향법은 면적이 비교적 크고 거울과 같이 산란이 거의 없는 물체의 3차원 측정을 하는데 유용하다. 편향법을 통해 얻은 왜곡 무늬로부터 위상과 기울기를 구하기 위해 위상이동법과 시간추적 위상펼침 (TPU:Temporal Phase Unwrapping) 방법을 이용하였고, 구한 기울기로부터 높이를 구하기 위해 최소자승법을 이용하였다. 굴절률 분포 측정을 위해 2개의 유체를 이용하였다. 전산기 시늉과 실험결과 액체를 이용한 투과형 편향법을 이용하여 시료내의 굴절률 분포를 측정 할 수 있음을 확인하였다.