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http://dx.doi.org/10.3938/NPSM.68.1275

Three-Dimensional Measurements of the Specular Components by Using Direct Phase-Measuring Transmission Deflectometry  

Na, Silin (Kanghae Precision System)
Shin, Sanghoon (Kanghae Precision System)
Kim, Doocheol (Department of Physics and Research Institute for Basic Sciences, Jeju National University)
Yu, Younghun (Department of Physics and Research Institute for Basic Sciences, Jeju National University)
Publication Information
New Physics: Sae Mulli / v.68, no.11, 2018 , pp. 1275-1280 More about this Journal
Abstract
We demonstrated transmission direct phase-measuring deflectometry (DPMD) with a specular phase object having discontinuous surfaces by using two displays and a two-dimensional array detector for display and by recording the distorted fringe patterns. Three-dimensional (3D) information was obtained by calculating the height map directly from the phase information. We developed a mathematical model of the phase-height relationship in transmission DPMD. Unlike normal transmission deflectometry, this method supports height measurement directly from the phase. Compared with other 3D measurement techniques such as interferometry, this method has the advantages of being inexpensive and easy to implement.
Keywords
Phase-measuring deflectometry; Phase reconstruction; Surface shape measurement;
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