A study on the nonlinear error correction of the phase measuring profilometry

PMP 형상 측정법에서 비선형 오차보정에 관한 연구

Phase Measuring Profilometry(PMP) has been developed as one of three dimensional 3-D shape measuring methods. The 3-D profile of an object was calculated from the phase data obtained by the sinusoidal patterns projected on the object. However, in some cases the approximation includes considerable errors. In this paper, the effect on the errors caused by the optical geometry and the calibration procedure in PMP technique are discussed. The errors which occured in the process of calculating the 3-D profile from the phase distribution are investigated theoritically and experimentally.