• 한국자기학회:학술대회 개요집
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• 한국자기학회 2008년도 Asian Magnetics Conference
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• pp.80.2-80.2
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• 2008

• 한국전기전자재료학회논문지
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• 제14권1호
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• pp.74-83
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• 2001

In this study, the optimum structure of a magnetic thin film inductor was designed for application of DC-DC converters. The Ni$\sub$81/Fe$\sub$19/ (at%) alloy was selected as a high-frequency($\geq$MHz) magnetic thin film magnetron sputtering system. As-deposited NiFe thin films show similar magnetic properties compared to bulk NiFe alloys, indicating that they have a good film quality. The optimum design of dolenoid-type magnetic thin film inductors was performed utilizing a Maxwell computer simulator (Ansoftt HFSS V7.0 for PC) and parameters obtained from the magnetic properties of magnetic core materials selected. The high-frequency characteristics of the inductance(L) and quality factor(Q) obtained for the designed inductors through simulation agreed well with those obtained by theoretical calculations, confirming that the simulated result is realistic. The optimum structure of high-performance (Q$\geq$60, L = 1${\mu}$H, efficiency $\geq$90%), high-frequency ($\geq$5MHz), and solenoid-type magnetic thin film inductors was designed successfully.

• Journal of Magnetics
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• 제6권1호
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• pp.9-12
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• 2001

The dependence of the magnetoimpedance effect (MI) on magnetic properties has been investigated in mumetal thin films prepared by rf magnetron sputtering. Coercivity of thin films prepared at 400 W was about 0.4 Oe, and the magnetic anisotropy field of films deposited under a uniaxial magnetic field decreased with increasing film thickness. The saturation magnetization of mumetal films increased with rising input power and thickness and was smaller than that of permalloy films. Transverse incremental Permeability (TPR) of films of 1$\mu m$ thick increased with increasing effective permeability. The magneto impedance ratio (MIR) was proportional to TPR in films 1$\mu m$ thick but in spite of lower effective permeability at higher thicknesses, MIR increased due to skin effect. The height of the double peaks in the MIR curves decreased with decreasing anisotropy and thickness. The maximum MIR value for a 4$\mu m$ thick 75% at 36.5 MHz.

• 한국자기학회지
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• 제19권6호
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• pp.197-202
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• 2009

코닝유리(Corning glass) 기판 위에 이온빔 증착법으로 제작한 버퍼(Ta)/코네틱(Conetic; NiFeCuMo) 박막에 대해 버퍼층에 의존하는 결정성장과 열처리 효과를 조사하였다. 또한 코네틱층을 증착할 때에 인가한 자기장 방향으로 용이축과 곤란축의 자기저항 곡선으로부터 얻은 보자력과 포화자기장값을 버퍼층 유무에 따라 서로 비교하였다. Ta 박막의 두께가 5 nm이고 코네틱 박막의 두께가 50 nm일 때에 보자력은 0.12 Oe으로 작았으며, MH 히스테리시스 곡선에서 얻은 자화율($\chi$)은 1.2 ${\times}\;10^4$으로 우수한 연자성의 특성을 가졌다. 저자기장에 민감한 거대자기저항 스핀밸브(GMR-SV; giant magneoresistance-spin valve)나 자기터널링접합(MTJ; megnetic tunnel junction) 박막구조에서 자유층으로 연자성의 특성이 우수한 코네틱 박막을 사용할 수 있는 가능성을 확인하였다.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2003년도 하계학술연구발표회 및 한.일 공동심포지엄
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• pp.272-273
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• 2003

Spin dynamics has been investigated intensively in various kinds of fields. Most popular one is an initial permeability at high frequency. Also, magnetic after-effect such as thermal fluctuation of fine magnetic particles and disaccommodation in soft magnetic materials were extensively studied in the past. When we apply an external farce with the same frequency as that of the system being examined, the system absorbs the external energy and the precession enhances. It is called resonance in general. Among the various resonances, ferromagnetic resonance (FMR) has been used as a good tool to evaluate material constants such as saturation manetization or spin damping parameter by analyzing a resonance curve. In this talk first instinctive understanding of Gilbert spin damping and spin pumping will be explained. Then, experimental data for enhancement of Gilbert damping parameter (G) evaluated from FMR spectrum and spin precession measured by a time resolved pump-probe method for Permalloy thin film will be introduced. Finally, magnetization reversal observed by air-coplanar probe will be given.

• 한국자기학회지
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• 제20권1호
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• pp.18-23
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• 2010

본 연구에서는 벡터 네트워크 분석기(vector network analyzer; VNA)와 코플라나 전송선(coplanar waveguide; CPW)을 이용한 강자성 공명 측정 방법을 개발하기 위해 두께가 각각 10, 20, 40 nm인 $Ni_{81}Fe_{19}$(Permalloy; Py) 합금 박막을 증착하여 측정하였다. 유리기판 위에 패터닝 작업을 거쳐 CPW를 형성하고 제작된 CPW 위에 Py 박막을 직접 올려놓아 시료의 반사/투과계수인 S-파라미터를 측정하였다. 외부자기장을 0 Oe에서 490 Oe까지 변화 시키며 측정해본 결과 Py 박막의 공명주파수는 2.5 GHz에서 7 GHz 범위 내에서 나타났으며 외부자기장의 세기가 커짐에 따라 공명주파수도 증가함을 확인하였다. S-파라미터를 분석하여 나온 공명주파수와 반치폭을 이용하여 포화자화량과 길버트 감쇠 상수를 구한 결과 Py 박막 40 nm에서 길버트 감쇠 상수 값 0.0124($\pm$0.0008)를 구했고 이는 선행 연구되었던 일반적인 강자성 공명 측정값과 일치함을 볼 수 있었다. 또한 두께별 의존도를 조사해본 결과 두께가 작아질수록 S-파라미터의 세기가 작아지는 것을 확인 할 수 있었으며, 강자성공명 분석 결과에서 Py 박막의 두께가 10 nm에서 40 nm까지 증가할 때 유효 포화 자화가 7.205($\pm$0.013) kOe에서 7.840($\pm$0.014) kOe로 증가하는 것을 확인 할 수 있었다.

• 한국자기학회지
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• 제15권4호
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• pp.241-245
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• 2005

CoFeNi 합금은 HDD, MEMS 분야에서 head core 재료로 쓰이는 permalloy(FeNi)합금보다 뛰어난 우수한 자기적 특성을 가진 재료로써 최근 많이 연구되어지고 있다. CoFeNi 합금의 조성과 전기도금 시 전류조건에 따른 미세구조와 결정학적 특성이 자기 특성에 미치는 영향을 조사하였으며, 높은 포화자화와 낮은 보자력을 갖는 CoFeNi 삼원계 합금을 전기도금 방식으로 제조하는데 성공하였다. 포화자화 1.9 T, 보자력 0.16 A/m를 갖는 대표적인 CoFeNi film의 조성은 $Co_{30}\;Fe_{34}\;Ni_{36}(at\%)$이며, 미세결정립과 ffc-bcc 상의 혼재가 낮은 보자력을 갖는 요인임을 XRD, TEM의 결과로부터 확인 하였다.

• 한국전기전자재료학회논문지
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• 제17권5호
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• pp.508-514
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• 2004

A fluxgate magnetic sensor consists of a solenoid excitation coil, pick-up coil, and magnetic core. We presents the effect of magnetic core shape in a micromachined fluxgate sensor. To observe the performance of fluxgate sensor with magnetic core side width and gap, side width of 125 ${\mu}{\textrm}{m}$, 250 ${\mu}{\textrm}{m}$, and 500 ${\mu}{\textrm}{m}$ were designed in a rectangular-ring shaped core and the gaps of 0 ${\mu}{\textrm}{m}$, 50 ${\mu}{\textrm}{m}$, and 100 ${\mu}{\textrm}{m}$ were also fabricated in a racetrack shaped core. The solenoid coils and magnetic core were separated by benzocyclobutane(BCB) which had high insulation and good planarization characters. Copper coil patterns of 10 ${\mu}{\textrm}{m}$ width and 6${\mu}{\textrm}{m}$ thickness were electroplated on Ti(300 $\AA$) / Cu(1500 $\AA$) seed layers. 3 ${\mu}{\textrm}{m}$ thick N $i_{0.8}$F $e_{0.2.}$(permalloy) film for the magnetic core was also electroplated under 2000 gauss to induce the magnetic anisotropy. The magnetic core had the high DC effective permeability of ∼1,300 and coercive field of ∼0.1 Oe. Because the magnetic cores of 500 ${\mu}{\textrm}{m}$ side width and 0 gap had a low magnetic flux leakage, high sensitivity of ∼350 V/T were measured at excitation condition of 3 $V_{P-P}$ and 2 MHz square wave. The power consumption of ∼14 ㎽ was measured. The fabricated fluxgate sensor had the very small actual size of 3.0${\times}$1.7 $\textrm{mm}^2$. When two fluxgates were perpendicularly aligned in terrestrial field, their two-axis output signals were very useful to commercialize an electronic azimuth compass for the portable navigation system.m.m.m.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2011년도 자성 및 자성재료 국제학술대회
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• pp.7-8
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• 2011

Although yttrium iron garnet (YIG) has provided a great vehicle for the study of spin waves in the past, associated difficulties in film deposition and device fabrication using YIG had limited the applicability of spin waves to practical devices. However, microfabrication techniques have made it possible to characterize both the resonant as well as the travelling characteristics of spin waves in permalloy (Py). A variety of methods have been used for measuring spin waves, including Brillouin light scattering (BLS), magneto-optic Kerr effect (MOKE), vector network analyzer ferromagnetic resonance (VNA-FMR), and pulse inductive microwave magnetometry (PIMM). PIMM is one of the most preferred methodologies of measuring travelling spin waves. In this method, an electrical impulse is applied at one of two coplanar waveguides patterned on top of oxide-insulated Py, producing a local disturbance in the magnetization of the Py. The resulting disturbance travels down the Py in the form of waves, and is inductively picked up by the other coplanar waveguide. We investigate the effect of the pulse width of excitation pulses on the generated spin wave packets using both experimental results and micromagnetic simulations. We show that spin wave packets generated from electrical pulses are a superposition of two separate spin wave packets, one generated from the rising edge and the other from the falling edge, which interfere either constructively or destructively with one another, depending upon the magnitude and direction of the field bias conditions. A method of spin wave amplitude modulation is also presented by the linear superposition of spin waves. We use interfering spin waves resulting from two closely spaced voltage impulses for the modulation of the magnitude of the resultant spin wave packets.

• 한국자기학회지
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• 제16권5호
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• pp.249-254
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• 2006

CoFeNi 합금은 HDD, MEMS 분야에서 head core 재료로 쓰이는 permalloy(FeNi)합금보다 뛰어난 우수한 자기적 특성을 가진 재료로써 최근 많이 연구되어지고 있다. 전기도금된 CoFeNi합금 박막의 열처리에 따른 미세구조 변화와 결정학적 특성이 자기특성에 미치는 영향을 조사하였다. 삼원계 합금을 열처리하면 전기도금 시 결정의 크기와 결정구조의 변화가 자기특성에 영향을 미친다. 이를 조사하여 열처리를 통하여 얻어지는 CoFeNi계 박막의 자기 특성을 향상시키고자 하였고, $300{\sim}400^{\circ}C$까지 열처리를 함으로써 보자력을 최소화하고 포화자화 값을 증가시켰다. 포화자화 값의 증가는 bcc상의 생성으로 야기되는 것으로 판단된다.