• Title/Summary/Keyword: patterning effect

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Fabrication of Multi-Fin-Gate GaN HEMTs Using Honeycomb Shaped Nano-Channel (벌집구조의 나노채널을 이용한 다중 Fin-Gate GaN 기반 HEMTs의 제조 공정)

  • Kim, Jeong Jin;Lim, Jong Won;Kang, Dong Min;Bae, Sung Bum;Cha, Ho Young;Yang, Jeon Wook;Lee, Hyeong Seok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.1
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    • pp.16-20
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    • 2020
  • In this study, a patterning method using self-aligned nanostructures was introduced to fabricate GaN-based fin-gate HEMTs with normally-off operation, as opposed to high-cost, low-productivity e-beam lithography. The honeycomb-shaped fin-gate channel width is approximately 40~50 nm, which is manufactured with a fine width using a proposed method to obtain sufficient fringing field effect. As a result, the threshold voltage of the fabricated device is 0.6 V, and the maximum normalized drain current and transconductance of Gm are 136.4 mA/mm and 99.4 mS/mm, respectively. The fabricated devices exhibit a smaller sub-threshold swing and higher Gm peak compared to conventional planar devices, due to the fin structure of the honeycomb channel.

Smart Surface Texturing Implant Stem for Enhancement of Osteoblast Cell Biocompatibility (골육세포 성장 촉진을 위한 스마트 써피스 텍스처링 임플란트 스템 제작 기술)

  • Kim, Kyunghan;Lee, Jaehoon;Park, Jongkweon;Jin, Sukwon;Choi, Wanhae;Lee, Hongjin
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.5
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    • pp.375-380
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    • 2014
  • To enhance biocompatibility between the orthopedic implant stem and obsteoblast cells, bone-forming cells, micro-size holes are patterned in Ti plate surface. Initially, the house built laser power stabilization system is applied to the laser micro patterning machine to convince repeatable result. Various pulse widths are irradiated Ti plate and relationship between diameters of patterned holes and pulsed width is derived. Effect of multi pulse is observed and optimal pulse number is considered to avoid heat affected zone. After MG-63 osbeoblast cells are cultured, micro patterned Ti plates are compared with control plates. In SEM image, cells are well aligned and aggregation is observed in both 60, and $100{\mu}m$ patterned plates. Finally, free form surface stem model is prepared to test micro hole patterning.

Grinding Technology for Surface Texturing (연삭기법을 이용한 패터닝 기술)

  • Ko, Tae Jo;Han, Do Sup;Qiu, Kang;Park, Jong-Kweon
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.5
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    • pp.367-373
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    • 2014
  • Surface texturing is a machining process on the surface to give engineering functions. The representative process of the surface texturing is lotus effect to give hydrophobic property by the lithography and chemical etching, which is the bio mimic from the nature. Surface texturing can be manufactured by a lot of processes, in particular using mechanical method such as a precise diamond turning, grinding, rolling, embossing, vibrorolling, and abrasive jet machining (AJM). Among them, the grinding process is notable in terms of the wide range of texturing area and fast processing time. The patterning by grinding is done by the grooved grinding wheel on the work piece. In this case, the pattern shape is determined by the grinding conditions as well as the wheel dressing conditions. In this paper, experimental study on the pattern shapes were done and provide the feasibility in use for the large area patterning.

A Comparison of High Frequency Properties of LTCC Substrate Systems (LTCC 기판 시스템의 고주파 특성 비교)

  • 이영신;김경철;박성대;박종철
    • Journal of the Microelectronics and Packaging Society
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    • v.9 no.3
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    • pp.7-12
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    • 2002
  • In the measurement of the RF properties, the LTCC substrate must be considered as a system including various conductor patterning processes. In this paper, the LTCC substrate system is compared with a conventional PCB(Printed Circuit Board) substrate such as FR-4, Duroid and Teflon, etc. The microstrip resonator method is employed for the measurement of the RF properties in the range of DC to 20 GHz. Experimental results show that the ring resonator method is suitable for system loss measurement, and the series gap resonator method for dielectric constant measurement. The process of conductor patterning and its effect on the system loss were also studied.

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A Study on the Uniformity Improvement of Residual Layer of a Large Area Nanoimprint Lithography

  • Kim, Kug-Weon;Noorani, Rafigul I.;Kim, Nam-Woong
    • Journal of the Semiconductor & Display Technology
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    • v.9 no.4
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    • pp.19-23
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    • 2010
  • Nanoimprint lithography (NIL) is one of the most versatile and promising technology for micro/nano-patterning due to its simplicity, high throughput and low cost. Recently, one of the major trends of NIL is large-area patterning. Especially, the research of the application of NIL to TFT-LCD field has been increasing. Technical difficulties to keep the uniformity of the residual layer, however, become severer as the imprinting area increases. In this paper we performed a numerical study for a large area NIL (the $2^nd$ generation TFT-LCD glass substrate ($370{\times}470$ mm)) by using finite element method. First, a simple model considering the surrounding wall was established in order to simulate effectively and reduce the computing time. Then, the volume of fluid (VOF) and grid deformation method were utilized to calculate the free surfaces of the resist flow based on an Eulerian grid system. From the simulation, the velocity fields and the imprinting pressure during the filling process in the NIL were analyzed, and the effect of the surrounding wall and the uniformity of residual layer were investigated.

The Effect of Consumer Choice Attributes on Customer Satisfaction, Revisit and Word-of-Mouth Intention in a Coffee Shop (커피 전문점 소비자 선택 속성이 고객 만족과 재방문 및 구전 의도에 미치는 영향)

  • Son, Young-Jin
    • Culinary science and hospitality research
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    • v.16 no.4
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    • pp.76-93
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    • 2010
  • The hypothesis testing on the impact relationship of patterning, reliability, kindness and credibility, which are perceived as choice attributes in a coffee shop laid out in this study, showed that they are fit to the models of this study. They also bad a direct repercussion on customer satisfaction, and the customer satisfaction equally affected revisit and word-of-mouth intention. This results show that when the patterning and reliability, and employees' kindness and credibility based on the fresh image in the shop serve as the foundation, its customers also affect satisfaction-maximization, leading to the revisit of the satisfied customers and positive word-of-mouth.

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Study of metal dopants and/or Ag nanoparticles incorporated direct-patternable ZnO film by photochemical solution deposition

  • Kim, Hyun-Cheol;Reddy, A.Sivasankar;Park, Hyung-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.368-368
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    • 2007
  • Zinc oxide (ZnO) has drawn much interest as a potential transparent conducting oxide (TCO) for applying to solar cell and front electrode of electro-luminescent devices. For the enhancement of electrical property of TCOs, dopant introduction and hybridization with conductive nanoparticles have been investigated. In this work, ZnO films were formed on glass substrate by using photochemical solution deposition of Ag nanoparticles dispersed or various metal (Ag, Cd, In, or Sn) contained photosensitive ZnO solutions. The usage of photosensitive solution permits us to obtain a micron-sized direct patterning of ZnO film without using conventional dry etching procedure. The structural, optical, and electrical characteristics of ZnO films with the introduction of metal dopants with/without Ag nanoparticles have been investigated to check whether there is a combined effect between metal dopants and Ag nanoparticles on the characteristics of ZnO film. The phase formation and crystallinity of ZnO film were monitored with X-ray diffractometer. The optical transmittance measurement was carried out using UV-VIS-NIR spectrometer and the electrical properties such as sheet resistance and conductivity were observed by using four-point probe.

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Superhydrophobic Nano Patterning Techniques for Enhanced Performance of Naval Underwater Vessels (군용 수중 운동물체의 성능강화를 위한 초소수성 나노 패터닝 기술)

  • Hong, Soon-Kook;Lee, Ki-Young
    • Journal of Ocean Engineering and Technology
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    • v.27 no.2
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    • pp.114-120
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    • 2013
  • A superhydrophobic surface means that the contact angle between the solid surface and a water droplet is more than $150^{\circ}$. Materials with a superhydrophobic surface have a self-cleaning function because of the Lotus effect, in which water is not absorbed by the material but rolls off of it. If such a Lotus effect can be applied to the surface of underwater vessels, submarines, torpedos, and so on, enhanced vessels can be made based on this lubricant effect reducing the friction coefficient for the liquid. Because polymer composites can be easily applied in various nanotechniques, they are more advantageous than conventional materials like iron in terms of a superhydrophobic surface. Furthermore, a superhydrophobic surface bring enhanced anticorrosion and ecotechnology because no paint is needed on underwater vessels.

Finite Element Analysis of Stress Distribution around the Micro-Patterned Implants (마이크로패터닝을 부여한 임플란트 주변골에서의 하중 분포에 관한 유한요소분석법적 연구)

  • Hur, Bae-Young;Kim, Dae-Gon;Park, Chan-Jin;Cho, Lee-Ra
    • Journal of Dental Rehabilitation and Applied Science
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    • v.24 no.1
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    • pp.67-76
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    • 2008
  • Implant requires long lasting, strong osseointegration using bio-mechanical interlocking by bone ingrowth. In regarding the size level for bone ingrowth, the micro-patterning would enhance bone response. Micro-patterning can increase the area contacting the bone tissues. Therefore, it may distribute the load to the surrounding bone tissue, more effectively. This study compared and analyzed the load distributing effect with the shape and number of micro-patterning. For the optimal comparison of threads, the assumptions different from general finite element analysis model were made. It was assumed that the implant was axisymmetric and infinitely long. The implant was assumed to be completely embedded in the infinitely long cortical bone and to have 100% bone apposition. The implant-bone interface had completely fixed boundary conditions and received an infinitely big axial load. The condition of threads were as follows. The reference model 1 had conventional thread. Model 2 had 2 micro-patterns on the upper flank of the thread. Model 3 had 2 micro-patterns on the lower flank of the thread. Model 4 had 2 micro-patterns on the upper and lower flanks of the thread. Model 5 had 3 micro patterns on the upper and lower flanks of the thread. The results were as follows: 1. The thread with micro-patterns distributed stress better than the conventional thread. 2. The thread with micro-patterns on the lower flank distributed stress better than that with micro-patterns on the upper flank. 3. The thread with 3 micro-patterns distributed stress better than that with 2 micro-patterns, However, an area with stress concentration occurred.