• Title/Summary/Keyword: patterned surface

검색결과 372건 처리시간 1.017초

Laser-Induced Direct Copper Patterning Using Focused $Ar^+$ Laser Beam (집속 아르곤 이온 레이저 빔을 이용한 레이저 유도 직접 구리 패터닝)

  • Lee, Hong-Kyu;Lee, Kyoung-Cheol;Ahn, Min-Young;Lee, Cheon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • 제13권11호
    • /
    • pp.969-975
    • /
    • 2000
  • Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$.4$H_2O$), as a metallo-organic precursor, using a focused CW Ar$^{+}$ laser beam (λ=514nm) on PCB boards and glass substrates. The linewidth and thickness of the lines wee investigated as a functin of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameters using probe station and semiconductor analyzer. We compared resistivities of the patterned copper lines with these of the Cu bulk. Resistivities decreased due to changes in morphology and porosity of the deposit, which were about 3.8 $\mu$$\Omega$cm and 12$\mu$$\Omega$cm on PCB and glass substrates after annealing at 30$0^{\circ}C$ for 5 minutes.s.

  • PDF

Ion Induced Secondary Electron Emission of MgO with Patterned Gold Line Charge Neutralization

  • Lee, Jong-Wan;Lee, Kie-Young;Kim, Hong-Gyu;Ahn, Joon-Hyung;Jung, Won-Joon;Yoon, Sean-J;Byungdu Oh
    • Journal of Korean Vacuum Science & Technology
    • /
    • 제5권1호
    • /
    • pp.7-10
    • /
    • 2001
  • Ion induced secondary electron emission coefficients γ of protecting layers of an AC plasma display panel(AC-PDP) have been measured. In order to solve the surface charging effect during the measurement at insulating samples like MgO, a new method with the patterned gold line charge neutralization has been introduced. The measurement was performed at the samples, MgO and MgO+MgF$_2$, which showed a great difference in the firing voltage between the two protecting layers. The γ value has been compared with the firing voltage Vf of the AC-PDP with the same protecting layer. Correct relationship between γ and Vf has been observed. Thus, the patterned gold line method has been proven to be successful for the measurement of the secondary electron emission yield at insulator sample surfaces.

  • PDF

SERS Immunoassay Using Microcontact Printing for Application of Sensitive Biosensors

  • Hong, Won-Jin;Seo, Hyeong-Kuyn;Jung, Young-Mee
    • Bulletin of the Korean Chemical Society
    • /
    • 제32권12호
    • /
    • pp.4281-4285
    • /
    • 2011
  • We introduced a promising patterned substrate by using a microcontact printing method that can be used for SERS immunoassays based on antigen-antibody binding. SERS spectrum of the Raman reporter with antibody, which is rhodamine 6G (R6G) adsorbed on colloidal gold nanoparticles, was observed only for the surfaces in which prostate-specific antigen (PSA) is present on the substrate that is attached to an immobilized layer of antibody on the gold nanoparticles layer of the patterned substrate. Raman mapping images clearly showed that the antibodies on the Raman reporter were successfully and selectively conjugated with the antigen on the patterned substrate. This method could be potentially extended to multi-protein detections and ultrasensitive biosensors.

Dynamic Characteristics of Droplet Impinging on Multi-layer Texture Surfaces (이중으로 텍스쳐 된 표면에 충돌하는 액적의 동적 특성)

  • Moon, Joo Hyun;Lee, Seong Hyuk
    • Journal of ILASS-Korea
    • /
    • 제21권1호
    • /
    • pp.58-63
    • /
    • 2016
  • This study presents the dynamic characteristics of an impinging droplet on hydrophobic and hydrophilic surfaces with various texture area fractions. The flat surface was fabricated by using the drilling technique to make micro-meter hole-patterned surfaces, which shows hydrophobic textured surfaces. Moreover, the hydrophilic textured surfaces were manufactured by anodizing technique on the micro-meter hole-patterned surfaces to generate multi-layer surfaces. Impinging droplet experiments were conducted for various hole-patterned surfaces, with changing impact velocity and texture area fractions. It is observed that an anodizing technique increases wettability by decrease in hole diameter on the textured surfaces. However, micro-drilled surfaces decreases wettability because the hole diameter was so large that air can be trapped under the holes. In addition, the maximum spreading diameter decreases with the texture area fraction for the micro-drilled surfaces because of decrease in wettability.

Photolithographic Silicon Patterns with Z-DOL (perfluoropolyether, PFPE) Coating as Tribological Surfaces for Miniaturized Devices

  • Singh, R. Arvind;Pham, Duc-Cuong;Yoon, Eui-Sung
    • KSTLE International Journal
    • /
    • 제9권1_2호
    • /
    • pp.10-12
    • /
    • 2008
  • Silicon micro-patterns were fabricated on Si (100) wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and micro-channels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces were then evaluated for their micro-friction behavior in comparison with those of bare Si (100) flat, Z-DOL coated Si (100) flat and uncoated Si patterns. Experimental results showed that the chemically treated (Z-DOL coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the test materials. The results indicate that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro/Nano-Electro-Mechanical-Systems (MEMS/NEMS).

Soft-lithography for Preparing Patterned Liquid Crystal Orientations

  • Kim, Hak-Rim;Jung, Jong-Wook;Shin, Min-Soo;Kim, Myung-Eun;Lee, You-Jin;Kim, Jae-Hoon
    • Journal of Information Display
    • /
    • 제8권2호
    • /
    • pp.5-9
    • /
    • 2007
  • We demonstrate novel soft-lithographic techniques for preparing patterned liquid crystal (LC) orientations at an alignment layer. By controlling patterning conditions such as wetting property and operating temperature depending on polymeric materials, multi-directional or modified LC alignment conditions can be simply achieved.

Laser dissect writing from copper(II) formate using Ar+ laser (아르곤 이온 레이저를 이용한 CU의 직접 쓰기 기술)

  • Lee, Hong-Kyu;Lee, Cheon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
    • /
    • pp.663-666
    • /
    • 2000
  • Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$$.$4H$_2$O), as a precursor, using a focused Ar$\^$+/ laser beam ($\lambda$= 514 nm) on PCB boards and glass substrates. The linewidth and thickness of the lines were investigated as a function of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler (${\alpha}$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameter using probe station and semiconductor analyzer. we compared resistivities of the patterned lines with that of the Cu bulk, respectively.

  • PDF

Fabrication of Micro Patterned Fibronectin for Studying Adhesion and Alignment Behavior of Human Dermal Fibroblasts

  • Lee, Seung-Jae;Son, Young-Sook;Kim, Chun-Ho;Choi, Man-Soo
    • Macromolecular Research
    • /
    • 제15권4호
    • /
    • pp.348-356
    • /
    • 2007
  • The aim of this study was to fabricate a submicro-and micro-patterned fibronectin coated wafer for a cell culture, which allows the positions and dimensions of the attached cells to be controlled. A replica molding was made into silicon via a photomask in quartz, using E-beam lithography, and then fabricated a polydimethylsiloxane stamp using the designed silicon mold. Hexadecanethiol $[HS(CH_2){_{15}}CH_3]$, adsorbed on the raised plateau of the surface of polydimethylsiloxane stamp, was contact-printed to form self-assembled monolayers (SAMs) of hexadecanethiolate on the surface of an Au-coated glass wafer. In order to form another SAM for control of the surface wafer properties, a hydrophilic hexa (ethylene glycol) terminated alkanethiol $[HS(CH_2){_{11}}(OCH_2CH_2){_6}OH]$ was also synthesized. The structural changes were confirmed using UV and $^1H-NMR$ spectroscopies. A SAM terminated in the hexa(ethylene glycol) groups was subsequently formed on the bare gold remaining on the surface of the Aucoated glass wafer. In order to aid the attachment of cells, fibronectin was adsorbed onto the resulting wafer, with the pattern formed on the gold-coated wafer confirmed using immunofluorescence staining against fibronectin. Fibronectin was adsorbed only onto the SAMs terminated in the methyl groups of the substrate. The hexa (ethylene glycol)-terminated regions resisted the adsorption of protein. Human dermal fibroblasts (P=4), obtained from newborn foreskin, only attached to the fibronectin-coated, methyl-terminated hydrophobic regions of the patterned SAMs. N-HDFs were more actively adhered, and spread in a pattern spacing below $14{\mu}m$, rather than above $17{\mu}m$, could easily migrate on the substrate containing spacing of $10{\mu}m$ or less between the strip lines.

Fabrication of Graphene p-n Junction Field Effect Transistors on Patterned Self-Assembled Monolayers/Substrate

  • Cho, Jumi;Jung, Daesung;Kim, Yooseok;Song, Wooseok;Adhikari, Prashanta Dhoj;An, Ki-Seok;Park, Chong-Yun
    • Applied Science and Convergence Technology
    • /
    • 제24권3호
    • /
    • pp.53-59
    • /
    • 2015
  • The field-effect transistors (FETs) with a graphene-based p-n junction channel were fabricated using the patterned self-assembled monolayers (SAMs). The self-assembled 3-aminopropyltriethoxysilane (APTES) monolayer deposited on $SiO_2$/Si substrate was patterned by hydrogen plasma using selective coating poly-methylmethacrylate (PMMA) as mask. The APTES-SAMS on the $SiO_2$ surface were patterned using selective coating of PMMA. The APTES-SAMs of the region uncovered with PMMA was removed by hydrogen plasma. The graphene synthesized by thermal chemical vapor deposition was transferred onto the patterned APTES-SAM/$SiO_2$ substrate. Both p-type and n-type graphene on the patterned SAM/$SiO_2$ substrate were fabricated. The graphene-based p-n junction was studied using Raman spectroscopy and X-ray photoelectron spectroscopy. To implement low voltage operation device, via ionic liquid ($BmimPF_6$) gate dielectric material, graphene-based p-n junction field effect transistors was fabricated, showing two significant separated Dirac points as a signature for formation of a p-n junction in the graphene channel.

Recent Progress in Patterned Membranes for Membrane-Based Separation Process (분리공정을 위한 패턴화 멤브레인 최근 연구 동향)

  • Aung, Hein Htet;Patel, Rajkumar
    • Membrane Journal
    • /
    • 제31권3호
    • /
    • pp.170-183
    • /
    • 2021
  • Fouling has continued to be a problem that hinders the effectiveness of membrane properties. To solve this problem of reducing fouling effects on membrane surface properties, different and innovative types of membrane patterning has been proposed. This article reviews on the progress of patterned membranes and their separation process concerning the fouling effects of membranes. The types of separation processes that utilize the maximum effectiveness of the patterned membranes include nanofiltration (NF), reverse osmosis (RO), microfiltration (MF), ultrafiltration (UF), and pervaporation (PV). Using these separation processes have shown and prove to have a major effect on reducing fouling effects, and in addition, they also add beneficial properties to the patterned membranes. Each patterned membrane and their separation processes gave notable results in threshold towards flux, salt rejections, hydrophilicity and much more, but there are also some unsolved cases to be pointed out. In this review, the effects of patterned membrane for separation processes will be discussed.