• 한국반도체및디스플레이장비학회:학술대회논문집
• /
• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
• /
• pp.128-131
• /
• 2007

As the minimum feature size decrease, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT. Charged monodisperse particles are generated using scanning mobility particle sizer (SMPS) and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well. We calculate the particles loss in pipe flow theoretically and compare with the experimental results.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
• /
• pp.199-202
• /
• 2004

NFGM(Nano-Floating Gate Memory) is a very prospective candidate memory for the next generation with MRAM, PRAM, PoRAM. Among these memory devices for the next generation, NFGM has a lot of merits such as a simple low cost fabrication process, improved retention time, lower operating voltages, high speed program/erase time and so on. Therefore, many intensive researches for NFGM have been performed to improve device performance and reliability, which depends on the ability to control particle size, size distribution, crystallity, areal particle density and tunneling oxide quality. In this paper, we investigate the researches for NFGM up to recently.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1999년도 제14차 학술회의논문집
• /
• pp.270-273
• /
• 1999

Circular dynamic stereo has special advantages as it enables a 3-D measurement using a single TV camera and also enables a high accurate measurement without a cumbersome calibration. Annular particle streaks are recorded using this system and the size of annular streaks directly concerns to the depth from TV camera. That is, the size of annular streaks is inversely proportional to the depth from the TV camera and the depth can be measured automatically by image processing technique. Overlapped streaks can be processed also by our method. The flow measurement in a water tank is one of the applications of our system. Tracer particles are introduced into the water in a flow measurement. Since the tracer particles flow with water, three-dimensional velocity distributions in the water tank can be obtained by measuring the all movement of tracer particles. Experimental results demonstrate the feasibility of our method.

• 한국군사과학기술학회지
• /
• 제18권4호
• /
• pp.415-422
• /
• 2015

The flow field structures of dual jet-in-cross-flow were examined experimentally for in-lined perforated damage holes configuration using particle image velocimetry. Ensemble averaged in-plane velocity and vorticity data in the jet were determined to study the mean jet structure. Jets are formed by pressure differences between upper and lower airfoil surface. The flow structure of vicinity of the thru holes consist of a vortical structure that wrap around the jets like a horseshoe and develop further downstream through a pair of stream-wise vortices. The shape, size and location of the horseshoe vortex were found to be dependent on the angle of attack. In spite of the existence of battle damage holes, the effect on the control force was insignificant when the damage size was not large enough.

• 한국분말야금학회:학술대회논문집
• /
• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
• /
• pp.684-685
• /
• 2006

In the present study, the powder metallurgical fabrication of $Bi_{0.4}Te_3Sb_{1.6}$ thermoelectric materials has been studied with specific interest to control the microstructure by the mechanical grinding process. The $Bi_{0.4}Te_3Sb_{1.6}$ thermoelectric powders with a various particle size distribution were prepared by the combination of the mechanical milling and blending processes. The specific electric resistivity of the $Bi_{0.4}Te_3Sb_{1.6}$ sintered bodies mainly depended on the orientation of the crystal structure rather than the particle size of the raw powders.

• Journal of Magnetics
• /
• 제9권3호
• /
• pp.83-85
• /
• 2004

Magnetic nanoparticles have been investigated for use as biomedical purposes for several years. For biomedical applications the use of particles that present superparamagnetic behavior at room temperature is preferred [1-4]. To control the magnetic materials by magnetic field is essential locate particle to the suitable destination on feeding by injection. In order to use them properly, the particles should be nano size. However there are many difficulties in applications, because there is lack of identifications in nano magnetic properties. In our studies, structural and magnetic properties of iron oxide nanoparticles were investigated by XRD, VSM, TEM, and Mossbauer spectroscopy. At 13 K, hyperfine fields of ${\gamma}-Fe_2O_3$ were 516 kOe and 490 kOe, that of $Fe_3O_4$ were 517 kOe and 482 kOe. The saturation magnetizations were 21.42 emu/g and 39.42 emu/g. The particle size of powders is 5～19 nm.

• Molecular & Cellular Toxicology
• /
• 제4권1호
• /
• pp.52-60
• /
• 2008

In order to investigate whether the particles reduced to almost nano grade might affect the chemical and physical properties of organic materials, whole Korean Black-Red Ginseng was pulverized into almost nano size and then ginsenosides, minerals, carbohydrates, lipids and proteins in the ultrafine particles were compared with those in the regular particles as control. The mean size of the ultrafine particles was in the 350 nm range, while that of the regular particles was $127{\mu}m$. More ginsenosides, minerals, carbohydrates, lipids and proteins were detected in the ultrafine particles than in the regular particles. Interestingly, more lipids from the ultrafine particles dissolved in the water than those from the regular particles in the ethanol. Absorption and transport of carbohydrate, lipid or antioxidant activity across the intestinal wall using everted intestine sacks of mice was also enhanced by particle size reduction at the almost nano scale. More cytotoxic effect against hepatoma cell growth by ultrafine particles was also found. These results could be used as the basic data for the understanding and evaluation of the effects of organic nanomaterials on the human health.

• Macromolecular Research
• /
• 제17권2호
• /
• pp.72-78
• /
• 2009

Size control of therapeutic carriers in drug delivery systems has become important due to its relevance to biodistribution in the human body and therapeutic efficacy. To understand the dependence of particle size on the formation condition during nanoprecipitation method, we prepared nanoparticles from biodegradable, amphiphilic block copolymers and investigated the particle size and structure of the resultant nanoparticles according to various process parameters. We synthesized monomethoxy poly(ethylene glycol)-poly($\varepsilon$-caprolactone) block copolymer, MPEG-PCL, with different MPEG/PCL ratios via ring opening polymerization initiated from the hydroxyl end group of MPEG. Using various formulations with systematic change of the block ratio of MPEG and PCL, solvent choice, and concentration of organic phase, MPEG-PCL nanoparticles were prepared through nanoprecipitation technique. The results indicated that (i) the nanoparticles have a dual structure with an MPEG shell and a PCL core, originating from self-assembly of MPEG-PCL copolymer in aqueous condition, and (ii) the size of nanoparticles is dependent upon two sequential processes: diffusion between the organic and aqueous phases and solidification of the polymer.

• 공업화학
• /
• 제22권2호
• /
• pp.133-137
• /
• 2011

본 연구에서는 다양한 용도로 사용되는 일라이트의 분산성 및 분산안정성을 향상시키고자, 습식 볼밀 분쇄법을 이용하여 일라이트의 입도를 저감하였다. 분쇄 시간에 따른 일라이트의 입도와 입도분포 및 분산특성의 변화를 고찰하였으며, 또한 여러 가지 pH조건에서 두 시간 동안 습식 볼밀 분쇄 처리하여 얻은 일라이트 분산용액의 분산성 및 분산안정성을 평가하였다. 일라이트의 입도분석 결과 분쇄시간의 증가에 따라 입자의 크기가 현저히 감소하였으며, 2 h의 분쇄시간을 기점으로 입도저감의 효과가 저하됨을 확인하였다. 또한, 입도분포분석 결과 분쇄시간의 증가에 따라 입자가 균일해지는 것을 확인하였다. X-선 회절분석 결과 분쇄에 의한 결정구조의 변화는 나타나지 않았으나 입도저감 또는 박리현상으로 인하여 특성 피크의 강도가 입도저감 시간의 증가에 따라 약해지는 것을 확인하였다. Zeta potential 분석 결과, 분쇄시간이 증가함에 따라서 분산성이 높아지는 것을 확인하였다. 분산 안정성 측정 결과 pH 2에서 분쇄처리한 일라이트의 분산안정성이 가장 낮았고 pH가 증가함에 따라서 표면 이온화도의 증가로 분산성 및 분산안정성이 향상되는 것을 확인하였다. 이러한 결과로부터 일라이트는 습식 볼밀 분쇄처리 시간을 증가시킬수록 입자 크기가 감소하고 표면 에너지 증가 및 입자간의 반발력 상승으로 분산성 및 분산안정성이 향상되는 것을 확인할 수 있었다.

• 한국의학물리학회:학술대회논문집
• /
• 한국의학물리학회 2002년도 Proceedings
• /
• pp.267-268
• /
• 2002

Microbeam is a new avenue of radiation research especially in radiation biology and radiation protection. Selective irradiation of an ionizing particle to a targeted cell organelle may disclose such mechanisms as signal transaction among cell organelles and cell-to-cell communication in the processes toward an endpoint observed. Bystander effect, existence of which is clearly evidenced by application of the particle microbeam to biological experiments, suggests potential underestimation in the conventional risk estimation at low particle fluence rates, such as environment of space radiations in ISS (International Space Station). To promote these studies we started the construction of our microbeam facility (named as SPICE) to our HVEE Tandem accelerator (3.4 MeV proton and 5.1 MeV $^4$He$\^$2+/). For our primary goal, "irradiation of single particle to cell organelle within a position resolution of 2 micrometer in a reasonable irradiation time", special features are considered. Usage of a triplet Q magnet for focussing the beam to submicron of size is an outstanding feature compared to facilities of other institutes. Followings are other features: precise position control of cell dish holder, design of the cell dish, data acquisition of microscopic image of a cell organelle (cell nucleus) and data processing, a reliable particle detection, soft and hard wares to integrate all these related data, to control and irradiate exactly determined number of particles to a targeted spot.