• Korean Chemical Engineering Research
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• 제45권2호
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• pp.203-207
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• 2007

불산과 오존 세정 시 실리콘 웨이퍼 표면의 미세입자를 효과적으로 제거할 수 있는 세정 방법에 대하여 연구하였다. 불산의 농도가 0.3 vol% 이상이 되어야 미세입자가 제거 되었으며, 초음파가 인가된 오존수를 사용 시 제거 효율은 증가되었다. 오존과 불산 세정 단계 이후에 추가로 극미량의(0.01 vol%) 희석 암모니아수 세정을 하면 미세입자가 99%이상 제거됨을 확인하였다. 이는 암모니아수에 의한 웨이퍼 표면의 미세 에칭 효과와 알칼리 영역에서의 재흡착 방지 효과가 동시에 작용함에 기인된다고 보인다. 한편, 불산-오존-희석 암모니아수 세정은 통상의 SC-1 세정과 비교할 때 표면 미세 거칠기가 개선되는 경향을 보였다. 불산-오존-희석 암모니아수 세정은 상온에서도 미세입자를 효과적으로 제거할 수 있는 세정 방법으로, 고온 공정 및 과다한 화학액을 사용하는 기존 습식세정의 대안으로서 기대된다.

• 한국입자에어로졸학회지
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• 제9권1호
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• pp.23-29
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• 2013

Inertial impaction type mist eliminators are the most effective instruments to separate mist from the gas. In this work, the effect of the horizontal chevron type mist eliminators is characterized experimentally. Droplet size distribution and evaluation of removal efficiency of the chevron type mist eliminators at different gas flows were investigated using an aerosol particle size analyzer and a portable aerosol spectrometer, respectively. The experimental investigations showed that the mist removal efficiency in these instruments is dependent in the droplet size, and the pressure drop is nil.

• Journal of Forest and Environmental Science
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• 제23권2호
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• pp.73-78
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• 2007

Ultrasonic deinkings of white ledger were carried out to confirm whether the ink removal efficiency and pulp qualities can be improved by the ultrasonic deinking. The effects of conventional pulping and ultrasonic treatment of white ledger on the ink particle size distribution and ink removal coefficient were compared. The physical properties of paper, energy consumption and effluent qualities were measured. The ultrasonic treatment of white ledger resulted in the ink particle size distribution suitable for flotation. The ink removal efficiency, brightness, breaking length and effluent quality were improved by the ultrasonic deinking. It is expected that the competitiveness of ultrasonic deinking system can be improved by the optimization of treatment condition.

• 한국입자에어로졸학회지
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• 제15권4호
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• pp.191-202
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• 2019

In this study, performance (particle removal efficiency and breathing resistance) of several commercially available face masks (electrostatic filter masks (KF80 certified), a nanofiber filter mask (KF80 certified), and an uncertified mask) with their filter structure and composition were evaluated. Also, effects of relative humidity (RH) of incoming air, water and alcohol exposure, and reusability on performance of face masks were examined. Monodisperse and polydisperse sodium chloride particles were used as test aerosols. Except the uncertified mask filter, PM_2.5 removal efficiency was found to be higher than 90%, and the nanofiber filter mask had the highest quality factor due to the low pressure drop and high removal efficiency (nanofibers were arranged in a densely packed pore structure and contained a significant amount of fluorine in addition to carbon and oxygen). In the case of the KF80 certified mask, the removal efficiency was little affected when the RH of incoming air increased. When the mask filters were soaked in water, the removal efficiency of mask filters was degraded. In particular, the uncertified mask filter showed the highest removal efficiency degradation (26%). When the mask was soaked in alcohol, the removal efficiency also decreased with the greater degree than the water soaking case. The nanofiber mask filter showed the strongest resistance to alcohol exposure among tested mask filters. During evaluation of reusability of masks in real life, the removal efficiency of certified mask filter was less than 4% for 5 consecutive days (2 hours per day), while the removal efficiency of uncertified mask filter significantly decreased by 30% after 5 days.

• 한국환경과학회지
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• 제25권4호
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• pp.517-524
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• 2016

In order to treat groundwater containing high levels of nitrate, nitrate reduction by nano sized zero-valent iron (nZVI) was studied using batch experiments. Compared to nitrate removal efficiencies at different mass ratios of $nitrate/Fe^0$, the removal efficiency at the mass ratio of 0.02% was the highest(54.59%). To enhance nitrate removal efficiency, surface modification of nZVI was performed using metallic catalysis such as Pd, Ni and Cu. Nitrate removal efficiency by Cu-nZVI (at $catalyst/Fe^0$ mass ratio of 0.1%) was 66.34%. It showed that the removal efficiency of Cu-nZVI was greater than that of the other catalysts. The observed rate constant ($k_{obs}$) of nitrate reduction by Cu-nZVI was estimated to $0.7501min^{-1}$ at the Cu/Fe mass ratio of 0.1%. On the other hand, TEM images showed that the average particle sizes of synthetic nZVI and Cu-nZVI were 40~60 and 80~100 nm, respectively. The results imply that catalyst effects may be more important than particle size effects in the enhancement of nitrate reduction by nZVI.

• 대한환경공학회지
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• 제22권1호
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• pp.21-31
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• 2000

본 연구에서는 공기청정기, 기수분리기 및 중성능 필터로 구성되는 습식 공기청정장치를 대상으로 입자와 유해가스인 $SO_2$, NO, $NO_2$, HCHO 및 $NH_3$의 제거 특성을 실험적으로 살펴보고, 실험결과를 대상물질의 물리화학적 특성과 연관시켜 검토하였다. 입자제거 실험에서는 대기 에어로졸을 송풍기를 통해 장치에 도입하여 장치의 3곳에서 2대의 레이저 입자계수기로 입자크기 분포를 측정하여 각 구성요소의 입자제거효율을 구하였다. 실험결과로부터 기수분리기에서는 입경이 $5{\mu}m$ 이상인 조대 입자가 주로 제거되고. 중성능 필터에서는 이보다 작은 미세 입자가 주로 제거됨을 알 수 있었다. 유해가스 제거 실험에서는 시험용 가스를 송풍기의 출구에 주입하여 공기청정기의 상류와 기수분리기의 하류에서 가스농도를 측정하여 유해가스 제거효율을 구하였다. 실험결과로부터 헨리상수가 큰 수용성인 $SO_2$, HCHO 및 $NH_3$는 제거효율이 높았으나, 헨리상수가 낮아 난용성인 NO와 $NO_2$는 제거효율이 낮음을 알 수 있었으며, 공기청정기에서 상당량의 음이온이 발생됨을 알았다.

• 산업기술연구
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• 제30권A호
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• pp.127-132
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• 2010

We analyzed the effects of several process variables on the $SO_2$ removal and particle growth by the dielectric barrier discharge - photocatalysts hybrid process. In this process, $SO_2$ was converted into the ammonium sulfate ($(NH_4)_2SO_4$) particles. The size and crystallinity of ammonium sulfate particles were examined by using TEM and XRD analysis. The dielectric barrier discharge reactor consisted of two zones: the first is for plasma generation and the second is for ammonium sulfate particles formation and growth. The first zone of reactor was filled with glass beads as a dielectric material. To enhance $SO_2$ removal process, the $TiO_2$ photocatalysts were coated on glass beads by dip-coating method. As the voltage applied to the plasma reactor or the pulse frequency of applied voltage increases, the $SO_2$ removal efficiency increases. Also as the initial concentration of $SO_2$ decreases or as the residence time increases, the $SO_2$ removal efficiency increases. $(NH_4)_2SO_4$ particles continue to grow by particle coagulation and surface reaction, moving inside the reactor. Larger particles in site are produced according to the increase of residence time or $SO_2$ concentrations.

• 한국레이저가공학회지
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• 제5권2호
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• pp.9-15
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• 2002

Basic principles and unique characteristics of laser-induced shock cleaning have been described compared to a conventional laser cleaning method and the removal of small tungsten particles from silicon wafer surfaces was attempted using both methods. It was found that the conventional laser cleaning was not feasible to remove the tungsten particles whereas a successful removal of the particles was carried out by the laser-induced shock waves. From the quantitative analysis using a surface scanner, the average removal efficiency of the particles was more than 98% where smaller particles were slightly more difficult to remove probably due to the increased adhesion force with a decrease of the particle size. It was also seen that the gap distance between the laser focus and the wafer surface is an important processing parameter since the removal efficiency is strongly dependent on the gap distance.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.362-363
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• 2006

Ozonized DI water was supplied to make alkaline cleaning solutions to replace SCI chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonized water with $NH_4OH$ to a bath without recirculation resulted in higher PRE over 93 %.

• 대한기계학회논문집B
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• 제27권10호
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• pp.1442-1449
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• 2003

We investigated the amount of the toxic gases emitted from the Electrostatic Precipitators(ESPs), which are currently used as the indoor air cleaners. The existing wire-to-plate(WTP) and neddle-to-plate(NTP) types of ESP designs are considered as the experimental corona dischargers. Using the voltage, the polarity of wire, the number of needles of NTP as the input variables, we studied the generation characteristics of ozone and $NO_{x}$ and the particle removal efficiency in the ESPs. As the results, we found out that the concentration of ozone, $NO_{2}$ and $NO_{x}$ is increased with increasing the voltage and the number of needles, but the amount of NO is decreased. And we observed that the generation rates of ozone and $NO_{x}$ are mainly related with the corona region through the photographs. Finally the experimental results showed that the particle removal efficiency of ESP with WTP type charger is more superior to that with NTP type chargers at the same voltage.