• Korean Chemical Engineering Research
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• v.45 no.2
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• pp.203-207
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• 2007

In this paper efficient method for particle removal from silicon wafers by usage of HF and ozone was studied. It was found that at least 0.3 vol% concentration of HF was required for particle removal and removal efficiency increased with the application of megasonic in ozonated water. Additional cleaning with minute amount of ammonia (0.01 vol%) after HF/Ozone step showed over 99% in removal efficiency. It is proposed that the superior cleaning efficiency of HF-Ozone-ammonia is due to micro-etching of silicon surface and impediment of particle re-adsorption in alkali environment. Compared to SC-1 cleaning method micro roughness has also been slightly improved. Therefore it is expected that HF-ozone-ammonia cleaning method is a viable alternative to the conventional wet cleaning methods.

• Particle and aerosol research
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• v.9 no.1
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• pp.23-29
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• 2013

Inertial impaction type mist eliminators are the most effective instruments to separate mist from the gas. In this work, the effect of the horizontal chevron type mist eliminators is characterized experimentally. Droplet size distribution and evaluation of removal efficiency of the chevron type mist eliminators at different gas flows were investigated using an aerosol particle size analyzer and a portable aerosol spectrometer, respectively. The experimental investigations showed that the mist removal efficiency in these instruments is dependent in the droplet size, and the pressure drop is nil.

• Journal of Forest and Environmental Science
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• v.23 no.2
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• pp.73-78
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• 2007

Ultrasonic deinkings of white ledger were carried out to confirm whether the ink removal efficiency and pulp qualities can be improved by the ultrasonic deinking. The effects of conventional pulping and ultrasonic treatment of white ledger on the ink particle size distribution and ink removal coefficient were compared. The physical properties of paper, energy consumption and effluent qualities were measured. The ultrasonic treatment of white ledger resulted in the ink particle size distribution suitable for flotation. The ink removal efficiency, brightness, breaking length and effluent quality were improved by the ultrasonic deinking. It is expected that the competitiveness of ultrasonic deinking system can be improved by the optimization of treatment condition.

• Particle and aerosol research
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• v.15 no.4
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• pp.191-202
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• 2019

In this study, performance (particle removal efficiency and breathing resistance) of several commercially available face masks (electrostatic filter masks (KF80 certified), a nanofiber filter mask (KF80 certified), and an uncertified mask) with their filter structure and composition were evaluated. Also, effects of relative humidity (RH) of incoming air, water and alcohol exposure, and reusability on performance of face masks were examined. Monodisperse and polydisperse sodium chloride particles were used as test aerosols. Except the uncertified mask filter, PM_2.5 removal efficiency was found to be higher than 90%, and the nanofiber filter mask had the highest quality factor due to the low pressure drop and high removal efficiency (nanofibers were arranged in a densely packed pore structure and contained a significant amount of fluorine in addition to carbon and oxygen). In the case of the KF80 certified mask, the removal efficiency was little affected when the RH of incoming air increased. When the mask filters were soaked in water, the removal efficiency of mask filters was degraded. In particular, the uncertified mask filter showed the highest removal efficiency degradation (26%). When the mask was soaked in alcohol, the removal efficiency also decreased with the greater degree than the water soaking case. The nanofiber mask filter showed the strongest resistance to alcohol exposure among tested mask filters. During evaluation of reusability of masks in real life, the removal efficiency of certified mask filter was less than 4% for 5 consecutive days (2 hours per day), while the removal efficiency of uncertified mask filter significantly decreased by 30% after 5 days.

• Journal of Environmental Science International
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• v.25 no.4
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• pp.517-524
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• 2016

In order to treat groundwater containing high levels of nitrate, nitrate reduction by nano sized zero-valent iron (nZVI) was studied using batch experiments. Compared to nitrate removal efficiencies at different mass ratios of $nitrate/Fe^0$, the removal efficiency at the mass ratio of 0.02% was the highest(54.59%). To enhance nitrate removal efficiency, surface modification of nZVI was performed using metallic catalysis such as Pd, Ni and Cu. Nitrate removal efficiency by Cu-nZVI (at $catalyst/Fe^0$ mass ratio of 0.1%) was 66.34%. It showed that the removal efficiency of Cu-nZVI was greater than that of the other catalysts. The observed rate constant ($k_{obs}$) of nitrate reduction by Cu-nZVI was estimated to $0.7501min^{-1}$ at the Cu/Fe mass ratio of 0.1%. On the other hand, TEM images showed that the average particle sizes of synthetic nZVI and Cu-nZVI were 40~60 and 80~100 nm, respectively. The results imply that catalyst effects may be more important than particle size effects in the enhancement of nitrate reduction by nZVI.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.1
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• pp.21-31
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• 2000

Performance characteristics of a wet air cleaning system were investigated experimentally, and discussed in relation with physicochemical properties of the target pollutants. The system is composed of an air cleaner, a separator, and a medium filter. Removal efficiency of the system was measured for ambient particles and gaseous air pollutants: $SO_2$, NO, $NO_2$, HCHO, and $NH_3$. For particle removal test, particles were introduced into the system through a fan, and the particle size distribution was measured at three locations by using two laser particle counters. Particle removal efficiency for each system component was obtained from the particle size distribution. It was found that the separator primarily removed coarse particles greater than $5{\mu}m$ in diameter, and that the medium filter mainly removed fine particles less than $5{\mu}m$ in diameter. For gas removal test, air with gaseous air pollutant was injected into the outlet of the fan, and the concentration was measured both at the upstream of the air cleaner and at the downstream of the separator. It was found that the gaseous species with high Henry's law coefficients, such as $SO_2$, HCHO, and $NH_3$, showed high removal efficiency, but the gaseous species with low Henry's law coefficients, such as NO and $NO_2$, showed low removal efficiencies. It was also found that negative ions were generated from the air cleaner.

• Journal of Industrial Technology
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• v.30 no.A
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• pp.127-132
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• 2010

We analyzed the effects of several process variables on the $SO_2$ removal and particle growth by the dielectric barrier discharge - photocatalysts hybrid process. In this process, $SO_2$ was converted into the ammonium sulfate ($(NH_4)_2SO_4$) particles. The size and crystallinity of ammonium sulfate particles were examined by using TEM and XRD analysis. The dielectric barrier discharge reactor consisted of two zones: the first is for plasma generation and the second is for ammonium sulfate particles formation and growth. The first zone of reactor was filled with glass beads as a dielectric material. To enhance $SO_2$ removal process, the $TiO_2$ photocatalysts were coated on glass beads by dip-coating method. As the voltage applied to the plasma reactor or the pulse frequency of applied voltage increases, the $SO_2$ removal efficiency increases. Also as the initial concentration of $SO_2$ decreases or as the residence time increases, the $SO_2$ removal efficiency increases. $(NH_4)_2SO_4$ particles continue to grow by particle coagulation and surface reaction, moving inside the reactor. Larger particles in site are produced according to the increase of residence time or $SO_2$ concentrations.

• Laser Solutions
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• v.5 no.2
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• pp.9-15
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• 2002

Basic principles and unique characteristics of laser-induced shock cleaning have been described compared to a conventional laser cleaning method and the removal of small tungsten particles from silicon wafer surfaces was attempted using both methods. It was found that the conventional laser cleaning was not feasible to remove the tungsten particles whereas a successful removal of the particles was carried out by the laser-induced shock waves. From the quantitative analysis using a surface scanner, the average removal efficiency of the particles was more than 98% where smaller particles were slightly more difficult to remove probably due to the increased adhesion force with a decrease of the particle size. It was also seen that the gap distance between the laser focus and the wafer surface is an important processing parameter since the removal efficiency is strongly dependent on the gap distance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.362-363
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• 2006

Ozonized DI water was supplied to make alkaline cleaning solutions to replace SCI chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonized water with $NH_4OH$ to a bath without recirculation resulted in higher PRE over 93 %.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.10
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• pp.1442-1449
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• 2003

We investigated the amount of the toxic gases emitted from the Electrostatic Precipitators(ESPs), which are currently used as the indoor air cleaners. The existing wire-to-plate(WTP) and neddle-to-plate(NTP) types of ESP designs are considered as the experimental corona dischargers. Using the voltage, the polarity of wire, the number of needles of NTP as the input variables, we studied the generation characteristics of ozone and $NO_{x}$ and the particle removal efficiency in the ESPs. As the results, we found out that the concentration of ozone, $NO_{2}$ and $NO_{x}$ is increased with increasing the voltage and the number of needles, but the amount of NO is decreased. And we observed that the generation rates of ozone and $NO_{x}$ are mainly related with the corona region through the photographs. Finally the experimental results showed that the particle removal efficiency of ESP with WTP type charger is more superior to that with NTP type chargers at the same voltage.