• Transactions of the Korean Society of Mechanical Engineers B
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• v.22 no.11
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• pp.1564-1570
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• 1998

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at subatmospheric pressures has been studied. We created uniform upstream conditions of particle concentration and measured the detection efficiency, the lower detection limit, and the size response of the ISPM using uniform sized methylene blue aerosol particles. The effect of particle size, particle velocity, particle concentration, and system pressure on the detection efficiency was examined. Results show that the detection efficiency of the ISPM decreases with decreasing chamber pressure, and with increasing mass flow rate. The lower detection limit of the ISPM, determined at 50 % of the measured maximum detection efficiency, was found to be about $0.15{\sim}0.2{\mu}m$, which is similar to the minimum detectable size of $0.17{\mu}$ given by the manufacturer.

• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.1
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• pp.219-224
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• 2014

In this paper, we study the scattering characteristics of particle using Mie scattering based on various variables such as particle size and refraction of particle, wavelength of laser and angle of receiver to get diffuse light. And we consist a optical system for particle detection, then analyzed the characteristics of the optical system. And based on these characteristics, we develop a particle detection chamber for particle counter and shows experiment result.

• Nuclear Engineering and Technology
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• v.53 no.6
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• pp.1942-1946
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• 2021

Gadolinium oxysulfide (GOS) is regarded as a novel scintillator for the realization of ultra-high spatial resolution in neutron imaging. Monte Carlo simulations of GOS scintillator show that the capability of its spatial resolution is towards the micron level. Through the time-of-flight method, the light output of a GOS scintillator was measured to be 217 photons per captured neutron, ~100 times lower than that of a ZnS/LiF:Ag scintillator. A detector prototype has been developed to evaluate the imaging solution with the GOS scintillator by neutron beam tests. The measured spatial resolution is ~36 ㎛ (28 line pairs/mm) at the modulation transfer function (MTF) of 10%, mainly limited by the low experimental collimation ratio of the beamline. The weak light output of the GOS scintillator requires an enormous increase in the neutron flux to reduce the exposure time for practical applications.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3162-3167
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• 2007

The OPS (Optical Particle Sensor) using light scattering from the particles (real-time measurement without physical contact to the particles) can be used for cleanroom or atmospheric environment monitoring. For particles smaller than 300 nm, the detection efficiency becomes lower as scattered light decreases with particle size. To obtain higher detection efficiency with small particles, the flow field in particle chamber and the detection volume should be designed optimally to achieve maximum scattered light from the particles. In this study, a commercial computational fluid dynamics software FLUENT was used to simulate the gas flow field and particle trajectories with various optical chamber designs for 300 nm PSL particle. For estimation of laser viewing volume, we used a commercial computational optical design program ZEMAX. The results will be a great help in the development of OPS which can measure small particles with higher detection efficiency.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.10
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• pp.1359-1367
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• 2000

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure, and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number. We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.

• Journal of the Korea Computer Graphics Society
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• v.25 no.2
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• pp.11-18
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• 2019

In this paper, we propose a framework that can perform acceleration collision detection efficiently by using a cone based collision area in a particle-based system which requires collision detection with many objects. Three conditions determine particle and cone-based collision regions: 1) If there is a cone position within the radius of the adjacent particle, 2) In the case where the position of the adjacent particle exists in the cone area, 3) When adjacent particles exist between two vectors forming a cone area. As a result, it is defined that when the above conditions are all satisfied, the particle and the region of a cone have collided. In this paper, we automatically update the area of the cone, which is the collision detection area, according to the particle movement. Determine the direction and length of the cone based on the position and velocity of the particle to calculate the dynamic change of the cone. Collision detection is performed quickly using only the particles in the finally calculated area. The acceleration method proposed in this paper is simple to implement because it is executed with a closed form equation instead of explicitly creating the tree data structure, and collision inspection performance is improved in all results.

• The Journal of the Korea institute of electronic communication sciences
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• v.7 no.3
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• pp.579-583
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• 2012

We have designed the small particle detection system. The scatteing effect of light was used to detect small particle. The fabricated system consisted of laser diode, lens, pin hole, and photo detector. The aperture, lens, and photo detector were optimized to improve the performance of detection system. The fabricated detection system detected the scattered light by small particle entering into detection system and its response time was fast.

• Particle and aerosol research
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• v.13 no.4
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• pp.159-164
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• 2017

The detection efficiency and characteristics of an optical particle counter (OPC), with various sample nozzle outlet diameters, were experimentally investigated. The OPC system, which was built with original design, was made up of a diode laser, two photodetectors, and a variety of optics such as a beam splitter and a concave mirror. The cone-shaped sampling nozzle was designed to be changeable to alter the outlet diameter, within the range of 1 to 3 mm. For samples, sets of polystyrene latex (PSL) standard particle with various sizes of 1 to $3{\mu}m$, were used. As a result, detection efficiency of the OPC greatly decreased with larger nozzle outlet diameter. Moreover, increased nozzle outlet diameter means broader sample flow, thus caused light interference and multiple scattering which results in abnormal high peaks in scattered light signal. The ratio of abnormal peaks to regular signal of single particle increased with larger nozzle outlet diameter.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.10
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• pp.1826-1835
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• 2007

In this paper, we present a new approach for automatic detection and tracking for multiple targets. We combine a highest probability data association(HPDA) algorithm for target detection with a particle filter for multiple target tracking. The proposed approach evaluates the probabilities of one-to-one assignments of measurement-to-track and the measurement with the highest probability is selected to be target- originated, and the measurement is used for probabilistic weight update of particle filtering. The performance of the proposed algorithm for target tracking in clutter is compared with the existing clustering algorithm and the sequential monte carlo method for probability hypothesis density(SMC PHD) algorithm for multi-target detection and tracking. Computer simulation studies demonstrate that the HPDA algorithm is robust in performing automatic detection and tracking for multiple targets even though the environment is hostile in terms of high clutter density and low target detection probability.

• Particle and aerosol research
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• v.13 no.1
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• pp.25-31
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• 2017

This paper offer the characteristics for the detection and classification of biological and non-biological aerosol particles in the air by using laser-induced-fluorescence (LIF) based Bio-aerosol Detection System (BDS). The BDS is mainly consist of an optical chamber, in-outlet nozzle system, 405 nm diode laser, an avalanche photo detector (APD) for scattering signal and photomultiplier tubes (PMT) for fluorescence signals in two different wavelength range ; F1, 510-600 nm and F2, 435-470 nm. The detection characteristics, especially ratio of fluorescence signal intensity were examined using well-known components : polystylene latex (PSL), fluorescence PSL, $2{\mu}m$ of SiO2 micro sphere, dried yeast, NADH, ovalbumin, fungicide powder and standard dust. The results indicated that the 405 nm diode laser-based LIF instrument can be a useful bio-aerosol detection system for unexpected biological threaten alter in real-time to apply for dual-use technology in military and civilian fields.