• Korean Journal of Materials Research
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• v.5 no.4
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• pp.397-404
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• 1995

반도체 세정공정에서 염기성 세정액(SCI, Standard cleaning 1, $NH_{4}$OH + $H_{2}$O_{2}$ + $H_{2}$O)은 공정상 발생되는 여러 오염물 중 파티클의 제거를 위해 널리 사용되고 있는데, SCI 조성중 $NH_{4}$OH양에 따라 세정 중 실리콘의 식각속도를 증가시킨다. 이 연구에서는 SCI 세정이 CZ(Czochralski)와 에피 실리콘 기판 표면에 미치는 영향을 단순세정과 연속적인 산화-HF 식각-SCI 세정공정을 통해 관찰되었다. CZ와 에피 기판을 8$0^{\circ}C$의 1 : 2 : 10과 1 : 1 : 5 SCI 용액에서 60분까지 단순 세정을 했을 때 laser particle scanner와 KLA사의 웨이퍼 검색장치로 측정된 결함의 수는 세정시간에 따라 변화를 보이지 않았다. 그러나 CZ와 에피 기판을 10분간 SCI 세정후 90$0^{\circ}C$에서 산화 HF식각공정을 4번까지 반복하였을 때 에피 기판 표면의 결함수는 감소하는 반면에 CZ기판에서는 직선적으로 증가하였다. 반복적인 산화-HF 식각-XCI 세정공정을 통해 생성된 CZ기판 표면의 결함은 크기가 0.7$\mu$m 이하의 pit과 같은 형상을 보여주었다. 이들 결함은 열처리 중 CZ 기판내와 표면에 산화 석출물들이 형성, 반복적인 HF 식각-SCI 세정공정을 통해 다른 부위에 비해 식각이 빨리 일어나 표면에 생성되는 것으로 여기어 진다.

• Progress in Superconductivity and Cryogenics
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• v.21 no.2
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• pp.22-25
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• 2019

The superconducting magnetic separation system has been developing to separate the iron oxide scale from the feed water of the thermal power plant. The accumulation in the boiler lowers the heat exchange rate or in the worst case damages it. For this reason, in order to prevent scale generation, controlling pH and redox potential is employed. However, these methods are not sufficient and then the chemical cleaning is performed regularly. A superconducting magnetic separation system is investigated for removing iron oxide scale in a feed water system. Water supply conditions of the thermal power plant are as follows, flow rate 400 t / h, flow speed 0.2 m / s, pressure 2 MPa, temperature $160-200^{\circ}C$, amount of scale generation 50 - 120 t / 2 years. The main iron oxide scale is magnetite (ferromagnetic substance) and its particle size is several tens ${\mu}m$. As the first step we are considering to introduce the system to the chemical cleaning process of the thermal power plant instead of the thermal power plant itself. The current status of development will be reported.

• Journal of Ocean Engineering and Technology
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• v.25 no.5
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• pp.15-20
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• 2011

This study carried out a series of experiments involving impact tests (Drop Weight type & Charpy type with a standard specimen and newly designed I-type specimen), hardness tests, and fracture surface observations of French-made roll shell steel (F), abnormal roll shell steel (M), reheated roll shell steel (R), and S25C steel under heat treatment conditiAn experimental study was carried out to study the solid-liquid mixture upward hydraulic transport of solid particles in vertical and inclined annuli with a rotating inner cylinder. The lift forces acting on a fluidized particle play a central role in many important applications such as the removal of drill cuttings in horizontal drill holes, sand transport in fractured reservoirs, sediment transport, the cleaning of particles from surfaces, etc. In this study a clear acrylic pipe was used to observe the movement of solid particles. Annular velocities varied from 0.4 to 1.2 m/s. The effect of the annulus inclination and drill pipe rotation on the carrying capacity of a drilling fluid, particle rising velocity, and pressure drop in a slim hole annulus were measured for fully-developed flows of water and aqueous solutions of CMC (sodium carboxymethyl cellulose) and bentonite. The rotation of the inner cylinder was efficient at carrying particles to some degree. For a higher particle volume concentration, the hydraulic pressure loss of the mixture flow increased because of the friction between the wall and solids or between solids.

• Tribology and Lubricants
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• v.35 no.5
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• Journal of Adhesion and Interface
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• v.21 no.4
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• pp.143-155
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• 2020

Hydrophobic Organic-Inorganic (O-I) hybrid materials prepared by sol-gel process have been widely used at functional coating fields such as coatings for anti-corrosion, anti-icing, self-cleaning, anti-reflection. The key point for fabricating hydrophobic surface is to optimize the surface energy and roughness of the coating films. There are typical processes to control the surface energy and roughness which are 'In situ fabricating', 'Pre-fluorinating/Post-roughening', 'Pre-roughening/ Post-fluorinating'. In this study, particle-binder process was used for in-situ fabrication of hydrophobic coating films. Various O-I hybrid compounds prepared using several kinds of alkoxysilane compounds were used as a binder for silica nanoparticles at particle-binder process. To study effect of fluorine content and weight ratio of particle : binder on the hydrophobicity and surface morphology, Hydrophobic coating films were prepared onto glass substrate at various content of fluorine content of O-I hybrid binder and weight ratio of particle : binder. The coating films prepared using O-I hybrid binder (GPTi-HF10) having 10 wt% of fluorine content showed the highes water contact angle (107.52±1.6°). The coating films prepared at 1:3 weight ratio of GPTi-HF10 : silica nanoparticle exhibited the highest water contact angle (130.84±1.99°).

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.1315-1320
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• 2008

An experimental study was carried out to study the solid-liquid mixture upward flow in a vertical and inclined annulus with rotating inner cylinder. Lift forces acting on a fluidized particle plays a central role in many importance applications, such as the removal of drill cuttings in horizontal drill holes, sand transport in fractured reservoirs, sediment transport and cleaning of particles from surfaces, etc. Field measurements have revealed that the pressure drop over a borehole during drilling of a slim oil well or a well with a long reach can depend significantly on the rotation speed of the drill pipe. An accurate prediction of the annular frictional pressure drop is therefore important for conditions where the annular clearance is small. Effect of annulus inclination and drill pipe rotation on the carrying capacity of drilling fluid, particle rising velocity, and pressure drop in the slim hole annulus have been measured for fully developed flows of water and of aqueous solutions.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.7
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• pp.1002-1009
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• 2000

Among the various types of diesel after-treatment device, the corona discharge reactor may be considered as a powerful process for trapping submicron particles. But after precipitation on the electrodes occurs, the reentrainment of particles is severe and often causes low or negative precipitation efficiency. Experiments were performed to investigate the effect of an applied voltage on the reentrainment of soot particles from the electrodes. A co-annular laminar diffusion flame burner was used as the soot generator. When a highly negative voltage was applied, exfoliation of the deposited soot particles and an increase in concentration of particles smaller than approximately 150 nm were observed. Turbulence induced from the negative tuft corona and sputtering caused particle reentrainment from the corona wire and from plates as well. Under soot laden combustion gas, a streamer corona often occurred in the wire-cylinder reactor. Because of its transient nature, streamer corona violently increased the concentration of reentrained particles and CO gas.

• Advances in Energy Research
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• v.4 no.3
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• pp.223-237
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• 2016

The excess use of conventional sources of energy by the industries and power sector result in acute shortage of energy produced by fossil fuel. To overcome this energy crisis, biomass feedstock is used to produce syngas or producer gas. For cleaning the dust particle present in the producer gas cyclone separators are largely used. In this paper we investigate the performance parameters of cyclone separator mainly efficiency and pressure drop for different feedstock. Cyclone performance has been evaluated based on experimentation and empirical approach using Leith and Licht model. The same has also been calculated by using turbulent RSM in Ansys Fluent for Wood and Coconut shell feedstock. Experimental results show that using feed stock with 10 % Calcium oxide (CaO) by weight, the efficiency of cyclone got reduced from 71.87% to 70.75% for wood feed stock, whereas in case of coconut shell, the cyclone efficiency got reduced from 78% to 73.44%. It is also seen that Leith and Licht model and Reynolds stress model (RMS) predicts very close to the particle collection efficiency evaluated by using experimental data.

• Journal of the Korean Society of Industry Convergence
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• v.24 no.6_2
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• pp.737-744
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• 2021

An investigation is conducted to study a solid-liquid mixture vertically upward hydraulic transport of solid particles by non-Newtonian fluids in the Mud system. Rheology of particulate suspensions in viscoelastic fluids is of importance in many applications such as particle removal from surfaces, transport of proppants in fractured reservoir and cleaning of drilling holes, etc. In this study a clear acrylic pipe was used in order to observe the movement of solid particles. Annular velocities varied from 0.4 m/s to 1.2 m/s. The mud systems which were utilized included aqueous solution of sodium carboxymethyl cellulose (CMC) solutions. Main parameters considered in the study were inner-pipe rotary speed, fluid flow regime and particle injection rate. Solid volumetric concentration and pressure drops were measured for the various parameters such as inclination angle, flow rate, and rotational speed of inner cylinder.

• Particle and aerosol research
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• v.18 no.4
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• pp.109-127
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• 2022

Recently, low-cost particulate matter (PM) sensors have been widely used in monitoring mass concentration. Maintaining the accuracy of the sensors is important and requires rigorous performance evaluation and calibration. In this study, two commercial low-cost PM sensors(LCS), Plantower PMS3003 and Plantower PMS7003, were evaluated in the laboratory and field with a reference-grade PM monitor (GRIMM 11-D). Laboratory evaluation was conducted with single/mixed particles of PSL (Poly Styrene Latex) in an acrylic chamber at 20℃ and relative humidity of 20%. Field evaluation was conducted inside a building of Yonsei University (Shinchon) from February 12 to March 31, 2022. In both evaluations, LCS measured values became different from reference measured values when the relative humidity was high or the outdoor air PM10/PM2.5 ratio was high. Based on the field evaluation, the LCS measured values were corrected through four different regression analysis models. As a result, the multivariate polynomial regression analysis model showed highest matching with the reference PM monitor (PM2.5 >0.9, PM10 >0.85). In this model, the PM10/PM2.5 ratio and relative humidity were chosen as independent variables.