• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.171-175
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• 2001

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics and metal, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter level dielectrics and metal. Especially, defects like (micro-scratch) lead to severe circuit failure, and affects yield. Current conditioning method - bladder type, orbital pad motion- usually provides unsuitable pad profile during ex-situ conditioning near the end of pad life. Since much of the pad wear occurs by the mechanism of bladder type conditioning and its orbital motion without rotation, we need to implement new ex-situ conditioner which can prevent abnormal regional force on pad caused by bladder-type and also need to rotate the pad during conditioning. Another important study of ADPC is related to the orbital scratch of which source is assumed as diamond grit dropped from the strip during ex-situ conditioning. Scratch from diamond grit damaged wafer severely so usually scraped. Figure 1 shows the typical shape of scratch damaged from diamond. e suspected that intensive forces to the edge area of bladder type stripper accelerated the drop of Diamond grit during conditioning. so new designed Flat stripper was introduced.

• 한국의류학회지
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• 제41권1호
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• pp.141-152
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• 2017

The lumbar disc is one of the first parts of the human body to age. Female discs start to age at twenty and completely age between fifty and sixty. The number of lumbar herniated intervertebral disc patients is increasing rapidly; however, studies on protective inner wear are insufficient. This study develops protective inner wear equipment for bodies. The following were the study methods and procedures. First, the protective design, pattern and making of the inner wear were based on the analysis of collected data. Second, one subject was selected, then human body parts were measured to create the inner protective pattern. The inner pattern was made by the basic size of the subject. The inner protective equipment was made for lumbar disc disease patients after a wearing test and after correcting the pattern. Third, inner protective equipment was thoroughly tested to verify the compatibility of lumbar pads. The following were the study results and observations. First, lumbar pads who had inner protection were easily worn and the design was very ladyish in contrast to other lumbar pads on the market. Second, the pattern was completed by referring to, Lee Hyoung Sook's, torso and her lumbar pad shape. The fabric was mesh (for good ventilation) and poly spandex (for elasticity). Third, lumbar inner protective equipment was verified through a subject assessment and a major assessment. This study showed high scores on appearance and functional satisfaction versus existing disc lumbar pads in the market. This study predicts that new waist protective inner wear can help the female patient's health and social life because it has great functionality and can maintain outer line patterns.

• Carbon letters
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• 제5권1호
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• pp.6-11
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• 2004

In spite of unparalleled combination of essential material properties for brake linings and clutch facings, replacement for asbestos is seriously called for since it is a health hazard. Once asbestos is replaced with other material then composition and properties of brake pad changes. In certain cases hardness of the material may be high enough to affect the rotor material. In this study, hardness of the brake pad has been controlled using suitable reinforcement materials like glass, carbon and Kevlar pulp. Brake pad formulations were made using CNSL (cashew net shell liquid) modified phenolic resin as a binder, graphite or cashew dust as a friction modifier and barium sulphate, talc and wollastonite as fillers. Influence of each component on the hardness value has been studied and a proper formulation has been arrived at to obtain hardness values around 35 on Scleroscopic scale. Friction and wear properties of the respective brake pad materials have been measured on a dynamometer and their performance was evaluated.

• Nuclear Engineering and Technology
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• 제55권6호
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• pp.2325-2334
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• 2023

To study the lubrication performance of tilting-pad thrust bearing (TPTBs) during start-up in nuclear pump, a hydrodynamic lubrication model of TPTBs was established based on the computational fluid dynamics (CFD) method and the fluid-structure interaction (FSI) technique. Further, a mesh motion algorithm for the transient calculation of thrust bearings was developed based on the user defined function (UDF). The result demonstrated that minimum film thickness increases first and then decreases with the rotational speed under start-up condition. The influence of pad tilt on minimum film thickness is greater than that of collar movement at low speed, and the establishment of dynamic pressure mainly depends on pad tilt and minimum film thickness increases. As the increase of rotational speed, the influence of pad tilt was abated, where the influence of the moving of the collar dominated gradually, and minimum film thickness decreases. For TPTBs, the circumferential angle of the pad is always greater than the radial angle. When the rotational speed is constant, the change rate of radial angle is greater than that of circumferential angle with the increase of loading forces. This study can provide reference for improving bearing wear resistance.

• 한국의류산업학회지
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• 제22권3호
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• pp.271-286
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• 2020

This study evaluated designs via the consumers' function and design preferences survey for using product design images, virtual avatar wearing images and product explanations that identified consumers' function and design preferences for knee protection pads as well as to develop movement assistive knee pad designs. We developed Design A for men and Design B for women. For Design A, the front of the knee supports muscles and alleviates pain with a hole. Mesh material with good ventilation was applied to enhance wearing comfort. The color was achromatic for a modern style, and the hook fastener and loops enabled easy wear and removal of the pad while controlling size and pressure strength. For Design B, taping details seamlessly support muscles in the knee area with fabrics less than 0.1 cm thick and with long sleeves in the diverse sizes. The design's satisfaction assessment showed that potential consumers were satisfied with Design A and Design B for overall design and functional features. Over 77% wanted to use/wear and purchase designs; in addition, over 78% expected it would help with walking and relieve knee pain. The results can be helpful for designers when deciding designs for manufacturing and commercializing kneepad products.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1998년도 제28회 추계학술대회
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• pp.330-336
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• 1998

The friction and wear characteristics of automotive friction materials reinforced with carbon fibers were studied using a direct drive brake dynamometer. Two types of model friction materials, a low-metallic and an NAO type, were prepared and each of the materials was modified by substituting 5 vol% of carbon fibers with other reinforcing fiber used in the model formulations. Drag tests were carried out to investigate the friction properties of these materials at various braking conditions. Results showed that the modified friction materials were improved in the friction stability and the wear resistance.

• Tribology and Lubricants
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• 제27권2호
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• pp.95-100
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• 2011

The brake disc materials for railway vehicle have been mainly used cast-iron. The brake disc and pad should be light, resist to a thermal crack and absorb enough friction energy. In order to satisfy this requirement, aluminum alloy brake disc for railway vehicle has been newly developed. The aluminum itself has not been considered the friction material for railway vehicle. However, in the case of aluminum composite with dispersed ceramic particles, friction characteristics, resistance to wear and heat are much improved. In the present study, aluminum composite brake disc of 20% ceramic particle and three kinds of organic pads have been tested in dynamometer. The results show that Al MMC brake disc and pad have good friction coefficient and wear rate, and thermal cracks in brake disc have not been initiated. Also, the Al MMC brake disc can be applied to railway vehicle of 150 km/h.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.231-234
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• 2004

Chemical mechanical polishing(CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with the slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various coefficient of friction was attained and analyzed with the kind of pad, abrasive and the abrasive concentration. The lubrication regime is also classified with ${\eta}v/p(\eta,\;v\;and\;p;$ the viscosity, relative velocity and pressure). Especially, the co-relation not only between the friction force and the removal per unit distance but also between the coefficient of friction and within-wafer-nonuniformity was estimated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.123-124
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• 2010

• Tribology and Lubricants
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• 제35권6호
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• pp.330-336
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• 2019

Conditioning is a process involving pad surface scraping by a moving metallic disk that is electrodeposited with diamond abrasives. It is an indispensable process in chemical-mechanical planarization, which regulates the pad roughness by removing the surface residues. Additionally, conditioning maintains the material removal rates and increases the pad lifetime. As the conditioning continues, the pad profile becomes unevenly to be deformed, which causes poor polishing quality. Simulation calculates the density at which the diamond abrasives on the conditioner scratch the unit area on the pad. It can predict the profile deformation through the control of conditioner dwell time. Previously, this effect of the diamond shape on conditioning has been investigated with regard to microscopic areas, such as surface roughness, rather than global pad-profile deformation. In this study, the effect of diamond shape on the pad profile is evaluated by comparing the simulated and experimental conditioning using two conditioners: a) random-shaped abrasive conditioner (RSC) and b) uniform-shaped abrasive conditioner (USC). Consequently, it is confirmed that the USC is incapable of controlling the pad profile, which is consistent with the simulation results.