• Transactions on Electrical and Electronic Materials
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• v.8 no.1
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• pp.11-14
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• 2007

Consumables used in Chemical Mechanical Polishing (CMP) have been played important role to improve quality and productivity. Since the properties of consumables constantly change with various reasons, such as shelf time, manufactured time, lot to lot variation from supplier and so on, CMP results are not constant during the process. Also, CMP process results are affected by multiple sources from wafer, conditioner, pad and slurry. Therefore, multiple sensing systems are required to monitor CMP process variation. In this paper, the authors focus on development of monitoring system for CMP process which consist of force, temperature and displacement sensor to measure the signal from CMP process. With monitoring systems mentioned above, complex CMP phenomena can be investigated more clearly.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.792-795
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• 2005

The guide-ways of precision machine tools are one of important element of machine tools. It has usually a pair of surfaces for constraint of one direction with bearing. In the case of precision machine tools, non-contact bearing such as hydrostatic bearing and aerostatic bearing is adopted usually. In this case, profiles of rails has effect on straightness and the clearance of bearing has effect on stiffness of guide way, which changes to higher if clearance changes to smaller. The clearance is varied along moving table according to relative distance of pair of rails. The relative distance of pair of rail can be divided by three properties. First and second properties are straightness of each pair of rail and bearing pad. And, third is parallelism about pair of rails and pairs of bearing pad. There are several methods for measuring straightness of each surface such as reversal method, sequential two point method, and way straightness. These straightness measuring methods are always acquiring deviation of profile from eliminating linear fitted inclined line and don't have the information of parallelism. Therefore, to get the small clearance for high stiffness, the straightness of rail and bearing pad and parallelism about pair of rails and pair of bearing pads are measured for correction such as regrinding, reassembling and lapping. In this research, new and easy method for measuring parallelism of pair of rails is suggested. Two displacement probe and sensor stage, which is carry on the displacement sensor, are needed. The simulation and experiment was accomplished about pair of horizontal guide way to confirm the measurement of parallelism. And, the third probe is added to measure the straightness of each rails by sequential two point method. From the estimation of combined these two methods, it is confirmed that the profiles of a pairs of rails can be measured.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.277-277
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• 2011

디스플레이의 기술발전에 의해 대면적 고해상도의 LCD가 제작되어 왔다. 이에 따라 LCD 점등검사를 위한 Probe Unit의 기술 또한 급속도로 발전하고 있다. 고해상도에 따라 TFT LCD pad가 미세피치화 되어가고 있으며, panel의 검사를 위한 Probe 또한 30 um 이하의 초미세피치를 요구하고 있다. 따라서, 초미세 pitch의 LCD panel의 점등검사를 위한 Probe Unit의 개발이 시급하가. 본 연구에서는 30 um 이하의 미세피치의 Probe block을 위한 Slit wafer의 식각 공정 조건을 연구하였다. Si 공정에서 식각율과 식각깊이에 따른 profile angle의 목표를 설정하고, 식각조건에 따라 이 두 값의 변화를 관측하였다. 식각실험으로 Si DRIE 장비를 이용하여, chamber 압력, cycle time, gas flow, Oxygen의 조건에 따라 각각의 단면 및 표면을 SEM 관측을 통해 최적의 식각 조건을 찾고자 하였다. 식각율은 5um/min 이상, profile angle은 $90{\pm}1^{\circ}$의 값을 목표로 하였다. 이 때 최적의 식각조건은 Etching : SF6 400 sccm, 10.4 sec, passivation : C4F8 400 sccm, 4 sec의 조건이었으며, 식각공정의 Coil power는 2,600 W이었다. 이러한 조건의 공정으로 6 inch Si wafer에 공정한 결과 균일한 식각율 및 profile angle 값을 보였으며, oxygen gas를 미량 유입함으로써 식각율이 균일해짐을 알 수 있었다. 결론적으로 최적의 Slit wafer 식각 조건을 확립함으로써 Probe Unit을 위한 Pin 삽입공정 또한 수율 향상이 기대된다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.482-483
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• 2009

In chemical mechanical planarization (CMP) process, the uniformity of stress acting on wafer surface is a key factor for uniform material removal of thin film especially in the oxide CMP. In this paper, we analyze the stress on the contact region between wafer and pad with finite-element analysis (FEA). The setting pressure acting on wafer back side was $500g/cm^2$ and the retainer pressure was changed from 300 to $700g/cm^2$. The polishing test is also done with the same conditions. The material removal rate profiles well-matched with stress distribution.

• The Journal of Korean Medicine
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• v.34 no.1
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• pp.1-14
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• 2013

Objectives: This study was designed to investigate the anti-obesity, anti-diabetic and anti-inflammatory effects of Platycodi radix on obese type 2 diabetes mouse model. Methods: Obese type 2 diabetes mouse model was induced by Surwit's high fat, high sucrose diet for 8 weeks. Models were divided into 4 groups of normal diet (ND, n=10), high fat and high sucrose diet (HFD, n=10), high fat and high sucrose diet with Platycodi radix (PR, n=10), and high fat and high sucrose diet with Metformin (Met, n=10). Body weights were measured every week. After 7 weeks fasting, blood sugar and oral glucose tolerance tests were conducted. After 8 weeks blood samples were taken from mouse hearts and analyzed biochemically. Lipid profile, fructosamine, leptin and weight of epididymal fat pad and liver were measured. Adipose tissue macrophage percentage was analyzed by fluorescence-activated cell sorting (FACS). Results: Compared with the HFD group, body weight, glucose level, fructosamine, weight of epididymal fat pad and adipose tissue macrophage percentage decreased in the PR group. Conclusions: These results suggest that Platycodi Radix has anti-obesity, anti-diabetic, and anti-inflammatory effects on obese type 2 diabetes mouse model.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.23 no.4
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• pp.403-407
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• 2010

Gecko adhesion system consists of beam-shaped seta and spatula which has the role of adhesive pad. In this paper, adhesion mechanism of gecko adhesion system is performed by using adhesive beam contact model. this model has a feature of non-uniform stress profile on the contact surface and adhesion/detachment mechanism is determined by the tensile stress of the contact region. a spatula tip pad has the role of reduction of maximum tensile stress and adhesive force is increased due to this effect. As for a reverse loading case, maximum compressive stress drops by the spatula effect and this cause unsymmetric loading conditions between adhesion and detachment forces. In this study, finite element method is used for the analysis of adhesive beam contact model and the results for spatula effect are presented.

• Journal of Nutrition and Health
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• v.40 no.8
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• pp.675-683
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• 2007

This study was conducted to investigate the effects of feeding different carbohydrate sources and garcinia cambogia extract(HCA) on body weight and lipid metabolism. Fifty 10-month-old male Sprague-Dawley rats weighting $635{\pm}6g$ were randomly divided into 5 groups and fed different experimental diets for 4 weeks. The carbohydrate(CHO) sources of each group were cornstarch(control group, 100% of CHO), fructose(F group and FH group, 25% of CHO) and sucrose(S group and SH group, 25% of CHO). FH group and SH group were fed diets containing 1%(W/W) of HCA. Food intake, body weight gain, and calorie efficiency were not significantly different among the groups. Perirenal fat pad weight of FH group was significantly lower than F group, but epididymal fat pad weight was not different among the groups. Fasting glucose level were not significant among the groups. Plasma lipid profile of FH or SH group was slightly lower than F or S group, respectively. The degree of difference of plasma lipid level was greater between F and FH group than those of between S and SH group. In liver, total lipid, triglyceride and total cholesterol level were slightly higher in F group than S group, and tended to be lower in FH group than F group, but tended to be higher in SH group than S group. Liver citrate lyase activity were not significant among the groups. These results suggest that HCA is potential material for reduction of body weight and improvement of plasma lipid profiles. But, there was no difference between fructose intake with HCA and sucrose intake with HCA in reduction of body weight and lipid metabolism.

• The Journal of the Convergence on Culture Technology
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• v.8 no.5
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• pp.515-524
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• 2022

The turnout system of the sleeper floating tracks (STEDEF) on urban transit is a Anti-vibration track composed of a wooden sleeper embedded in a concrete bed and a sleeper resilience pad under the sleeper. Therefore, deterioration and changes in spring stiffness of the sleeper resilience pad could be cause changes in sleeper support conditions. The damage amount of manganese crossings that occurred during the current service period of about 21 years was investigated to be about 17% of the total amount of crossings, and it was analyzed that the damage amount increased after 15 years of use (accumulated passing tonnage of about 550 million tons). In this study, parameter analysis (wheel position, sleeper support condition, and dynamic wheel load) was performed using a three-dimensional numerical model that simulated real manganese crossing and wheel profile, to analyze the damage type and cause of manganese crossing that occurred in the actual field. As a result of this study, when the voided sleeper occurred in the sleeper around the nose, the stress generated in the crossing nose exceeded the yield strength according to the dynamic wheel load considering the design track impact factor. In addition, the analysis results were evaluated to be in good agreement with the location of damage that occurred in the actual field. Therefore, in order to minimize the damage of the manganese crossing, it is necessary to keep the sleeper support condition around the nose part constant. In addition, by considering the uniformity of the boundary conditions under the sleepers, it was analyzed that it would be advantageous to to replace the sleeper resilience pad together when replacing the damaged manganese crossing.

• Journal of Nutrition and Health
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• v.39 no.8
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• pp.733-741
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• 2006

The study was conducted to investigate the effects of dietary calcium and soy isoflavone on body fat and lipid metabolism in high fat-induced obesity. Four week old female C57/BL6J mice, known as a good model of diet-induced obesity, were fed low Ca and high fat diet for 6 weeks. After induced obesity, mice were divided into six groups according to diets varying calcium contents (0.1 or 1.5%) and genistein contents (0 or 500 or 1,000 ppm). Body weight, fat pad (perirenal fat and parameterial fat), adipocyte size, serum total lipid and total cholesterol were significantly decreased by both high Ca intake and genistein supplementation. However, the effect of genistein supplementation showed in low Ca-fed groups. Serum LDL-cholesterol and TG were significantly decreased by high Ca intake and genistein supplementation, respectively. In liver, lipogenic enzymes (fatty acid synthase and malic enzyme) activity and TG were significantly decreased by both high Ca intake and genistein supplementation. This inhibitory effect of genistein on lipogenic enzymes showed in low Ca-fed groups. But liver total cholesterol and total lipid were significantly decreased by high Ca intake and genistein supplementation, respectively. Fecal excretion of total lipid, total cholesterol and TG were significantly increased by high Ca intake, not by genistein supplementation. In conclusion, high calcium intake and genistein supplement may be beneficial for suppression of obesity through direct anti-adipogenesis by decreasing fat weight and size and indirect anti-lipo-genesis by inhibiting lipogenic enzymes activity and improving lipid profile.

• YAKHAK HOEJI
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• v.36 no.1
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• pp.17-25
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• 1992

The general and some other pharmacological actions of growth hormone without N-terminal methionine(rhGH) were investigated in animals. The hormone had no influences on the central nervous system and on body temperature at a high oral dose of 40 IU/kg in animals. It had neither analgesic nor antiepileptic actions at the high doses. In the isolated ileum and trachea of guinea-pig and isolated stomach fundus and uterus of rat, it showed neither contractive nor relaxing effects at a concentration of $1{\times}10^{-3}\;IU/ml$ in bath, and no inhibitory action at a dose of $1{\times}10^{-3}\;IU/ml$ against the contractions produced by histamine ($5{\times}10^{-5}\;g/ml$), serotonin($1{\times}10^{-5}\;g/ml$), acetylcholine($1{\times}10^{-5}\;g/ml$) and oxytocin($5{\times}10^{-3}\;IU/ml$). Furthermore, the intravenous injection of 20 IU/kg rhGH had no influences on the normal blood pressure and respiration in rabbits. These negative results in pharmacological profile are thought that the hormone may not elicit serious side effects. On the other hand, the rhGH exhibited a weak inhibitory action of glucose tolerance in normal rats, significantly lowered the blood glucose contents in adrenalectomized rats 20 min after i.v. administration of 80 IU/kg, and showed a significant inhibitory effect on in vitro glycerol release in epinephrine-stimulated epididymal fat pad segments of rats.