• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.563-564
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• 2006

Recently, CMP (Chemical Mechanical Polishing) is one of very important processing in semiconductor technology because of large integration and application of design role. CMP is a planarization process of wafer surface using the chemical and mechanical reactions. One of the most important components of the CMP system is the polishing pad. During the CMP process, the pad itself becomes smoother and glazing. Therefore it is necessary to have a pad conditioning process to refresh the pad surface, to remove slurry debris and to supply the fresh slurry on the surface. A diamond disk use during the pad conditioning. There are diamonds on the surface of diamond disk to remove slurry debris and to polish pad surface slightly, so density, shape and size of diamond are very important factors. In. this study, we characterized diamond disk with 9 kinds of sample.

• The International Journal of Costume Culture
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• 제8권2호
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• pp.124-131
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• 2005

This study focused on the change of skin temperature by the emissivity and emission power of far-infrared for conformant far infrared effect to naked eyes. The study method is to manufacture the bra pad by each concentration on far-infrared materials of illite powder $(K,H_3O)AI_2(Si,Al)_4O_{10}(H_2O,OH)_2)$, liquid alumina ($Al_2O_3$), the extracted liquid from 29 kind of medical plants, then, measured change of skin temperature. Result are as follows. Far-infrared were emitted each $90.2\%,\;90.1\%,\;89.7\%$ from the illite powder, liquid alumina, extracted liquid from medical plants. When the testee weared the bra pad, the temperature of coated bra pad was $0.5^{\circ}C$ higher than the non finished bra pad. Washing fastness on far-infrared finishing was better dope addition method than coating method.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2003년도 학술대회지
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• pp.261-266
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• 2003

The present paper theoretically investigates characteristics of moment balance of a tilting-pad thrust bearing. Pressure of lubricant film of the bearing was computed using tile finite element method, and average film temperature was estimated from the heat balance over a pad. From the investigation, it has been found that different two sets of tilt angles satisfy moment equilibrium of the pad about tile pivot for a given pivot location. The tilt angles converged depend upon initial tilt angles assumed. Quite different bearing performance, including load capacity, film thickness, and temperature, is shown to be obtained based on choice of the initial tilt angles.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.99-100
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• 2002

Radial, tilting-pad proceeding bearings are applied in high speed rotating machines operating at stable small and mean loads and the peripheral speeds of proceeding reaching 150 m/s. The operation of bearing can be determined by static characteristics including the oil film pressure, temperature and viscosity distributions, minimum oil film thickness, load capacity, power loss, oil flow. The operation of 5-lobe tilted-pad proceeding bearing has been introduced at the assumption of adiabatic oil film. The oil film pressure, temperature and viscosity distributions habe received by iterative solution of the Reynolds', energy and viscosity equations. The resulting oil film force, minimum oil film thickness, power loss. oil flow, maximum oil film pressure, maximum temperature were computed for different sets of bearing geometric parameters as: bearing length to diameter ratio, pad angular length and width as well as pad relative clearance.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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• pp.236-242
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• 2001

In this paper the effect of bump compliance, load, and the number of pad on the lift-off speed is studied. When the load is greater and bump compliance lower, the shaft is lifted off at higher rotating speed. And when the load is applied near the center of pad, lift-off speed is lower. When the number of pad increases, the lift-off speed is higher. The lift-off characteristics can be used to lengthen the life time of the coating and design the rotating machinery supported by bump bearings.

• Tribology and Lubricants
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• 제33권2호
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• pp.37-44
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• 2017

A DE-side LBP tilting pad journal bearing of a 1-stage overhung heat-pump compressor in a propylene process exhibited abnormal high-temperature behavior. Its temperature had been relatively high at $78^{\circ}C$ from the beginning of operation. In 2014, after three years of operation, it increased suddenly and reached $103^{\circ}C$. Installing a varnish removal equipment and others managed to stabilize the temperature at $95^{\circ}C$. We undertook a troubleshooting approach for reviewing the comprehensive status and integrity of the temperature design of the bearing. We performed lubrication and heat-balance analysis, based on the design engineering data and documents supplied by the OEM. For the base design data of DE-side TPJB, evaluating the effects of key design variables on bearing metal temperature showed that firstly, increasing the bearing clearance and supply oil flow-rate, and next, changing the oil type, and finally, increasing the machined pad clearance and offset, are more effective in reducing the bearing metal temperature. Furthermore, a clarification meeting with the OEM revealed that an incorrect decision had been made to decrease the bearing clearance to eliminate the SSV harshness issue, while not maintaining a sufficient oil flow-rate. We conducted a detailed retrofit design analysis, wherein we increased the oil flow-rate and bearing clearance by decreasing the preload. We predicted that the bearing temperature would decrease to $63^{\circ}C$ from $75.7^{\circ}C$ even at the rerate condition. Finally, after installing and operating a retrofit replacement bearing in 2015, the bearing temperature stabilized at a low temperature of $65^{\circ}C$. Currently (January. 2017), two year later, the bearing metal temperature remains at $65^{\circ}C$. Therefore, we can conclude that the abnormal high-temperature behavior of the bearing has been resolved completely.

• 한국의상디자인학회지
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• 제15권2호
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• pp.15-26
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• 2013

The purpose of this study is to offer basic data for designing and making of brassiere with the consideration of the physiological nature of man. Each of 3/4-cup wired upward-support-type Mold Bra of 75 size with basic pad made at three representative domestic companies (A, B and C Company) was selected for analysis of pattern and components. The following is the result of this study. 1. That Company A's bra had the highest cup, relatively narrow width, the widest front-center and the highest front center at front pad. That of Company B had relatively short wing over the base and much difference at the height of cup depending on the presence of wire. That of Company C had low and wide cup, the widest bust span and the front center width, the front center height of front pad, the base length of front pad and the length of wings were observed to be of the figures between those of Company A and B. 2. The Bra of Company A had the biggest front center angle of $6^{\circ}$, while that of Company C had the biggest wing angle of $18^{\circ}$. The Bra of Company B showed the biggest difference of patterns depending on the presence of wire. Those of Company A and C showed very similar shape when wire was inserted. 3. The order of making brassiere is following: making of exterior mold cup${\rightarrow}$ sewing exterior cup and circumference of mold${\rightarrow}$ sewing base and wings${\rightarrow}$ sewing binding tape to base${\rightarrow}$ sewing cup and main pad${\rightarrow}$ sewing binding tape to upper sides and upper part of wings${\rightarrow}$ sewing wire-tape to interior base of cup${\rightarrow}$ inserting of wire inside wire-tape${\rightarrow}$ sewing hook & eye on the back of wings${\rightarrow}$ sewing shoulder string.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.1287-1288
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• 2010

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.47-48
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• 2007

A CMP Process has many factors that affect result of a polished wafer. Dominant factors are velocity, pressure and temperature in process. A pad profile is also considered as affecting factor of CMP. Accoding to variation of a pad profile, the each pan of a wafer is differently pressured. It appears to affect the uniformity of a wafer. A pad profile varies as a swing arm conditioner which have been ordinarily used in industry. A swing arm conditioner has several sectors in its swing path. This study aims that a wafer get a good uniformity as swing arm conditioner's path on pad is analyzed and simulated. Through the simulation, tendency of pad profile after conditioning will be predicted and the result of simulation compared with the result of experiment. The optimized pad profile would be made by to vary swing arm's velocity on each sector. In order to maintain the optimized profile, conditioner design or swing arm's velocity should be changed and designed.

• Tribology and Lubricants
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• 제30권4호
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• pp.205-211
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• 2014

Recent studies emphasize the importance of pivot stiffness in the analysis of tilting pad bearings (TPBs). The present paper develops a finite element model of the pad pivot and compares the predicted pivot stiffness to the results of Hertzian contact model calculations. Specifically, a finite element analysis generates tetrahedral mesh models with ~40,000 nodes for a ball-socket pivot and ~50,000 nodes for a rocker-back pivot. These models assume a frictionless boundary condition in the contact area. Increasing the applied loads on the pad in conjunction with increasing time steps ensures rapid convergence during the nonlinear numerical analysis. Predictions are performed using the developed finite element model for increasing the differential diameters between the pad pivot (or ball) and the bearing housing (or socket). The predictions show that the pivot contact area increases with decreasing differential diameters and increasing applied loads. Further, the maximum deformation occurring at the pivot center increases with increasing differential diameters and increasing applied loads. The pivot stiffness increases nonlinearly with decreasing differential diameters and increasing applied loads. Comparisons of results of the developed finite element model to those of Hertzian contact model calculations assuming a small contact area show that the latter model underestimates the pivot stiffnesses predicted by the finite element models of the ball-socket and rocker-back pivots, particularly for small differential diameters. This result implies the need for cautionduring the design of pivot stiffness by the Hertzian contact model.