• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.238-238
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• 2011

Ion sensitive field effect transistor (ISFET)는 용액의 이온 농도를 측정하는 반도체 센서로, 1970년 Bergveld에 의해 처음으로 제안되었다. ISFET가 제안된 이래로, 제조공정이 간단하고 감지막의 감지 특성 평가가 용이한 electrolyte-insulator-semiconductor (EIS) pH센서 또한 지속적으로 연구되었다. EIS pH센서는 작은 소자 크기, 견고한 구조, 빠른 응답속도와 CMOS공정과의 호환성이 좋다는 장점이 있다. EIS 또는 ISFET 센서를 이용하여 생물학적 요소의 신호 감지 특성을 평가함에 있어 소자의 signal to noise 비율이 우수해야 한다. EIS pH센서의 높은 signal to noise 비율을 얻기 위해, 소자의 표면적을 증가시키거나 감지막으로 유전상수가 높은 물질을 사용하여 출력 특성을 향상시켜야 한다. 본 연구에서는 trench구조와 SiO2/HfO2/Al2O3 (OHA) 적층 감지막을 갖는 EIS pH센서를 제작하여 출력 특성을 증가시키는 실험을 실시하였다. 120 nm, 380 nm, 780 nm의 다양한 깊이를 가진 trench를 형성하였으며, trench 깊이에 따른 출력특성을 비교하였다. 또한, 제작된 EIS 소자의 pH감지 특성을 분석하였다. 제작된 EIS소자의 감지막 중 SiO2는 Si와 high-k물질의 계면 상태를 보완하기 위한 완충막으로 성장되었고, HfO2는 높은 유전상수를 가지고 있어 signal to noise 비율을 향상시키는 물질로 증착되었다. 최종적으로 Al2O3는 pH용액과의 화학적 손상을 막기 위한 물질로 증착되었다. 실험 결과, trench 깊이가 깊어질수록 출력값이 증가하였고 이는 signal to noise 비율이 향상되는 것을 의미한다. 결론적으로 trench 형성을 통한 표면적 증가와 high-k물질을 적층한 감지막으로 인해 높은 출력 특성을 갖는 우수한 EIS 바이오센서를 제작할 수 있었다.

• Journal of the Korean Chemical Society
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• v.66 no.6
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• pp.521-525
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• 2022

• Journal of Sensor Science and Technology
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• v.26 no.6
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• pp.414-419
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• 2017

The optical characteristics of cresol red, phenol red, and neutral red immobilized in the thin film were investigated with absorbance measurement in order to find a sensing part of a fiber-optic pH sensor. Sol-Gel method with tetramethyl orthosilicate as a precursor was used to immobilize the pH indicators in the thin film. The absorbance spectra were measured when pH indicators were immobilized in the film and were dissolved in the buffer solution. Experimental results showed that the absorbance spectra could be changed when the pH indicator is immobilized in the thin film. As compared with other pH indicators, the neutral red exhibited similar absorbance spectra regardless of physical conditions and was sensitive over whole pH range between 4 and 11. In addition, the absorbance ratio of base peak to acid peak tended to increase in proportion to the increase in pH. Experimental results indicate that the neutral red is a good pH indicator for fabrication of a sensing part of the fiber-optic pH sensor.

• Analytical Science and Technology
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• v.5 no.2
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• pp.177-184
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• 1992

A preparation method and response characteristics of a glucose sensor which consisted of pH-ISFET and glucose oxidase-immobilized membrane were investigated. The pH-ISFET glucose sensor was fabricated by immbilizing bovine serum albumin and glucose oxidase with glutaraldehyde on gate of the pH-ISFET. Effects of pH and concentration of working buffer and enzyme load on the pontentiometric response of the pH-ISFET glucose sensor were examined. Response characteristics for the determination of glucose in synthetic physiological saline solution(pH 7.4) were as follows. That is the concentration range of linear response, slope of linear response(sensitivity), and response time were $1.0{\times}10^{-4}{\sim}6.0{\times}10^{-3}M $, 4.1 mV/decade, and 12~15 min., respectively.

• Journal of the Korean Chemical Society
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• v.36 no.6
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• pp.864-871
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• 1992

A preparation method and response characteristics of a urea sensor which consisted of pH-ISFET and urease-immobilized membrane were investigated. The pH-ISFET urea sensor was fabricated by immobilizing BSA and urease with glutaraldehyde on gate of the pH-ISFET. Effects of pH and concentration of working buffer and enzyme load on the pontentiometric response of the pH-ISFET urea sensor were examined. Response characteristics for the determination of urea in synthetic physiological saline solution (pH 7.4) were as follows. That is, the concentration range of linear response, slope of linear response (sensitivity), and response time were 5.0 ${\times}$ $10^{-4}$ ${\sim}$ 5.0 ${\times}$ $10^{-2}$M, 31.6 mV/decade and 4${\sim}$10 min, respectively.

• Journal of Sensor Science and Technology
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• v.2 no.1
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• pp.29-34
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• 1993

a-Si : H photodiodes for image sensor have been fabricated and characterized. Photosensitivity of a ITO/a-Si : H/Al photodiode without blocking layer was 0.7 under the applied voltage of 5 V and peak spectral sensitivity in visible region was found at 620 nm. Dark current of ITO/a-SiN : H/a-Si : H/p-a-Si : H/Al photodiode was suppressed by hole blocking layer and electron blocking layer at the value of lower than 1.5 pA to the applied voltage of 10 V. Also maximum photosensitivity was about 1 under the applied voltage of 3 V and peak spectral sensitivity was found at 540 nm.

• Journal of the Korean Society for Nondestructive Testing
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• v.22 no.4
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• pp.347-353
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• 2002

A structure of a glass electrode-type pH sensor for measuring any concentration of $H^+$ in an aqueous solution was embodied with bulk micromachining technology. Two open well structures were formed, and a reference electrode was secured by the Ag/AgCl thin film in the sloped side of the etched structure. A sensitive membrane of an indicator electrode for generating a potential by an exchange reaction to $H^+$ was made with a glass containing Na 20% or more finely so that its thickness might be $100{\mu}m$ or so, and then it was bonded to one pyramidal structure. A liquid junction for a current path was formed by filling an agar in the anisotropically etched part of the Si wafer, which had a size of $50{\mu}m{\times}50{\mu}m$, and then bonded it to the other. After complete fabrication of each part, it was filled with a 2M KCl reference solution and encapsulated the sensor structure with a cold expoxy. The potential value of fabricated pH sensor was about 90mV/pH in the standard pH solutions.

• Journal of Sensor Science and Technology
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• v.15 no.2
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• pp.127-133
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• 2006

Recent studies demonstrated the ability of carbon nanotube (CNT) to promote electron transfer reactions of important compounds and to impart higher stability onto electrochemical sensors. CNT-based sensors measured by hydroxyl radical concentration or pH value suggest great promise for biosensors. This paper describes a new method for fabricating a very simple and inexpensive pH sensor compose of single walled-carbon nanotubes (SW-CNTs) using an ultra-precision spray. CNT-based sensor shows pH sensitivity in buffer solution at different pH range. Our experimental results show the sensor responses to pH buffer solution and the conductance of depends on the pH values. These results support application possibility of SW-CNTs based pH sensor for mass production.

• Journal of Sensor Science and Technology
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• v.13 no.3
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• pp.213-217
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• 2004

The general method to find a H. pylori in the stomach is the rapid urease test but it is only used to decide the infection with H. pylori. In this study, it is tried to develope fiber-optic pH sensor which can be used with gastroscop to quantify H. pylori. To measure the degree of infection with H. pylori, the color change of phenol red according to the degree of pH is measured by optical fibers with different light sources and the optimum distance from a sample to the end of sensor tip is decided by measuring the maximum reflectivity from a sample. Also the sensitivity study is carried out to decide the optimum light source which has sensitive change of reflectivity to the change of pH. It is expected that the fiber-optic pH sensor which measures the degree of infection with H. pylori exactly can be developed.

• Journal of Sensor Science and Technology
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• v.22 no.3
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• pp.207-211
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• 2013

In this research, the pH sensor was developed using CNT nanosheet with Nafion coating for the advanced medical sensor such as a blood gas analyzer. The CNT nanosheet was formed by dielectrophoresis and water-meniscus between cantilever-type electrodes. Then, the process of the heat annealing and the Nafion coating was conducted for reducing contact resistance and giving proton selectivity respectively. We measured the response of the pH sensor as the electrolyte-gated CNT-nanosheet field effect transistor. The sensor showed a linear current ratio in a similar range of the normal blood pH. A calibration method for decreasing of the response variation among sensors has also been introduced. Coefficient of variance of the pH sensor was decreased by applying the calibration method. A linear relation between the calibrated response of the sensors and pH variance was also obtained. Finally, the pH sensor with a high resolution was fabricated and we verify the feasibility of the sensor by applying the calibration method.