• 제목/요약/키워드: p130

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W/TiN 금속 게이트 MOS 소자의 물리.전기적 특성 분석

  • 윤선필;노관종;노용한
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.123-123
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    • 2000
  • 선폭이 초미세화됨에 따라 게이트 전극에서의 공핍 현상 및 불순물 확산의 물제를 갖는 poly-Si 게이트를 대체할 전극 물질로 텅스텐(W)이 많이 연구되어 왔다. 반도체 소자의 배선물질로 일찍부터 사용되어온 텅스텐은 내화성 금속의 일종으로 용융점이 높고, 저항이 낮다. 그러나, 일반적으로 사용되고 있는 CVD에 의한 텅스텐의 증착은 반응가스(WF6)로부터 오는 불소(F)의 게이트 산화막내로의 확산으로 인해 MOS 소자가 크게 열화될수 있다. 본 연구에서는 W/TiN 이중 게이트 전극 구조를 갖는 MOS 캐패시터를 제작하여 전기적 특성을 살펴보았다. P-Type (100) Si위에 RTP를 이용, 85$0^{\circ}C$에서 110 의 열산화막을 성장 및 POA를 수행한 후, 반응성 스퍼터링법에 의해 상온, 6mTorr, N2/Ar=1/6 sccm, 100W 조건에서 TiN 박막을 150, 300, 500 의 3그룹으로 증착하였다. 그 위에 LPCVD 방법으로 35$0^{\circ}C$, 0.7Torr, WF6/SiH4/H2=5/5~10/500sccm 조건에서 2000~3000 의 텅스텐을 증착하였다. Photolithography 공정 및 습식 에칭을 통해 200$\mu\textrm{m}$$\times$200$\mu\textrm{m}$ 크기의 W/TiN 복층 게이트 MOSC를 제작하였다. W/TiN 복측 게이트 소자와 비교분석하기 위해 같은 조건의 산화막을 이용한 알루미늄(Al) 게이트, 텅스텐 게이트 MOSC를 제작하였다. 35$0^{\circ}C$에서 증착된 텅스텐 박막은 10~11$\Omega$/ 의 면저항을 가졌고 미소한 W(110) peak값을 나타내는 것으로 보아 비정질 상태에 가까웠다. TiN 박막의 경우 120~130$\Omega$/ 의 면저항을 가졌고 TiN (200)의 peak 값이 크게 나타난 반면, TiN(111) peak가 미소하게 나타났다. TiN 박막의 두께와 WF/SiH4의 가스비를 변화시켜가며 제작된 MOS 캐패시터를 HF 및 QS C-V, I-V 그리고 FNT를 통한 전자주입 방법을 이용하여 TiN 박막의 불소에 대한 확산 방지막 역할을 살펴 보았다. W/TiN 게이트 MOS 소자는 모두 순수 텅스텐 게이트보다 우수하였고, Al 게이트와 유사한 전기적 특성을 보여주었다. W/TiN 게이트 MOS 소자는 모두 순수 텅스텐 게이트보다 우수하였고, Al 게이트와 유사한 전기적 특성을 보여주었다. TiN 박막이 300 , 500 이고 WF6/SiH4의 가스비가 5:10인 경우 소자 특성이 우수하였으나, 5:5의 경우에는 FNT 전자주입 특성이 열화되기 시작하였다. 그리고, TiN박막의 두께가 150 으로 얇아질 경우에는 WF6/SiH4의 가스비가 5:10인 경우에서도 소자 특성이 열화되기 시작하였다. W/TiN 복층 게이트 MOS 캐패시터를 제작하여 전기적인 특성 분석결과, 순수 텅스텐 게이트 소자의 큰 저전계 누설 전류 특성을 해결할 수 있었으며, 불소확산에 영향을 주는 조건이 WF6/SiH4의 가스비에 크게 의존됨을 알 수 있었다. TiN 박막의 증착 공정이 최적화 될 경우, 0.1$\mu\textrm{m}$이하의 초미세소자용 게이트 전극으로서 텅스텐의 사용이 가능할 것으로 보여진다.

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판별분석을 통한 농촌유역 소하천의 수질등급모형(WQLM) 개발 및 적용 (Development and Application of Water Quality Level Model (WQLM) for the Small Streams of Rural Watersheds with Discriminant Analysis)

  • 김진호;최철만;류종수;정구복;신중두;한국헌;이정택;권순국
    • 한국물환경학회지
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    • 제23권2호
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    • pp.260-265
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    • 2007
  • This study was carried out to complement water quality standards and to establish new concept for water quality standards reflecting current state of water quality in small streams. By this purpose, discriminant analysis was performed and Water Quality Level Model (WQLM) was developed using the data such as EC, BOD, $COD_{Mn}$, SS, T-N, T-P, $NH_3-N$ in 224 agricultural streams. To give water quality level for water quality parameters, it divided into 20% respectively in the order of excellent water quality. On the basis of the lowest water quality level, water quality level of small streams is granted. As a result of it, number of stream corresponding to Level I was no, Level II was 2 streams, Level III was 22 streams, Level IV was 70 streams, and Level V was 130 streams. Average of water quality in each level was the highest in Level V. EC, SS, and T-N of 7 parameters were selected in variance concerned water quality level. By standardized canonical discriminant function coefficient, EC of three variances was the highest in 0.625 at the discriminant power. The next was T-N (0.509), SS (0.414). By discriminant function for water quality level, Level II was equal to $-2.973+19.376{\times}(EC)+0.647{\times}(T-N)+0.009{\times}(SS)$, Level III was equal to $-3.288+19.190{\times}(EC)+0.733{\times}(T-N)+0.041{\times}(SS)$, Level IV was equal to $-4.462+27.097{\times}(EC)+0.792{\times}(T-N)+0.053{\times}(SS)$, and Level V was equal to $-9.117+40.040{\times}(EC)+1.305{\times}(T-N)+0.111{\times}(SS)$. As a result of test at real agricultural watershed of Jeongan and Euidang in Gongju city, the fitness of WQLM was high to 88.78%. But, to get accomplished water quality assessment more exactly in agricultural streams, we had to concentrate and get vast data, and WQLM was modified and complemented continually.

Annual Bluegrass의 생물학적 특성과 방제 (Biological Characteristics and Control of Annual Bluegrass (Poa annua))

  • 이상국
    • Weed & Turfgrass Science
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    • 제2권2호
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    • pp.122-130
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    • 2013
  • Annual bluegrass는 종자 생산능력이 뛰어나고 한번 조성이 되었을 때 그 분얼경과 지상부 생육이 뛰어나, 전 세계에 가장 널리 퍼져 서식하는 잔디 초종중의 하나이다. 또한 낮은 예초에 적응하는 능력과 조성이 되었을 때 균일성이 좋은 것으로 알려져 있다. Annual bluegrass의 지상부가 성장하기 가장 좋은 온도 범위가 $16-21^{\circ}C$이며 지하부 성장을 위한 최적의 온도범위는 $13-18^{\circ}C$로 고온과 저온에 취약한 초종이다. Annual bluegrass를 관리하기 위해서는 질소와 인산의 비교적 높은 시비량은 annual bluegrass의 확산을 촉진하며 반대로 낮은 시비량은 방제에 도움이 된다. 질소원으로 ammonium sulfate를 사용했을때 sulfate에 의해서 낮아진 토양 pH는 토양속에 존재하는 인이 용해되는 것을 감소시키고 annual bluegrass에 피해를 주는 aluminum의 양을 증가시켜 방제에 효과적이다. 관수는 light and frequent 보다는 deep and infrequent 관수방법이 방제에 도움이 되며 예초높이는 낮추고 예지물은 회수 하는 것이 annual bluegrass의 방제에 도움이 된다. 우리나라에서는 화학적 방제가 주를 이루고 있는데 발아전 처리제로서 prodiamine, bensulide, dithiopyr등이 있으며 발아후 처리제로는 ethofumesate, bisbyribac-sodium 그리고 최근에 연구가 되고 있는 mesotrione등이 있다. 발아전 혹은 발아후 처리제 이외에 생장조절제가 annual bluegrass 방제에 이용이 되고 있는데 paclobutrazol, flurprimidol 등이 있다. 우리나라에서 많이 사용이 되고 있는 생장조절제인 trinexapac은 오히려 여름철 annual bluegrass에 좋은 효과를 나타내고 있어 방제에 적합하지 않다. Annual bluegrass의 방제 효과를 극대화 하기 위해서는 관리적 방제와 화학적 방제의 두 가지 방법이 동시에 고려되어야 할 것이다.

한 시멘트공장의 분진발생과 대기확산에 관한 조사연구 (A Study on the Emission and Dispersion of Particulate Matter from a Cement Plant)

  • 장남익;정용;권숙표
    • Journal of Preventive Medicine and Public Health
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    • 제16권1호
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    • pp.67-77
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    • 1983
  • To investigate the an air pollution by particulate matter and its dispersion, a cement plant produceing portland cement 600,000 ton/year and its vicinity were surveyed from Obtober, 1980 to April, 1983. The survey was mainly focused on main stack emmission rate of the cement plant and particle size distribution in the dust, dustfall and total suspended particulate concentration in the area by month and distance from the stack. The results of the study were as follows; 1. The main stack emission rate was surveyed before and after the spray tower was additionally installed to the original E.P bag filter. Before the spray tower installed, the main stack emission rate was higher ($0.64g/Nm^3$) than the emission standard of Korean Environmental Preservation Law's ($0.59g/Nm^3$, amended to $0.4g/Nm^3$ on April 1983), but after the spray tower was installed, its main stack emission rate was markedly decreased to the standard ($0.43g/Nm^3$). 2. $2{\sim}3{\mu}m$ of the particle size was the largest portion (20.8%) of the dust particulate from the main stack and 50% of the frequency distribution was $1.5{\mu}m$ of the size. Most particle size was below $10{\mu}m$. 3. The spray tower reduced the dustfall to $37.81{\sim}9.76\;ton/km^2/month$ while dustfall appeared at $45.29-15.45ton/km^2/month$, in the vicinity of plant before spray tower installed 4. Mean concentrations of total suspended particulate for 24 hours of the various stations were determined in $20.6-200.0{\mu}g/m^3$, 3 stations of tham were higher than the value of Harry and William's arthmetic average standard $130{\mu}g/m^3$. 5. Linear regression between dustfall [X] and total suspended particulate[Y] concentration was an equation, Y=4.024X+11.479.[r=0.91] 6. During the whole seasons in the opposite area 100m apart from the omission source the prevailing wind direction was with estimated more than $30ton/km^2/month$, and the concentration of total suspended particulate for 24 hours averaging time was more than $140{\mu}g/m^3$ in the same area and direction. 7. Assuming the wind direction were constant through the day dustfalls for a day were estimated at $13.40ton/km^2/day,\;10.79ton/km^2/day$ and $4.55ton/km^2/day$ at various distances of 100m, 500m and 1,500m from the emission source respectively. 8. In the simutalion of dustfall and suspended dust by area, Gaussian dispersion model modified by size distribution of particulate matter was not applicated since the emission of dust were from multi sources other them stack. From the above results, it could be applied that the dispersion of dust from the cement plant is estimated and regulated for the purpose of environmental protection.

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$^{131}I$ OIH와 $^{99m}Tc-MAG_3$의 약물동력학 및 체내 분포에 관한 비교 연구 (A Comparative Pharmacokinetic and Biodistributional Study of $^{131}I$ OIH and $^{99m}Tc-MAG_3$)

  • 정재민;염미경;김문혜;박경호;송세흠;이범우;이동수;정준기;이명철;조보연;고창순
    • 대한핵의학회지
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    • 제24권1호
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    • pp.74-79
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    • 1990
  • $^{99m}Tc-MAG_3$ was synthesized, and biodistribution and blood clearance rate were compared with those of $^{131}I-OIH$ in mice and rats respectively. Finally renal image was obtained from a normal male volunteer before and after prescription of probenecid. The results obtained were as follows: 1) The uptake of $^{99m}Tc-MAG_3$ by kindey was higher than that of $^{131}I-OIH$ in mice 10 mins after injection (n=6, p<0.05), but slightly lower uptakes were found in all organs (kindney, blood, stomach, intestinge and liver) 2 hrs after injection. 2) For $^{99m}Tc-MAG_3$ $4\frac{1}{2}\;\alpha=2.4{\pm}0.0\;min,\;t\frac{1}{2}\;\beta=44.3{\pm}7.4\;min$, and blood clearance=$3.4{\pm}0.5ml/min$, and for $^{131}I-OIH\;t\frac{1}{2}\;\alpha=1.8{\pm}0.2\;min,\;\beta=69.1{\pm}9.5\;min$, and blood clearance=$1.3{\pm}0.1\;min$ were found in rats. 3) From the renogram of normal male volunteer, we could find that tmax=130 sec and $t\frac{1}{2}=430\;sec$ before probenecid prescription, and $tmax=150\sim170$ sec and $t\frac{1}{2}=810\sim1,170$ sec after probenecid prescriprion. From these results we concluded that $^{99m}Tc-MAG_3$ can be used instead of $^{131}I-OIH$ for obtaining renal image.

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정식(定植) 후 양상추의 품질평가 및 잔류농약 분석 (Quality Evaluation and Residual Pesticides of Lettuce during Growth after Transplanting)

  • 윤예리;김병삼;김상희;권기현;차환수
    • 한국식품저장유통학회지
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    • 제14권2호
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    • pp.124-130
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    • 2007
  • 양상추(Lactuca Sativa L.)의 정식 후 42일 경과한 결구 초기부터 결구가 형성(정식 후 67일 경과)되어 제품으로 출하될 때까지의 품질 변화와 잔류농약에 대해 알아보았다. 양상추의 정식 후 결구가 형성되면서부터 전체 중량과 가식부 중량이 모두 증가하였는데, 결구 형성 초기에는 전체중량의 약 40% 정도가 가식부였지만 제품 출하 시점에서는 약 80%까지 큰 증가추세를 보였다. PH, 당도, 수분의 경우는 양상추 결구과정 중 약간의 증가를 보였으며, 감광체 역할을 하는chlorophyll의 SPAD값은 초기에는 16.2이었던 것이 양상추 성장과 함께 계속적인 증가를 보이다가 26.4까지 크게 증가하는 것으로 나타났다. 양상추는 결구가 진행되면서 전체적으로 점차 투명해지고 초록빛은 감소하는 반면 노란빛은 약간 증가하였다. 또한 양상추의 겉잎부분은 결구 형성과 함께 씹힘성이 커졌으며, vitamin C함량은 정식 후 60일이 지났을 때 양상추 100g당 2.5mg이 함유되어있어 가장 높게 증가한 시점이었다. 양상추에 한 유되어 있는 무기질 중에서는 칼륨의 함량이 가장 높았으며 정식 후 60일이 지난 결구 완성기에는 양상추의 100g당 칼슘 21.1mg, 나트륨 24.5mg, 철분 0.4mg, 마그네슘 13.1mg, 칼륨 183.5mg으로 전체적으로 가장 높은 함량을 보여주었다. 위해요소인 잔류농약의 경우에는 초기에는 검출되지 않았지만 정식 후 54일 이후부터 chlorthalonil가 미량 잔류하는 것으로 나타났다.

OGLE-2019-BLG-0362Lb: A SUPER-JOVIAN-MASS PLANET AROUND A LOW-MASS STAR

  • Chung, Sun-Ju;Yee, Jennifer C.;Udalski, Andrej;Gould, Andrew;Albrow, Michael D.;Jung, Youn Kil;Hwang, Kyu-Ha;Han, Cheongho;Ryu, Yoon-Hyun;Shin, In-Gu;Shvartzvald, Yossi;Zang, Weicheng;Cha, Sang-Mok;Kim, Dong-Jin;Kim, Seung-Lee;Lee, Chung-Uk;Lee, Dong-Joo;Lee, Yongseok;Park, Byeong-Gon;Pogge, Richard W.;Poleski, Radek;Mroz, Przemek;Pietrukowicz, Pawel;Skowron, Jan;Szymanski, Michal K.;Soszynski, Igor;Kozlowski, Szymon;Rybicki, Krzysztof A.;Iwanek, Patryk;Wrona, Marcin;Gromadzki, Mariusz;Ulaczyk, Krzysztof
    • 천문학회지
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    • 제55권4호
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    • pp.123-130
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    • 2022
  • We present the analysis of a planetary microlensing event OGLE-2019-BLG-0362 with a shortduration anomaly (~0.4 days) near the peak of the light curve, which is caused by the resonant caustic. The event has a severe degeneracy with ∆𝜒2 = 0.9 between the close and the wide binary lens models both with planet-host mass ratio q ≃ 0.007. We measure the angular Einstein radius but not the microlens parallax, and thus we perform a Bayesian analysis to estimate the physical parameters of the lens. We find that the OGLE-2019-BLG-0362L system is a super-Jovian-mass planet $M_p=3.26^{+0.83}_{-0.58}M_J $ orbiting an M dwarf $M_h=0.42^{+0.34}_{-0.23}M_{\odot}$ at a distance $D_L=5.83^{+1.04}_{-1.55}kpc$. The projected star-planet separation is ${\alpha}_{\bot}= 2.18^{+0.58}_{-0.72}AU$, which indicates that the planet lies beyond the snow line of the host star.

Effects of FSH and LH on Maturation of Bovine Preantral Follicle

  • Kim, D. J.;H. J. Chung;S. J. Uhm;Lee, H. T.;K. S. Chung
    • 한국동물번식학회:학술대회논문집
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    • 한국동물번식학회 2001년도 춘계학술발표대회
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    • pp.30-30
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    • 2001
  • The culture of preantral follicles has important biotechnological implications through its potential to produce the large quantity of oocytes for embryo production, transgenesis research, conservation of rare breed, and a potential source of ovarian genetic material. The present study was conducted to establish the optimal conditions of in vitro culture for intact bovine preantral follicles; and to examine the developmental ability of oocytes derived from the in vitro-grown preantral follicles; and to investigate the effects of various concentrations of FSH and LH on these processes. Bovine preantral follicles (150 $\pm$ 1.2${\mu}{\textrm}{m}$), surrounded by theca cell, were isolated enzymetically and mechanically from ovarian cortical slides in Leibovitz L-15 medium containing 1 mg/$m\ell$ collagens and 0.2 mg/$m\ell$ DNase I and cultured for 25 days in the presence of different concentrations of bovine FSH and LH in $\alpha$MEM medium with insulin, transferrin, and selenite. The survival was tested by frypan Blue and Hematoxylin. The survival and growth rates of follicles were higher in FSH treatment groups than these in control (P<0.001), but there were no significant differences between the LH treatment groups and the control. In 25 days, the survival and growth rates of follicles in FSH and LH treatment group (50%, 300$\pm$1.0${\mu}{\textrm}{m}$) were higher than in FSH treatment group (40%, 244$\pm$0.5${\mu}{\textrm}{m}$) and the control group (25%, 160$\pm$ 1.0${\mu}{\textrm}{m}$). Fifty-five percent of healthy antral follicles were obtained, and 60% of the oocytes complete meiotic maturation to the metaphase II stage. Twenty-two percent of the mature oocytes underwent cleavage, and 9% developed to the blastocyst stage. In this study, in vitro-grown oocytes (111 $\pm$ $1.5mutextrm{m}$), under our culture conditions, were not equivalent in size to the in vivo-grown oocytes (130$\pm$1.3${\mu}{\textrm}{m}$). Therefore, these results suggest that bovine preantral follicles with intact theca cell can grow to the antral stage in 25days, and that oocytes from those follicles can acquire the meiotic competence and normally undergo fertilization and development to the blastocyst stage. However, the developmental capacity of in vitro-grown oocytes is presumably not comparable to those of the in vivo counterparts.

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Purification and Characterization of Mitochondrial Mg2+-Independent Sphingomyelinase from Rat Brain

  • Jong Min Choi;Yongwei Piao;Kyong Hoon Ahn;Seok Kyun Kim;Jong Hoon Won;Jae Hong Lee;Ji Min Jang;In Chul Shin;Zhicheng Fu;Sung Yun Jung;Eui Man Jeong;Dae Kyong Kim
    • Molecules and Cells
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    • 제46권9호
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    • pp.545-557
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    • 2023
  • Sphingomyelinase (SMase) catalyzes ceramide production from sphingomyelin. Ceramides are critical in cellular responses such as apoptosis. They enhance mitochondrial outer membrane permeabilization (MOMP) through self-assembly in the mitochondrial outer membrane to form channels that release cytochrome c from intermembrane space (IMS) into the cytosol, triggering caspase-9 activation. However, the SMase involved in MOMP is yet to be identified. Here, we identified a mitochondrial Mg2+-independent SMase (mt-iSMase) from rat brain, which was purified 6,130-fold using a Percoll gradient, pulled down with biotinylated sphingomyelin, and subjected to Mono Q anion exchange. A single peak of mt-iSMase activity was eluted at a molecular mass of approximately 65 kDa using Superose 6 gel filtration. The purified enzyme showed optimal activity at pH of 6.5 and was inhibited by dithiothreitol and Mg2+, Mn2+, Ni2+, Cu2+, Zn2+, Fe2+, and Fe3+ ions. It was also inhibited by GW4869, which is a non-competitive inhibitor of Mg2+-dependent neutral SMase 2 (encoded by SMPD3), that protects against cytochrome c release-mediated cell death. Subfractionation experiments showed that mt-iSMase localizes in the IMS of the mitochondria, implying that mt-iSMase may play a critical role in generating ceramides for MOMP, cytochrome c release, and apoptosis. These data suggest that the purified enzyme in this study is a novel SMase.

무지외반증에서의 원위 연부 조직 유리술: 변형된 맥브라이드 술식과 경관절 접근법의 비교 (Distal Soft Tissue Procedure in Hallux Valgus Deformity: Comparison of Modified Mcbride Procedure and Trans-Articular Approach)

  • 이준엽;김광연;박세진
    • 대한족부족관절학회지
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    • 제27권4호
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    • pp.123-130
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    • 2023
  • Purpose: "Hallux valgus" is a common disease encountered in clinical practice and is accompanied by foot deformities. Conservative treatment is commonly used in the early stages of hallux valgus. On the other hand, surgical treatment often becomes necessary as the deformity progresses. Surgical treatments involve various osteotomy methods or joint fusion procedures combined with soft tissue release, and outcomes from these surgical treatments are generally favorable. This study compared two soft tissue release techniques in the hallux region. Materials and Methods: This study conducted a retrospective cohort study on 48 participants who underwent surgical treatment for hallux valgus at a single institution from March 1, 2018, to March 31, 2023. A scarf osteotomy was performed in all cases, and the "Modified Mcbride procedure" or "Trans-articular approach" was done for soft tissue release. Hallux valgus angle (HVA), intermetatarsal angle (IMA), and the degree of subluxation of the lateral sesamoid were measured through simple foot radiographs taken before surgery and one year after surgery. Results: In the Modified Mcbride procedure group, HVA, IMA, and the sesamoid position grade decreased from 34.94° to 9.98°, 15.64° to 5.44°, and 2.47 to 0.44, respectively. In the trans-articular approach group, HVA, IMA, and the sesamoid position grade decreased from 33.42° to 7.34°, 15.06° to 6.03°, and 2.17 to 0.58, respectively. There was no significant difference in these changes between the preoperative and one-year postoperative measurements for both techniques (p-value>0.05). Conclusion: A radiological assessment of soft tissue release through the Modified Mcbride procedure and trans-articular approach in hallux valgus did not show significant differences. Therefore, both surgical techniques can be considered in the distal soft tissue release for a hallux valgus correction.