• 제목/요약/키워드: ozone and temperature

검색결과 362건 처리시간 0.022초

실리콘 웨이퍼 세정을 위한 오존의 거동에 관한 연구 (Solubility Behavior of Ozone for Silicon Wafer Cleaning)

  • 이건호;김인정;배소익
    • 반도체디스플레이기술학회지
    • /
    • 제4권4호
    • /
    • pp.13-17
    • /
    • 2005
  • The behavior of ozone in $NH_4OH$ was investigated to evaluate the solution as a cleaning chemical of the silicon wafer. The solubility of ozone in DI(Deionized) water increased as the oxygen flow-rate decreased and ozone generator power increased. Ozone in DI water showed solubility of 100 ppm or higher at room temperature. Ozone concentration was stabilized at the range of ${\pm}2ppm$ by controlling oxygen flow rate and ozone generator power. On the contrary, the solubility of ozone in $NH_4OH$ was very low and strongly depended on the concentration of $NH_4OH$ and pH. The redox potential of ozone was saturated within 10 minutes in DI water and decreased rapidly with the addition of $NH_4OH$. The behavior of ozone in $NH_4OH$ is well explained by redox potential calculation.

  • PDF

EPDM 함량 변화에 따른 SBR/EPDM 블렌드 혼합물의 내오존성과 물리적 성질에 관한 연구 (Studies on the Ozone Resistance and Physical Properties of SBR/EPDM Blend Compound due to EPDM Content Variation)

  • 하기룡;이종철;김태근;황기섭
    • Elastomers and Composites
    • /
    • 제43권1호
    • /
    • pp.8-17
    • /
    • 2008
  • Styrene-butadiene rubber(SBR)은 내마모성, 상용성, 방진성이 우수 하지만, SBR은 주쇄의 불포화기때문에 오존에 의해 쉽게 손상을 받고 탄화수소에 쉽게 팽윤되어 점탄성을 잃어버려 고무제품으로서의 수명을 단축시킨다. 따라서, 본 연구의 목적은 SBR 고무의 이러한 단점을 보완하기 위함이다. 내오존성과 기계적물성을 개선시키기 위해서 내오존성이 우수한 ethylene-propylene-diene terpolymer(EPDM)을 다양한 비율로 블렌드하고, 방진제품으로써의 적합성을 고려하기 위하여 다양한 분석기술을 사용하여 경도, 열분해 온도, 모폴러지, 유리전이온도, 내오존성, 정적 스프링정수를 측정하였다. 본 실험을 통하여 SBR과 EPDM 블렌드의 조성변화에 따른 특성을 연구한 결과, SBR에 대하여 EPDM 30% 블렌드시 상용성이 우수하고, 내오존성이 증가하는 것을 알 수 있었다.

부산지역 오존농도의 시·공간 분포 변화 (Spatial-temporal variations in surface ozone concentrations in Busan metropolitan area)

  • 강윤희;김유근;황미경;정주희;김현수;강민성
    • 한국환경과학회지
    • /
    • 제28권2호
    • /
    • pp.169-182
    • /
    • 2019
  • Temporal and spatial variations in surface ozone concentrations in Busan were investigated by using observation data from urban air quality sites during 2001-2016. The annual ozone concentrations showed a significant increasing trend of $+0.40ppb\;yr^{-1}$ in this period, with a more rapid increase of $+0.81ppb\;yr-1$ since 2010. For the monthly analysis, the increase in ozone concentration was the greatest in August ($+0.68ppb\;yr-1$). These ozone trends were due mainly to rising temperature ($+0.05^{\circ}C\;yr^{-1}$) and weak decreasing precipitation ($-6.42mm\;yr^{-1}$). However, the extreme weather events (heat wave, localized heavy rain, etc.) lead to an increase in short-term variability of ozone since 2010. The relatively low ozone concentrations in the downtown area were caused by high NOx emissions from mobile sources. The increases in ozone concentrations were observed at most of the air quality monitoring sites due to the reductions in anthropogenic emissions of NOx during 2001-2015. However, in the southern coastal area, lower rates of increase in ozone concentrations were observed by $-0.10{\sim}0.25ppb\;yr^{-1}$ due to the significant NOx emitted by ships in the Busan port and Busan new port.

위성관측(MODIS)에서 유도된 수도권 지역의 대류권 오존 및 수치실험 (Tropospheric Ozone over the Seoul Metropolitan Area Derived from Satellite Observations (MODIS) and Numerical Simulation)

  • 유정문;박유민;이석조
    • 한국지구과학회지
    • /
    • 제26권3호
    • /
    • pp.283-296
    • /
    • 2005
  • 본 연구에서는 복사전달모델을 통하여 $9.7{\mu}m$오존 흡수대에 미치는 오존 및 열적(i.e., 지표 온도) 효과를 각각 조사하였다. 또한 오존주의보가 수도권 지역(37.2-37.7 N, 125.7-127.2 E)에 발령되었던 2003년 4일에 대한 위성(MODIS Aqua; ECT 13:30) 및 지상 오존(79개 관측소)의 동시 관측 자료를 기초로 지상 오존에 대한 원격탐사 방법을 제시하였다. 여기서 구름 효과를 제거하고 오존 연직 분포를 분석하기 위하여 종관기상 자료도 사용하였다. 주어진 오존 농도($327\~391$ DU)에 대하여 산출된 $9.6{\mu}m$에서의 상향 복사휘도는 표면온도 Ts = 290 K에서 $5.52\~5.78Wm^{-2}sr^{-1}$, 그리고 Ts = 325 K에서는 $9.00\~9,57Wm^{-2}sr^{-1}$이었다. 따라서 오존 흡수 세기(i.e., $11{\mu}m$$9.7{\mu}m$ 밝기온도 간의 차; $T_{11-9.7}$)를 이용한 오존 원격탐사 시에 세기 변화에 대한 순수한 오존 효과는$0.26Wm^{-2}sr^{-1}/64\;DU$, 그리고 열적 효과는 $0.31Wm^{-2}sr^{-1}/35 K$이었다. 본 연구에서는 흡수 세기와 지상 관측 간에 유의적인 상관을 보이는 경우에 대하여 적외선 위성 관측에서 지상 오존을 원격탐사하는 경험식을 유도하였다. 유도된 지상 오존 농도와 관측값과의 상관은 $49\~63\%$로 유의수준 $1\%$에서 유의미하였다. 경험식을 개선하기 위하여는 지상 오존 대신에 대류권 오존 자료를 사용하고, 성층권 오존 변화도 고려하는 후속 연구가 요구된다.

히터 일체형 하이브리드 단판형 플라즈마 방전소자 (One-Plate Type Hybrid Plasma Discharge Device with Heating Element)

  • 최우진;최은혜;성형석;권진구;이성의
    • 한국전기전자재료학회논문지
    • /
    • 제32권4호
    • /
    • pp.320-326
    • /
    • 2019
  • Recently, the application of atmospheric plasma technology in air filtration is increasing. Sterilization by an atmospheric plasma device is very effective. However, ozone gas, which is generated during atmospheric plasma formation, poses a hazard to human health. To reduce the ozone gas during plasma discharge, we fabricated a one-plate hybrid plasma discharge device with a heating element, which can decompose ozone gas effectively by a simple heating action. In this study, we evaluated the plasma discharge characteristics and ozone concentrations with various Ar flow rates and temperatures. With increasing Ar gas flow rate, the ozone concentration and spectrum intensity increased till an Ar gas flow rate of 60 sccm, and decreased thereafter. When discharged in high temperature, the ozone concentration and spectrum intensity decreased. Further, to evaluate the state of the treated surface under various plasma discharge and heating conditions, we measured the variation in the contact angles on the surface. Regardless of the temperature, the contact angle increased with increasing discharge voltage. However, the contact angle increased when discharged at high temperature.

제형별 오존 free 플라즈마 안정도 검토 (Stability Review of Formulations Produced with Ozone Free Plasma)

  • 천유연;조하현;백문기;박선주;;빈범호
    • 대한화장품학회지
    • /
    • 제50권2호
    • /
    • pp.143-151
    • /
    • 2024
  • 오존은 무색의 독성 가스로, 질소 산화물과 탄화수소가 태양 광선에 의해 광화학 산화 반응이 일어나면서 생성된다. 낮은 농도여도 호흡기 기관에 영향을 주고, 기침 또는 인체에 해롭다. 화장품 원료 중 질소 플라즈마에서 오존이 생성되는 것을 확인하였고, 1 day 후부터 오존의 농도가 낮아짐을 알 수 있었다. 반면 아르곤 가스로 발생된 오존 free 플라즈마는 오존이 검출되지 않았다. 따라서 오존 free 플라즈마를 활용하여 오존 free 화장품의 제조를 목표로 하였다. 효율적인 플라즈마 처리를 위해 non-sinking 법을 활용하여 층분리 미스트, 토너와 앰플에 주입하고, 안정도를 관찰하였다. 층분리 미스트에서 플라즈마의 주입 성공량이 두 제형보다 많았으나, 토너와 앰플에 비해 급격히 감소함을 확인할 수 있었다. 사용된 오존 free 플라즈마는 저온(4 ℃), RT (25 ℃), 고온(37 ℃, 50 ℃) 조건에서 층분리 미스트, 토너와 앰플의 안정도에 영향이 미치지 않는 것을 확인하였다. 따라서, 본 연구는 오존 free 플라즈마의 제형별 화장품 가능성과 안정성의 중요성을 시사하고 있다.

오존을 이용한 신갈나무 크라프트펄프의 무염소표백 (Non-chlorine Bleaching of Oak Kraft Pulp by Ozone)

  • 김동호;백기현
    • 펄프종이기술
    • /
    • 제29권2호
    • /
    • pp.36-45
    • /
    • 1997
  • Newly bleaching sequence using oxygen, ozone and hydrogen peroxide has introduced to avoid pollution hazards from chlorinated organic compounds, because chlorine dioxide substitution bleaching was produced a little chlorinated organic substance. Oxygen-type chemicals replaced for chlorine has attracted much research attention. Bleachability of ozone was improved at low temperature and high pulp consistency. In third bleaching followed OZ bleaching, addition of O2 and NaBH4 in alkali extraction was effective than only alkali extraction. Bleachability of pulps in ozone bleaching(Z) was improved at higher consistency and lower temperature The addition O2 and NaBH4 in alkali extraction after OZ bleaching sequence improved brightness, when compared to those obtained by only alkaline extraction. Pulps bleached by ECF bleaching sequences such as OZEoD and OZEopD was obtained by 90% ISO brightness. The brightness of pulp bleached by TCF sequences with the ozone dosage of 1.6% was approached to target brightness (88~90%ISO). Pulps bleached Z stage combined bleaching sequence was reduced the viscosity to a little greater extent. However, physical properties of pulps was not great different compared to those bleached by conventional bleaching sequences. A pollution index of bleaching effluente by ozone combined bleaching sequences was lower than by conventional bleaching sequence, but somewhat higher than multistage bleaching sequences combined C/D stage.

  • PDF

오존과 생물활성탄에 의한 합성세제 제거 특성 연구 (Removal characteristics of surfactant by ozone and biological activated carbon)

  • 구숙현;권진형;이재인;임진경;김동윤
    • 상하수도학회지
    • /
    • 제14권1호
    • /
    • pp.99-107
    • /
    • 2000
  • In this article, the removal of surfactant by ozone and BAC was studied. Batch and pilot tests were carried out for these studies. In batch tests, efficiency of ozone oxidation process was evaluated for LAS(Linear Alkylbenzen Sulfonate) and SLS(Sodium Lauryl Sulfate) removal. Under oxidant conditions, the removal of LAS was more effective than that of SLS. The removal of surfactant was more enhanced with increasing pH in oxidant systems. Pilot tests are carried out with BAC single process and ozone oxidation/BAC combined process. The removal of LAS was more effective in ozone oxidation/BAC combined process than BAC single process about 10-20%. In the case of SLS, the efficiency of BAC single process was similar to that of ozone oxidation BAC combined process. According to temperature, the removal efficiency of SLS changed from 70% to 95% and initial concentration of surfactant had no effects on removal efficiency of SLC under applied temperature above $15^{\circ}C$.

  • PDF

The Characterization of Surface Ozone Concentrations in Seoul, Koera

  • Heo, Jeong-Sook;Kim, Dong-Sool
    • Journal of Korean Society for Atmospheric Environment
    • /
    • 제18권E3호
    • /
    • pp.129-142
    • /
    • 2002
  • This paper provides a long-term perspective for ozone concentrations at 20 national air quality monitoring sites in Seoul from 1989 to 1998, which were managed by the Korean Ministry of Environment. Ozone episodes occurred more frequently in the east areas (Bangi, Guui, Seongsu, and Ssangmun) than in the west area (Guro and Oryu). When an ozone episode happened, hourly ozone concentrations over 80 ppb continued for an average of 4.0 hours at all sites. Annual variations in daily mean and maximum oBone concentrations showed broadly consistent upward trends at Ssangmun and Gwanaksan. Monthly mean ozone concentrations were the highest from May to June and the 99$^{th}$ and 95$^{th}$ percentile levels appeared higher during June, July, and August. The diurnal patterns of hourly mean ozone levels in urban areas showed typical photochemical formation and destruction, while the flat diurnal shape before 1996 at Gwanaksan indicated few significant photochemical reactions due to a lack of precursors of ozone. The occurrence of ozone over 80 ppb was ascribed to meteorological conditions such as high temperature, strong solar radiation, low relative humidity, and low wind speed with winds most frequently in a westerly direction.

Dependence of Ozone Generation in a Micro Dielectric Barrier Discharge on Dielectric Material and Micro Gap Length

  • Sakoda, Tatsuya;Sung, Youl-Moon
    • KIEE International Transactions on Electrophysics and Applications
    • /
    • 제4C권5호
    • /
    • pp.201-206
    • /
    • 2004
  • In order to investigate the optimum conditions for the effective ozone formation in a dielectric barrier discharge, measurements of ozone concentration were carried out for various conditions such as the gap length, the dielectric material and the operating gas. It was found that the optimum discharge conditions differed exceedingly in the types of operating gases and dielectric materials. In dry air, dielectric material with low dielectric constant and thermal conductivity, which might contribute to the restriction of the gas temperature rise in the discharge region, proved effective in obtaining both high ozone yield and concentration. The optimum gap length was considered to be in the range of 600-800 mm. In oxygen, using a quartz glass disk as a dielectric material, the required condition to obtain the high ozone yield and concentration was expanded.