• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.434-435
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• 2012

Plasma enhanced chemical vapor deposition (PECVD) silicon dioxide thin films have many applications in semiconductor manufacturing such as inter-level dielectric and gate dielectric metal oxide semiconductor field effect transistors (MOSFETs). Fundamental chemical reaction for the formation of SiO2 includes SiH4 and O2, but mixture of SiH4 and N2O is preferable because of lower hydrogen concentration in the deposited film [1]. It is also known that binding energy of N-N is higher than that of N-O, so the particle generation by molecular reaction can be reduced by reducing reactive nitrogen during the deposition process. However, nitrous oxide (N2O) gives rise to nitric oxide (NO) on reaction with oxygen atoms, which in turn reacts with ozone. NO became a greenhouse gas which is naturally occurred regulating of stratospheric ozone. In fact, it takes global warming effect about 300 times higher than carbon dioxide (CO2). Industries regard that N2O is inevitable for their device fabrication; however, it is worthwhile to develop a marginable nitrous oxide free process for university lab classes considering educational and environmental purpose. In this paper, we developed environmental friendly and material cost efficient SiO2 deposition process by substituting N2O with O2 targeting university hands-on laboratory course. Experiment was performed by two level statistical design of experiment (DOE) with three process parameters including RF power, susceptor temperature, and oxygen gas flow. Responses of interests to optimize the process were deposition rate, film uniformity, surface roughness, and electrical dielectric property. We observed some power like particle formation on wafer in some experiment, and we postulate that the thermal and electrical energy to dissociate gas molecule was relatively lower than other runs. However, we were able to find a marginable process region with less than 3% uniformity requirement in our process optimization goal. Surface roughness measured by atomic force microscopy (AFM) presented some evidence of the agglomeration of silane related particles, and the result was still satisfactory for the purpose of this research. This newly developed SiO2 deposition process is currently under verification with repeated experimental run on 4 inches wafer, and it will be adopted to Semiconductor Material and Process course offered in the Department of Electronic Engineering at Myongji University from spring semester in 2012.

• Journal of Korean Society for Atmospheric Environment
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• v.19 no.6
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• pp.625-637
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• 2003

This study was performed to examine the relationship between air pollution exposure and mortality in Seoul for the years of 1998∼2001. Daily counts of death were analyzed by general additive Poisson model, with adjustment for effects of seasonal trend, air temperature, humidity, and day of the week as confounders in a nonparametric approach. Daily death counts were associated with CO (current day),O$_3$ (current day), PM$_{10}$ (current day), NO$_2$ (1 day before), SO$_2$ (1 day before). Increase of 41.71 $\mu\textrm{g}$/㎥ (interquartile range) in PM$_{10}$ was associated with 1.3% (95% CI = 0.7∼1.9％) increase in the daily number of death. $O_3$ concentrations resulted in an increased risk of 1.3% for 23.86 ppb in all-aged mortality [RR = 1.013 (1.004-1.023)1. This effect was greater in children (less than 15 aged) and elderly (more than 65 aged). After ozone level exceeds 25 ppb, the dose-response relationship between mortality and ozone was almost linear. We concluded that Seoul had 1∼5％ increase in mortality in association with IQR (interquartile range) in air pollutants. Daily variations in air pollution within the range currently occurring in Seoul might have an adverse effect on daily mortality. These findings also support the hypothesis that air pollution, at levels below the current ambient air quality standards of Korea, is harmful to sensitive subjects, such as children or elderly.rly.

• Journal of the Korean earth science society
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• v.38 no.2
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• pp.129-140
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• 2017

Global solar radiation was calculated in this research using ground-base measurement data, meteorological satellite data, and GWNU (Gangneung-Wonju National University) solar radiation model. We also analyzed the accuracy of the GWNU model by comparing the observed solar radiation according to the total cloud cover. Our research was based on the global solar radiation of the GWNU radiation site in 2012, observation data such as temperature and pressure, humidity, aerosol, total ozone amount data from the Ozone Monitoring Instrument (OMI) sensor, and Skyview data used for evaluation of cloud mask and total cloud cover. On a clear day when the total cloud cover was 0 tenth, the calculated global solar radiations using the GWNU model had a high correlation coefficient of 0.98 compared with the observed solar radiation, but root mean square error (RMSE) was relatively high, i.e., $36.62Wm^{-2}$. The Skyview equipment was unable to determine the meteorological condition such as thin clouds, mist, and haze. On a cloudy day, regression equations were used for the radiation model to correct the effect of clouds. The correlation coefficient was 0.92, but the RMSE was high, i.e., $99.50Wm^{-2}$. For more accurate analysis, additional analysis of various elements including shielding of the direct radiation component and cloud optical thickness is required. The results of this study can be useful in the area where the global solar radiation is not observed by calculating the global solar radiation per minute or time.

• Korean Journal of Remote Sensing
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• v.38 no.6_1
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• pp.1423-1444
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• 2022

In this study, the sensitivity of the mid-infrared radiance to atmospheric and surface factors was analyzed using the radiative transfer model, MODerate resolution atmospheric TRANsmission (MODTRAN6)'s simulation data. The possibility of retrieving the land surface temperature (LST) using only the mid-infrared bands at night was evaluated. Based on the sensitivity results, the LST retrieval algorithm that reflects various factors for night was developed, and the level of the LST retrieval algorithm was evaluated using reference LST and observed LST. Sensitivity experiments were conducted on the atmospheric profiles, carbon dioxide, ozone, diurnal variation of LST, land surface emissivity (LSE), and satellite viewing zenith angle (VZA), which mainly affect satellite remote sensing. To evaluate the possibility of using split-window method, the mid-infrared wavelength was divided into two bands based on the transmissivity. Regardless of the band, the top of atmosphere (TOA) temperature is most affected by atmospheric profile, and is affected in order of LSE, diurnal variation of LST, and satellite VZA. In all experiments, band 1, which corresponds to the atmospheric window, has lower sensitivity, whereas band 2, which includes ozone and water vapor absorption, has higher sensitivity. The evaluation results for the LST retrieval algorithm using prescribed LST showed that the correlation coefficient (CC), the bias and the root mean squared error (RMSE) is 0.999, 0.023K and 0.437K, respectively. Also, the validation with 26 in-situ observation data in 2021 showed that the CC, bias and RMSE is 0.993, 1.875K and 2.079K, respectively. The results of this study suggest that the LST can be retrieved using different characteristics of the two bands of mid-infrared to the atmospheric and surface conditions at night. Therefore, it is necessary to retrieve the LST using satellite data equipped with sensors in the mid-infrared bands.

• Applied Chemistry for Engineering
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• v.32 no.5
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• pp.547-555
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• 2021

A catalyst-plasma reactor was applied to the storage of agricultural products, e.g., apple and kiwi, to remove the ethylene generated during the storage. Two 1-m³ unit containers were prepared, and the long-term storage stability of the control group at room temperature was compared with that of the experimental group of which the produced ethylene was treated by the catalyst-plasma reactor. In case of the experimental group, a small amount of ozone was injected to the unit container to suppress the growth of microorganisms such as mold. The apples and kiwis were stored at room temperature for 50 and 57 days, respectively, and the changes in ethylene concentration, hardness, sugar content, acidity, and loss rate were compared. The ethylene concentration during the storage for the control group was higher than that for the experimental group, indicating that the ethylene was effectively removed. Hardness, sugar content, and sugar acid ratio after the storage were better than before the storage, and in particular, the storage stability of kiwifruit was improved significantly. In addition, after the storage, the loss rates of apples and kiwis in the control group were 10 and 54.1%, respectively, but the loss rates in the experimental group were 6 and 34.8%, respectively. Therefore, the storage stability of the experimental group was a lot better than that of the control group.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.5
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• pp.413-421
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• 2014

Desiccant cooling system is an air conditioning system that uses evaporative cooler to cool air and it can perform cooling by using heat energy only without electrically charged cooler. Thus, it can solve many problems of present cooling system including the destruction of ozone layer due to the use of CFC[chloro fluoro carbon] affiliated refrigerants and increase of peak power during summer season. In this study, cooling performance and exergy analysis was conducted in order to increase efficiency of desiccant cooling system. Especially, using exergy analysis based on the second law of thermodynamics can resolve the issue related to system efficiency in a more fundamental way by analyzing the cause of exergy destruction both in whole system and each component. The purpose of this study is to evaluate COP[coefficient of performance], cooling capacity and exergy performance of desiccant cooling system incorporating a regenerative evaporative cooler in various regeneration temperature and outdoor air conditions.

• Journal of Sensor Science and Technology
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• v.18 no.4
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• pp.263-268
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• 2009

With the increasing number of automobiles, the problem of air pollution from the exhaust gases of automobiles has become a critical issue. The principal gases that cause air pollution are nitrogen oxide or NO$_x$(NO and NO$_2$), and CO. Because NO$_x$ gases cause acid rain and global warming and produce ozone(O$_3$) that leads to serious metropolitan smog from photochemical reaction, they must be detected and reduced. Mixtures of WO$_3$ and $In_2O_3$(WO$_3$:$In_2O_3$=10:0, 7:3, 5:5, 3:7, and 0:10 in wt.%), which are NO$_x$ gas-sensing materials, were prepared, and thick-film gas sensors that included a heater and a temperature sensor were fabricated. Their sensitivity to NO$_x$ was measured at 250$\sim$400$^{\circ}C$ for NO$_x$ concentrations of 1$\sim$5 ppm. The $In_2O_3$ thick-film sensor showed excellent sensitivity($R_{gas}/R_{air}$=10.22) at 300$^{\circ}C$ to 5-ppm NO. The response time for 70 % saturated sensitivity was about 3 seconds, and the sensors exhibited very fast reactivity to NO$_x$.

• Journal of Korean Society for Atmospheric Environment
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• v.23 no.E1
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• pp.16-28
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• 2007

An improved method was developed to determine gas-phase hydrogen peroxide($H_2O_2$) and organic hydro-peroxides (ROOH) in real-time, The analytical system for $H_2O_2$ is based on formation of hydroxybenzoic acid (OHBA), a strong fluorescent compound. OHBA is formed by a sequence of reactions, photoreduction of Fe(III)-EDTA to Fe(II)-EDTA, the Fenton reaction of Fe(II)-EDTA with $H_2O_2$, and hydroxylation of benzoic acid. By use of this analytical method rather than a previous similar method, Fenton reaction time was reduced from 2 min. to 30s. Air samples were collected by a surfaceless inlet to prevent inlet line losses. With a special arrangement of the sampling apparatus, sample delivery time was drastically reduced from ${\sim}5\;min\;to\;{\sim}20\;s$. The automated system was found to be sensitive, capable of continuous monitoring, and affordable to operate. A comparison of this method with a well-established one showed an excellent linear correlation, validating applicability of this technique to $H_2O_2$ determination. The system was applied to field measurements conducted during summertime of 2004 in Gwangju, South Korea. $H_2O_2$ was found to be a predominant species of peroxides. The diurnal variation of $H_2O_2$ displayed the maximum in early afternoon and the broad minimum throughout night. $H_2O_2$ was correlated positively with ozone, photochemical age, and temperature, however, negatively with $NO_x$ and relative humidity.

• Journal of Biomedical Engineering Research
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• v.19 no.6
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• pp.617-622
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• 1998

A cryotherapy system using cold air was developed. The developed system had superior low-temperature characteristics with various flow rates and nozzle sizes, and used R-404A, as a coolant, which has no destructive effects of Ozone layers. Flow rates and the treatment time can be easily altered during the operation. In addition, and alarm system was designed for the overload, overheat, and over-charge of the machine. For clinical applications, skin temperatures, intra-articular temperatures of the knee joint and intra-muscluar temperatures of the gluteal muscles were measured during and after the cryotherapy. After a 5-minute therapy, skin and intra-articular temperatures decreased by $23.3{\pm}4.7 and 4.1 {\pm}1.0^{circ}C$, respectively. A 5-minute cryotherapy was good enough to maintain low intra-articular temperatures for 2-3 hours. Resting intra-muscular temperatures in 2, 4, and 6cm deep in the gluteal muscle were $36.5{\pm}1.2, 36.9{\pm}0.2, 37.1{\pm}0.2^{circ}C$, respectively (p<0.05). Lowest temperatures in 2, 4, and 6cm depth were $35.1{\pm}0.7, 36.2{\pm}0.4, 36.9{\pm}0.3^{circ}C$, respectively (p<0.05). Temperatures after a 2-hour cold air application on the skin and in the muscle in dept도 of 2, 4, and 6cm were $32.2{\pm}1.1, 36.2{\pm}0.5, 36.6{\pm}0.3, 36.9{\pm}0.3^{circ}C$respectively (p<0.05). Temperatures on the skin and in the muscle significantly decreased after 2 hours, compared with before cold air application (p<0.05). The intra-muscular temperature was changed more slowly than the skin temperature, and the deeper the muscle, the lesser temperature changes. The effect of a 5-minute cold air application lasts up to 2 hours, and it seems that the rebound-rise of the temperature dut to the reactive vasodilatation does not occur in the gluteal muscle.

• Current Photovoltaic Research
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• v.12 no.1
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• pp.1-5
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• 2024

Perovskite solar cells have exhibited a remarkable increase in efficiency from an initial 3.8% to 26.1%, marking a significant advancement. However, challenges persist in the commercialization of perovskite solar cells due to their low stability with respect to humidity, light exposure, and temperature. Moreover, the instability of the organic charge transport layer underscores the need for exploring inorganic alternatives. In the manufacturing process of the perovskite solar cells' oxide charge transport layer, ultraviolet-ozone (UVO) treatment is commonly applied to enhance the wettability of the perovskite solution. The UVO treatment on metal oxides has proven effective in suppressing surface oxygen vacancies and removing surface organic contaminants. This study focused on the characterization of nickel oxide as the hole transport material in perovskite solar cells, specifically investigating the impact of UVO treatment on film properties. Through this analysis, changes induced by the UVO treatment were observed, and consequent alterations in the device characteristics were identified.