• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.5
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• pp.52-59
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• 1989

The reliability of the thin thermal oxide was investigated by using constant current stress method. Polysilicon gate MOS capacitors with oxide thickness range of 20-25nm were used in this experiment. Automatic measurement and statistical data analysis which were essential in reliability evaluation of VLSI process preformed by HP 9000 computer. Based on TDDB results, defect density, breakdown charge (Qbd) and lifetime of oxide film were evaluated. According to the polarity of the stress, some different characteristics were shown. Defect density was 62/$cm^2$ at negative gate injection. The value of Qbd was about 30C/$cm^2$ at positive gate injection, and about 21C/$cm^2$ at negative. The current density acceleration factor was 1.43$cm^2$/A for negative gate injection, and 1.25$cm^2$/A for positive gate injection.

• Journal of Power System Engineering
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• v.22 no.1
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• pp.79-86
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• 2018

Many countries have conducted extensive studies for biomass co-firing to enhance the durability of reactor on high-temperature corrosion. However, due to the complicated mechanisms of biomass co-firing, there have been limitations in accurately determining the current state of corrosion and predicting the potential risk of corrosion of power plant. In order to solve this issue, this study introduced Lab-scale corrosion system to analyze the corrosion characteristics of the A213 T91 material under the biomass co-firing conditions. The corrosion status of the samples was characterized using SEM/EDS analysis and mass loss measurement according to various biomass co-firing conditions such as corrosion temperature, $SO_2$ concentration, and corrosion time. As a result, the corrosion severity of A213 T91 material was gradually increased with the increase of $SO_2$ concentration in the reactor. When $SO_2$ concentration was changed from 0 ppm to 500 ppm, both corrosion severity and oxide layer thickness were proportionally increased by 15% and 130%, respectively. The minimum corrosion was observed when the corrosion temperature was $450^{\circ}C$. As the temperature was increased up to $650^{\circ}C$, the faster corrosion behavior of A213 T91 was observed. A213 T91 was observed to be more severely corroded by the effect of chlorine, resulting in faster corrosion rate and thicker oxide layer. Interestingly, corrosion resistance of A213 T91 tended to gradually decrease rather than increases as the oxide layer was formed. The results of this study is expected to provide necessary research data on boiler corrosion in biomass co-firing power plants.

• Journal of the Korean Vacuum Society
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• v.19 no.2
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• pp.141-147
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• 2010

In this study, high-k oxide films like $Al_2O_3$, $TiO_2$, $HfO_2$ were deposited on Si, $SiO_2$/Si, GaAs wafers, and then the thermal conductivity was measured by using thermo-reflectance method which utilizes the reflectance variation of the film surface produced by the periodic temperature variation. The result shows that high-k oxide films with 50 nm thickness have high thermal conductivity of 0.80~1.29 W/(mK). Therefore, effectively dissipate the heat generated in the electric circuit such as CMOS memory device, and the heat transfer changes according to the micro grain size.

• Nuclear Engineering and Technology
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• v.49 no.5
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• pp.1044-1062
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• 2017

The construction project of the Kijang research reactor (KJRR), which is the second research reactor in Korea, has been launched. The KJRR was designed to use, for the first time, U-Mo fuel. Plate-type U-7 wt.% Mo/Al-5 wt.% Si, referred to as U-7Mo/Ale5Si, dispersion fuel with a uranium loading of $8.0gU/cm^3$, was selected to achieve higher fuel efficiency and performance than are possible when using $U_3Si_2/Al$ dispersion fuel. To qualify the U-Mo fuel in terms of plate geometry, the first miniplates [HANARO Miniplate (HAMP-1)], containing U-7Mo/Al-5Si dispersion fuel ($8gU/cm^3$), were fabricated at the Korea Atomic Energy Research Institute and recently irradiated at HANARO. The PIE (Post-irradiation Examination) results of the HAMP-1 irradiation test were analyzed in depth in order to verify the safe in-pile performance of the U-7Mo/Al-5Si dispersion fuel under the KJRR irradiation conditions. Nondestructive analyses included visual inspection, gamma spectrometric mapping, and two-dimensional measurements of the plate thickness and oxide thickness. Destructive PIE work was also carried out, focusing on characterization of the microstructural behavior using optical microscopy and scanning electron microscopy. Electron probe microanalysis was also used to measure the elemental concentrations in the interaction layer formed between the U-Mo kernels and the matrix. A blistering threshold test and a bending test were performed on the irradiated HAMP-1 miniplates that were saved from the destructive tests. Swelling evaluation of the U-Mo fuel was also conducted using two methods: plate thickness measurement and meat thickness measurement.

• The Journal of the Korea institute of electronic communication sciences
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• v.12 no.5
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• pp.791-796
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• 2017

In this study, we investigated the influence of the fabrication process of stacked capacitors on the cell capacitance by using Load Lock (L/L) LPCVD system for dielectric thin film of DRAM capacitor. As a result, it was confirmed that the capacitance difference of about 3-4 fF is obtained by reducing the effective thickness of the oxide film by about $6{\AA}$ compared to the conventional non-L/L device. In addition, Cs was found to be about 3-6 fF lower than the calculated value, even though the measurement range of the thickness of the nitride film as an insulating film was in a normal management range. This is because the node poly FI CD is managed at the upper limit of the spec, resulting in a decrease in cell surface area, which indicates a Cs reduction of about 2fF. Therefore, it is necessary to control the thickness of insulating film and CD management within 10% of the spec center value in order to secure stable Cs.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.316-316
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• 2008

Using an evaporation method, $SiO_2$ was deposited as a buffer layer between a flexible PET substrate and a ITO film deposited by DC magnetron sputtering and electro-optical properties were investigated with thickness variance of $SiO_2$ layers. After coating a $SiO_2$ layer and a ITO film, the ITO/$SiO_2$/PET was heated up to $200^{\circ}C$ and the resistivity and the transmittance were measured by hall effect measurement system and UV/VIS/NIR spectroscopy. As a result of depositing a $SiO_2$ buffer layer, the resistivity increased and the transmittance and adhesion property were enhanced than ITO films with no buffer layers and the resistivity was lowered as $SiO_2$ thickness increased from 50 $\AA$ to 100 $\AA$. It was found that the transmittance was independent of annealing temperature variance in $150^{\circ}C{\sim}200^{\circ}C$ and the resistivity decreased as the temperature increased and especially decreasing rate of the resistivity was higher as the buffer layer thickness was thinner. So under optimized depositing of $SiO_2$ buffer layers and post-annealing of ITO/$SiO_2$/PET, ITO films with enhanced adhesion, electro-optical properties can obtained.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.5
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• pp.563-569
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• 2012

The superheater and reheater tubes of a heavy-load fossil power plant boiler can be damaged by overheating, and therefore, the degree of overheating is assessed by measuring the oxide scale thickness inside the tube during outages. The tube temperature prediction from the oxide scale thickness measurement is necessarily accompanied by destructive tube sampling, and the result of tube temperature prediction cannot be expected to be accurate unless the selection of the overheated point is precise and the initial-operation tube temperature has been obtained. In contrast, if the tube temperature is to be predicted analytically, considerable effort (to carry out the analysis of combustion, radiation, convection heat transfer, and turbulence fluid dynamics of the gas outside the tube) is required. In addition, in the case of analytical tube temperature prediction, load changes, variations in the fuel composition, and operation mode changes are hardly considered, thus impeding the continuous monitoring of the tube temperature. This paper proposes a method for the short-term prediction of tube temperature; the method involves the use of boiler operation information and flow-network-analysis-based tube heat flux. This method can help in high-temperaturedamage monitoring when it is integrated with a practical tube-damage-assessment method such as the Larson-Miller Parameter.

• The Journal of Korean Society for Radiation Therapy
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• v.30 no.1_2
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• pp.49-63
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• 2018

Purpose : The purpose of this study is investigating the changes of treatment plan and comparing skin dose with or without the skin flash. To investigate optimal applications of the skin flash, the changes of skin dose of each plans by various thicknesses of skin flash were measured and analyzed also. Methods and Material : Anthropomorphic phantom was scanned by CT for this study. The 2 fields hybrid IMRT and the 6 fields static IMRT were generated from the Eclipse (ver. 13.7.16, Varian, USA) RTP system. Additional plans were generated from each IMRT plans by changing skin flash thickness to 0.5 cm, 1.0 cm, 1.5 cm, 2.0 cm and 2.5 cm. MU and maximum doses were measured also. The treatment equipment was 6MV of VitalBeam (Varian Medical System, USA). Measuring device was a metal oxide semiconductor field-effect transistor(MOSFET). Measuring points of skin doses are upper (1), middle (2) and lower (3) positions from center of the left breast of the phantom. Other points of skin doses, artificially moved to medial and lateral sides by 0.5 cm, were also measured. Results : The reference value of 2F-hIMRT was 206.7 cGy at 1, 186.7 cGy at 2, and 222 cGy at 3, and reference values of 6F-sIMRT were measured at 192 cGy at 1, 213 cGy at 2, and 215 cGy at 3. In comparison with these reference values, the first measurement point in 2F-hIMRT was 261.3 cGy with a skin flash 2.0 cm and 2.5 cm, and the highest dose difference was 26.1 %diff. and 5.6 %diff, respectively. The third measurement point was 245.3 cGy and 10.5 %diff at the skin flash 2.5 cm. In the 6F-sIMRT, the highest dose difference was observed at 216.3 cGy and 12.7 %diff. when applying the skin flash 2.0 cm for the first measurement point and the dose difference was the largest at the application point of 2.0 cm, not the skin flash 2.5 cm for each measurement point. In cases of medial 0.5 cm shift points of 2F-hIMRT and 6F-sIMRT without skin flash, the measured value was -75.2 %diff. and -70.1 %diff. at 2F, At -14.8, -12.5, and -21.0 %diff. at the 1st, 2nd and 3rd measurement points, respectively. Generally, both treatment plans showed an increase in total MU, maximum dose and %diff as skin flash thickness increased, except for some results. The difference of skin dose using 0.5 cm thickness of skin flash was lowest lesser than 20 % in every conditions. Conclusion : Minimizing the thickness of skin flash by 0.5 cm is considered most ideal because it makes it possible to keep down MUs and lowering maximum doses. In addition, It was found that MUs, maximum doses and differences of skin doses did not increase infinitely as skin flash thickness increase by. If the error margin caused by PTV or other factors is lesser than 1.0 cm, It is considered that there will be many advantages in with the skin flash technique comparing without it.

• Restorative Dentistry and Endodontics
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• v.42 no.2
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• pp.118-124
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• 2017

Objectives: This study aimed to evaluate the color stability of bulk-fill and nanohybrid resin-based composites polished with 3 different, multistep, aluminum-oxide impregnated finishing and polishing disks. Materials and Methods: Disk-shaped specimens (8 mm in diameter and 4 mm in thickness) were light-cured between two glass slabs using one nanohybid bulk-fill (Tetric EvoCeram, Ivoclar Vivadent), one micro-hybrid bulk-fill (Quixfil, Dentsply), and two nanohybrid incremental-fill (Filtek Ultimate, 3M ESPE; Herculite XRV Ultra, Kerr) resin-based composites, and aged by thermocycling (between $5-55^{\circ}C$, 3,000 cycles). Then, they were divided into subgroups according to the polishing procedure as SwissFlex ($Colt\grave{e}ne/Whaledent$), Optidisc (Kerr), and Praxis TDV (TDV Dental) (n = 12 per subgroup). One surface of each specimen was left unpolished. All specimens were immersed in coffee solution at $37^{\circ}C$. The color differences (${\Delta}E$) were measured after 1 and 7 days of storage using a colorimeter based on CIE Lab system. The data were analyzed by univariate ANOVA, Mann-Whitney U test, and Friedmann tests (${\alpha}=0.05$). Results: Univariate ANOVA detected significant interactions between polishing procedure and composite resin and polishing procedure and storage time (p < 0.05). Significant color changes were detected after 1 day storage in coffee solution (p < 0.05), except Quixfil/Optidisc which was color-stable after 7 days (p > 0.05). Polishing reduced the discoloration resistance of Tetric EvoCeram/SwissFlex, Tetric EvoCeram/Praxis TDV, Quixfil-SwissFlex, and all Herculite XRV Ultra groups after 7 days storage (p < 0.05). Conclusions: Discoloration resistance of bulk-fill resin-based composites can be significantly affected by the polishing procedures.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1343_1344
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• 2009

In this work, transparent conducting Al-doped zinc oxide (AZO) films were prepared on Corning glass substrate by RF magnetron sputtering using an Al-doped ZnO target (Al: 2 wt.%) at room temperature and all films were deposited with athickness of 150 nm. We investigated the effects of the post-annealing temperature and the annealing ambient on structural, electrical and optical properties of AZO films. The films were annealed at temperatures ranging from 300 to $500^{\circ}C$ in steps of $100^{\circ}C$ using rapid thermal annealing equipment in oxygen. The thickness of the film was observed by field emission scanning electron microscopy (FE-SEM) and grain size was calculated from the XRD spectra using the Scherrer equation and their electrical properties were investigated using a hole measurement and the reflectance of AZO films was investigated by UV-VIS spectrometry.