Thermal Conductivity Measurement of High-k Oxide Thin Films |
Kim, In-Goo
(Department of Physics, University of Ulsan)
Oh, Eun-Ji (Department of Physics, University of Ulsan) Kim, Yong-Soo (Department of Physics, University of Ulsan) Kim, Sok-Won (Department of Physics, University of Ulsan) Park, In-Sung (Department of Materials Science &Engineering, Hanyang University) Lee, Won-Kyu (School of Mechanical and Automotive Engineering, University of Ulsan) |
1 | G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 89, 5243 (2001). DOI |
2 | S. M. Lee and D. G. Cahill. Rev. B52, 253 (1995). DOI |
3 | D. Guidotti and H. M. van Driel, Appl. Phys. Lett. 47, 1336 (1985). DOI |
4 | S. J. Ahn and C. G. Park, J. Korea Magnetics Soc. 15, 287 (2005). 과학기술학회마을 DOI |
5 | J. H. Blackwell, J. Appl. Phys. 25, 127 (1954). |
6 | J. H. Mun, S. W. Kim, R. Kato, I. Hatta, S. H. Lee, and K. H Kang, Thermochimica Acta. 455, 55 (2007). DOI |
7 | Takuji Maekawa and Ken Kurosaki, Surface & Coatings Technology 202, 3067 (2008). DOI |
8 | S. C. Chen, J. C. Lou, and C. H. Chien, Thin Solid Films. 488, 167 (2005). DOI |
9 | S. M. Lee and D. G. Cahill, J. Appl. Phys. 81, 2950 (1997). |
10 | T. H. Lee and H. K. Ko, J. Ahn, J. Appl. Phys. 45, 6693 (2006). |
11 | S. W. Shin and H. N. Cho, Thin Solid Films 517, 933 (2008). DOI |
12 | S. G. Choi and A. Sivasankar Reddy, J. Korea Vacuum Soc. 17, 130 (2008) 과학기술학회마을 DOI |
13 | R. Kato and I. Hatta, Int. J. Thermophys. 26, 179 (2005). DOI |
14 | N. Taketoshi, T. Baba, and A. Ono, Jpn. J. Appl. Phys. 38, L126 (1999). DOI |
15 | S. E. Gustafsson and E. Karawhchi, Rev. Sci. Instr. 54, 744 (1983). DOI |
16 | S. H. Kim, E. H. Lee, I. W. Jung, J. H. Hyun, S. Y. Lee, M. I. Kang, and J. W. Ryu, J. Korea Vacuum Soc. 18, 133 (2009) 과학기술학회마을 DOI |