• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.567-567
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• 2012

Since the carbon nanotubes (CNTs) have extraordinary material properties, many researchers are trying to make a practical application in various fields [1]. In particular, the high surface area of CNTs was fascinated for nano-template on the catalytic system. $RuO_2$ coated CNTs are useful functional nano-composites in many applications, including super capacitors, fuel cells, biosensors, and field emitters. However, the research of interaction between CNTs and $RuO_2$ was not satisfied with various fields [2]. In this study, we will introduce the change of chemical and electrical state of $RuO_2$/CNTs at different temperatures by synchrotron radiation photoemission spectroscopy (SRPES). The t-MWCNTs used in this experiment were grown on the Ni/TiN/Si substrates by chemical vapor deposition. $RuO_2$ of 4-20 nm in thickness was deposited on the t-MWNTs by sputter. The SRPES measurements were carried out at the 4B1 beamline of the Pohang Accelerator Laboratory in Korea. The result of XPS measurement indicates that the deposited $RuO_2$ on the CNTs was reduced into pure Ru at above $300^{\circ}C$. And we confirmed that the effective work function of $RuO_2$/CNTs was decreased with increasing temperature.

• 한국결정학회:학술대회논문집
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• 한국결정학회 2002년도 정기총회 및 추계학술연구발표회
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• pp.40-41
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• 2002

차세대 반도체 및 나노소자 산업에 대한 국제적 기술은 고밀도 직접화의 추세에 따라서 .게이트 산화막의 두께가 급속히 작아지는 추세이다. 지금까지 이산화규소(A1₂O₃)가 게이트 산화막으로 주로 사용되어 왔으나 점차 SiON 혹은 high k 박막으로 바뀌고 있다. 본 연구에서는 차세대 반도체 소자에 사용될 게이트 산화막 물질인 SiON 박막과 Al₂O₃박막에 대한 SE(Spectroscopic Ellipsometry)분석 모델을 확립하였고, SE 측정결과를 TEM, MEIS, XRR의 결과들과 비교하였다. SiON 박막의 굴절률 값은 Si₃N₄와 SiO₂가 물리적으로 혼합되어 있다고 가정하여 Bruggeman effective medium approximation을 사용하여 구하였다. 동일한 시료를 절단하여 TEM, MEIS, 그리고 XRR에 의하여 SiON 박막의 두께를 측정하였으며, 그 결과 SE와 XRR에 의해 얻어진 박막두께가 TEM과 MEIS의 결과 값보다 약 0.5 nm 크게 주어짐을 알 수 있었다(Table 1 참조). 본 연구결과는 비파괴적이며 비접촉식 측정방법인 SE가 2～4nm 두께의 초미세 SiON 박막의 두께와 N 농도의 상대적 값을 빠르고 쉽게 구할 수 있는 유용한 측정방법 임을 보여주었다. 기존의 게이트 산화물인 SiO₂를 대체할 후보 물질들 중의 하나인 A1₂O₃의 유전함수를 구하기 위하여 8 inch, p-type 실리콘 기판 위에 성장된 5 nm, 10 nm, 및 20 nm 두께의 A1₂O₃ 박막의 유전함수와 두께를 측정하였다. 이 시료들에 대한 SE data는 vacuum-UV spectroscopic ellipsometer를 사용하여 세 개의 입사각에서 0.75 eV에서 8.75 eV까지 0.05 eV 간격으로 측정되었다. A1₂O₃ 박막의 유전함수와 두께를 얻기 위하여 공기층/A1₂O₃ 박막/Si 기판으로 구성된 3상계 모델을 사용하였다. Si 기판에 대한 복소 유전함수는 문헌상의 값(1)을 사용하였고, A1₂O₃ 박막의 유전함수는 5개의 미지상수를 갖는 Tauc- Lorentz(TL) 분산함수(2)를 사용하였다. A1₂O₃ 박막의 경우 두께가 증가함에 따라서 굴절률이 커짐을 알 수 있었다.

• 한국세라믹학회지
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• 제49권5호
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• pp.404-411
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• 2012

The reliability of solid oxide fuel cells (SOFCs) particularly depends on the high quality of solid oxide electrolytes. The application of thinner electrolytes and multi electrolyte layers requires a more reliable characterization method. Most of the investigations on thin film solid electrolytes have been made for the parallel transport along the interface, which is not however directly related to the fuel cell performance of those electrolytes. In this work an array of ion-blocking metallic Ti/Au microelectrodes with about a $160{\mu}m$ diameter was applied on top of an ultrathin ($1{\mu}m$) yttria-stabilized-zirconia/gadolinium-doped-ceria (YSZ/GDC) heterolayer solid electrolyte in a micro-SOFC prepared by PLD as well as an 8-${\mu}m$ thick YSZ layer by screen printing, to study the transport characteristics in the perpendicular direction relevant for fuel cell operation. While the capacitance variation in the electrode area supported the working principle of the measurement technique, other local variations could be related to the quality of the electrolyte layers and deposited electrode points. While the small electrode size and low temperature measurements increaseed the electrolyte resistances enough for the reliable estimation, the impedance spectra appeared to consist of only a large electrode polarization. Modulus representation distinguished two high frequency responses with resistance magnitude differing by orders of magnitude, which can be ascribed to the gadolinium-doped ceria buffer electrolyte layer with a 200 nm thickness and yttria-stabilized zirconia layer of about $1{\mu}m$. The major impedance response was attributed to the resistance due to electron hole conduction in GDC due to the ion-blocking top electrodes with activation energy of 0.7 eV. The respective conductivity values were obtained by model analysis using empirical Havriliak-Negami elements and by temperature adjustments with respect to the conductivity of the YSZ layers.

• E2M - 전기 전자와 첨단 소재
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• 제10권2호
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• pp.141-149
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• 1997

L $a_{0.7}$S $r_{0.3}$Mn $O_{3}$ powders were prepared by both GNP(Glycine-Nitrate Process) and solid state reaction method in various of calcination temperature(800-1000.deg. C) and time in air. Also, L $a_{0.7}$S $r_{0.3}$Mn $O_{3}$ cathode contacts on YSZ(Yttria-Stabilized Zirconia) substrate were prepared by screen printing and sintering method as a function of sintering temperature(1100-1450.deg. C) in air. Sintering behaviors have been investigated by SEM(Scanning Electron Microscope) and porosity measurement. Compositional and structural characterization were carried out by X-ray diffractometer and ICP AES(Inductively Coupled Plasma-Atomic Emission Spectrometry) analysis. Electrical characterization was carried out by the electrical conductivity with linear 4 point probe method. As the calcination period increased in solid state reaction method, L $a_{0.7}$S $r_{0.3}$Mn $O_{3}$ phase increased. Although L $a_{0.7}$S $r_{0.3}$Mn $O_{3}$ single phase was obtained only for 48hrs at 1000.deg. C, in GNP method it was easy to get single and ultra-fine L $a_{0.7}$S $r_{0.3}$Mn $O_{3}$ powders with submicron particle size at 650.deg. C for 30min. The particle size and thickness of L $a_{0.7}$S $r_{0.3}$Mn $O_{3}$ cathode contact by solid state reaction method did not change during the heat treatment, while those by GNP method showed good sintering characteristics because initial powder size fabricated from GNP method is smaller than that fabricated from solid state reaction method. Based on enthalpy change from thermodynamic data and ICP-AES analysis, it was suggested to make cathode contact in composition of (L $a_{0.7}$S $r_{0.3}$)$_{0.91}$ Mn $O_{3}$ which have little second phase (L $a_{2}$Z $r_{2}$ $O_{7}$) for high efficient solid oxide fuel cells applications. As (L $a_{0.7}$S $r_{0.3}$)$_{0.91}$Mn $O_{3}$ cathode contact on YSZ substrate was sintering at 1250.deg. C the temperature that liquid phase sintering did not occur. It was possible to obtain proper cathode contacts with electrical conductivity of 150(S/cm) and porosity content of 30-40%.m) and porosity content of 30-40%.

• 구강회복응용과학지
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• 제16권3호
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• pp.197-210
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• 2000

Surface roughness is one of implant surface topography and it's found that surface roughness characterizations, such as surface energy, oxide layer thickness and its chemical composition, are closely correlated if the roughness is changed. Several studies showed the importance of analyzing surface structure so the surface structure of thread implant was analyzed to measure the implant quality exactly. In this study, surface roughness of 4 implants - MK $II^{(R)}$(Nobel Biocare), $RBM^{(R)}$(Life-Core, USA), $Osseotite^{(R)}$(3i, USA), $TPS^{(R)}$(Life-Core, USA) - were measured using $Accura^{(R)}$ and 40 implants were installed into 4 sets of ten bovine ribs based on the parameters from the measurements. From this test, the following conclusions for the initial stability were drawn by measuring and comparing RFA, Periotest Value (PTV), Removal Torgue Value (RTV). 1. $R_a$ value in surface roughness measurement was increasing by the order of $MKII^{(R)}$, $Osseotite^{(R)}$, $RBM^{(R)}$, $TPS^{(R)}$ and $R_q$ value was the same order. 2. $R_q$ value in each section was observed to increase by the order of $MKII^{(R)}$, $Osseotite^{(R)}$, $RBM^{(R)}$, $TPS^{(R)}$ in top and $MKII^{(R)}$, $RBM^{(R)}$, $Osseotite^{(R)}$, $TPS^{(R)}$ in mid-section but the value of $MKII^{(R)}$ bottom was the lowest, followed by $Osseotite^{(R)}$, $RBM^{(R)}$ and $TPS^{(R)}$. 3. RFA increased by the order of $RBM^{(R)}$(7042Hz), $MKII^{(R)}$(7047Hz), $Osseotite^{(R)}$(7076Hz), $TPS^{(R)}$(7168Hz) and there was no significance between each group. 4. PTV was increasing by the order of $MKII^{(R)}$(-1.62), $TPS^{(R)}$(-1.92), $Osseotite^{(R)}$ & $RBM^{(R)}$(-2.08) and there was no significance, either. 5. Removal torque in RTV measurement showed the increasing order of $MKII^{(R)}(5.31kgf{\cdot}cm)$, $Oeeotite^{(R)}(5.71kgf{\cdot}cm)$, $TPS^{(R)}(5.92kgf{\cdot}cm)$ and $RBM^{(R)}(7.24kgf{\cdot}cm)$ and there was no significance among groups. Above observations explains that surface roughness does not make any impact on the initial stability of implants installation.

• 대한기계학회논문집B
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• 제35권1호
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• pp.17-22
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• 2011

실험을 통해 구현한 ZnO 기반의 투명 박막트랜지스터의 기계적 특성을 분석하고 안정성에 대한 확보방안을 제시하기 위해 FEM (Finite Element Method)을 이용하여 소자를 구성하는 브릿지 와 패드 부분에 대한 구조해석을 실시하였다. 소자의 유연성 확보를 위해 설계된 브릿지 부분의 웨이브 패턴을 구현한 결과 실험 값 대비 최대 진폭의 크기가 오차 0.5%로 실험값과 유사한 신뢰성 있는 결과 값을 얻어낼 수 있었다. 이러한 결과를 바탕으로 브릿지와 패드 사이에 나타나는 압축 응력을 확인하였으며, 압축 응력 값을 패드에 적용하여 그 변형 정도를 분석하였다. 기계적으로 안정성을 갖는 소자를 설계하기 위해 $SiO_2$ 절연층위의 ITO 전극과 ZnO 활성 층의 위치 및 크기를 예측 하였으며, SU-8 코팅 두께를 조절함으로써 중성 역학 층 (Neutral Mechanical Plane)의 위치와 구조적 타당성에 대하여 분석하였다.

• 대한치과보철학회지
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• 제41권3호
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• pp.300-318
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• 2003

Statement of problem: The success of implants depends on intimate and direct contact of implant material on bone tissue and on functional relationship with soft tissue contact. Creation and maintenance of osseointegration depend on the understanding of the tissue's healing, repairing, and remodeling capacity and these capacities rely on cellular behavior. Altering the surface properties can modify cellular responses such as cell adhesion, cell motility, bone deposition, Therefore, various implant surface treatment methods are being developed for the improved bone cell responses. Purpose: The purpose of this study was to evaluate the responses of osteoblast-like cells to surface-modified titanium. Materials and Methods: The experiment was composed of four groups. Group 1 represented the electropolished surface. Group 2 surfaces were machined surface. Group 3 and Group 4 were anodized surfaces. Group 3 had low roughness and Group 4 had high roughness. Physicochemical properties and microstructures of the discs were examined and the responses of osteoblast-like cells to the discs were investigated. The microtopography was observed by SEM. The roughness was measured by three-dimension roughness measuring system. The microstructure was analyzed by XRD, AES. To evaluate cell responses to modified titanium surfaces, osteoblasts isolated from calvaria of neonatal rat were cultured. Cell count, morphology, total protein measurement and alkaline phosphatase activities of the cultures were examined. Results and Conclusion: The results were as follows 1. The four groups showed specific microtopography respectively. Anodized group showed grain structure with micropores. 2. Surface roughness values were, from the lowest to the highest, electropolished group, machined group, low roughness anodized group, and high roughness anodized group. 3. Highly roughened anodized group was found to have increased surface oxide thickness and surface crystallinity. 4. The morphology of cells, flattened or spherical, were different from each other. In the electropolished group and machined group, the cells were almost flattened. In two anodized groups, some cells were spherical and other cells were flattened. And the 14 day culture cells of all of the groups were nearly flattened due to confluency. 5. The number of attached cells was highest in low roughness anodized group. And the machined group had significantly lower cell count than any other groups(P<.05). 6. Total protein contents showed no difference among groups. 7. The level of alkaline phosphatase activities was higher in the anodized groups than electropolished and machined groups(P<.05).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.430-430
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• 2007

In general, polyimides (PIs) are used in liquid crystal displays (LCDs) as alignment layer of liquid crystals (LCs). Up to date, the rubbing alignment technique has been widely used to align liquid crystals on the PI surface, which is suitable for mass-production of LCDs because of its simple process and high productivity. However, this method has some disadvantages. Rubbed PI surfaces include the debris left by the cloth and the generation of electrostatic charges during rubbing process. Therefore, rubbing-free techniques for LC alignment are strongly required in LCD technology. In this experiment, PI was uniformly coated on indium-tin-oxide electrode substrates to form LC alignment layers using a spin-coating method and the PI layers were subsequently imidized at 433 K for 1 h. The thickness of the PI layer was set at 50 nm. The LC alignment layer surfaces were exposed to an $Ar^+$ ion-beam under various ion-beam energies. The antiparallel cells and twisted-nematic (TN) cells for the measurement of pretile angle and electro-optical characteristics were fabricated with the cell gap of 60 and $5\;{\mu}m$, respectively. The LC cells were filled with nematic LC (NLC, MJ001929, Merck) and were assembled. The NLC alignment capability on ion-beam-treated PI was observed using photomicroscope and the pretilt angle of the NLC was measured by the crystal-rotation method at room temperature. Voltage-transmittance (V-T) and response time characteristics of the ion-beam irradiated TN cell were measured by a LCD evaluation system.

• 세라미스트
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• 제21권4호
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• pp.378-387
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• 2018

The optimal fabrication conditions for $Gd_{0.1}Ce_{0.9}O_{2-{\delta}}$(GDC) buffer layer and $La_{0.6}Sr_{0.4}Co_{0.2}Fe_{0.8}O_{3-{\delta}}$ (LSCF) cathode on 1mol% $CeO_2-10mol%\;Sc_2O_3$ stabilized $ZrO_2$ (CeScSZ) electrolyte were investigated for application of IT-SOFCs. GDC buffer layer was used in order to prevent undesired chemical reactions between LSCF and CeScSZ. These experiments were carried out with $5{\times}5cm^2$ anode supported unit cells to investigate the tendencies of electrochemical performance, Microstructure development and interface reaction between LSCF/GDC/CeScSZ along with the variations of GDC buffer layer thickness, sintering temperatures of GDC and LSCF were checked, respectively. Electrochemical performance was analyzed by DC current-voltage measurement and AC impedance spectroscopy. Microstructure and interface reaction were investigated by scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS). Although the interfacial reaction between these materials could not be perfectly inhibited, We found that the cell, in which $6{\mu}m$ GDC interlayer sintered at $1200^{\circ}C$ and LSCF sintered at $1000^{\circ}C$ were applied, showed good interfacial adhesions and effective suppression of Sr, thereby resulting in fairly good performance with power density of $0.71W/cm^2$ at $800^{\circ}C$ and 0.7V.

• 한국방사선학회논문지
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• 제5권2호
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• pp.93-96
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• 2011

현재 광도전체 물질을 이용한 직접변환방식의 방사선 검출기 연구가 활발히 진행되고 있다. 이러한 광도전체 물질 중 상용화된 비정질 셀레늄(a-Se)에 비해 요오드화수은($HgI_2$) 광도전체 화합물은 고에너지에 대한 높은 흡수율과 민감도를 가지는 것으로 보고되고 있다. 또한 이러한 광도전체 필름은 발생된 신호의 검출효율은 상하부 전극크기에 의한 전기장의 세기 및 기하학적 분포에 많은 영향을 미치는 것으로 보고되고 있다. 이에 본 연구는 $HgI_2$ 광도전체 필름에서 상하부 전극의 크기에 따른 X선 검출특성을 조사하였다. 시편제작은 기존의 진공 증착법이 두꺼운 대면적 필름제조가 어렵다는 문제점을 해결하고자 페이스트 인쇄법을 이용하여 인듐전극이 코팅된 유리기관위에 제작하였으며, 시편의 두께를 $150{\mu}m$, 면적크기를 $3cm{\times}3cm$ 크기로 제조하였다. 상부전극은 마그네틱 스퍼터링법을 이용하여 $3cm{\times}3cm$, $2cm{\times}2cm$, $1cm{\times}1cm$의 크기로 ITO(indium-tin-oxide)를 진공 증착하였다. 특성평가를 위해 X선 선량에 대한 민감도와 누설전류, 신호대잡음비를 측정하여 필름의 전기적 검출 특성을 정량적으로 평가하였다. 그 결과 상부전극의 크기가 증가함에 따라 검출된 신호의 크기가 다소 증가하는 경향을 보였다. 하지만, 전극크기의 증가에 따른 누설전류 또한 증가함으로써 신호대잡음비는 오히려 감소하는 것을 확인할 수 있었다. 이러한 결과로부터 향후 광도전체를 적용한 X선 영상검출기 개발에 있어 상부전극의 최적크기와 구조설계가 고려되어야 할 것으로 사료된다.