• 제목/요약/키워드: oxide reduction

검색결과 1,337건 처리시간 0.034초

플라즈마 후처리 시간에 따른 저유전율 SiOF 박막의 특성 (Characteristics of Low Dielectric Constant SiOF Thin Films with Post Plasma Treatment Time)

  • 이석형;박종완
    • 한국진공학회지
    • /
    • 제7권3호
    • /
    • pp.167-272
    • /
    • 1998
  • ECR plasma CVD를 이용한 SiOF박막은 낮은 유전상수를 가지고 있으며, 기존의 공정과의 정합성이 우수해 다층배선 공정에 채용이 유망한 재료이지만 수분의 흡수로 인한 유전율의 상승과 후속공정의 안정성이 문제점으로 부각되고 있다. 따라서 본 연구에서는 SiOF박막의 내흡습성과 후속공정에서의 안정성을 향상시키기 위하여 SiOF박막을 증착한 후 후속 산소 플라즈마 처리를 행하였다. SiOF박막은 산소 플라즈마 처리를 수행함으로써 SiOF박막의 밀도가 증가하고, 수분과의 친화력이 강한 Si-F 결합이 감소하는 것이 주요한 원인으로 사료된다. 하지만 플라즈마 처리 시간이 5분 이상으로 증가하면 유전율의 증가가 일어난다. 따라서 본 실험에서는 산소 플라즈마 처리조건이 마이크로파 전력이 700W, 공정 압력이 3mTorr, 기판온도가 $300^{\circ}C$일 경우 플라즈마 처리시간은 3분이 적당한 것으로 생각 된다.

  • PDF

플라즈마 버너를 적용한 요소수에서 암모니아로의 고속 전환 기술 성능 평가 (Performance Evaluation for Fast Conversion from Urea to an Ammonia Conversion Technology with a Plasma Burner)

  • 조성권;김관태;이대훈;송영훈
    • 한국대기환경학회지
    • /
    • 제32권5호
    • /
    • pp.526-535
    • /
    • 2016
  • Recently, fine dust in atmosphere have been considerably issued as a harmful element for human. Nitrogen oxide ($NO_x$) exhausted from diesel engines and power plants has been disclosed as a main source of secondary production of fine dust. In order to prevent exhausting these nitrogenous compounds into atmosphere, a treatment system with selective catalytic reduction (SCR) catalyst with ammonia as a reductant has been used in various industries. Urea solution has been widely studied to supply ammonia into a SCR catalytic reactor, safely. However, the conversion of urea solution to ammonia has several challenges, especially on a slow conversion velocity. In the present study, a fast urea conversion system including a plasma burner was suggested and designed to evaluate the performances of urea conversion and initial operation time. A designed lab-scale facility has a plasma burner, urea nozzle, mixer, and SCR catalyst which is for hydrolysis of isocyane. Flow rate of methane that is a fuel of the plasma burner was varied to control temperatures in the urea conversion facility. From experimental results, it is found that urea can be converted into ammonia using high temperature condition of above $400^{\circ}C$. In the designed test facility, it is found that ammonia can be produced within 1 min from urea injection and the result shows prospect commercialization of proposed technology in the SCR facilities.

해수산 클로렐라(Chlorella ellipsoidea) 유기용매 추출물의 항염증 효과 (Anti-Inflammatory Effect of Chlorella ellipsoidea Extracted from Seawater by Organic Solvents)

  • 최유진;조월순;김현지;남병혁;강은영;오수정;이계안;정민호
    • 한국수산과학회지
    • /
    • 제43권1호
    • /
    • pp.39-45
    • /
    • 2010
  • Chlorella has been reported to have certain beneficial physiological effects, including hypocholesterolemic, antihypertensive, antioxidative, and anti-tumor activities in animal and human studies. The aim of this study was to determine the anti-inflammatory activities of an 80% methanol extract(CE-Met), hexane fraction (CE-Hex), and ethyl acetate fraction (CE-EA) of Chlorella ellipsoidea in lipopolysaccharide (LPS)-stimulated RAW 264.7 murine macrophage. Treatment with various concentrations of the C. ellipsoidea extract resulted m a significant, dose-dependent reduction in nitric oxide (NO) production by LPS-induced macrophages. The C. ellipsoidea extract significantly inhibited LPS-induced NO production accompanied by an attenuation of IL-6 and TNF-$\alpha$ formation in macrophages. These results suggest potent inhibit이y effects on the production of inflammatory mediators by a C. ellipsoidea extract. Thus, C. ellipsoidea extract may be a potent anti-inflammatory agent for troubled skin.

이산화탄소 변환 과정이 포함된 인공 광합성 시스템 (Artificial Photosynthesis System Containing CO2 Conversion Process)

  • 김기범
    • 한국산학기술학회논문지
    • /
    • 제19권1호
    • /
    • pp.63-68
    • /
    • 2018
  • 본 논문은 이산화탄소 고정 과정이 포함된 인공 광합성 과정을 모사하기 위하여 지구상에 흔히 존재하는 촉매 재료를 이용해 개발한 광화학 반응 시스템(인공나뭇잎)과 시스템 에너지 포집 및 변환 능력에 대한 성능을 조사하기 위한 기초 연구 결과를 제시한다. 본 연구에서 개발한 시스템은 태양광 전지의 전면부에 산화코발트를 도핑 하여 물의 전기분해로 인한 산소 발생이 태양전지 표면에서 직접 발생하도록 하였고, 후면 기판 표면에는 이산화탄소 변환 반응을 위한 효율적인 촉매로 $MoS_2$를 도핑 하여, 전선이 없는 구조로 구성하였다. 직접 태양광 연료 변환 시스템은 약4.5%로 이산화탄소를 일산화탄소와 수소로 변환하여 지속 가능한 연료(합성가스)의 형태로 생산하며, 이는 음극에서 촉매 변환 효율이 75%이상이 될 수 있음을 의미한다. 본 연구는 물의 광분해뿐만 아니라 태양광에 의해 유도된 이산화탄소 전환 과정을 하나의 시스템에서 동시에 실현하여 자연적 광합성 과정을 좀 더 성공적으로 모사할 수 있는 시스템 개발에 기여하였다.

Effects of 1,7-Substituted Methylxanthine Derivatives on LPS-Stimulated Expression of Cytokines and Chemokines in Raw 264.7 and HK-2 Cells

  • Kang, Joo-Yeon;Shin, Hea-Soon
    • Journal of Microbiology and Biotechnology
    • /
    • 제25권2호
    • /
    • pp.296-301
    • /
    • 2015
  • Chronic kidney diseases are based on uncontrolled immunological and inflammatory responses to pathophysiological renal circumstances such as glomerulonephritis, which is caused by immunological mechanisms of glomerular inflammation with increased production of renal pro-inflammatory cytokines. Pentoxifylline (PTX) exhibits anti-inflammatory properties by inhibiting cytokine and chemokine production through aggregation of erythrocytes and thrombocytes. We synthesized a series of 1,7-substituted methylxanthine derivatives by the Traube purine reaction, and the formation of purine ring was completed through nitrosation, a reduction of the nitroso to the amine by catalytic hydrogenation as derivatives of PTX. Then we studied biological activities such as renal anti-inflammatory effects of the synthesized compounds in the production of cytokines such as nitric oxide (NO), interleukin (IL)-1β, IL-6, and tumor necrosis factor-α (TNF-α) and of chemokines such as monocyte chemoattractant protein-1 and IL-8 in Raw 264.7 and HK-2 cells. Renal antiinflammatory activities of this novel series of N-1 and N-7-substituted methylxanthine showed that the N-7 methyl-group-substituted analogs (S7b) showed selective 61% and 77% inhibition of the production of NO and IL-8. The other replacement of the N-1-(CH2)4COCH3 roup, as in the case of compound S6c, also showed an effective 50% and 77% inhibition of TNF-α and IL-8 production in LPS-stimulated Raw 264.7 and HK-2 cells.

태양전지 산업(産業)에서 배출(排出)되는 Si waste로부터 SiC 분말 제조에 관한 연구(硏究) (A Study on the Preparation of SiC Nano powder from the Si Waste of Solar Cell Industry)

  • 장은진;김영희;이윤주;김수용;권우택
    • 자원리싸이클링
    • /
    • 제19권5호
    • /
    • pp.44-49
    • /
    • 2010
  • 태양전지산업으로부터 배출되는 Si waste로부터 탄소환원법을 사용하여 SiC 분말을 제조하였다. 태양광 산업의 실리콘 웨이퍼 가공 공정에서 다량의 실리콘 및 오일 포함된 폐액이 발생한다. 환경과 경제적인 측면에서 폐액으로부터 실리콘 성분을 재회수하는 기술의 개발은 매우 중요하다. 본 연구에서는 폐 실리콘를 milling하여 나노화한 후 카본 블랙과 혼합하고 진공분위기에서 $1,350^{\circ}C$로 열처리하여 100 nm크기의 균일한 입도를 갖는 SiC 분말을 제조하였다. 폐실리콘과 생성물의 물리적 특성을 SEM, XRD, 입도분석 그리고 원자 흡수 분광기를 사용하여 분석하였다.

흰쥐의 염증반응에 대한 CW-501027과 CW-501029의 억제효과 (The Inhibitory Effect of CW-501027 and CW-501029 on the Anti-inflammatory Action in Rats)

  • 정지훈;심재호;양성준;민영실;송현주;우재광;김용성;조영래;손의동
    • 약학회지
    • /
    • 제48권6호
    • /
    • pp.317-322
    • /
    • 2004
  • The use of nonsteroidal anti-inflammatory drugs (NSAIDs) is limited by their ability to induce gastrointestinal injury. It has been shown that nitric oxide (NO), similar to pro staglandins (PGs), appears to play an important role in gastric mucosal defence. We hypothesized that NSAIDs contained NO group would be less acutely toxic to the gastric mucosa, but would not interfere with their ability to suppress inflammatory process in rats. We have compared the ulcerogenic and anti-inflammatory effect of CW-501029 (NO-NSAIDs), CW-501027 (NSAIDs) and indomethacin. Both did not change mean blood pressure and heart rates, indicating that they had no side effect on cardiovascular system. We found that CW-501029 increased nitrite/nitrate levels without changing of blood pressure and heart rates. We suggest that it may help gastric mucosal blood flow, the which helps reducing the discomfort in astrointestinal system. Carrageenan-induced PGE2 increase was reduced in a similar tendency when compared CW-501027 or CW-501027 with control in back exudate of rats, but CW-501029 less reduced PGE2 than CW-502027 or indomethacin in gastric tissues. CW-501027 or CW-501029 reduced platelet aggregation. From these results we suggest that CW-501029 may improve the side effect by reduction of short-term gastric injury and less inhibition of PGs synthesis.

High Conductivity of Transparent SWNT Films on PET by Ionic Doping

  • Min, Hyung-Seob;Kim, Sang-sig;Choi, Won-Kook;Lee, Jeon-Kook
    • 한국재료학회:학술대회논문집
    • /
    • 한국재료학회 2011년도 춘계학술발표대회
    • /
    • pp.65-65
    • /
    • 2011
  • Single-well carbon nanotubes (SWNT) have been proposed as a promising candidate for various applications owing to their excellent properties. In particular, their fascinating electrical and mechanical properties could provide a new area for the development of advanced engineering materials. A transparent conductive thin film (TCF) has increased for applications such as liquid crystal displays, touch panels, and flexible displays. Indium tin oxide (ITO) thin films, which have been traditionally used as the TCFs, have a serious obstacle in TCFs applications. SWNTs are the most appropriate materials for conductive films for displays due to their excellent high mechanical strength and electrical conductivity. But, a bundle of CNTs has different electrical properties than their individual counterparts. In this work, the fabrication by the spraying process of transparent SWNT films and reduction of its sheet resistance on PET substrates is researched. Arc-discharge SWNTs were dispersed in deionized water by adding sodum dodecyl sulfate (SDS) as surfactant and sonicated, followed by the centrifugation. The dispersed SWNT was spray-coated on PET substrate and dried on a hotplate at $100^{\circ}C$. When the spray process was terminated, the TCF was immersed into deionized water to remove the surfactant and then it was dried on hotplate. The TCF film was then treated with ionic doping treatment, rinsed with deionized water and dried. The surface morphology of TCF was characterized by field emission scanning electron microscopy. The sheet resistance and optical transmission properties of the TCF were measured with a four-point probe method and a UV-visible spectrometry, respectively. Results, we show that 97 ${\Omega}$/> sheet resistance can be achieved with 81% transmittance at the wavelength of 550 nm. The changes in electrical and optical conductivity of SWNT film before and after ionic doping treatments were discussed.

  • PDF

리튬용융염계 산화성분위기에서 초합금의 고온 부식거동 (Hot Corrosion Behavior of Superalloys in Lithium Molten Salt under Oxidation Atmosphere)

  • 조수행;임종호;정준호;오승철;서중석;박성원
    • 한국재료학회지
    • /
    • 제14권11호
    • /
    • pp.813-820
    • /
    • 2004
  • The electrolytic reduction of spent oxide fuel involves the liberation of oxygen in a molten LiCl electrolyte, which is a chemically aggressive environment that is very corrosive for typical structural materials. So, it is essential to choose the optimum material for the process equipment handling molten salt. In this study, corrosion behavior of Haynes 263, 75, and Inconel X-750, 718 in molten salt of $LiCl-Li_{2}O$ under oxidation atmosphere was investigated at $650^{\circ}C\;for\;72\sim360$ hours. At $3\;wt\%\;of\;Li_{2}O$, Haynes 263 alloy showed the highest corrosion resistance among the examined alloys, and up to $8\;wt\%\;of\;Li_{2}O$, Haynes 75 exhibited the highest corrosion resistance. Corrosion products were formed $Li(Ni,Co)O_2,\;LiNiO_2\;and\;LiTiO_2\;and\;Cr_{2}O_3$ on Haynes 263, $Cr_{2}O_3,\;NiFe_{2}O_4,\;LiNiO_2,\;Li_{2}NiFe_{2}O_4,\;Li_{2}Ni_{8}O_10$ and Ni on Haynes 75, $Cr_{2}O_3,\;(Al,Nb,Ti)O_2,\;NiFe_{2}O_4,\;and\;Li_{2}NiFe_{2}O_4$ on Inconel X-750 and $Cr_{2}O_3,\;NiFe_{2}O_4\;and\;CrNbO_4$ on Inconel 718, respectively. Haynes 263 showed local corrosion behavior and Haynes 75, Inconel X-750, 718 showed uniform corrosion behavior.

Catalytic Effects and Characteristics of Ni-based Catalysts Supported on TiO2-SiO2 Xerogel

  • Jeong, Jong-Woo;Park, Jong-Hui;Choi, Sung-Woo;Lee, Kyung-Hee;Lee, Chang-Seop
    • Bulletin of the Korean Chemical Society
    • /
    • 제28권12호
    • /
    • pp.2288-2292
    • /
    • 2007
  • The catalytic activities of nickel-based catalysts were estimated for oxidizing acetaldehyde of VOCs exhausted from industrial facilities. The catalysts were prepared by sol-gel methods of SiO2 and SiO2-TiO2 as a xerogel followed by impregnating Al2O3 powder with the nickel nitrate precursor. The crystalline structure and catalytic properties for the catalysts were investigated by use of BET surface area, X-ray diffraction (XRD), Xray photoelectron spectroscopy (XPS) and temperature programmed reduction (TPR) techniques. These results show that nickel oxide is transformed to NiAl2O4 spinel structure at the calcination temperature of 400 °C in response to the steps with after- and co-impregnation of Al2O3 powder in sol-gel process. The NiAl2O4 could suppress the oxidation reaction of acetaldehyde by catalysts. The NiO is better dispersed on SiO2-TiO2/Al2O3 support than SiO2/Al2O3 and SiO2-TiO2-Al2O3 supports. From the testing results of catalytic activities for oxidation of acetaldehyde, Catalysts showed a big difference in conversion efficiencies with the way of the preparation of catalysts and the loading weight of nickel. The catalyst of 8 wt.% Ni/TiO2-SiO2/Al2O3 showed the best conversion efficiency on acetaldehyde oxidation with 100% conversion efficiency at 350 °C.