• Title/Summary/Keyword: oxide compound

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III-V 화합물 반도체 Interface Passivation Layer의 원자층 식각에 관한 연구

  • Gang, Seung-Hyeon;Min, Gyeong-Seok;Kim, Jong-Gyu;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.198-198
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    • 2013
  • Metal-Oxide-Semiconductor (MOS)에서 사용되는 다양한 channel materials로 high electron mobility을 가지는 III-V compound semiconductor가 대두되고 있다 [1,2]. 하지만 이러한 III-V compound semiconductor는 Si에 비해 안정적인 native oxide가 부족하기 때문에 Si, Ge, Al2O3과 BeO 등과 같은 다양한 물질들의 interface passivation layers (IPLs)에 대한 연구가 많이 되고 있다. 이러한 IPLs 물질은 0.5~1.0 nm의 매우 얇은 physical thickness를 가지고 있고 또한 chemical inert하기 때문에 플라즈마 식각에 대한 연구가 되고 있지만 IPLs 식각 후 기판인 III-V compound semiconductor에 physical damage과 substrate recess를 줄이기 위해서 높은 선택비가 필요하다. 이러한 식각의 대안으로 원자층 식각이 연구되고 있으며 이러한 원자층 식각은 반응성 있는 BCl3의 adsorption과 low energy의 Ar bombardment로 desorption으로 self-limited한 one monolayer 식각을 가능하게 한다. 그러므로 본 연구에서는, III-V compound semiconductor 위에 IPLs의 adsorption과 desorption의 cyclic process를 이용한 원자층식각으로 다양한 물질인 SiO2, Al2O3 (self-limited one monolayer etch rate=about 1 ${\AA}$/cycle), BeO (self-limited one monolayer etch rate=about 0.75 ${\AA}$/cycle)를 얻었으며 그 결과 precise한 etch depth control로 minimal substrate recess 식각을 할 수 있었다.

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Characterization of Ni Oxide Nanofibers by Electrospinning

  • Park, Ju-Yeon;Go, Seong-Wi;Gang, Yong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.379.2-379.2
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    • 2016
  • The Ni oxide/PVP nanofibers were synthesized by sol-gel and electrospinning technique. The obtained Ni oxide/PVP (polyvinylpyrrolidone) nanofibers were calcined to remove the PVP compound at 873 and 1173 K. The Ni oxide/PVP nanofibers were analyzed by scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). The SEM images showed that the mat form was prepared by calcination of Ni oxide/PVP nanofibers at 873 K. And the crystal structure of Ni oxide at 1173 K was also confirmed by SEM images. XRD results shows the crystallinity of metallic Ni and NiO. TEM images also verified the crystal phase of Ni and Ni oxide. XP spectra revealed that the oxidation state of Ni to conclude the chemical composition of Cu oxide nanofibers.

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Frictional behaviour of Oxide Films Produced on S45C Steel by Plasma Nitrocarburizing and Post Plasma Oxidation Treatment (플라즈마 질탄화 & 후산화처리로 S45C강에 형성된 산화막의 마찰거동)

  • Jeong, Kwang-Ho;Lee, In-Sup
    • Korean Journal of Materials Research
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    • v.16 no.12
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    • pp.766-770
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    • 2006
  • The frictional behavior of oxide films on top of the plasma nitrocarburized compound layers was investigated in terms of post-oxidation treatment temperatures. The post-oxidation treatment at both temperatures($400^{\circ}C,\;500^{\circ}C$) produced magnetite($Fe_3O_4$) films which led to a significant enhancement in corrosion resistance. However, this process did not result in any improvement in frictional behavior of the nitrocarburized surface. The wear mechanisms were governed predominantly by the abrasive action of the slider on the surface irrespective of the counterface material(SiC and Bearing steel). When the specimen was sliding against a SiC counterface, the oxide films were destroyed during the early stage of the sliding process and the wear debris of the oxide film at the sliding track had a great influence on the friction coefficient. On the other hand, when sliding against a bearing steel counterface, the slider was mainly worn out due to the much higher hardness of the surface hardened layer. The fluctuation of the friction coefficient of $400^{\circ}C$-oxidized/ nitrocarburized specimen is much severer than that of $500^{\circ}C$ specimen, due to the less amount of wear debris.

Inhibitory Effect of Saingheylyunbooem on Compound 48/80 Stimulated Allergic Reaction (Compound 48/80로 유발된 Allergy에 대한 생혈윤부음(生血潤膚飮)의 효과)

  • Kim, Hee-Yeol;Park, Jong-Hyun
    • Journal of Physiology & Pathology in Korean Medicine
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    • v.24 no.1
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    • pp.48-54
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    • 2010
  • The present study was conducted to investigate the anti-allergic activity of Saingheylyunbooem(SHU)). We investigated the anti-allergic effects of SHU in RBL-2H3 basophilic leukemia cells by compound 48/80, a mast cell degranulator in mice. SHU inhibited ${\beta}$-hexosaminidase and histamine release from compound 48/80 stimulated RBL-2H3 cells. The in vitro anti-inflammatory activities of SHU in LPS-stimulated RAW 264.7 cells were investigated. SHU inhibited NO production effectively dowregulated the expression of iNOS mRNA and iNOS protein expression in LPS-stimulated RAW 264.7 cells. These result provide evidences that SHU may be beneficial in the treatment of allergic inflammtory disease.

The Electrical Characteristics of Chromium Oxide Film Produced by Son Beam Sputter Deposition (이온선 스퍼터 증착법에 의하여 제조된 CrOx의 전기적 특성)

  • 조남제;이규용
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.6
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    • pp.518-523
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    • 2002
  • The influences of ion beam energy and reactive oxygen partial pressure on the physical and crystallographic characteristics of transition metal oxide compound(CrOx) film were studied in this paper. Chromium oxide films were deposited onto a cover-glass using ion Beam Sputter Deposition(IBSD) technique according to the various processing parameters. Crystallinity and grain size of as-deposited films were analyzed using XRD analysis. Thickness and Resistivity of the films were measured by $\alpha$-step and 4-point probe measurement. According to the XRD, XPS and resistivity results, the deposited films were the cermet type films which had crystal structure including amorphous oxide(a-oxide) phase and metal Cr phase simultaneously. The increment of the ion beam energy during the deposition process led to decreasing of metal Cr grain size and the rapid change of resistivity above the critical $O_2$ partial pressure.

Comparative Study on the Failure of Polymer/Roughened Metal Interfaces under Mode-I Loading I: Experimental Result (인장하중하에서의 고분자/거친금속 계면의 파손에 대한 비교연구 I: 실험결과)

  • Lee Ho-Young;Kim Sung-Ryong
    • Korean Journal of Materials Research
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    • v.15 no.1
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    • pp.1-5
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    • 2005
  • Copper-based leadframe sheets were immersed in two kinds of hot alkaline solutions to form brown-oxide or black-oxide layer on the surface. The oxide-coated leadframe sheets were molded with epoxy molding compound (EMC). After post mold curing, the oxide-coated EMC-leadframe joints were machined to form sandwiched double-cantilever beam (SDCB) specimens. The SDCB specimens were used to measure the fracture toughness of the EMC/leadframe interfaces under quasi-Mode I loading conditions. Fracture surfaces were analyzed by various equipment to investigate failure path. The present paper deals with the failure path, and the cause of the failure path formation with an adhesion model will be treated in the succeeding paper.

Isolation and Characterization of Constituent Compounds from Leaves and Stems of Chrysanthemum boreale Makino (산국 잎과 줄기의 유효성분 분리 및 특성 연구)

  • Park, Sook Jahr;Park, Moon Ki;Lee, Jong Rok
    • Journal of Environmental Science International
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    • v.28 no.11
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    • pp.993-1004
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    • 2019
  • Chrysanthemum boreale Makino (C. boreale) is widely distributed in Asian countries, and has traditionally been used to treat various inflammatory diseases including bronchitis. In this study, we aimed to isolate biologically active compounds from leaves and stems of C. boreale. Chemical components were purified by column chromatograpy and recyclic HPLC, and characterized from their spectral data (IR, MS, NMR). Biological activity experiments were conducted for Farnesyl-protein transferase (FPTase) activity, apoptosis and nitirc oxide (NO) release. As a results, three sesquiterpene lactones were isolated. Compound 1 (4-methoxy-8-O-acetyl-10-hydroxy-2,11(13)-guaiadiene-12,6-olide) showed strong cytotoxic activities having an average growth inhibition of 50% ($GI_{50}$) value of $1.89{\mu}g/m{\ell}$ against human colon adenocarcinoma cells. Compound 1 also showed a low half maximal inhibitory concentration ($IC_{50}$) value of $10{\mu}g/m{\ell}$ for NO release. In the caspase 3 activity, compound 1 and compound 2 (8-O-(2-carbonyl-2-butyl)-3,10-dihydroxy-4,11(13) -guaiadiene-12,6-olide) exhibited 94% and 90% apoptosis inhibition activity, respectively. Compound 3 (4,8-O-diacetyl -10-hydroxy-2(3),11(13)-guaiadiene-12,6-olide) showed a strong inhibitory effect on FPTase activity with 90% inhibitory activity at a concentration of $100{\mu}g/m{\ell}$. These results clearly show the presence of lactone compounds in the leaves and stems, which may partially contribute to the pharmacological activity of C. boreale.

Structure Determination and Biological Activities of Elaiophylin Produced by Streptomyces sp. MCY-846

  • LEE, SANG-YONG;MI-SOON KIM;HANG-SUB KIM;YOUNG-HO KIM;SOON-DUCK HONG;JUNG-JOON LEE
    • Journal of Microbiology and Biotechnology
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    • v.6 no.4
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    • pp.245-249
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    • 1996
  • A cytotoxic compound, 8461 was isolated from the culture of Streptomyces sp. strain MCY846 by its cytotoxicity against gastric cancer cell line SNU-l. The IR, UV and NMR spectra of 8461 were identical to those of elaiophylin. This compound showed moderate cytotoxicity against several cell lines and exerted strong inhibitory effect on the synthesis of nitric oxide in the lipopolysaccharide stimulated-Raw 264.7 cells.

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