• 한국정보통신학회논문지
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• 제6권1호
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• pp.99-102
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• 2002

다결정 실리콘층 아래의, 게이트 산화막이라고 불리는 높은 온도에서 형성된 산화막에서 핀홀이 관찰되었으며 그 메카니즘이 분석되었다. 다결정 실리콘층 아래의 산화막은 다른 다결정 실리콘층의 플라즈마 에칭 과정 동안에 파괴되어진다. 두 개의 다결정 실리콘층은 CVD증착에 의해 만들어진 0.8$\mu\textrm{m}$의 두꺼운 산화막에 의해 분리되어 있다. 파괴된 산화막들이 아크가 발생한 부분을 중심으로 흩어져 있으며 아크가 발생한 부분에서 생성된 극도로 강한 전계가 게이트 산화막을 파괴 시켰다고 가정된다. 아크가 발생한 부분은 Alignment key에서 관찰되었고 그리고 이것이 발견된 웨이퍼는 낮은 수율을 보여주었다. 아크가 발생한 부분이 칩의 내부가 아니더라도 게이트 산화막의 파괴에 의해 칩이 정상적으로 동작하지 않았다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.207.2-207.2
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• 2013

Oxide-based thin film transistors have been attempted as powerful candidates for driving circuits for active-matrix organic light-emitting diodes and transparent electronics. The oxide TFTs are based on the amorphous multi-component oxides involving zinc, indium, and/or tin elements as main cation sources. The current work employed RF sputtering in order to deposit zinc-tin oxide thin films applicable to transparent oxide thin film transistors. The deposited thin film was characterized and probed in terms of materials and devices. The physical/chemical characterizations were performed using X-ray diffraction, Atomic Force Microscopy, Spectroscopic Ellipsometry, and X-ray Photoelectron Spectroscopy. The thin film transistors were fabricated using a bottom-gated structure where thermally-grown silicon oxide layers were applied as gate-dielectric materials. The inherent properties of oxide thin films are combined with the corresponding device performances with the aim to fabricating the multi-component oxide thin films being optimized towards transparent electronics.

• Clinical Nutrition Research
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• 제5권3호
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• pp.172-179
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• 2016

Acid food indicators can be used as pH indicators for evaluating the quality and freshness of fermented products during the full course of distribution. Iron oxide particles are hardly suspended in water, but partially or completely agglomerated. The agglomeration degree of the iron oxide particles depends on the pH. The pH-dependent particle agglomeration or dispersion can be useful for monitoring the acidity of food. The zeta potential of iron oxide showed a decreasing trend as the pH increased from 2 to 8, while the point of zero charge (PZC) was observed around at pH 6.0-7.0. These results suggested that the size of the iron oxide particles was affected by the change in pH levels. As a result, the particle sizes of iron oxide were smaller at lower pH than at neutral pH. In addition, agglomeration of the iron oxide particles increased as the pH increased from 2 to 7. In the time-dependent aggregation test, the average particle size was 730.4 nm and 1,340.3 nm at pH 2 and 7, respectively. These properties of iron oxide particles can be used to develop an ideal acid indicator for food pH and to monitor food quality, besides a colorant or nutrient for nutrition enhancement and sensory promotion in food industry.

• 반도체디스플레이기술학회지
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• 제18권4호
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• pp.6-11
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• 2019

For a wider application of laser direct patterning, selective laser ablation of indium tin oxide (ITO) film on transparent oxide semiconductor (TOS) thin film was carried out using a diode-pumped Q-switched Nd:YVO₄ laser at a wavelength of 1064 nm. In case of the laser ablation of ITO on indium gallium zinc oxide (IGZO) film, both of ITO and IGZO films were fully etched for all the conditions of the laser beams even though IGZO monolayer was not ablated at the same laser beam condition. On the contrary, in case of the laser ablation of ITO on zinc oxide (ZnO) film, it was possible to etch ITO selectively with a slight damage on ZnO layer. The selective laser ablation is expected to be due to the different coefficient of thermal expansion (CTE) between ITO and ZnO.

• Corrosion Science and Technology
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• 제20권5호
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• pp.256-265
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• 2021

Titanium is applied in various industries due to its valuable properties and abundant reserves. Generally, if a highly uniform oxide structure and a high-density oxide film is formed on the surface through anodization treatment, the utility value such as color appearance and corrosion inhibition efficiency is further increased. The objective of this study was to determine improvement of water-repellent property by controlling titanium oxide parameters such as pore size and inter-pore distance to improve corrosion resistance. Oxide film structures of different shapes were prepared by controlling the anodization processing time and voltage. These oxide structures were then analyzed using a Field Emission Scanning Electron Microscope (FE-SEM). Afterwards, a Self-Assembled Monolayer (SAM) coating was performed for the oxide structure. The contact angle was measured to determine the relationship between the shape of the oxide film and the water-repellency. The smaller the solid fraction of the surface, the higher the water-repellent effect. The surface with excellent hydrophobic properties showed improved corrosion resistance. Such water-repellent surface has various applications. It is not only useful for corrosion prevention, but also useful for self-cleaning. In addition, a hydrophobic titanium may open up a new world of biomaterials to remove bacteria from the surface.

• Elastomers and Composites
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• 제55권4호
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• pp.321-328
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• 2020

Zinc nitrate hexahydrate (Zn(NO3)2·6H2O) and sodium hydroxide (NaOH) were dissolved in distilled water and stirred for 30 min. The resulting solution was sonicated by an ultrasonic wave for 45 min. This solution was washed with distilled water and ethanol after centrifugation; next, it was placed in an electric furnace at 200℃ for 1 h under the flow of Ar gas to obtain zinc oxide nanoparticle. A zinc oxide nanoparticle-(C60) fullerene nanowhisker composite was synthesized using the zinc oxide nanoparticle solution, C60-saturated toluene, and isopropyl alcohol via the liquid-liquid interfacial precipitation method. The zinc oxide nanoparticle and zinc oxide nanoparticle-(C60) fullerene nanowhisker composite were characterized using X-ray diffraction, scanning electron microscopy, and Raman spectroscopy, and they were used for the catalytic degradation of methyl orange (MO) under ultraviolet (at 254 and 365 nm) and ultrasonic irradiation. In addition, the catalytic degradation of MO over the zinc oxide nanoparticle and zinc oxide nanoparticle-(C60) fullerene nanowhisker composite was evaluated using ultraviolet-visible spectroscopy.

• 한국표면공학회지
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• 제55권4호
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• pp.215-221
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• 2022

In the present work, copper oxide thin films were formed by heat-treatment method with different temperatures and atmosphere, e.g., at 200 ~ 400 ℃; in air and Ar atmosphere. The morphological, electrical and optical properties of the thermally fabricated Cu oxide films were analyzed by SEM, XRD, and UV-VIS spectrometer. Thereafter, photoelectrochemical properties of the thermal copper oxide films were analyzed under solar light (AM 1.5, 100 mW/cm²). Conclusively, the highest photocurrent was obtained with Cu₂O formed under the optimum annealing condition at 300 ℃ in air atmosphere. In addition, EIS results of Cu oxide formed in air atmosphere showed relatively low resistance and long electron life-time compared with Cu Oxide fabricated in Ar atmosphere at the same temperature. This is because heat-treatment in Ar atmosphere could not form Cu₂O due to lack of oxygen, and thermally formed CuO at high temperature suppressed stability and conductivity of the Cu oxide.

• 한국표면공학회지
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• 제56권4호
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• pp.265-272
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• 2023

Photoelectrochemical (PEC) water splitting is one of the promising methods for hydrogen production by solar energy. Iron oxide has been effectively investigated as a photoelectrode material for PEC water splitting due to its intrinsic property such as short minority carrier diffusion length. However, iron oxide has a low PEC efficiency owing to a high recombination rate between photoexcited electrons and holes. In this study, we synthesized nanoporous structured iron oxide by anodization to overcome the drawbacks and to increase surface area. The anodized iron oxide was annealed in Ar atmosphere with different purging times. In conclusion, the highest current density of 0.032 mA/cm² at 1.23 V vs. RHE was obtained with 60 s of pursing for iron oxide(Fe-60), which was 3 times higher in photocurrent density compared to iron oxide annealed with 600 s of pursing(Fe-600). The resistances and donor densities were also evaluated for all the anodized iron oxide by electrochemical impedance spectra and Mott-Schottky plot analysis.

• 한국표면공학회지
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• 제32권4호
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• pp.531-537
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• 1999

A copper based leadframe was oxidized in brown-oxide forming solution, then the growth characteristics of brown oxide and the effect of brown-oxide formation on the adhesion strength of leadframe to epoxy molding compound (EMC) were studied by using sandwiched double cantilever beam (SDCB) specimens. The brown oxide is composed of fine acicular CuO, and its thickness increased up to ~150 nm within 2 minutes and saturated. Bare leadframe showed alomost no adhesion to EMC, while once the brown-oxide layer formed on the Surface of leadframe, the adhesion strength increased up to ~80 J/$\m^2$ within 2 minutes. Correlation between oxide thickness, $\delta$ and the adhesion strength in terms of interfacial fracture toughness, $G_{c}$ was linear. Considering the above results, we might conclude that the main adhesion mechanism of brown-oxide treated leadframe to EMC is mechanical interlocking, in which fine acicular CuO plays a major role.e.

• Corrosion Science and Technology
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• 제23권1호
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• pp.33-40
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• 2024

The concentration and diffusion coefficient of oxide ion vacancies in the oxide scale formed on Fe-22Cr-0.5Mn ferritic stainless steel with and without molybdenum (Mo) was measured at 800℃ by the electrochemical polarization method. After pre-oxidation for 100 h in ambient air at 800 ℃, the oxide scale on one side was completely removed with sandpaper. A YSZ plate was placed on the side where the oxide scale remained. Platinum (Pt) meshes were attached on the top of the YSZ plate and the side where the oxide scale was removed. Changes in electrical current were measured after applying an electrical potential through Pt wires welded to the Pt meshes. The results were interpreted by solving the diffusion equation. The diffusion coefficient and concentration of oxide ion vacancy decreased by 30% and 70% in the specimen with Mo, respectively, compared to the specimen without Mo. The oxide ion vacancy concentration of chromia decreased due to the addition of Mo.