• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.563-564
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.379-380
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• 2010

• 한국소음진동공학회논문집
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• 제14권5호
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• pp.385-393
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• 2004

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(voice coil motor) for coarse motion, for an SFF ODD(small form factor optical disk drive), in order to achieve fast access speed and precise track-following control. Over the past few decades there have been a lot of researches related to the VCM and dual-stage actuator. In this paper, we focus our attention on the design and control of the PZT actuator. Due to the dual cantilever structure. the PZT actuator can generate precise translational tracking motion at its tip to which an optical pickup is attached. and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing it with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 학술회의 논문집 정보 및 제어부문 B
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• pp.629-632
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• 2003

Piezo actuators are mainly used in precision position control system because of their high position resolution. Although there have been many approaches in open loop control of this, those method turn out to be not effective in precision control due to hysteresis and creep. To overcome the problems, closed loop PI control method is used in commercial products. However, it is very difficult to obtain fast response with conventional PI control although piezo actuator has fast response. In this paper, we propose a fuzzy PI control method with the proposed fuzzy PI controller, we obtains faster settling response over the conventional PI controller. We verify the effectiveness of the proposed method with experimental results.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

• 유공압시스템학회논문집
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• 제3권2호
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• pp.1-6
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• 2006

The pressure regulator which is used for controlling the reducing pressure in the piezoelectrically driven pneumatic valve has been studied. The pneumatic valve of this study object is 2-stage type and consists of a piezoelectric actuator, a controller, a poppet valve and a pressure regulator. Nominal flow of 50 lpm, maximum operating pressure of 0.9MPa and frequency characteristic of 10Hz and over are required in this pneumatic valve, but the pressure regulator is needed because piezoelectric actuator has no ability to control the pressure of 0.9MPa directly. In this study, bimorph type PZT actuator of $25.2mm(L){\times}7.2mm(W){\times}0.5mm(H)$ with constant of $-220{\times}10-12$ CN-1 was proposed and investigated. Maximum operating force of 0.052 N and maximum displacement of $63{\mu}m$ were gotten from the fabricated PZT actuator. From the analysis results, the orifice diameter of 0.6mm for a piezoelectric actuator was derived and then the pressure regulator which can be operated under 0.15 MPa easily was designed and manufactured. Performance and effects of design parameters were simulated by the Simulink of Matlab software, and it was confirmed that the performance characteristics of manufactured pressure regulator are superior in the common use pressure range of 0.5 MPa to 0.7 MPa. The results show that the proposed pressure regulator is suitable for the pneumatic valve with a PZT actuator.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.581-584
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• 2008

At the inlet and outlet differential pressure and The fluid velocity over 32m/s are damaged (Plug, sheet ring, trim) About reduction trim parts of the control valve. AOV of the differential pressure 1,500psi become often the damage in the nuclear power plant. Damages of AOV studied CFD analysis and improvement program. Multi-stage trim designs which decrease a fluid kinetic energy are demanded and AOV parts are demanded case hardening and material change.

• 융복합기술연구소 논문집
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• 제1권2호
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• pp.6-15
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• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• 비파괴검사학회지
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• 제26권4호
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• pp.220-230
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• 2006

3점 굽힘 하중을 받는 단일 PET 및 평판형 압전 복합재료 작동기(PCA)의 파괴거동을 음향방출(AE) 법을 이용하여 살펴보았다. 단일 PET의 경우 최대 굽힘하중에서 발생한 AE신호는 고진폭 및 긴 유지시간을 갖는 특징을 보였으며 FFT에 의한 지배 주파수 대역을 확인한 결과 $100{\sim}230kHz$의 비교적 저주파수 대역이었다. PCA의 경우, stage 1에서 발생한 80dB이상의 고진폭 및 $170{\sim}223kHz$의 저 지배 주파수 대역을 갖는 신호는 PZT층에서의 취성파괴 및 PZT층과 인근 섬유층 사이의 층간분리에 의한 것으로 추정되었다. 상기의 AE거동 해석결과와 광학현미경 및 주사전자현미경에 의한 손상관찰에 근거하여 비대칭으로 적층된 PCA의 파괴거동과 관련한 AE특성을 규명하였다.