• 공업화학
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• 제16권5호
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• pp.719-723
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• 2005

Tetraethyl orthosilicate (TEOS) 혹은 1,2-bis(triethyoxysilyl)ethane (BTSE)과 여러 종류의 organosilane들을 공중합하여 유 무기 혼성 메조포러스 물질들을 제조하고, 이들이 공기 중의 휘발성 유기화합물(VOC)들을 흡착 제거하는 능력을, TEOS 만을 사용하여 제조한 친수성 무기 메조포러스물질인 SBA-15와 비교 평가하였다. 유기 구조의 도입에 의한 소수성의 증대는 메조포러스 물질이 VOC를 흡착 제거하는데 긍정적 효과를 줌을 관찰하였다. 특히 BTSE와 phenyl triethoxysilane을 중량비 90:10으로 공중합한 유 무기 혼성 메조포러스 물질의 VOC 제거 능력은 우수하였다. 또, 물속에 분산된 기름 성분을 흡착 제거하는데 유 무기 혼성 메조포러스 물질들을 유용하게 응용할 수 있음도 정성적으로 관찰하였다.

• Journal of Industrial and Engineering Chemistry
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• 제68권
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• pp.209-219
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• 2018

Colloidally stable organic-inorganic (O-I) hybrid nanoparticles could be prepared using an alkoxysilanefunctionalized amphiphilic polymer (AFAP) precursor. O-I hybrid sols could maintain colloidal stability for six months even at 45% solid content and be coated onto glass as well as PET film to form transparent O-I hybrid films. The formation of O-I hybrid nanoparticles dispersed in cured coating films could be confirmed using scanning electron microscopy. The cured coating film showed 3H and 5H pencil hardness on PET and glass, respectively. Nanoindentation measurements also showed that their modulus and hardness was varied with the type of AFAP used in its preparation.

• 한국세라믹학회지
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• 제43권1호
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• pp.28-32
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• 2006

Diarylethene in photochromic materials was doped in organic-inorganic hybrid low-melting glasses were synthesized through a nonaqueous acid-base reaction process, which consists of network units including a small number of bridging oxides. The organic phase is a dichlorodimethylsilane while the inorganic phase is a tin(II) chloride. Diarylethene was incorporated into the glasses without any degradation of its functionality. The open form of diarylenthene, which is converted from the opening one upon UV-irradiation, is change to the closed form visible light-irradiation. The rate constant of the photochemical reaction is $31.78\times10^{-3}s^{-1}$ with 400 W UV lamp irradiation.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.75.1-75.1
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• 2013

Atomic layer deposition (ALD) and molecular layer deposition (MLD) are based on sequential, self-limiting surface reactions that produce atomic layer controlled and conformal thin film growth. ALD can deposit inorganic films and MLD can deposit films containing organics. ALD and MLD can be used together to fabricate a wide range of hybrid organic-inorganic alloy films. The relative fraction of inorganic and organic constituents can be defined by controlling the ratio of the ALD and MLD reaction cycles used to grow the film. These hybrid films can be tuned to obtain desirable mechanical, electrical and optical properties. This talk will focus on the growth and properties of metal alkoxide films grown using metal precursors and various organic alcohols that are known as "metalcones". The talk will highlight the tunable mechanical properties of alucone alloys grown using Al2O3 ALD and alucone MLD and the tunable electrical conductivity of zincone alloys grown using ZnO ALD and zincone MLD with DEZ and hydroquinone as the reactants.

• Bulletin of the Korean Chemical Society
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• 제33권10호
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• pp.3196-3202
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• 2012

Post-synthesis is used to synthesize organic hybrid inorganic mesoporous sieves. In this method, the activity and structure of the base sieve are crucial to obtain the definable hybrid materials. The chemical and physical properties of the base can be largely changed either by the final step of its synthesizing processes, by template removal which is accomplished with the oxidative thermal decomposition (burning) method or by solvent extraction method. In this paper we compared two methods for the post-synthesis of organic hybrid MCM-48. When the template was extracted with HCl/alcohol mixture, the final product showed larger pore size, larger pore volume and better crystallinity compared to the case of the thermal decomposition. The reactivity of the surface silanol group of template free MCM-48 was also checked with an alkylsilylation reagent $CH_2=CHSi(OC_2H_5)_3$. Raman and $^{29}Si$ NMR spectra of MCM-48 in the test reaction indicated that more of the organic group was grafted to the surface of the sample after the template was removed with the solvent extraction method. Direct synthesis of vinyl-MCM-48 was also investigated and its characteristics were compared with the case of post-synthesis. From the results, it was suggested that the structure and chemical reactivity can be maintained in the solvent extraction method and that organic grafting after the solvent extraction can be a good candidate to synthesize a definable hybrid porous material.

• 한국산학기술학회논문지
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• 제12권4호
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• pp.1993-1998
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• 2011

반도체 산업은 지속적으로 비약적인 발전을 이루어내면서 점점 고집적회로를 제작하기 위하여 패턴의 미세화가 이루어지게 되었다. 현재 미세 나노패턴의 형성을 위하여 여러층의 하드마스크가 사용되고 있으며, 화학증기증착(CVD)공정을 이용하여 형성한다. 이에 본 연구에서는 스핀공정(spin-on process)이 가능한 유-무기 하이브리드 중합체를 이용한 단일층의 하드마스크를 제작하였는데, 하드마스크 내의 무기계 성분이 감광층 보다 쉽게 식각되는 반면에 하드마스크의 유기계 성분으로 인해 substrate층 보다 덜 식각되었다. 유-무기 하이브리드 중합체를 이용한 하드마스크막의 광학 및 표면 특성을 조사하였고, 감광층과 하드마스크막의 식각비를 비교하여 유-무기소재의 하이브리드중합체에 대한 미세패턴을 형성시킬 수 있는 하드마스크막으로써의 유용성을 확인하였다.

• 한국응용과학기술학회지
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• 제28권2호
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• pp.240-246
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• 2011

UV-Curable hybrid coatings were synthesized to improve the surface properties of plastic film. Organic-inorganic coating solutions were prepared by the sol-gel method using urethane-acrylate oligomer, acrylate monomer, photo initiator and tetraethoxysilane (TEOS). Methacryloyloxypropyltrimethoxysilane(MPTMS) was used as a silane coupling agent to improve chemical interaction between inorganic phases and UV curable acrylate. In this study, the surface hardness and adhesive properties were improved with the use of inorganic component. The experimental results showed that UV-Curable hybrid films containing aliphatic urethane oligomer, hexanedioldiacrylate, trimethylolpropanetriacrylate, hydroxy dimethyl acetophenone exhibited good surface properties. Also, the optimum curing conditions were investigated.

• 한국전기화학회:학술대회논문집
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• 한국전기화학회 2003년도 연료전지심포지움 2003논문집
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• pp.169-171
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• 2003

Organic/inorganic hybrid membranes have been prepared and evaluated as polymer electrolytes in a polymer electrolyte membrane fuel cell (PEMFC). Previously, partially fluorinated poly (arylenether) was synthesized and the polymer was sulfonated by fuming sulfuric acid$(30\%\;SO_3)$. Modification of these polymers with coupling agent and inorganic materials was carried out to prepare membranes. Membranes cast from these materials were investigated in relation to the proton conductivity and weight loss at the room temperature. It was found that these membranes had a higher conductivity of $10^{-2}\;Scm^{-1}$ at the room temperature. But inorganic materials have leaked out from the hybrid membrane. If this problem is resolved, organic/inorganic hybrid membranes will become satisfactory Polymer electrolytes for the PEMFC.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.395-395
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• 2012

We fabricate organic-inorganic hybrid thin film for the purpose of encapsulation by molecular layer deposition (MLD) using Trimethylaluminium (TMA) and Adipoyl Chloride (AC). Ellipsometry was employed to verify self limiting reaction of ALD. Linear relationship between number of cycle and thickness was obtained. We found that desirable organic thin film fabrication is possible by MLD surface reaction in nanoscale. Purging was carried out after dosing of each precursor to form monolayer in each sequence. We also confirmed roughness of the organic thin film by atomic force microscopy. We deposit TMA and AC at $70^{\circ}C$ and that 1.78A root mean square was obtained which indicates that uniform organic thin film was formed. We confirmed precursor's functional group by IR spectrum. We calculated WVTR of organic-inorganic hybrid super-lattice epitaxial layer using Ca test. WVTR indicates superlattice film can be possibly use as encapsulation in flexible devices.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.274-274
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• 2013

We fabricate encapsulation-layer of OLED panel from organic-inorganic hybrid thin film by atomic layer deposition (ALD) molecular layer deposition (MLD) using Al2O3 as ALD process and Adipoyl Chloride (AC) and 1,4-Butanediamine as MLD process. Ellipsometry was employed to verify self-limiting reaction of MLD. Linear relationship between number of cycle and thickness was obtained. By such investigation, we found that desirable organic thin film fabrication is possible by MLD surface reaction in monolayer scale. Purging was carried out after dosing of each precursor to eliminate physically adsorbed precursor with surface. We also confirmed roughness of the organic thin film by atomic force microscopy (AFM). We deposit AC and 1,4-Butanediamine at $70^{\circ}C$ and investigated surface roughness as a function of increasing thickness of organic thin film. We confirmed precursor's functional group by IR spectrum. We calculated WVTR of organic-inorganic hybrid super-lattice epitaxial layer using Ca test. WVTR indicates super-lattice film can be possibly use as encapsulation in flexible devices.