• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.106-106
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• 2011

Recently, zinc oxide (ZnO) thin films have attracted great attention as a promising candidate for various electronic applications such as transparent electrodes, thin film transistors, and optoelectronic devices. ZnO thin films have a wide band gap energy of 3.37 eV and transparency in visible region. Moreover, ZnO thin films can be deposited in a poly-crystalline form even at room temperature, extending the choice of substrates including even plastics. Therefore, it is possible to realize thin film transistors by using ZnO thin films as the active channel layer. In this work, we investigated influence of oxygen partial pressure on ZnO thin films and fabricated ZnO-based thin film transistors. ZnO thin films were deposited on glass substrates by using a pulsed laser deposition technique in various oxygen partial pressures from 20 to 100 mTorr at room temperature. X-ray diffraction (XRD), transmission line method (TLM), and UV-Vis spectroscopy were employed to study the structural, electrical, and optical properties of the ZnO thin films. As a result, 80 mTorr was optimal condition for active layer of thin film transistors, since the active layer of thin film transistors needs high resistivity to achieve low off-current and high on-off ratio. The fabricated ZnO-based thin film transistors operated in the enhancement mode with high field effect mobility and low threshold voltage.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.185-185
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• 2011

ZnTe semiconductor is very attractive materials for optoelectronic devices in the visible green spectral region because of it has direct bandgap of 2.26 eV. The prototypes of ZnTe light emitting diodes (LEDs) have been reported [1], showing that their green emission peak closely matches the most sensitive region of the human eye. Another application to photovoltaics proved that ZnTe is useful for the production of high-efficiency multi-junction solar cells [2,3]. By using the pulse laser deposition system, ZnTe thin films were deposited on ZnO thin layer, which is grown on (0001) Al2O3substrates. To produce the plasma plume from an ablated ZnO and ZnTe target, a pulsed (10 Hz) YGA:Nd laser with energy density of 95 mJ/$cm^2$ and wavelength of 266 nm by a nonlinear fourth harmonic generator was used. The laser spot focused on the surface of the ZnO and ZnTe target by using an optical lens was approximately 1 mm2. The base pressure of the chamber was kept at a pressure around $10^{-6}$ Torr by using a turbo molecular pump. The oxygen gas flow was controlled around 3 sccm by using a mass flow controller system. During the ZnTe deposition, the substrate temperature was $400^{\circ}C$ and the ambient gas pressure was $10^{-2}$ Torr. The structural properties of the samples were analyzed by XRD measurement. The optical properties were investigated by using the photoluminescence spectra obtained with a 325 nm wavelength He-Cd laser. The film surface and carrier concentration were analyzed by an atomic force microscope and Hall measurement system.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.480-480
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• 2011

양극산화(anodization)는 금속을 전기화학적으로 산화시켜 금속산화물로 만드는 기술로서 최근 다양한 크기의 나노 구조를 제조하는 기술로 각광받고 있으며, 이러한 기술에 의하여 얻어지는 anodic aluminum oxide(AAO)는 magnetic data storage, optoelectronic device, sensor에 적용될 수 있는 nano device 뿐만 아니라 nanostructure를 제조하기 위한 template 및 mask로써 최근 광범위 하게 연구되고 있다. 또한, AAO는 Al2O3의 단단한 구조를 가진 무기재료이므로 solid mask로써 다른 porous materials 보다 뛰어난 특성을 갖고 있다. 또한 electron-beam lithography 및 block co-polymer 에 의한 patterning 과 비교하여 매우 경제적이며, 재현성이 우수할 뿐만 아니라 대면적에서 나노 구조의 크기 및 형상제어가 비교적 쉽기 때문에 널리 사용되고 있다. 그러나, AAO 형성 시 생기게 되는 반구형 모양의 barrier layer는 물질(substance)과 기판과의 direct physical and electrical contact을 방해하기 때문에 해결해야 할 가장 큰 문제점 중 하나로 알려져 있다. 따라서 본 연구에서는 실리콘 기판위의 형성된 AAO의 barrier layer를 Cl/BCl3 gas mixture에서 Neutral Beam Etching (NBE)과 Ion Beam Etching (IBE) 로 각각 식각한 후 그 결과와 비교하였다. NBE와 IBE 모두 Cl2/BCl3 gas mixture에서 BCl3 gas의 첨가량이 60% 일 경우 etch rate이 가장 높게 나타났고, optical emission spectroscopy (OES)로 Cl2/BCl3 플라즈마 내의 Cl radical density와 X-ray photoelectron spectroscopy (XPS)로 AAO 표면 위를 관찰한 결과 휘발성 BOxCly의 형성이 AAO 식각에 크게 관여함을 확인 할 수 있었다. 또한, NBE와 IBE 실험한 다양한 Cl2/BCl3 gas mixture ratio 에서 AAO가 식각이 되지만, 이온빔의 경우 나노사이즈의 AAO pore의 charging에 의해 pore 아래쪽의 위치한 barrier layer를 어떤 식각조건에서도 제거하지 못하였다. 하지만, NBE에서는 BCl3-rich Cl2/BCl3 gas mixture인 식각조건에서 AAO pore에 휘발성 BOxCly를 형성하면서 barrier layer를 제거할 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.207-207
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• 2008

ZnO is one of the widely utilized n-type semiconducting oxide materials in the field of optoelectronic devices. For its application to the fabrication of promising ultraviolet (UV) photodetectors, ZnO with various structures has been extensively studied. However, study on the photodetectors using zero-dimensional (0-D) ZnO nanoparticle is scarce while the 0-D nanoparticle structure has many advantages compared to the other dimensional structures for absorption of light. In this study, the photocurrent characteristics of ZnO nanoparticles were investigated through a simply pasting of the nanoparticles across the pre-patterned electrodes. Then the photoluminescence (PL) characteristic, photocurrent response spectrum, photo- and dark-current and photoresponse spectrum were investigated with a He-Cd laser and an Xe lamp. An dominant PL peak of the ZnO nanoparticles was located at the wavelength of 380 nm under the illumination of 325-nm wavelength light. The ratio of photocurrent to dark current (on/off ratio) is as high as 106 which is considerable value for promising photodetectors. On the other hand, the time constants in photoresponse were relatively slow. The reasons of the high on/off ratio and relatively slow photoresponse characteristic will be discussed.

• 융합정보논문지
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• 제10권8호
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• pp.137-143
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• 2020

SiO2 증착된 금속 호일 기판에 형성된 은 금속 박막의 급속 열처리에 대한 물리적 및 화학적 특성 영향을 조사하였다. 은 박막을 150도에서 550도까지 온도를 변화시키며, 각 온도에서 20분 동안 급속 열처리를 진행하였다. 550도에서 표면 거칠기와 저항이 급격하게 증가하는 현상을 발견하였다. 따라서 550도의 열처리 온도 샘플에 대해 조성 분석 기법을 사용하였고, 은 필름 표면에 산소 (O) 및 실리콘 (Si) 원자가 존재함을 확인하였다. 박막의 광학적 특성인, 전체 반사율은 온도가 증가함에 따라 감소하였으며, 특히 550도에서 공정을 진행한 박막은 박막 및 기판 표면으로부터의 다중 반사에 의한 광학적 간섭으로 인해 정현파 특성을 나타냄을 확인하였다. 이러한 현상은 급속 열처리 동안 SiO2 층으로부터 Si 원자의 외부 확산에 기인한 것이다. 본 연구 결과는 다양한 플렉서블 광전자소자의 기판으로 사용할 수 있는 가능성을 제공한다.

• Nuclear Engineering and Technology
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• 제52권1호
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• pp.1-13
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• 2020

At present, the Department of Energy (DOE) in Unite State are directing the efforts of developing accident tolerant fuel (ATF) technology. As the first barrier of nuclear fuel system, the material selection of fuel rod cladding for ATFs is a basic but very significant issue for the development of this concept. The advanced cladding is attractive for providing much stronger oxidation resistance and better in-pile behavior under sever accident conditions (such as SBO, LOCA) for giving more coping time and, of course, at least an equivalent performance under normal condition. In recent years, many researches on in-plie or out-pile physical properties of some suggested cladding materials have been conducted to solve this material selection problem. Base on published literatures, this paper introduced relevant research backgrounds, objectives, research institutions and their progresses on several main potential claddings include triplex SiC, FeCrAl and MAX phase material Ti3SiC2. The physical properties of these claddings for their application in ATF area are also reviewed in thermohydraulic and mechanical view for better understanding and simulating the behaviors of these new claddings. While most of important data are available from publications, there are still many relevant properties are lacking for the evaluations.

• 센서학회지
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• 제31권4호
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• pp.249-254
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• 2022

To achieve high-performance colloidal quantum dot light-emitting diodes (QD-LEDs), the use of a densely packed QD film is crucial to prevent the formation of leakage current pathways and increase in interface resistance. Spin coating is the most common method to deposit QDs; however, this method often produces pinholes that can act as short-circuit paths within devices. Since state-of-the-art QD-LEDs typically employ mono- or bi-layer QDs as an emissive layer because of their low conductivities, the use of a densely packed and pinhole-free QD film is essential. Herein, we introduce the Langmuir-Blodgett (LB) technique as a deposition method for the fabricate densely packed QD films in QD-LEDs. The LB technique successfully transfers a highly dense monolayer of QDs onto the substrate, and multilayer deposition is performed by repeating the transfer process. To validate the comparability of the LB technique with the standard QD-LED fabrication process, we fabricate and compare the performance of LB-based QD-LEDs to that of the spin-coating-based device. Owing to the non-destructiveness of the LB technique, the electroluminescence efficiency of the LB-based QD-LEDs is similar to that of the standard spin coating-based device. Thus, the LB technique is promising for use in optoelectronic applications.

• Computers and Concrete
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• 제29권 6호
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• pp.375-391
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• 2022

This paper examined the impact of the cross-sectional structure on the structural results under different loading conditions of reinforced concrete (RC) members' management limited in Carbon Fiber Reinforced Polymers (CFRP). The mechanical properties of CFRC was investigated, then, totally 32 samples were examined. Test parameters included the cross-sectional shape as square, rectangular and circular with two various aspect rates and loading statues. The loading involved concentrated loading, eccentric loading with a ratio of 0.46 to 0.6 and pure bending. The results of the test revealed that the CFRP increased ductility and load during concentrated processing. A cross sectional shape from 23 to 44 percent was increased in load capacity and from 250 to 350 percent increase in axial deformation in rectangular and circular sections respectively, affecting greatly the accomplishment of load capacity and ductility of the concentrated members. Two Artificial Intelligence Models as Extreme Learning Machine (ELM) and Particle Swarm Optimization (PSO) were used to estimating the tensile and flexural strength of specimen. On the basis of the performance from RMSE and RSQR, C-Shape CFRC was greater tensile and flexural strength than any other FRP composite design. Because of the mechanical anchorage into the matrix, C-shaped CFRCC was noted to have greater fiber-matrix interfacial adhesive strength. However, with the increase of the aspect ratio and fiber volume fraction, the compressive strength of CFRCC was reduced. This possibly was due to the fact that during the blending of each fiber, the volume of air input was increased. In addition, by adding silica fumed to composites, the tensile and flexural strength of CFRCC is greatly improved.

• 마이크로전자및패키징학회지
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• 제30권2호
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• pp.60-64
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• 2023

본 연구에서는 그래핀 기반 소자의 성능에 영향을 미치는 그래핀과 금속 사이의 전기적 접촉저항 특성을 비교 분석하였다. 화학기상증착법을 이용하여 고품질의 그래핀을 합성하였으며, 전극 물질로 Al, Cu, Ni 및 Ti를 동일한 두께로 그래핀 표면 위에 증착하였다. TLM (transfer length method) 방법을 통해 SiO₂/Si 기판에 전사된 그래핀과 금속의 접촉저항을 측정한 결과, Al, Cu, Ni, Ti의 평균 접촉저항은 각각 345 Ω, 553 Ω, 110 Ω, 174 Ω으로 측정되었다. 그래핀과 물리적 흡착 특성을 갖는 Al와 Cu에 비해 화학적 결합을 형성하는 Ni과 Ti의 경우, 상대적으로 더 낮은 접촉저항을 갖는 것을 확인하였다. 본 연구의 그래핀과 금속의 전기적 특성에 대한 연구 결과는 전극과의 낮은 접촉저항 형성을 통해 고성능 그래핀 기반 전자, 광전자소자 및 센서 등의 구현에 기여할 수 있을 것으로 기대한다.

• Steel and Composite Structures
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• 제45권2호
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• pp.205-218
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• 2022

Proper calculation of splitting tensile strength (STS) of concrete has been a crucial task, due to the wide use of concrete in the construction sector. Following many recent studies that have proposed various predictive models for this aim, this study suggests and tests the functionality of three hybrid models in predicting the STS from the characteristics of the mixture components including cement compressive strength, cement tensile strength, curing age, the maximum size of the crushed stone, stone powder content, sand fine modulus, water to binder ratio, and the ratio of sand. A multi-layer perceptron (MLP) neural network incorporates invasive weed optimization (IWO), cuttlefish optimization algorithm (CFOA), and electrostatic discharge algorithm (ESDA) which are among the newest optimization techniques. A dataset from the earlier literature is used for exploring and extrapolating the STS behavior. The results acquired from several accuracy criteria demonstrated a nice learning capability for all three hybrid models viz. IWO-MLP, CFOA-MLP, and ESDA-MLP. Also in the prediction phase, the prediction products were in a promising agreement (above 88%) with experimental results. However, a comparative look revealed the ESDA-MLP as the most accurate predictor. Considering mean absolute percentage error (MAPE) index, the error of ESDA-MLP was 9.05%, while the corresponding value for IWO-MLP and CFOA-MLP was 9.17 and 13.97%, respectively. Since the combination of MLP and ESDA can be an effective tool for optimizing the concrete mixture toward a desirable STS, the last part of this study is dedicated to extracting a predictive formula from this model.